Furnace disassembling protection device for single crystal furnace

Abstract

The utility model discloses a single crystal furnace disassembly protection device which comprises a bottom frame fixedly connected with a hollow first supporting pipe; the connecting frame comprises a second supporting pipe and a fixing pipe, the second supporting pipe is fixedly connected with the fixing pipe, the second supporting pipe is inserted into the first supporting pipe, one side of the second supporting pipe is in threaded connection with a positioning rod capable of adjusting the threaded connection position in the vertical direction, and the top of the first supporting pipe supports the positioning rod; the adsorption mechanism comprises a tail gas adsorption machine and a flow guide cover, the top of the flow guide cover is fixedly connected with the fixed pipe, an air outlet is formed in the outer side wall of the flow guide cover, the tail gas adsorption machine is detachably fixed to the air outlet, and the flow guide cover is located above the bottom frame. The diffusion of oxides is effectively prevented, the personal safety of workers can be protected, the diffusion of the oxides is prevented from influencing the growth of single crystals, and the quality of the single crystals is improved.

Description

Technical Field

[0001] This utility model generally relates to the field of single crystal furnaces, and more particularly to a single crystal furnace dismantling protection device. Background Technology

[0002] When dismantling a single crystal furnace, if heavily doped crystal rods are being pulled, a large amount of compounds from dopants such as phosphorus, arsenic, and boron will be released into the air. Since the distance between single crystal furnaces is very short, these compounds released during dismantling can affect other furnaces, introducing unwanted elements and impacting the quality of the single crystals. Simply put, the single crystal furnace should be isolated from other parts during dismantling. Generally, single crystal furnaces producing four products (heavily doped with phosphorus, arsenic, antimony, and boron) can be architecturally separated by walls to minimize the impact of volatiles on the products.

[0003] Once the existing plan is finalized, it's difficult to make changes because the factory has already been partitioned. If you want to change the products being produced, you'll need to install additional partitions or remove them altogether. Furthermore, during furnace cleaning, a high-powered dust collector is used to clean the hot zone of the single crystal furnace, but the suction port of the dust collector is small and cannot effectively prevent the dispersion of oxides during furnace cleaning. Utility Model Content

[0004] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a flexible and effective protection device for single crystal furnace dismantling that can prevent oxide dispersion.

[0005] Firstly, the single crystal furnace dismantling protection device of this utility model includes:

[0006] The base frame is fixedly connected to a hollow first support tube;

[0007] A connecting frame includes a second support tube and a fixed tube. The second support tube is fixedly connected to the fixed tube. The second support tube is inserted into the first support tube. A positioning rod that can be adjusted vertically is screwed onto one side of the second support tube. The positioning rod is supported at the top of the first support tube.

[0008] The adsorption mechanism includes an exhaust gas adsorption machine and a flow guide hood. The top of the flow guide hood is fixedly connected to the fixed pipe. An air outlet is provided on the outer side wall of the flow guide hood. The exhaust gas adsorption machine is detachably fixed to the air outlet. The flow guide hood is located above the base frame.

[0009] According to the technical scheme provided in the embodiment of the application, the base frame is not fixed on the ground, and can be moved to the position of the single crystal furnace which needs to be disassembled, and the adsorption mechanism is used to adsorb the compounds emitted during disassembly, so that the influence of volatile matters on products is reduced, and the method is more flexible. In addition, the adsorption mechanism comprises a flow guide cover, and during disassembly, the base frame is moved so that the flow guide cover is located above the thermal field of the single crystal furnace, the ventilation area of the tail gas adsorption machine is enlarged, the emission of oxides is effectively prevented, the personal safety of workers is protected, the influence of oxide emission on single crystal growth is avoided, and the quality of single crystals is improved. BRIEF DESCRIPTION OF DRAWINGS

[0010] Other features, objects, and advantages of the application will become more apparent from the following detailed description of non-limiting embodiments, read in conjunction with the accompanying drawings:

[0011] Figure 1 A structural schematic view of the single crystal furnace disassembly protection device of the embodiment of the application is shown in the figure.

[0012] Figure 2 A structural schematic view of the single crystal furnace disassembly protection device of the embodiment of the application is shown in the figure.

[0013] Figure 3 A structural schematic view of the base frame of the single crystal furnace disassembly protection device of the embodiment of the application is shown in the figure.

[0014] Figure 4 A structural schematic view of the cooperation of the second support pipe and the first support pipe of the single crystal furnace disassembly protection device of the embodiment of the application is shown in the figure. DETAILED DESCRIPTION

[0015] The application will be further described in detail below with reference to the accompanying drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the related application, and not to limit the application. In addition, it should be noted that, for the convenience of description, only parts related to the application are shown in the drawings.

[0016] It should be noted that the embodiments in the application and the features in the embodiments can be combined with each other without conflict. The application will be described in detail below with reference to the accompanying drawings and embodiments.

[0017] Reference should be made to Figures 1-4The utility model discloses a single crystal furnace dismantling protection device, include: the chassis 100 is fixedly connected with the hollow first support pipe 110, the connecting frame 200 includes the second support pipe 210 and fixed pipe 220, and the second support pipe 210 is fixedly connected with fixed pipe 220, and the second support pipe 210 is inserted into the first support pipe 110, and the second support pipe 210 one side is screwed with the position of the vertical direction adjustable screwing of positioning rod 211, and the first support pipe 110 top support positioning rod 211, the adsorption mechanism 300 includes the tail gas adsorption machine and the fairing 310, and the fairing 310 top is fixedly connected with fixed pipe 220, and the outside wall of fairing 310 is provided with the air outlet 311, and the tail gas adsorption machine is detachably fixed in the air outlet 311, and the fairing 310 is located above the chassis 100.

[0018] In the embodiment of the utility model, the chassis 100 is placed on the ground, and the first support pipe 110 is fixedly connected with the chassis 100, the second support pipe 210 is inserted into the first support pipe 110, thereby supporting the connecting frame 200. The chassis 100 can be moved on the ground, driving the connecting frame 200 and the adsorption mechanism 300 to move, thereby protecting the single crystal furnace at different positions.

[0019] The second support pipe 210 one side is screwed with the position of the vertical direction adjustable screwing of positioning rod 211, can according to the height of single crystal furnace, the position of positioning rod 211 is adjusted, thereby adjusting the depth of second support pipe 210 inserted into the first support pipe 110, and then adjusting the height of fixed pipe 220, that is, adjusting the height of fairing 310, so that the single crystal furnace dismantling protection device can be suitable for a variety of height single crystal furnace. Of course, the first support pipe 110 and the second support pipe 210 can be separated, and different models of chassis 100 can be selected according to the length of the pit where the single crystal furnace is located, so that the single crystal furnace dismantling protection device can be suitable for a variety of models of single crystal furnace.

[0020] The positioning rod 211 is screwed on the side of the second support pipe 210, and when the second support pipe 210 is inserted into the first support pipe 110, the positioning rod 211 will move with the second support pipe 210 until the positioning rod 211 abuts against the top of the first support pipe 110, and the positioning rod 211 can prevent the second support pipe 210 from continuing to insert into the first support pipe 110. By changing the vertical position of the positioning rod 211 screwed on the second support pipe 210, the depth of the second support pipe 210 inserted into the first support pipe 110 is adjusted, which is simple in structure and convenient to adjust.

[0021] The chassis 100 can be moved to the position of the single crystal furnace which needs to be disassembled, the tail gas adsorption machine is used to adsorb the compounds emitted during disassembly, the influence of volatile substances on the product is reduced, and the flexibility is relatively high. And the adsorption mechanism 300 includes a fairing 310, when disassembling the furnace, the chassis 100 is moved, so that the fairing 310 is located above the thermal field of the single crystal furnace, the ventilation area of the tail gas adsorption machine is enlarged, the emission of oxides is effectively prevented, the personal safety of workers is protected, the influence of oxide emission on single crystal growth is avoided, and the quality of single crystal is improved.

[0022] The fairing 310 can be trumpet-shaped, which can enlarge the air inlet.

[0023] Further, the chassis 100 is provided with a plurality of pulleys 120.

[0024] In the embodiment of the utility model, the plurality of pulleys 120 support the chassis 100, when moving the chassis 100, the pulley 120 rolls on the ground, and the chassis 100 is convenient to move.

[0025] Further, the chassis 100 is provided with four pulleys 120.

[0026] In the embodiment of the utility model, the pulley 120 is provided with four, which guarantees the stability and reliability of the pulley 120 supporting the chassis 100.

[0027] Reference Figure 1 And 2 Further, one end of the positioning rod 211 is fixedly connected with a hand screw head 212.

[0028] In the embodiment of the utility model, the hand screw head 212 is arranged, when the positioning rod 211 needs to be rotated, the worker can hold the hand screw head 212 with hand, drives the positioning rod 211 to rotate, and the worker is convenient to operate.

[0029] Reference Figure 1 And 4 Further, the second supporting pipe 210 is provided with a plurality of threaded holes 213 in the vertical direction, and the positioning rod 211 is screwed in one threaded hole 213.

[0030] In the embodiment of the utility model, the positioning rod 211 is screwed in the threaded hole 213, the screwing of the positioning rod 211 and the second supporting pipe 210 is realized. A plurality of threaded holes 213 are arranged on the second supporting pipe 210 in the vertical direction, so that the screwing position of the positioning rod 211 on the second supporting pipe 210 is adjusted in the vertical direction, the structure is simple, and the adjustment is convenient.

[0031] Reference Figure 1 And 2Furthermore, it also includes a support inclined tube 230, one end of which is fixedly connected to the second support tube 210, and the other end of which is fixedly connected to the fixed tube 220.

[0032] In the embodiments of this utility model, by setting the support inclined tube 230, the reliability of the connection between the second support tube 210 and the fixed tube 220 is improved, and the reliability of the connecting frame 200 supporting the adsorption mechanism 300 is guaranteed.

[0033] refer to Figure 1 and 4 Furthermore, the outer wall of the first support tube 110 is provided with an elongated through hole 111.

[0034] In an embodiment of this utility model, an elongated through hole 111 is provided on the outer wall of the first support tube 110. The operator can observe the depth of the second support tube 210 inserted into the first support tube 110 through the elongated through hole 111. This avoids the situation where the second support tube 210 is inserted into the first support tube 110 to a shallow depth, which would result in the first support tube 110 being unable to effectively support the second support tube 210. This ensures the reliability of the first support tube 110 supporting the second support tube 210.

[0035] refer to Figure 1 and 2 Furthermore, the base frame 100 is fixedly connected to a third support tube 130, which is fixedly connected to the first support tube 110.

[0036] In the embodiments of this utility model, by providing a third support tube 130, the reliability of the connection between the first support tube 110 and the base frame 100 is ensured.

[0037] refer to Figure 1 and 3 Furthermore, the base frame 100 is configured as a U-shape.

[0038] In an embodiment of this invention, when the single crystal furnace dismantling protection device adsorbs the volatiles generated during the dismantling process, the base frame 100 is pushed to the position of the single crystal furnace. The base frame 100 is U-shaped to facilitate adjusting the flow guide shroud 310 above the hot zone of the single crystal furnace.

[0039] The above description is merely a preferred embodiment of this application and an explanation of the technical principles employed. Those skilled in the art should understand that the scope of the utility model involved in this application is not limited to the technical solutions formed by specific combinations of the above-described technical features, but should also cover other technical solutions formed by arbitrary combinations of the above-described technical features or their equivalents without departing from the inventive concept. For example, technical solutions formed by substituting the above features with (but not limited to) technical features with similar functions disclosed in this application.

Claims

1. A single crystal furnace dismantling protection device, characterized in that, include: The base frame is fixedly connected to a hollow first support tube; A connecting frame includes a second support tube and a fixed tube. The second support tube is fixedly connected to the fixed tube. The second support tube is inserted into the first support tube. A positioning rod that can be adjusted vertically is screwed onto one side of the second support tube. The positioning rod is supported at the top of the first support tube. The adsorption mechanism includes an exhaust gas adsorption machine and a flow guide hood. The top of the flow guide hood is fixedly connected to the fixed pipe. An air outlet is provided on the outer side wall of the flow guide hood. The exhaust gas adsorption machine is detachably fixed to the air outlet. The flow guide hood is located above the base frame.

2. The single crystal furnace dismantling protection device according to claim 1, characterized in that, The base frame is equipped with multiple pulleys.

3. The single crystal furnace dismantling protection device according to claim 2, characterized in that, The base frame is equipped with four pulleys.

4. The single crystal furnace dismantling protection device according to claim 1, characterized in that, One end of the positioning rod is fixedly connected to a hand-tightening head.

5. The single crystal furnace dismantling protection device according to claim 1, characterized in that, The second support tube has multiple threaded holes spaced apart along the vertical direction, and the positioning rod is screwed into one of the threaded holes.

6. The single crystal furnace dismantling protection device according to claim 1, characterized in that, It also includes a support inclined tube, one end of which is fixedly connected to the second support tube, and the other end of which is fixedly connected to the fixed tube.

7. The single crystal furnace dismantling protection device according to claim 1, characterized in that, The outer wall of the first support tube has an elongated through hole.

8. The single crystal furnace dismantling protection device according to claim 1, characterized in that, The base frame is fixedly connected to a third support tube, which is fixedly connected to the first support tube.

9. The single crystal furnace dismantling protection device according to claim 1, characterized in that, The base frame is U-shaped.

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