Device for cleaning metal filter element for growth of heavily arsenic-doped crystal growth

Abstract

The utility model discloses a device for cleaning a metal filter element for growth of heavily arsenic-doped crystal growth. The device comprises a cleaning tank, a cleaning basket and a bubbling device, the cleaning basket is used for placing a to-be-cleaned filter element, and the cleaning basket can be hung and placed in the cleaning tank or separated from the cleaning tank; the interior of the cleaning tank is used for containing cleaning liquid and the cleaning basket, a bubbling pipe connected with the bubbling device is further arranged in the cleaning tank, and the bubbling pipe is used for bubbling towards the interior of the cleaning tank under the action of the bubbling device. The air permeability of the filter element cleaned by the cleaning device provided by the utility model is the same as that of a new filter element, so that the problems of bulkiness, complexity and boring existing in the filter element cleaning work can be effectively solved, the risk of manual cleaning work is reduced, the popularization and application of automatic equipment are improved, the quality and efficiency of the filter element cleaning work are improved, and the production cost is reduced. And labor cost is saved, cleaning efficiency is improved, and therefore the device has good practical value and technological improvement significance.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, specifically relating to a device for cleaning metal filter elements used in the growth of heavily arsenic-doped crystals. Background Technology

[0002] In the process of growing N-type doped arsenic crystal rods, the 10µm metal filter element used for heavy arsenic doping is prone to oxide buildup during growth, making it difficult to clean. Prolonged use reduces the filter element's permeability, preventing it from achieving optimal filtration and necessitating regular manual cleaning. However, the metal filter element is bulky and heavy, making manual cleaning inefficient. Furthermore, arsenic is harmful to health and poses safety risks. Additionally, the accumulation of oxides inside the filter element hinders cleaning, negatively impacting crystal rod quality.

[0003] Therefore, this application aims to provide a dedicated cleaning device for filter elements to solve the above-mentioned technical problems, improve work efficiency, reduce tedious and cumbersome manual work, benefit occupational health, and effectively ensure product quality. Utility Model Content

[0004] The purpose of this invention is to provide a device for cleaning metal filter elements used for heavy arsenic-doped crystal growth in order to overcome the shortcomings of the existing technology.

[0005] The objective of this utility model is achieved through the following technical solution:

[0006] An apparatus for cleaning a metal filter element used for heavy arsenic-doped crystal growth includes a cleaning tank, a cleaning basket, and a bubbling device.

[0007] The cleaning basket is used to place the filter element to be cleaned, and the cleaning basket can be lifted and placed in the cleaning tank or detached from the cleaning tank;

[0008] The cleaning tank is used to hold the cleaning liquid and the cleaning basket, and the cleaning tank is also equipped with a bubbling tube connected to the bubbling device. The bubbling tube is used to bubble into the cleaning tank under the action of the bubbling device.

[0009] Preferably, the apparatus for cleaning heavily arsenic-doped crystal growth metal filter elements provided in this application further includes a frame; the cleaning tank and the bubbling device are both located on the frame.

[0010] Preferably, the bottom of the frame is equipped with casters and lifting feet.

[0011] Preferably, the cleaning tank is composed of a stainless steel outer shell and a PP inner liner.

[0012] Preferably, the bubbling tube array is distributed at the bottom of the cleaning tank, and the bubbling tube is provided with upward-facing air holes.

[0013] Preferably, the air inlet end of the bubbling tube is equipped with an overflow prevention check valve.

[0014] Preferably, the bubbling device is an air pump.

[0015] Preferably, the washing basket is provided with retractable lifting claws.

[0016] Preferably, the cleaning tank is equipped with a water inlet valve;

[0017] The cleaning tank is equipped with a liquid level sensor;

[0018] The water inlet valve is interlocked with the liquid level sensor.

[0019] Preferably, the cleaning tank is provided with a cover plate.

[0020] The air permeability of the filter element cleaned by the cleaning device provided in this application is no different from that of a new filter element. Therefore, this application can effectively solve the problems of being cumbersome, tedious, and boring in filter element cleaning work, reduce the risk of manual cleaning operations, promote and improve the application of automated equipment, improve the quality and efficiency of filter element cleaning work, benefit occupational health, save labor costs and cleaning efficiency, and therefore has good practical value and technical improvement significance. Attached Figure Description

[0021] Figure 1 This is a three-dimensional structural schematic diagram (without cover plate) of the device for cleaning heavily arsenic-doped crystal growth metal filter element provided in this application;

[0022] Figure 2 This is a schematic diagram of the main structure of the apparatus for cleaning heavily arsenic-doped crystal growth metal filter element provided in this application (the front of the tank is made transparent to clearly show the internal structure).

[0023] Figure 3 This is a three-dimensional structural diagram (with cover plate) of the device for cleaning heavily arsenic-doped crystal growth metal filter element provided in this application;

[0024] Explanation of reference numerals in the attached figures:

[0025] 1-Washing tank; 2-Washing basket; 3-Bubble device; 4-Filter element; 5-Frame; 6-Wheel casters; 7-Handle; 8-Drain outlet; 9-Cover plate; 10-Anti-splash dosing funnel; 11-Lifting claw. Detailed Implementation

[0026] The apparatus provided in this application for cleaning metal filter elements used in the growth of heavily arsenic-doped crystals, such as... Figures 1-3 As shown, it includes a cleaning tank 1, a cleaning basket 2, and a bubbling device 3.

[0027] The cleaning basket 2 is used to place the filter element 4 to be cleaned. The cleaning basket 2 can be lifted and placed in the cleaning tank or taken out of the cleaning tank by the lifting device (such as a robot or crane), thus completing the transfer of the heavy filter element without the need for manual transfer, saving time and effort.

[0028] The cleaning tank 1 serves as the main cleaning platform, containing the cleaning solution and cleaning basket. To thoroughly clean the filter elements, chemical agents are added to the cleaning solution. For metal filter elements heavily doped with arsenic, a mixture of sodium hydroxide and hydrogen peroxide is preferred as the chemical agent. The chemical agent can be adjusted according to the type of item being cleaned. The cleaning tank 1 is also equipped with a bubbling pipe connected to a bubbling device. This device bubblees the cleaning tank, causing the liquid to flow and promoting the thorough and uniform dissolution of the chemical agent while simultaneously flushing the filter elements in the cleaning basket, thus improving the cleaning effect.

[0029] Preferably, the cleaning apparatus provided in this application further includes a frame 5 for supporting the cleaning tank 1 and the bubbling device 3, both of which are located on the frame 5. The frame is preferably made of SUS304 stainless steel, which provides sufficient strength and corrosion resistance.

[0030] Preferably, the bottom of the frame 5 is equipped with four casters 6 and four lifting feet. The casters 6 allow for easy movement of the cleaning device, while the lifting feet allow for leveling after the device is positioned. Furthermore, the casters 6 are equipped with a braking device and a shock-absorbing device. The braking device prevents the cleaning device from moving arbitrarily during operation, while the shock-absorbing device reduces vibration during operation and movement, extending its service life.

[0031] More preferably, a push-pull handle is provided on the frame or cleaning tank to facilitate pushing and pulling movement.

[0032] Preferably, the cleaning tank 1 consists of a stainless steel outer shell and a PP (polypropylene) inner liner. The stainless steel is preferably SUS304 stainless steel, which can support the entire cleaning tank. The PP material inside the stainless steel outer shell enhances corrosion resistance and reduces corrosion from the cleaning solution.

[0033] To improve the uniformity of bubbling, preferably, the bubbling tube array is distributed at the bottom of the cleaning tank. More preferably, bubbling tubes are arranged at 20cm intervals at the bottom of the PP inner tank. The bubbling tubes have upward-facing pores to generate bubbles. The pore diameter is preferably 1mm, and the pore spacing is preferably 200mm. The bubbling tubes are preferably made of PVC material.

[0034] The bubbling device 3 preferably uses an air pump. When the air pump is turned on, it can pump air into the bubbling tube to increase pressure and generate bubbles.

[0035] Preferably, the air inlet end of the bubbling tube is equipped with an anti-overflow one-way valve. This anti-overflow one-way valve is vertically connected in series at the air inlet end of the bubbling tube and operates unidirectionally by gravity. When the air pump is turned on, the internal air pressure in the pipeline forces the one-way valve's actuator to move airflow through the valve body. When operation stops, the one-way valve's actuator relies on gravity to shut off the flow inside the pipeline. Under normal operating conditions, the liquid level in the cleaning tank is below the height of the anti-overflow one-way valve.

[0036] Preferably, the cleaning tank 1 is equipped with a water inlet valve, and a liquid level sensor is installed inside the cleaning tank. The water inlet valve and the liquid level sensor are interlocked. The liquid level sensor can monitor the liquid level in the cleaning tank. When the liquid level is low, the water inlet valve automatically opens to replenish the cleaning solution in time. When the replenishment of water meets the liquid level requirements, the water inlet valve automatically closes, realizing the automatic addition of cleaning solution.

[0037] Preferably, the cleaning tank is provided with a drain outlet 8, and a drain valve is provided inside the drain outlet so that automatic drainage can be achieved after cleaning is completed.

[0038] Preferably, the cleaning tank is provided with a cover plate 9 to prevent the internal solution from overflowing due to bubbling. Furthermore, the cover plate 9 is provided with a handle 7 for easy removal of the cover plate.

[0039] Preferably, the cleaning tank is equipped with an anti-splash dosing funnel 10, which is located on one side of the tank and can be made of PP material. Adding chemical agents through the anti-splash dosing funnel 10 can prevent the agents from splashing during the addition process and reduce agent contamination.

[0040] Preferably, the cleaning basket is equipped with multiple retractable lifting claws 11. The lifting claws can extend during hoisting for easy hoisting, and can retract during cleaning to facilitate closing the cover plate 9.

[0041] The cleaning device provided in this application can be used not only for cleaning metal filter elements, but also for cleaning other items.

[0042] As those skilled in the art will understand, the device may also be equipped with a processor and a control panel, the processor containing a cleaning program that enables the device to automatically complete the filter cleaning according to the cleaning program.

[0043] The specific workflow for this application is as follows:

[0044] First, add water to the cleaning tank through the inlet valve. When the water level reaches a certain height, such as 60cm, the level sensor will automatically alarm and the inlet valve will automatically close. Then, add a certain proportion of chemical agent through the anti-splash dosing funnel (this can be done manually or by setting an automatic dosing valve). After the agent is added, turn on the air pump to pressurize the bubbling tube, causing the solution inside the cleaning tank to flow during the bubbling process, which promotes the full and uniform dissolution of the agent.

[0045] Then, place the filter element to be washed into the cleaning basket, use a crane to hook the lifting claw of the cleaning basket, and place the cleaning basket and filter element together into the cleaning tank. Then, close the cover plate and make sure the cover plate is completely closed. Power on the cleaning device and turn on the cleaning mode through the control panel. The device will automatically complete the soaking, bubbling and cleaning of the filter element according to the set program. After about 2 hours of chemical cleaning, the machine will alarm to indicate that it is complete.

[0046] After the cleaning alarm is completed, the internal solution will be automatically drained, and water will be replenished to the same level before automatically stopping. At this time, the machine will run the automatic water washing function. After the above procedure is performed twice, the water in the container will be automatically drained, and the machine will indicate with sound and light that the filter element cleaning is complete. The operator will then remove the filter element from the tank and reset the machine. The entire cleaning process will take about 3 hours to complete.

[0047] Comparative analysis revealed that manual cleaning easily damages the filter element surface, reducing its overall lifespan. However, the air permeability of filter elements cleaned using the cleaning device provided in this application was confirmed to be no different from that of new filter elements. Therefore, it is determined that this device significantly improves the lifespan and air permeability of filter elements after cleaning. This application has been successfully applied in the applicant's company, effectively solving the problems of cumbersome, tedious, and monotonous filter element cleaning work, reducing the risks of manual cleaning operations, promoting the application of automated equipment, improving the quality and efficiency of filter element cleaning, benefiting occupational health, and saving labor costs and cleaning efficiency. Therefore, it has significant practical value and technical improvement significance.

[0048] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including both the preferred embodiments and all changes and modifications falling within the scope of the present invention. Clearly, those skilled in the art can make various alterations and modifications to the present invention without departing from its spirit and scope. Thus, if such modifications and modifications fall within the scope of the claims of the present invention and their equivalents, the present invention also intends to include such modifications and modifications.

Claims

1. An apparatus for cleaning a metal filter element used for heavy arsenic-doped crystal growth, characterized in that, The device comprises a cleaning tank, a cleaning basket and a bubbling device. The cleaning basket is used to place filter cores to be cleaned and can be lifted to be placed in the cleaning tank or separated from the cleaning tank. The cleaning tank is used to hold cleaning liquid and the cleaning basket and is provided with a bubbling pipe connected with the bubbling device, which is used to bubble into the cleaning tank under the action of the bubbling device.

2. The device for cleaning metal filter cores for growing heavy arsenic-doped crystals according to claim 1, further comprising a rack, wherein the cleaning tank and the bubbling device are located on the rack.

3. The device for cleaning metal filter cores for growing heavy arsenic-doped crystals according to claim 2, wherein the bottom of the rack is provided with universal wheels and lifting feet.

4. The device for cleaning metal filter cores for growing heavy arsenic-doped crystals according to claim 1, wherein the tank body of the cleaning tank is composed of a stainless steel shell and a pp inner container.

5. The device for cleaning metal filter cores for growing heavy arsenic-doped crystals according to claim 1, wherein the bubbling pipes are arrayed at the bottom of the cleaning tank and are provided with air holes with upward direction.

6. The device for cleaning metal filter cores for growing heavy arsenic-doped crystals according to claim 1, wherein the air inlet end of the bubbling pipe is provided with an anti-overflow one-way valve.

7. The device for cleaning metal filter cores for growing heavy arsenic-doped crystals according to claim 1, wherein the bubbling device is an air pump.

8. The device for cleaning metal filter cores for growing heavy arsenic-doped crystals according to claim 1, wherein the cleaning basket is provided with retractable lifting claws.

9. The device for cleaning metal filter cores for growing heavy arsenic-doped crystals according to claim 1, wherein the cleaning tank is provided with a water inlet valve, the cleaning tank is provided with a liquid level sensor, and the water inlet valve and the liquid level sensor are interlocked.

10. The device for cleaning metal filter cores for growing heavy arsenic-doped crystals according to claim 1, wherein the cleaning tank is provided with a cover plate. ​ ​ ​ ​ ​ ​ ​ ​ ​ ​ ​

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