Water drop removing clamping jaw of intelligent transfer robot for wet process
By installing a figure-eight shaped cleaning component and staggered cleaning cylinders at the bottom of the clamping electric cylinder, the problem of water dripping from the grippers is solved, ensuring a clean environment for the silicon wafer processing equipment and achieving a highly efficient water removal effect.
Patent Information
- Application Number
- CN202422606101.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-28
- Publication Date
- 2025-11-14
- Estimated Expiration
- 2034-10-28
AI Technical Summary
Existing grippers drip moisture after gripping silicon wafers, resulting in an unclean working environment. Current technology cannot effectively solve the moisture problem on the grippers, especially in silicon wafer processing equipment where cleanliness is insufficient.
Design a water-removing gripper for a wet process intelligent handling robot, including a clamping electric cylinder, a holding plate and a cleaning component. The cleaning component is arranged in a figure-eight shape, and the water is completely removed by the staggered arrangement and angle adjustment of the left and right cleaning cylinders.
It effectively removes moisture from the clamping blocks, ensuring a clean working environment, preventing water dripping, and improving the cleanliness of silicon wafer processing equipment.
Smart Images
Figure CN223552516U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of silicon wafer processing equipment technology, and in particular to a gripper for removing water droplets from a smart handling robot used in wet processes. Background Technology
[0002] Silicon wafer manufacturing equipment is diverse, and most of the equipment requires the use of pure water. However, when existing equipment is transferred between each other, it uses grippers to pick up and transfer the wafers. Silicon wafer manufacturing requires keeping the ground environment within the working area clean, but existing grippers will leave water on the grippers after picking up the wafers, and will drip onto the bottom surface during movement.
[0003] The existing technology, application number CN2018220532476, is a hollow, air-blowing gripper for AOI online repair machines. It has an air-blowing mechanism inside the gripper, but due to its structural limitations, it can only be used with products and cannot solve the problem of moisture on the gripper. Furthermore, due to the special nature of the clamping blocks used to hold silicon wafer baskets, the existing structure cannot achieve complete cleaning.
[0004] Therefore, it is necessary to design a gripper for intelligent handling robots in wet processes to remove water droplets and solve the above problems. Utility Model Content
[0005] The purpose of this invention is to provide a gripper for removing water droplets from a wet process intelligent handling robot, thereby overcoming the aforementioned shortcomings of the existing technology.
[0006] To achieve the above objectives, the present invention adopts the following technical solution:
[0007] A gripper for removing water droplets from a wet process intelligent handling robot includes a clamping electric cylinder. The gripper is characterized by further comprising: a support plate respectively disposed at both ends of the clamping electric cylinder and driven by the clamping electric cylinder; a support block respectively disposed at the bottom of the two support plates; and a cleaning component respectively disposed corresponding to the two support blocks and respectively installed at the bottom of the clamping electric cylinder. The cleaning component is arranged in a figure-eight shape at the bottom of the clamping electric cylinder and is respectively disposed corresponding to the left and right support blocks. The cleaning component includes a cleaning mounting plate obliquely installed at the bottom of the clamping electric cylinder, and a left cleaning cylinder and a right cleaning cylinder respectively mounted on the left and right sides of the cleaning mounting plate by fasteners. The left and right cleaning cylinders are staggered at an included angle, and the air outlet paths of the left and right cleaning cylinders do not interfere with each other.
[0008] Preferably, the cleaning mounting plate is set at a 40° angle to the bottom surface of the clamping electric cylinder.
[0009] Preferably, the cleaning mounting plate is further provided with a fixing mounting hole, a cleaning fixing hole for installing a cleaning cylinder, and an arc-shaped hole.
[0010] Preferably, a contour groove is formed on the bearing block.
[0011] The beneficial effects of this utility model are: by setting a cleaning component at the bottom of the clamping electric cylinder, the cleaning component removes the moisture on the clamping block, thereby ensuring that there is no residual moisture on the clamping block and ensuring a clean working environment; and by setting cleaning cylinders at different angles and positions, it is ensured that the moisture on the clamping block can be completely removed. Attached Figure Description
[0012] Figure 1 This is a schematic diagram of the structure of a water droplet removal gripper for an intelligent handling robot in wet processes according to this utility model;
[0013] Figure 2 This is a schematic diagram of an adjustment component for a water droplet removal gripper of an intelligent handling robot in wet processes according to the present invention.
[0014] Figure 3 This is a schematic diagram of a contour vacuum module for removing water droplets from a wet process intelligent handling robot according to the present invention;
[0015] In the diagram: 1. Clamping cylinder; 2. Holding plate; 3. Holding block; 4. Cleaning assembly; 41. Cleaning mounting plate; 43. Left cleaning cylinder; 42. Right cleaning cylinder; 411. Fixing mounting hole; 412. Cleaning fixing hole; 413. Waist-shaped hole. Detailed Implementation
[0016] Reference Figures 1 to 3 A gripper for removing water droplets from a smart handling robot in wet processes includes a clamping electric cylinder 1, a support plate 2 respectively disposed at both ends of the clamping electric cylinder and driven by the clamping electric cylinder, a support block 3 respectively disposed at the bottom of the two support plates, and a cleaning component 4 respectively disposed corresponding to the two support blocks and respectively installed at the bottom of the clamping electric cylinder.
[0017] The cleaning component 4 is arranged in a figure-eight shape at the bottom of the clamping electric cylinder, and is respectively arranged corresponding to the left and right clamping blocks;
[0018] The cleaning assembly 4 includes a cleaning mounting plate 41 that is inclinedly installed at the bottom of the clamping electric cylinder, and a left cleaning cylinder and a right cleaning cylinder 42 that are respectively installed on the left and right sides of the cleaning mounting plate by fasteners.
[0019] In order to blow out all the moisture on the entire support block, the left cleaning cylinder and the right cleaning cylinder are staggered at an angle, and the air outlet paths of the left cleaning cylinder and the right cleaning cylinder do not interfere with each other.
[0020] To maximize the efficiency of the cleaning cylinder, the cleaning mounting plate is set at a 40° angle to the bottom surface of the clamping electric cylinder.
[0021] To facilitate the installation of the cleaning mounting plate on the bottom of the clamping electric cylinder and its installation in conjunction with the cleaning cylinder, a fixing mounting hole 411 is provided on the cleaning mounting plate. A cleaning fixing hole 412 for installing the cleaning cylinder is also provided on the cleaning mounting plate. To accommodate clamping blocks of different sizes and to facilitate adjustment of the cleaning cylinder's blowing angle, an arc-shaped oblong hole 413 is provided on the cleaning mounting plate. One end of the cleaning cylinder is installed in conjunction with the cleaning fixing hole via a fixing component, and the other end is installed in conjunction with the oblong hole via bolts and nuts. With the cleaning fixing hole as the center, the cylinder can be rotated along the angle of the oblong hole as needed to adjust the angle of the cleaning cylinder.
[0022] To facilitate the use of the support block with the basket, a contour groove is provided on the support block. The contour groove is used to fit into the step protruding from the side of the basket, thereby restricting it and preventing it from shaking or falling off during the support process, thus improving stability.
[0023] In this implementation, the clamping cylinder drives the two clamping plates 2 to move together simultaneously, which in turn drives the clamping block 3 to clamp the product. The product is clamped from one machine to another workstation and then moved to another machine for continued use. To prevent water from dripping onto the bottom or other locations, the left and right cleaning cylinders blow out the water on the clamping block before or after clamping, allowing for re-clamping and ensuring a clean working environment.
[0024] The advantages of this utility model are that by setting a cleaning component at the bottom of the clamping electric cylinder, the cleaning component removes moisture from the clamping block, thereby ensuring that there is no residual moisture on the clamping block and ensuring a clean working environment; and by setting cleaning cylinders at different angles and positions, it is ensured that the moisture on the clamping block can be completely removed.
[0025] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.
Claims
1. A gripper for removing water droplets from a smart handling robot in wet processes, comprising a clamping electric cylinder, characterized in that: It also includes clamping plates respectively disposed at both ends of the clamping electric cylinder and driven by the clamping electric cylinder, clamping blocks respectively disposed at the bottom of the clamping plates on both sides, and cleaning components respectively disposed corresponding to the clamping blocks on both sides and respectively installed at the bottom of the clamping electric cylinder. The cleaning components are disposed in a figure-eight shape at the bottom of the clamping electric cylinder and are respectively disposed corresponding to the clamping blocks on the left and right sides. The cleaning components include a cleaning mounting plate obliquely installed at the bottom of the clamping electric cylinder, and a left cleaning cylinder and a right cleaning cylinder respectively mounted on the left and right sides of the cleaning mounting plate by fasteners. The left cleaning cylinder and the right cleaning cylinder are arranged at an angle and staggered in the middle, and the air outlet paths of the left cleaning cylinder and the right cleaning cylinder do not interfere with each other.
2. A gripper for removing water droplets from a wet process intelligent handling robot according to claim 1, characterized in that: The cleaning mounting plate is set at a 40° angle to the bottom surface of the clamping electric cylinder.
3. A gripper for removing water droplets from a wet process intelligent handling robot according to claim 1, characterized in that: The cleaning mounting plate is also provided with a fixing hole, a cleaning fixing hole for installing a cleaning cylinder, and an arc-shaped hole.
4. A gripper for removing water droplets from a wet process intelligent handling robot according to claim 1, characterized in that: A contour groove is provided on the bearing block.