Semiconductor flower basket frame and wet process equipment

Abstract

The utility model discloses a semiconductor flower basket frame and wet process equipment, and relates to the technical field of semiconductor processing, and the semiconductor flower basket frame comprises a main body structure and a limiting assembly; the main body structure comprises two main body frames which are arranged in parallel at an interval; the limiting assembly comprises a first fixed limiting piece, a second fixed limiting piece and a movable limiting piece. The first fixed limiting piece is connected to the bottom position between the main body frames; the second fixed limiting pieces are connected to the two side ends between the main body frames; movable grooves which are formed in the vertical direction are formed in the opposite inner side walls of the two main body frames; the two ends of the movable limiting piece extend into the movable grooves respectively; communication grooves are formed in the opposite inner side walls of the two main body frames; one end of the communicating groove is communicated with the movable groove, and the other end extends to the side end wall of the main body frame. By means of the improvement, the situation that the positioning blocks occupy the transverse space is eliminated, so that the problem that the workpieces are possibly collided in the loading process is avoided, and meanwhile the usability of all stations in the flower basket frame is reserved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing, in particular to a semiconductor basket frame and a wet process equipment. BACKGROUND

[0002] In the production process of semiconductor chips, cleaning and etching processes are crucial links. In order to ensure the stability and safety of wafers or chips in these processes, a basket frame is usually used to load workpieces to prevent them from shaking or shifting, thereby improving the accuracy and reliability of cleaning and etching.

[0003] The existing basket frame design usually increases movable limiting modules in the structure to limit the displacement of workpieces in the vertical direction in order to adapt to workpieces of different sizes. For example, in the Chinese patent application with the patent number CN118053795A, a scientific research type wet etching full-automatic system and machine is disclosed, and the basket frame limits the workpiece in the vertical direction through the movable pressing block inserted into the positioning block to ensure the stability of the workpiece in the basket frame.

[0004] However, this design has certain technical defects. The design of the positioning block needs to protrude from the inner side wall of the basket frame, which inevitably occupies the horizontal space inside the basket frame. Due to the presence of the positioning block, the workstations located directly below it may have a bumping problem when loading workpieces, thereby affecting the integrity of the workpieces and the process effect. If the workstation is canceled to avoid bumping, the loading capacity of the basket frame will be reduced, which will reduce the production efficiency.

[0005] Therefore, it is necessary to propose a new design scheme that can ensure the stability and safety of workpieces in the basket frame and maximize the utilization of space to improve the loading efficiency. CONTENT OF THE INVENTION

[0006] Therefore, the purpose of the present application is to provide a semiconductor basket frame and a wet process equipment that can ensure the stability and safety of workpieces in the basket frame and maximize the utilization of space to improve the loading efficiency.

[0007] To achieve the above technical purpose, the present application provides a semiconductor basket frame, which comprises a main body structure and a limiting assembly.

[0008] The main body structure comprises two main body frames arranged in parallel and spaced apart.

[0009] The limiting assembly comprises a first fixed limiting piece, a second fixed limiting piece and a movable limiting piece.

[0010] The first fixed limiting piece is connected at the bottom position between the main body frames.

[0011] The second fixed limiting piece is connected at the two side end positions between the main body frames.

[0012] The inner side walls of the two main body frames are each provided with a movable groove arranged in a vertical direction.

[0013] The two ends of the movable limiting piece respectively extend into the movable groove and slide with the movable groove in the vertical direction.

[0014] The inner side walls of the two main body frames are each further provided with a communication groove.

[0015] One end of the communication groove communicates with the movable groove, and the other end extends to the side end wall of the main body frame, so that the end of the movable limiting piece can enter and exit the movable groove.

[0016] The limiting assembly and the main body structure surround a containing cavity for containing workpieces.

[0017] Further, one end of the communication groove communicates with the top end of the movable groove.

[0018] Further, the communication groove includes a first communication section and a second communication section.

[0019] The first communication section is an inclined section, one end of which communicates with the movable groove.

[0020] The other end of the first communication section is higher than the height of the one end thereof.

[0021] The second communication section is a horizontal section, one end of which communicates with the other end of the first communication section, and the other end of which extends to the side end wall of the main body frame.

[0022] Further, the other end edge of the second communication section is provided with a guide inclined surface, so that the other end of the second communication section forms a horn-shaped guide opening.

[0023] Further, at least one second fixed limiting piece is detachably connected with the main body frame.

[0024] Further, the second fixed limiting piece is detachably connected with the main body frame by a threaded member.

[0025] Further, one end of at least one second fixed limiting piece is rotatably connected with one main body frame, and the other end thereof is separably connected with another main body frame.

[0026] Further, the side end walls of the two main body frames are each provided with a U-shaped connecting groove.

[0027] One end of the second fixed limiting piece extends into the connecting groove of one main body frame and is hingedly connected with the connecting groove.

[0028] The other end of the second fixed limiting piece can be clamped into the connecting groove of the other main body frame under the rotation of the second fixed limiting piece.

[0029] Further, the first fixed limiting piece is at least two, and is arranged in parallel and spaced.

[0030] Further, the first fixed limiting piece is provided with a plurality of first clamping grooves for clamping the workpiece;

[0031] The second fixed limiting piece is provided with a plurality of second clamping grooves for clamping the workpiece and corresponding to the first clamping grooves;

[0032] The movable limiting piece is provided with a plurality of third clamping grooves for clamping the workpiece and corresponding to the first clamping grooves.

[0033] Further, the top of the movable limiting piece is provided with a positioning column for mounting a counterweight.

[0034] Further, the main body frame comprises a hollow frame and a connecting handle;

[0035] The connecting handle is connected to the top of the hollow frame;

[0036] The first fixed limiting piece and the second fixed limiting piece are connected between the two hollow frames;

[0037] The movable groove and the communication groove are arranged in the connecting handle;

[0038] The top position between the two connecting handles is also fixed with a gripping block.

[0039] Further, the outer side wall of the main body frame is also provided with a guide insertion slot arranged in the vertical direction.

[0040] Further, the outer side wall of the main body frame is provided with two fixed strips arranged in parallel and spaced.

[0041] The guide insertion slot is formed between the two fixed strips.

[0042] The application also discloses a wet process equipment, comprising a wet process machine body and the semiconductor basket frame.

[0043] The wet process machine body is provided with a working cavity;

[0044] The working cavity is provided with a liquid tank and a transfer robot;

[0045] The transfer robot is used for grabbing the semiconductor basket frame and extending it into the liquid tank.

[0046] From the above technical solution can be seen, the semiconductor basket rack designed in the application has the following beneficial effects:

[0047] 1. By designing the movable limiting piece to be slidably embedded in the movable groove of the inner side wall of the main body frame, the design of the traditional positioning block protruding on the inner side wall surface of the basket rack is avoided. This improvement eliminates the occupation of transverse space by the positioning block, thereby avoiding the possibility of bumping of the workpiece during loading, while retaining the availability of all workstations inside the basket rack, improving the loading quantity and production efficiency.

[0048] 2. The limiting assembly includes a first fixed limiting piece, a second fixed limiting piece, and a movable limiting piece, which jointly act on the workpiece from the bottom, both sides, and vertical direction to limit the workpiece in multiple dimensions, ensuring the stability of the workpiece during cleaning and etching processes. In particular, the movable limiting piece can be flexibly adjusted in position according to the size of the workpiece, further enhancing adaptability and reliability.

[0049] 3. The design of the communication groove allows the movable limiting piece to be easily installed or removed through the side end wall of the main body frame, simplifying the maintenance and replacement process. BRIEF DESCRIPTION OF DRAWINGS

[0050] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creative labor.

[0051] Figure 1 A perspective view of a semiconductor basket rack with a workpiece provided in the present application;

[0052] Figure 2 A perspective view of a semiconductor basket rack without a workpiece provided in the present application;

[0053] Figure 3 A perspective view of a first partial structure of a semiconductor basket rack provided in the present application;

[0054] Figure 4 A front view of a first partial structure of a semiconductor basket rack provided in the present application;

[0055] Figure 5 A Figure 4 enlarged view of position A in

[0056] Figure 6 A perspective view of a second partial structure of a semiconductor basket rack provided in the present application;

[0057] Figure 7 Figure 2 is a structural schematic diagram of another assembly mode of a second fixed limiting piece of a semiconductor flower basket provided in the present application;

[0058] In the figure: 1, main body frame; 11, hollow frame; 12, connecting handle; 13, connecting groove; 2, first fixed limiting piece; 21, first clamping groove; 3, second fixed limiting piece; 31, second clamping groove; 32, threaded part; 4, movable limiting piece; 41, third clamping groove; 42, extension; 5, movable recess; 6, communication recess; 61, first communication section; 62, second communication section; 63, guide inclined surface; 71, Z-axis direction; 72, Y-axis direction; 73, X-axis direction; 8, workpiece; 91, gripping block; 92, guide slot; 93, fixed strip. DETAILED DESCRIPTION

[0059] The technical solutions of the embodiments of the present application will be described clearly and completely below with reference to the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0060] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0061] In the description of the embodiments of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be replaceably connected, or it can be integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0062] The embodiments of the present application disclose a semiconductor flower basket.

[0063] Please refer to Figure 1 and Figure 2 An embodiment of a semiconductor flower basket provided in the embodiments of the present application comprises:

[0064] The main body structure and the limiting assembly.

[0065] The main body structure comprises two parallel and spaced main body frames 1. Taking the vertical direction as the Z-axis direction 71, the two main body frames 1 can be parallel and spaced in the Y-axis direction 72.

[0066] The limiting assembly comprises a first fixed limiting piece 2, a second fixed limiting piece 3, and a movable limiting piece 4.

[0067] The first fixed limiting piece 2 is connected at the bottom between the main body frames 1.

[0068] The second fixed limiting piece 3 is connected at the two side ends between the main body frames 1. Specifically, the second fixed limiting piece 3 is two, and is distributed on the two sides of the main body structure in the X-axis direction 73.

[0069] The inner side walls of the two main body frames 1 facing each other are each provided with a movable groove 5 arranged in the vertical direction (Z-axis direction 71). The two ends of the movable limiting piece 4 respectively extend into the movable groove 5 and slide in the vertical direction with the movable groove 5. It can be understood that the movable groove 5 provides the movable displacement of the movable limiting piece 4 in the Z-axis direction 71, thereby adapting to the limiting of workpieces 8 of different sizes and improving the adaptability.

[0070] The inner side walls of the two main body frames 1 facing each other are also each provided with a communication groove 6. One end of the communication groove 6 communicates with the movable groove 5, and the other end extends to the side end wall of the main body frame 1, so that the end of the movable limiting piece 4 can enter and exit the movable groove 5. The design of the communication groove 6 makes the installation and removal of the movable limiting piece 4 more convenient. When the workpiece 8 is loaded or unloaded, or when the movable limiting piece 4 of different specifications is replaced or maintained, it can be quickly operated. When the movable limiting piece 4 needs to enter the movable groove 5, the end thereof can be smoothly slid into the movable groove 5 through the guidance of the communication groove 6. When the movable limiting piece 4 needs to be taken out, it can also be removed from the movable groove 5 along the communication groove 6.

[0071] The limiting assembly and the main body structure form a containing cavity for containing the workpieces 8.

[0072] The semiconductor basket rack designed in the present application has the following beneficial effects:

[0073] 1. By designing the movable limiting piece 4 to be slidably embedded in the movable groove 5 of the inner side wall of the main body frame 1, the design of the traditional positioning block protruding on the inner side wall surface of the basket rack is avoided. This improvement eliminates the occupation of the positioning block to the transverse space, thereby avoiding the possible bumping problem of the workpiece 8 in the loading process, while retaining the availability of all the workstations inside the basket rack, improving the loading quantity and production efficiency.

[0074] 2. The limiting assembly includes a first fixed limiting member 2, a second fixed limiting member 3, and a movable limiting member 4. These three components work together to limit the workpiece 8 from the bottom, sides, and vertical direction in multiple dimensions, ensuring the stability of the workpiece 8 during cleaning and etching processes. In particular, the movable limiting member 4 can flexibly adjust its position according to the size of the workpiece 8, further enhancing its adaptability and reliability.

[0075] 3. The design of the connecting groove 6 allows the movable limiting component 4 to be easily installed or removed through the side wall of the main frame 1, simplifying the maintenance and replacement process.

[0076] The above is Embodiment 1 of a semiconductor flower basket rack provided in this application. The following is Embodiment 2 of a semiconductor flower basket rack provided in this application. Please refer to the following for details. Figures 1 to 7 .

[0077] Based on the solution of Embodiment 1 above:

[0078] Furthermore, such as Figure 3 as well as Figure 4 As shown, one end of the connecting groove 6 is connected to the top of the movable groove 5. This connection method allows the movable limiting member 4 to enter from the top of the movable groove 5, which is more in line with operating habits and easier to install. It also prevents the movable limiting member 4 from being displaced by the impact of cleaning or etching solutions, and thus from accidentally getting stuck in the connecting groove 6, affecting its movable displacement in the Z-axis direction 71.

[0079] Furthermore, such as Figure 5 As shown, the design of the connecting groove 6 includes a first connecting segment 61 and a second connecting segment 62; the first connecting segment 61 is an inclined segment, one end of which is connected to the movable groove 5; the other end of the first connecting segment 61 is higher than the height of one end of itself; the second connecting segment 62 is a horizontal segment, one end of which is connected to the other end of the first connecting segment 61, and the other end extends to the side wall of the main frame 1.

[0080] This design allows the movable limiting member 4 to first reach the inclined first connecting section 61 via the horizontal second connecting section 62 when entering the connecting groove 6, and then quickly slide into the movable groove 5 along the inclined first connecting section 61, making the installation of the movable limiting member 4 smoother. Conversely, the inclined design of the first connecting section 61 can prevent the movable limiting member 4 from accidentally coming out of the connecting groove 6 due to vibration or other reasons.

[0081] Furthermore, such as Figure 5As shown, the other end edge of the second connecting segment 62 is provided with a guide slope 63, so that the other end of the second connecting segment 62 forms a trumpet-shaped guide opening. This trumpet-shaped guide opening can play a good guiding role when the movable limiting member 4 is installed, making it easier for the end of the movable limiting member 4 to be aligned and enter the second connecting segment 62. When the operator installs the movable limiting member 4, even if the position is slightly deviated, it can be smoothly guided into the connecting groove 6 with the help of the guide slope 63. Moreover, when removing the movable limiting member 4, the guide slope 63 can also make the movable limiting member 4 move out of the connecting groove 6 more smoothly.

[0082] Furthermore, such as Figure 1 , Figure 2 as well as Figure 6 As shown, at least one of the two second fixing limiting members 3 is detachably connected to the main frame 1. The detachable design of the second fixing limiting member 3 means that the second fixing limiting member 3 can be separated from the main frame 1, thereby forming a large inlet and outlet at the connection point, providing better convenience for loading or unloading the workpiece 8.

[0083] Specifically, when loading and unloading workpiece 8, the operator can first remove the detachable second fixing limit member 3 from the main frame 1, which greatly increases the inlet and outlet size of the receiving cavity, facilitating the smooth entry and exit of workpiece 8. Moreover, this detachable design also facilitates the separate maintenance, replacement, or cleaning of the second fixing limit member 3.

[0084] Furthermore, such as Figure 6 As shown, the second fixing limiter 3 is detachably connected to the main frame 1 via a threaded part 32 (e.g., screw, bolt). Using the threaded part 32 for connection results in a simple structure and a firm connection. During installation and disassembly, operators only need to use common tools, such as screwdrivers, to tighten the threaded part 32 to complete the operation, which ensures the stability of the connection and facilitates subsequent adjustment or replacement of the second fixing limiter 3.

[0085] Regarding the connection method of the second fixing limiting member 3, in addition to the overall detachable connection design mentioned above, it can also be:

[0086] like Figure 7 As shown, at least one end of the second fixed limiting member 3 is rotatably connected to one main frame 1, and its other end is detachably connected to another main frame 1. Similar to a door opening and closing design, the opening and closing control of the second fixed limiting member 3 can be realized. When in the open state (detached from the other main frame 1), the inlet and outlet dimensions of the receiving cavity are increased, facilitating the smooth entry and exit of the workpiece 8; when in the closed state (connected to the other main frame 1), it serves to confine the workpiece 8 within the receiving cavity.

[0087] Furthermore, such as Figure 7As shown, the side end walls of the two main frames 1 are each provided with a U-shaped connecting groove 13; one end of the second fixed limiting member 3 extends into the connecting groove 13 of one main frame 1 and is hinged with the connecting groove 13; the other end of the second fixed limiting member 3 can be movably clamped into the connecting groove 13 of the other main frame 1 under the rotation of the second fixed limiting member 3. The design of the U-shaped connecting groove 13 and the hinged and clamped design make the rotation and connection of the second fixed limiting member 3 more stable and reliable. In actual operation, when the second fixed limiting member 3 needs to be opened, the operator only needs to separate the other end from the connecting groove 13 and then rotate around the hinge point, so that the inlet and outlet of the containing cavity are opened; when it needs to be closed, the other end is accurately clamped into the connecting groove 13 of the other main frame 1 by rotating to the appropriate position, so that the workpiece 8 can be effectively limited.

[0088] Further, as shown in Figure 6 The first fixed limiting member 2 is at least two and is arranged in parallel and at intervals. The plurality of first fixed limiting members 2 arranged in parallel and at intervals can form a more stable support structure at the bottom of the main frame 1, providing more reliable bottom limiting for the workpiece 8. On the one hand, the plurality of first fixed limiting members 2 can disperse the weight of the workpiece 8, reduce the pressure borne by a single first fixed limiting member 2, avoid damage caused by excessive local stress, and prolong the service life of the first fixed limiting member 2. On the other hand, this design can increase the contact area with the workpiece 8 and improve the support stability of the workpiece 8, preventing the workpiece 8 from shaking or tilting in the containing cavity.

[0089] Further, as shown in Figure 2 and Figure 6 The first fixed limiting member 2 is provided with a plurality of first clamping grooves 21 for clamping the workpiece 8; the second fixed limiting member 3 is provided with a plurality of second clamping grooves 31 for clamping the workpiece 8 and corresponding to the first clamping grooves 21; and the movable limiting member 4 is provided with a plurality of third clamping grooves 41 for clamping the workpiece 8 and corresponding to the first clamping grooves 21.

[0090] The arrangement of these clamping grooves enables the workpiece 8 to be more accurately positioned in the containing cavity. When the workpiece 8 is placed in the semiconductor basket frame, the edges thereof can be clamped into the corresponding first clamping grooves 21, second clamping grooves 31 and third clamping grooves 41, respectively, so as to be effectively limited in the bottom, two sides and vertical direction. This not only improves the stability of the workpiece 8, but also ensures that the workpiece 8 maintains the correct position and posture during cleaning and etching processes, reducing processing errors caused by shaking or deviation of the workpiece 8.

[0091] Moreover, the corresponding card slot design also facilitates the adaptation of workpieces 8 of different sizes and specifications. By adjusting the position of the movable limiting piece 4 in the movable recess 5, the relative positions between the third card slot 41 and the first card slot 21 and the second card slot 31 can be changed, thereby adapting to workpieces 8 of different diameters. At the same time, for workpieces 8 of different thicknesses, the sizes and spacings of the first card slot 21, the second card slot 31, and the third card slot 41 can also be reasonably designed to meet the requirements.

[0092] As shown in Figure 3 , regarding the design of the movable limiting piece 4, in order to design a third card slot 41 of sufficient depth, but also to avoid causing the end thickness to increase synchronously, thereby reducing the active range after extending into the movable recess 5, a smaller thickness extension 42 can be separately provided at the end of the movable limiting piece 4, which extends into the movable recess 5 and realizes sliding fit with the movable recess 5.

[0093] Further, the top of the movable limiting piece 4 is provided with a positioning column (not shown in the figure), which is used to install a counterweight block (not shown in the figure), and the counterweight block has a positioning hole for the positioning column to pass through. The installation of the counterweight block can increase the stability of the movable limiting piece 4, making it more stable during use and reducing shaking and deviation.

[0094] Further, as shown in Figure 3 , the main body frame 1 includes a hollow frame 11 and a connecting handle 12; the connecting handle 12 is connected to the top of the hollow frame 11; the first fixed limiting piece 2 and the second fixed limiting piece 3 are connected between the two hollow frames 11; the movable recess 5 and the communication recess 6 are opened in the connecting handle 12; and the top position between the two connecting handles 12 is also fixed with a gripping block 91.

[0095] This structure design makes the entire semiconductor basket frame convenient to carry and operate. The gripping block 91 provides a convenient gripping point for the transfer robot (mechanical hand), which can more easily and stably grasp and move when placing or taking out the basket frame from the liquid tank of the wet process equipment.

[0096] The design of the hollow frame 11 has many benefits. On the one hand, it can reduce the weight of the entire main body frame 1 and reduce the labor intensity during carrying; on the other hand, the hollow part can allow the liquid to more fully contact the workpiece 8, improving the effect of the wet process.

[0097] The connecting handle 12 not only serves to connect the hollow frame 11 and bear the movable recess 5 and the communication recess 6, but also provides a channel for the sliding and in-out of the movable limiting piece 4. At the same time, it also provides a suitable position for the installation of the gripping block 91, making the overall structural layout more reasonable.

[0098] Further, as shown in Figure 2As shown, the outer side wall of the main frame 1 is also provided with a guide slot 92 arranged in the vertical direction. During the process of placing the semiconductor basket frame into the liquid tank of the wet processing equipment, the guide slot 92 can cooperate with the corresponding guide structure in the liquid tank, play the role of accurate positioning, ensure that the basket frame can be accurately placed in the designated position, and also avoid the basket frame from shaking in the liquid tank, thereby avoiding the position deviation and affecting the subsequent wet processing operation.

[0099] Further, as shown in the drawings, Figure 2 As shown, the outer side wall of the main frame 1 is provided with two parallel and spaced fixed strips 93; the guide slot 92 is formed between the two fixed strips 93. This structure design makes the size and shape of the guide slot 92 relatively stable, ensuring the reliability of its guiding function. In addition, the existence of the fixed strips 93 also enhances the structural strength of the outer side wall of the main frame 1 to a certain extent, improves the durability of the entire semiconductor basket frame, and makes it better maintain its structural integrity and functionality during long-term use.

[0100] The application also discloses a wet processing equipment, which comprises a wet processing machine body and a semiconductor basket frame. The wet processing machine body is provided with a working cavity. The working cavity is provided with a liquid tank and a transfer robot. The transfer robot is used for grabbing the semiconductor basket frame and extending it into the liquid tank. The liquid tank can be placed with a cleaning solution or an etching solution, which is not limited in particular. The combination of the wet processing equipment and the semiconductor basket frame can efficiently complete the wet processing procedures such as cleaning and etching of the semiconductor workpiece 8. The transfer robot can accurately operate the semiconductor basket frame and stably place it into the liquid tank, ensuring that the workpiece 8 is in full contact with the liquid. The liquid in the liquid tank can comprehensively and uniformly process the workpiece 8, ensuring the consistency and stability of the processing effect.

[0101] The above describes a semiconductor basket frame and a wet processing equipment provided by the application in detail. For those skilled in the art, according to the idea of the embodiments of the application, the specific implementation and application range will be changed. In view of the above, the content of the specification should not be understood as a limitation of the application.

Claims

1. A semiconductor basket rack characterized by, The utility model relates to a kind of limit assemblies and main body structures, including main body structure and limit assembly; The main body structure includes two parallel and spaced main body frames (1); The limit assembly includes first fixed limiting piece (2), second fixed limiting piece (3) and movable limiting piece (4); The first fixed limiting piece (2) is connected at the bottom position between the main body frame (1); The second fixed limiting piece (3) is connected at the two side end positions between the main body frame (1); The inner side wall of the two main body frames (1) facing each other is provided with a movable groove (5) arranged in the vertical direction; The two ends of the movable limiting piece (4) respectively extend into the movable groove (5) and slide with the movable groove (5) in the vertical direction; The inner side wall of the two main body frames (1) facing each other is also provided with a communication groove (6); One end of the communication groove (6) communicates with the movable groove (5), and the other end extends to the side end wall of the main body frame (1) to allow the end of the movable limiting piece (4) to enter and exit the movable groove (5); The limit assembly and the main body structure form a receiving cavity for receiving a workpiece (8).

2. The semiconductor basket of claim 1, wherein, One end of the communication groove (6) communicates with the top end of the movable groove (5).

3. The semiconductor basket of claim 1, wherein, The communication groove (6) includes a first communication section (61) and a second communication section (62); The first communication section (61) is an inclined section, one end of which communicates with the movable groove (5); The other end of the first communication section (61) is higher than the height of one end of itself; The second communication section (62) is a horizontal section, one end of which communicates with the other end of the first communication section (61), and the other end extends to the side end wall of the main body frame (1).

4. The semiconductor basket of claim 3, wherein, The other end edge of the second communication section (62) is provided with a guide slope (63) to form a horn-shaped guide opening at the other end of the second communication section (62).

5. The semiconductor basket of claim 1, wherein, At least one second fixed limiting piece (3) is detachably connected with the main body frame (1).

6. The semiconductor basket of claim 5, wherein, The second fixed limiting piece (3) is detachably connected with the main body frame (1) by a threaded member (32).

7. The semiconductor basket of claim 1, wherein, One end of at least one second fixed limiting piece (3) is rotatably connected with one main body frame (1), and the other end is separably connected with another main body frame (1).

8. The semiconductor basket of claim 7, wherein, The side end wall of the two main body frames (1) is provided with a U-shaped connecting groove (13); One end of the second fixed limiting piece (3) extends into the connecting groove (13) of one main body frame (1) and is hingedly connected with the connecting groove (13); The other end of the second fixed limiting piece (3) can be movably clamped into the connecting groove (13) of the other main body frame (1) under the rotation of the second fixed limiting piece (3).

9. The semiconductor basket of claim 1, wherein, There are at least two first fixed limiting pieces (2), which are parallel and spaced apart.

10. The semiconductor basket of claim 1, wherein, The first fixed limiting piece (2) is provided with a plurality of first clamping grooves (21) for clamping the workpiece (8); The second fixed limiting piece (3) is provided with a plurality of second clamping grooves (31) for clamping the workpiece (8) and corresponding to the first clamping grooves (21); The movable limiting piece (4) is provided with a plurality of third clamping grooves (41) for clamping the workpiece (8) and corresponding to the first clamping grooves (21).

11. The semiconductor basket of claim 1, wherein, The top of the movable limiting piece (4) is provided with a positioning column for mounting a counterweight.

12. The semiconductor basket of claim 1, wherein, The main frame (1) comprises a hollow frame (11) and a connecting handle (12). The connecting handle (12) is connected to the top of the hollow frame (11). The first fixed limiting piece (2) and the second fixed limiting piece (3) are connected between the two hollow frames (11). The movable recess (5) and the communication recess (6) are provided on the connecting handle (12). The top position between the two connecting handles (12) is also fixed with a gripping block (91).

13. The semiconductor basket of claim 1, wherein, The outer side wall of the main frame (1) is also provided with a guide insertion slot (92) arranged in the vertical direction.

14. The semiconductor basket of claim 13, wherein, The outer side wall of the main frame (1) is provided with two fixed strips (93) arranged in parallel and spaced apart. The guide insertion slot (92) is formed between the two fixed strips (93).

15. Wet process plant characterized in that, The wet process machine body and the semiconductor basket frame as claimed in any one of claims 1 to 14 are included. The wet process machine body is provided with a working cavity. The working cavity is provided with a chemical solution tank and a transfer robot. The transfer robot is used for grabbing the semiconductor basket frame and extending it into the chemical solution tank.

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