Optical detection platform and optical detection device
By rationally arranging the number and position of the ejector pins and combining deformation simulation, an optical inspection platform was designed, which solved the problems of fragile glass substrates and high processing difficulty, and achieved stable and accurate optical inspection, adapting to the needs of products of different sizes and reducing the breakage rate and processing costs.
Patent Information
- Application Number
- CN202423305174.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2025-11-18
- Estimated Expiration
- 2034-12-31
AI Technical Summary
Glass substrates are fragile, difficult to process, costly, have mismatched coefficients of thermal expansion, and poor compatibility with existing processes in the display field. There is also a lack of suitable optical inspection platforms to meet the requirements for loading, unloading, and optical inspection.
An optical inspection platform was designed. By rationally arranging the number and position of ejector pins and through deformation simulation, the sag of the product after lifting is controlled within a controllable range, avoiding interference during loading and unloading. A combined structure of ejector pin assembly and stage, including vacuum suction cup and drive mechanism, is adopted to ensure stable support and inspection of the product.
It effectively avoids damage to products caused by false vacuum during loading and unloading, improves the stability and reliability of testing, adapts to the testing needs of products of different sizes, reduces the breakage rate, and improves processing accuracy and testing efficiency.
Smart Images
Figure CN223565213U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model belongs to the field of optical detection, specifically relates to an optical detection platform and optical detection device. BACKGROUND
[0002] The display field is another important application field of glass substrates besides the semiconductor field such as chips. The high transparency and optical uniformity of glass substrates ensure good optical performance, the excellent flatness guarantees the display quality, the mechanical strength and chemical resistance enable it to cope with various environments, and the thermal stability and low thermal expansion coefficient ensure the stability of the product in high-load operation. In addition, the self-luminous property of glass substrates also makes it particularly important in new display fields such as Micro LED.
[0003] Although the application of glass substrates in the display field brings many advantages, there are also some obvious disadvantages. The following are the main disadvantages of glass substrates:
[0004] Fragility: Compared with organic substrates, the impact resistance and shock resistance of glass substrates are relatively weak, so they are more prone to damage or breakage during manufacturing, transportation and use. This fragility not only increases the risk in the production process, but also may affect the stability and reliability of the packaged chips.
[0005] High processing difficulty: The processing of glass substrates is relatively complex and difficult. Due to its hardness and brittleness, special cutting, grinding and etching techniques are required, which increases the technical difficulty and cost in the manufacturing process. In addition, for fine patterns and wiring, the processing precision requirement of glass substrates is also higher, further increasing the processing difficulty.
[0006] High cost: Compared with organic substrates, the manufacturing cost of glass substrates is usually higher. This is mainly due to its complex processing process, special material requirements and higher technical requirements. High cost may limit the application of glass substrates in low-cost or large-scale production.
[0007] Thermal expansion coefficient mismatch: There may be a mismatch in the thermal expansion coefficient between the glass substrate and the chip material. In an environment with large temperature changes, this mismatch may cause stress concentration, warping or cracking, etc., thereby affecting the reliability and performance of the chip.
[0008] Poor compatibility with existing processes: Due to the characteristics and processing requirements of glass substrates, it may have compatibility problems with existing chip packaging processes. This may require more R&D resources to develop packaging processes suitable for glass substrates, increasing the technical difficulty and cost.
[0009] In view of the above problems, the packaged glass substrate needs to be detected by AOI, but there is a lack of suitable optical detection platform in the actual production process to meet the requirements of feeding and discharging and optical detection mechanism. Utility model content
[0010] In view of all or part of the deficiencies of the prior art described above, the purpose of the utility model is to provide an optical detection platform and an optical detection device, the amount of sag of the product after being lifted is within a controllable range through reasonable arrangement of the number and position of the ejector pins (top PIN) and simulation of the deformation amount, and interference between feeding and discharging is avoided, so that fragments are not caused.
[0011] To achieve the above utility model purpose, the utility model provides the following technical scheme:
[0012] The utility model provides a kind of optical detection platform, including stage and lifting mechanism, the lifting mechanism includes installation platform and ejector pin assembly, the stage and the ejector pin assembly are installed on the installation platform;The ejector pin assembly includes first ejector pin group and second ejector pin group with at least three ejector pins respectively, the first ejector pin group is used to support the side edge of product, the second ejector pin group is used to support the side edge of product, and a plurality of via holes for the ejector pin are provided on the stage.Through the setting of ejector pin (top PIN) mechanism, product and detection platform can be separated, false vacuum between the two is avoided, and abnormal material taking is caused.The utility model sets the ejector pin group at the side edge of product, and each ejector pin group contains at least three ejector pins, and through the simulation of deformation amount, it can be known that this design can make the amount of sag of product after being lifted within a controllable range.Deformation amount will not only directly affect the flatness of product such as glass substrate which is highly related to display quality, and if the amount of sag is too much and exceeds the controllable range, interference will be caused between material taking and placing mechanism during feeding and discharging, and product will be damaged.
[0013] The middle part of the stage is also provided with an in-place inductor between the first ejector pin group and the second ejector pin group;At least two groups of the first ejector pin group are provided on one side of the in-place inductor along the radial direction, and at least two groups of the second ejector pin group are provided on the other side along the radial direction.The in-place inductor is used to sense whether the product to be detected has been in place, two groups of the first ejector pin group and two groups of the second ejector pin group are provided, the first ejector pin group and the second ejector pin group close to the in-place inductor are used to support relatively small size product, and the first ejector pin group and the second ejector pin group away from the in-place inductor are used to support relatively large size product, and the same optical detection platform can meet the taking and placing and detection of products of different sizes.
[0014] The first needle group has 3-7 needles arranged in a straight line, and the second needle group has 3-7 needles arranged in a straight line, and the first needle group and the second needle group are arranged in parallel. Under the condition of meeting the deformation amount and the maximum stress, arranging fewer needles, preferably 5, can prevent background influence on optical detection of transparent products such as glass substrates. Through reasonable arrangement of the needles, the product can be prevented from being adhered to the stage due to false vacuum, causing the material to be pulled into fragments, or even unable to take the material.
[0015] The distance between the adjacent first needle group and the second needle group is 150-200mm, the distance between the adjacent two first needle groups or the adjacent two second needle groups is 100-150mm, the distance between the two needles in the same first needle group or second needle group is 100-150mm, and the diameter of the via is 10-20mm. Through reasonable layout of the distance and size, different feeding and discharging modes can be met, suitable deformation amount and maximum stress can be provided, so that the product can be prevented from being interfered by the feeding and discharging mechanism to cause fragments.
[0016] The needle includes a vacuum chuck arranged at the top end and a top rod connected with the vacuum chuck, and the mounting platform includes a gas distribution plate in communication with the top rod for gas flow during vacuumizing. The needle with the vacuum chuck can make the needle assembly support the product more stably.
[0017] The mounting platform includes a driving mechanism for driving the first needle group and the second needle group to lift. Specifically, the mounting platform can further include a first driving assembly and a second driving assembly, and the first driving assembly and the second driving assembly each include a mounting plate, two guide rails and a sliding table module. The guide rails are mounted on the mounting plate, and the sliding table module is mounted on the guide rails. The first needle group is mounted on the sliding table module of the first driving assembly, and the second needle group is mounted on the sliding table module of the second driving assembly. Two guide rails can make the lifting process more stable and more conducive to the adsorption of the needle assembly to the product. In other schemes, the first driving assembly and the second driving assembly can be driven by the same power through an adapter, and the first driving assembly and the second driving assembly can have only one of them, i.e. only one mounting plate, one guide rail and one sliding table module are arranged, and the first needle group and the second needle group are mounted on the same sliding table module.
[0018] The carrier is an adsorption carrier, and the adsorption carrier comprises a first adsorption area; the first adsorption area comprises a plurality of first adsorption holes which are linearly arranged on both sides of each of the first needle group and the second needle group. The uniform arrangement of the small holes for adsorption enables the product, such as a transparent glass substrate, to be uniformly adsorbed, thereby solving the problem of Z-direction jumping caused by uneven adsorption of the original adsorption disc / adsorption groove mode.
[0019] The carrier further comprises a second adsorption area, and the first adsorption area and the second adsorption area are connected with a switching valve; the second adsorption area comprises a plurality of second adsorption holes which are linearly arranged on the outer side of the first adsorption area along the circumferential direction of the carrier, and the second adsorption holes are arranged in at least two rows along the radial direction of the carrier. The adsorption partition design can automatically or manually switch the adsorption area for different specifications of products.
[0020] The product is a transparent glass substrate, and the surface of the carrier is subjected to black hard oxidation treatment; one side of the carrier is provided with an L-shaped positioning piece and a one-character-shaped positioning piece. The selection of the appropriate surface treatment can effectively eliminate the influence of the platform background on optical image taking, reduce the friction damage of the product during taking and placing, and take into account the durability of the platform. The L-shaped positioning piece and the one-character-shaped positioning piece are used for positioning the product during manual feeding.
[0021] The utility model also provides an optical detection device, including the optical detection platform and taking and placing mechanism of one, the taking and placing mechanism is tooth fork feeding mechanism, mechanical arm feeding mechanism or manual feeding. BRIEF DESCRIPTION OF DRAWINGS
[0022] In order to more clearly illustrate the technical scheme in the specific embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment description, and obviously, the following described drawings are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without creating creative labor.
[0023] Figure 1 It is the top view of the optical detection platform provided in embodiment 1;
[0024] Figure 2 It is another perspective view schematic drawing of the optical detection platform provided in embodiment 1;
[0025] Figure 3 It is the partial schematic drawing of the jacking mechanism provided in embodiment 1;
[0026] Figure 4 It is another perspective view schematic drawing of the optical detection platform provided in embodiment 1;
[0027] Figure 5 is a side view of an optical detection platform provided in embodiment 1;
[0028] Figure 6 is another perspective partial schematic view of the jacking mechanism provided in embodiment 1.
[0029] Reference signs: 1-stage; 10-via hole; 11-in-service inductor; 12-first adsorption area; 13-second adsorption area; 14-switching valve; 101-L-shaped positioning piece; 102-rectangular positioning piece; 2-mounting platform; 21-first drive assembly; 22-second drive assembly; 201-mounting plate; 202-guiding line rail; 203-sliding table module; 204-connection plate; 205-driving motor; 3-ejector pin assembly; 31-first ejector pin group; 32-second ejector pin group; 300-ejector pin; 301-vacuum chuck; 302-ejector rod; 303-gas distribution plate. DETAILED DESCRIPTION
[0030] The technical solutions in the embodiments of the present application will be described clearly and completely below. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0031] It should be noted that, in order to describe the technical solutions more specifically, the steps described in the following embodiments do not correspond to the steps described in the part of the application one by one.
[0032] Embodiment 1
[0033] An optical detection platform is provided, referring to Figure 1 and Figure 2 , comprising a stage 1 and a jacking mechanism, the stage 1 can be an aluminum plate or other. The jacking mechanism comprises a mounting platform 2 and an ejector pin assembly 3, and the stage 1 and the ejector pin assembly 3 are mounted on the mounting platform 2. Referring to Figure 3 and Figure 4The needle assembly 3 includes a first needle group 31 with 5 needles 300 for supporting one side edge of the product and a second needle group 32 with 5 needles 300 for supporting the other side edge of the product, and the stage 1 is provided with a plurality of through holes 10 for the needles 300 to pass through. The needle 300 includes a vacuum chuck 301 arranged at the top end and a needle rod 302 connected with the vacuum chuck 301, and the mounting platform 2 includes a gas distribution plate 303 in communication with the needle rod 302 for gas flow during vacuuming. The needles 300 of the first needle group 31 are arranged in a straight line, the needles 300 of the second needle group 32 are arranged in a straight line, and the first needle group 31 and the second needle group 32 are arranged in parallel. Under the conditions of meeting the deformation amount and the maximum stress, fewer needles 300 can prevent the background influence on the optical detection of the transparent product (the product in this embodiment is a transparent glass substrate).
[0034] With reference to Figure 1 and Figure 4 The stage 1 is further provided with a product in-service inductor 11 in the middle part, between the first needle group 31 and the second needle group 32; two groups of the first needle group 31 are arranged on one side of the in-service inductor 11 in the radial direction, and two groups of the second needle group 32 are arranged on the other side of the in-service inductor 11 in the radial direction. The in-service inductor 11 is used for sensing whether the product to be detected has been positioned, the first needle group 31 and the second needle group 32 close to the in-service inductor 11 are used for supporting the edges of the product with relatively small size, and the first needle group 31 and the second needle group 32 away from the in-service inductor 11 are used for supporting the edges of the product with relatively large size, so that the same optical detection platform can meet the taking, placing and detecting of products with different sizes. The distance between the adjacent first needle group 31 and the second needle group 32 is 150-200 mm, the distance between the adjacent two first needle groups 31 is 100-150 mm, the distance between the adjacent two second needle groups 32 is 100-150 mm, the distance between the two needles 300 in the same first needle group 31 is 100-150 mm, the distance between the two needles 300 in the same second needle group 32 is 100-150 mm, and the diameter of the through hole 10 is 10-20 mm.
[0035] With reference to Figure 5 and Figure 6The mounting platform 2 further comprises a first driving assembly 21 and a second driving assembly 22, each of which comprises a mounting plate 201, two guide rails 202 and a sliding table module 203, the guide rails 202 are mounted on the mounting plate 201, and the sliding table module 203 is mounted on the guide rails 202, the first needle group 31 is mounted on the sliding table module 203 of the first driving assembly 21, and the second needle group 32 is mounted on the sliding table module 203 of the second driving assembly 22. The needles 300 on the two first needle groups 31 are driven to rise and fall simultaneously by the first driving assembly 21, and the needles 300 on the two second needle groups 32 are driven to rise and fall simultaneously by the second driving assembly 22. Specifically, the sliding table module 203 is a Z-axis sliding table module, which comprises a connecting plate 204 and a driving motor 205, the driving motor 205 is mounted on the connecting plate 204, the connecting plate 204 is connected with the guide rails 202, and the gas distribution plate 303 is mounted on the connecting plate 204. The two guide rails 202 can make the lifting process more stable and more conducive to the adsorption and bearing of the product by the needle assembly 3.
[0036] With reference to Figure 1 and Figure 4 The surface of the carrier 1 is subjected to black hard oxidation treatment; one side of the carrier 1 is provided with an L-shaped positioning piece 101 and a one-letter positioning piece 102. By selecting a suitable surface treatment, the influence of the platform background on optical image taking can be effectively eliminated, and the durability of the platform is also considered; different surface treatment methods will affect the detection and the service life of the carrier 1. The L-shaped positioning piece and the one-letter positioning piece are used for positioning the product when manually feeding. The carrier 1 is an adsorption carrier, which comprises a first adsorption area 12 for adsorbing products; the first adsorption area 12 comprises a plurality of first adsorption holes, which are linearly arranged on both sides of each first needle group 31 and second needle group 32. The carrier 1 further comprises a second adsorption area 13, and the first adsorption area 12 and the second adsorption area 13 are connected with a switching valve 14; the second adsorption area 13 comprises a plurality of second adsorption holes, which are linearly arranged on the outer side of the first adsorption area 12 along the circumference of the carrier 1, and the second adsorption holes are arranged in two rows along the radial direction of the carrier 1. There is an adsorption partition design, and the adsorption area can be automatically or manually switched by opening and closing the switching valve 14 for different specifications of products. When the size of the product is relatively small, only the first adsorption area 12 needs to be opened, and when the size of the product is relatively large, the first adsorption area 12 and the second adsorption area 13 need to be opened at the same time, so as to realize stable adsorption of the glass substrate during detection.
[0037] The product is a transparent glass substrate, and the upper detection camera takes a picture downward, because the carrier 1 as the background will affect the detection, the number of adsorption holes and the top pin 300 needs to be controlled, too many will have a significant impact on the image taking. If the adsorption hole or the top pin 300 is arranged too little or randomly, it will cause uneven adsorption and cause the product surface to present a wavy shape. The design of the embodiment is to arrange about 20 adsorption holes in the vicinity of each via 10 in an orderly manner, which meets the requirements of adsorption force through calculation. Through the reasonable layout of the adsorption hole and the top pin 300, the scheme provided by the utility model can strictly control the deformation amount and the maximum stress of the glass substrate without affecting the detection, so as to meet the requirements of detection and product yield.
[0038] Embodiment 2
[0039] An optical detection device comprising the optical detection platform and the material taking and placing mechanism in embodiment 1; the material taking and placing mechanism is a prong material feeding and discharging mechanism, a mechanical arm material feeding and discharging mechanism or manual material feeding and discharging. In the embodiment, the prong material feeding and discharging mechanism is adopted.
[0040] The use process and principle of the utility model are described in combination with embodiment 1 and embodiment 2.
[0041] S1: the prong material feeding and discharging mechanism is adopted to transport the glass substrate to be detected to the upper side of the carrier 1, the top pin assembly 3 (i.e. the two side top pins 300) of the jacking mechanism is raised to the first height along the Z axis, and the top pin assembly 3 is vacuumized;
[0042] S2: the prong material feeding and discharging mechanism is lowered to the upper side of the top pin assembly 3 (i.e. the first height), the glass substrate is placed on the top pin assembly 3, the prong material feeding and discharging mechanism is broken, the vacuum is avoided, and the prong material feeding and discharging mechanism is retracted and then leaves;
[0043] S3: the carrier 1 is vacuumized, the top pin assembly 3 is lowered to the surface of the carrier 1 (the second height), the top pin assembly 3 is broken, the glass substrate is placed on the carrier 1, and the top pin assembly 3 is lowered to the lower side of the carrier 1 (the third height) along the Z axis;
[0044] S4: the glass substrate is subjected to optical detection, after the detection is completed, the carrier 1 is broken, the top pin assembly 3 is raised to the second height and vacuumized, the glass substrate after detection is further raised to the first height, and the prong material feeding and discharging mechanism takes the glass substrate.
[0045] The utility model is suitable for Mini LED / Micro LED display technical field, provide optical detection platform and optical detection device layout compact, can be applied to glass substrate microcircuit etching technology, huge via technology (TGV), thick copper plating film technology and ultrathin glass technology etc. After section product detection line, application range is wide. Through setting top PIN mechanism, can make product and detection platform separate, avoid false between both sides vacuum, lead to taking material exception. For the toothed fork feeding mode, reasonable arrangement top PIN quantity and position and through deformation variable simulation simulation, make product after jacking droop in controllable range, avoid feeding and toothed fork interference, lead to fragment.
[0046] The above description of the embodiments is only used to help understand the method and core idea of the utility model. It should be pointed out that for ordinary skilled persons in the technical field, without departing from the principle of the utility model, the utility model can be improved and modified in several ways, and these improvements and modifications also fall within the scope of protection of the utility model claims.
Claims
1. An optical detection platform, characterized in that, The device comprises a carrier (1) and a lifting mechanism, the lifting mechanism comprises a mounting platform (2) and a needle assembly (3), the carrier (1) and the needle assembly (3) are mounted on the mounting platform (2); the needle assembly (3) comprises a first needle group (31) and a second needle group (32) each having at least three needles (300), the first needle group (31) is used for supporting one side edge of a product, the second needle group (32) is used for supporting another side edge of the product, and the carrier (1) is provided with a plurality of through holes (10) for the needles (300) to pass through.
2. The optical detection platform of claim 1, wherein, The carrier (1) is further provided with an in-situ sensor (11) between the first needle group (31) and the second needle group (32); at least two groups of the first needle group (31) are provided on one side of the in-situ sensor (11) in the radial direction, and at least two groups of the second needle group (32) are provided on the other side of the in-situ sensor (11) in the radial direction.
3. The optical detection platform of claim 1, wherein, The number of the needles (300) of the first needle group (31) is 3-7 and arranged in a straight line, the number of the needles (300) of the second needle group (32) is 3-7 and arranged in a straight line, and the first needle group (31) and the second needle group (32) are arranged in parallel.
4. The optical detection platform of claim 2, wherein, The distance between adjacent first needle groups (31) and second needle groups (32) is 150-200 mm, the distance between two adjacent first needle groups (31) or two adjacent second needle groups (32) is 100-150 mm, the distance between two needles (300) in the same first needle group (31) or second needle group (32) is 100-150 mm, and the diameter of the through hole (10) is 10-20 mm.
5. The optical detection platform of claim 1, wherein, The needle (300) comprises a vacuum chuck (301) arranged at the top end and a top rod (302) connected with the vacuum chuck (301), and the mounting platform (2) comprises a gas distribution plate (303) in communication with the top rod (302) for gas flow during vacuumizing.
6. The optical detection platform of claim 1, wherein, The mounting platform (2) further comprises a first driving assembly (21) and a second driving assembly (22), the first driving assembly (21) and the second driving assembly (22) each comprise a mounting plate (201), two guide rails (202) and a sliding table module (203), the guide rails (202) are mounted on the mounting plate (201), the sliding table module (203) is mounted on the guide rails (202), the first needle group (31) is mounted on the sliding table module (203) of the first driving assembly (21), and the second needle group (32) is mounted on the sliding table module (203) of the second driving assembly (22).
7. The optical detection platform of claim 1, wherein, The carrier (1) is a suction carrier, and the suction carrier comprises a first suction area (12); the first suction area (12) comprises a plurality of first suction holes arranged linearly on both sides of each first needle group (31) and second needle group (32).
8. The optical detection platform of claim 7, wherein, The carrier (1) further comprises a second adsorption area (13), the first adsorption area (12) and the second adsorption area (13) are connected with a switching valve (14); the second adsorption area (13) comprises a plurality of second adsorption holes, the second adsorption holes are linearly arranged outside the first adsorption area (12) along the circumference of the carrier (1), and the second adsorption holes are arranged in at least two rows along the radial direction of the carrier (1).
9. The optical detection platform of claim 1, wherein, The product is a transparent glass substrate, the surface of the carrier (1) is subjected to black hard oxidation treatment; one side of the carrier (1) is provided with an L-shaped positioning piece (101) and a one-word positioning piece (102).
10. An optical detection device, characterized in that The product is a transparent glass substrate, the surface of the carrier (1) is subjected to black hard oxidation treatment; one side of the carrier (1) is provided with an L-shaped positioning piece (101) and a one-word positioning piece (102). An optical detection platform and a material taking and placing mechanism are included, the material taking and placing mechanism is a fork material taking and placing mechanism, a mechanical arm material taking and placing mechanism or manual material taking and placing.