Magnetron sputtering cathode forming device

Abstract

The utility model belongs to the technical field of magnetron sputtering, and discloses a magnetron sputtering cathode forming device which comprises a target body and a back plate detachably connected with the target body, the lower end of the target body is fixedly connected with two symmetrically arranged connecting plates, each connecting plate is provided with two insertion holes, and a triangular block is fixedly connected between the lower ends of the two connecting plates; a cavity is formed in the lower end face of the back plate, a through hole communicated with the cavity is formed in the upper end of the back plate, supporting plates are fixedly connected to the two ends in the cavity, two sliding rods connected in a sliding mode penetrate through the supporting plates, and a baffle is fixedly connected between the ends, away from the through hole, of the two sliding rods. A sliding plate is fixedly connected between the other ends of the supporting plates, the sliding rods between the supporting plates and the sliding plate are sleeved with springs, and the other side of the sliding plate is fixedly connected with two inserting rods. Under the elastic force of the spring, the sliding plate is pushed to move, so that the inserting rod is inserted into the inserting hole in the connecting plate, and the target body and the target body back plate are mounted and fixed.

Description

TECHNICAL FIELD

[0001] The utility model belongs to magnetron sputtering technical field, concretely relates to a magnetron sputtering cathode forming device. BACKGROUND

[0002] Magnetron sputtering refers to the electron under the action of electric field collides with argon atom in the process of flying to the substrate, makes argon atom ionization to produce argon positive ion and new electron, and new electron flies to the substrate, and argon positive ion accelerates under the action of electric field and flies to the target material as cathode, and with high energy bombards target material surface, makes target material sputter.

[0003] Such as the publication number CN220284198U discloses a magnetron sputtering target material, including target body, recess, center platform, back plate, locating ring and boss, the back plate upside is provided with boss, the boss upside is provided with target body, the target body lower end surface edge position is provided with locating ring, the recess is set up in the target body upper end surface inside, the recess center part is provided with center platform, the target body lower end surface is provided with locating block, the boss upper end surface inside is set up with locating groove.The locating block annular side is provided with limit stopper, the limit stopper is provided with four groups, four groups The limit stopper is arranged in equiangular arrangement structure, the locating groove inside is set up with limit stopper slot, and the limit stopper slot specification is same with limit stopper block specification.

[0004] In the above scheme, the connection between the target body and the back plate is realized by inserting the limit stopper at the lower end of the target body into the limit stopper slot, which is not firm. The limit stopper can easily come off from the limit stopper slot, and the target body and the back plate can easily separate. Utility model content

[0005] In view of the deficiencies of the prior art, the utility model aims at providing a magnetron sputtering cathode forming device, which is installed and fixed by inserting the inserting rod into the insertion hole on the connecting plate under the elastic force of the spring.

[0006] The utility model can achieve the purpose by the following technical scheme:

[0007] A magnetron sputtering cathode forming device comprises:

[0008] A target body and a back plate detachably connected to the target body;

[0009] The lower end of the target body is fixedly connected to two symmetrically arranged connecting plates, the connecting plates are provided with two insertion holes, and the lower ends of the two connecting plates are fixedly connected to a triangular block;

[0010] The lower end surface of the back plate is provided with a cavity, the upper end of the back plate is provided with a through hole communicated with the cavity, both ends of the cavity are fixedly connected with support plates, two sliding rods are penetrated through the support plates and are slidingly connected, the ends of the two sliding rods away from the through hole are fixedly connected with a baffle, the other ends of the two sliding rods are fixedly connected with a sliding plate, springs are sleeved on the sliding rods between the support plates and the sliding plate, and the other side of the sliding plate is fixedly connected with two inserting rods.

[0011] The above technical scheme has the following principles and technical effects:

[0012] The triangular block is inserted into the through hole, the ends of the inserting rods on both sides of the triangular block are in contact with the inclined surface of the triangular block, the inserting rods are moved when the triangular block continuously moves downwards, and the sliding plate, the sliding rods and the baffle are moved away from the triangular block, the ends of the inserting rods are aligned with the inserting holes in the connecting plate when the lower end surface of the target body is in contact with the upper end surface of the back plate, the sliding plate is moved under the elastic force of the springs, the inserting rods are inserted into the inserting holes in the connecting plate, and the target body and the target back plate are installed and fixed.

[0013] In a preferred example, the two ends of the sliding plate are penetrated through slidingly connected guide rods, and the two ends of the guide rods are fixedly connected with the back plate.

[0014] In a preferred example, the lower end of the baffle is fixedly connected with a push piece.

[0015] In a preferred example, the upper end of the triangular block is a plane, and the lower end is an edge.

[0016] In a preferred example, the end of the inserting rod, away from the sliding plate, is a hemispherical structure.

[0017] In a preferred example, the two sides of the target body are provided with positioning holes, and the upper end of the back plate is fixedly connected with positioning columns on both sides.

[0018] In a preferred example, the upper end of the positioning column is a hemispherical structure.

[0019] In a preferred example, the upper end surface of the target body is provided with an inner recessed circular groove, and a center table is fixedly connected with the center part of the circular groove.

[0020] The following explains the nouns, conjunctions or adjectives involved in the above technical scheme:

[0021] Fixed connection refers to the connection of parts or components after being fixed, without any relative movement. Among them, it is divided into two kinds of detachable connection and non-detachable connection.

[0022] (1) The detachable connection is to fix the parts together by using screw, spline, wedge pin, etc. This connection mode can be disassembled during maintenance, and the parts will not be damaged. However, the specifications of the connecting parts (such as the length of the bolt, key, wedge pin) must be correct, and the fastening must be appropriate.

[0023] (2) The non-detachable connection mainly refers to welding, riveting and over mortise matching, etc. Because it needs to be disassembled by forging, sawing or oxygen cutting during maintenance or replacement, the parts generally cannot be used twice. At the same time, attention should be paid to the process quality, technical detection and remedial measures (such as correction, polishing, etc.) during connection.

[0024] Threaded connection refers to the detachable connection of the connected parts by using threaded parts (or threaded parts of the connected parts).

[0025] Sliding connection refers to the contact between two objects, but not fixed, and the two can slide relative to each other.

[0026] Rotary connection refers to the connection between parts, which can make the parts rotate relative to each other.

[0027] The beneficial effects of the utility model are as follows:

[0028] The triangular block is inserted into the through hole, and the end of the insertion rod on both sides of the triangular block is in contact with the inclined surface of the triangular block. When the triangular block continues to move downward, the insertion rod will move, thereby driving the sliding plate, the sliding rod and the baffle to move away from the triangular block. At this time, the spring is compressed and shrunk. When the lower end surface of the target body contacts the upper end surface of the back plate, the end of the insertion rod is aligned with the insertion hole on the connecting plate. At this time, under the elastic force of the spring, the sliding plate is pushed to move, so that the insertion rod is inserted into the insertion hole on the connecting plate, and the installation and fixation of the target body and the target body back plate are realized. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below. Obviously, for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0030] Figure 1 It is the overall structure front view of the embodiment of the utility model;

[0031] Figure 2 It is the overall structure top view of the embodiment of the utility model;

[0032] Figure 3 It is the schematic diagram of the target body bottom structure of the embodiment of the utility model;

[0033] Figure 4 is a back plate top structure schematic diagram of the embodiment of the utility model;

[0034] Figure 5 is a back plate bottom structure schematic diagram of the embodiment of the utility model;

[0035] Figure 6 is a partial structure schematic diagram of the insertion rod of the embodiment of the utility model. DETAILED DESCRIPTION

[0036] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0037] In the description of the utility model, it should be understood that the terms "opening", "upper", "lower", "thickness", "top", "middle", "length", "inner", "periphery" and the like indicate the orientation or positional relationship, which are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the indicated components or elements must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0038] According to the conception of the present application, an embodiment of a magnetron sputtering cathode forming device is described herein. Figures 1 to 6 Specifically, the magnetron sputtering cathode forming device is configured in a split structure, which has the cooperation of the target body 1, the back plate 2 and the like structures, the triangular block 13 is inserted into the through hole 22, at this time, the end of the insertion rod 28 on both sides of the triangular block 13 is in contact with the inclined surface of the triangular block 13, when the triangular block 13 continuously moves downward, the insertion rod 28 will move, thereby driving the sliding plate 26, the sliding rod 24 and the baffle 25 to move away from the triangular block 13, at this time, the spring 27 is compressed and shrunk, when the lower end surface of the target body 1 is in contact with the upper end surface of the back plate 2, at this time, the end of the insertion rod 28 is just aligned with the insertion hole 12 on the connecting plate 11, at this time, under the elastic force of the spring 27, the sliding plate 26 is pushed to move, so that the insertion rod 28 is inserted into the insertion hole 12 on the connecting plate 11, realizing the installation and fixation of the target body 1 and the back plate 2 of the target body 1.

[0039] As shown in Figures 1 to 6 A magnetron sputtering cathode forming device comprises:

[0040] A target body 1 and a back plate 2 detachably connected with the target body 1;

[0041] The lower end of the target body 1 is fixedly connected with two symmetrically arranged connecting plates 11, two insertion holes 12 are arranged on the connecting plates 11, and a triangular block 13 is fixedly connected between the lower ends of the two connecting plates 11.

[0042] A cavity 21 is arranged on the lower end face of the back plate 2, a through hole 22 is arranged on the upper end of the back plate 2 and communicates with the cavity 21, support plates 23 are fixedly connected at both ends in the cavity 21, two slidingly connected slide rods 24 are arranged through the support plates 23, a baffle 25 is fixedly connected between the ends of the two slide rods 24 away from the through hole 22, a sliding plate 26 is fixedly connected between the other ends of the two slide rods 24, springs 27 are arranged on the slide rods 24 between the support plates 23 and the sliding plate 26, and two insertion rods 28 are fixedly connected to the other side of the sliding plate 26.

[0043] In use, the triangular block 13 is inserted into the through hole 22, at this time, the ends of the insertion rods 28 on the two sides of the triangular block 13 are in contact with the inclined surface of the triangular block 13, when the triangular block 13 continuously moves downward, the insertion rods 28 move, and then drive the sliding plate 26, the slide rods 24 and the baffle 25 to move away from the triangular block 13, at this time, the springs 27 are compressed and contracted, when the lower end face of the target body 1 is in contact with the upper end face of the back plate 2, at this time, the ends of the insertion rods 28 are aligned with the insertion holes 12 on the connecting plates 11, at this time, under the elastic force of the springs 27, the sliding plate 26 is pushed to move, so that the insertion rods 28 are inserted into the insertion holes 12 on the connecting plates 11, and the installation and fixation of the target body 1 and the back plate 2 are realized.

[0044] In an embodiment of the utility model, in order to make the insertion rod 28 move stably, the two ends of the sliding plate 26 are arranged through the slidingly connected guide rods 29, and the two ends of the guide rods 29 are fixedly connected with the back plate 2.

[0045] In an embodiment of the utility model, the lower end of the baffle 25 is fixedly connected with a push piece 30, when it is needed to separate the target body 1 from the back plate 2, the push piece 30 is pushed to drive the baffle 25, the slide rods 24, the sliding plate 26 and the insertion rods 28 to move away from the connecting plates 11, so that the insertion rods 28 are separated from the insertion holes 12, and the separation of the target body 1 and the back plate 2 is realized.

[0046] In an embodiment of the utility model, in order to make the triangular block 13 push the insertion rod 28 to move, the upper end of the triangular block 13 is a plane, and the lower end is an edge.

[0047] In an embodiment of the utility model, in order to make the insertion rod 28 be inserted into the insertion hole 12 quickly and easily, the end of the insertion rod 28 away from the sliding plate 26 is a hemispherical structure.

[0048] In one embodiment of the utility model, in order to make the triangular block 13 with the connecting plate 11 can be inserted into the through hole 22 correctly, make the insertion rod 28 can be inserted into the insertion hole 12, the positioning hole 14 is set up in the both sides of target body 1, the positioning column 31 is fixedly connected with on the both sides of the upper end of back plate 2. When positioning column 31 is inserted into positioning hole 14, play the installation positioning effect.

[0049] In one embodiment of the utility model, in order to make the positioning column 31 can be inserted into positioning hole 14 quickly and easily, the upper end of positioning column 31 is hemispherical structure.

[0050] In one embodiment of the utility model, the upper end surface of target body 1 is provided with a concave circular groove 15, and a center table 16 is fixedly connected to the center part of the circular groove 15. The conventional magnetron sputtering target material adopts an integral design, the target material surface is flat, the thickness of each part of the target material is uniform, and the non-uniformity of the magnetic field and the sputtering rate is not considered. The magnetic field is not uniform everywhere, and such a magnetic field will cause the plasma concentration to be different in different areas in magnetron sputtering, which may result in uneven etching of the target material in different areas, causing the material utilization rate of the target material to be low. When the target body 1 is subjected to magnetron sputtering, the part with the strongest magnetic field line passes through the target body 1 outside the circular groove 15, and the surface structure of the target body 1 is changed through the circular groove 15, so that the thickness of the target body 1 meets the magnetic field strength of magnetron sputtering, improving the sputtering etching uniformity of the target body 1, and thus improving the material utilization rate of the target body 1.

[0051] In the description of the present specification, the description of the terms "one embodiment", "example", "specific example" and the like means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0052] The basic principles, main features and advantages of the utility model are shown and described above. Those skilled in the art should understand that the utility model is not limited by the above embodiments, and the above embodiments and descriptions in the specification are only to illustrate the principles of the utility model. Without departing from the spirit and scope of the utility model, the utility model can also have various changes and improvements, and these changes and improvements all fall within the scope of the claimed utility model.

Claims

1. A magnetron sputter cathode forming device, characterized in that The utility model relates to a target body (1) and a back plate (2) detachably connected with the target body (1). The lower end of the target body (1) is fixedly connected with two symmetrically arranged connecting plates (11), two insertion holes (12) are formed in the connecting plates (11), and a triangular block (13) is fixedly connected between the lower ends of the two connecting plates (11). A cavity (21) is formed in the lower end face of the back plate (2), a through hole (22) is formed in the upper end of the back plate (2) and communicates with the cavity (21), support plates (23) are fixedly connected at both ends inside the cavity (21), two slidingly connected slide rods (24) penetrate through the support plates (23), a baffle (25) is fixedly connected between the ends of the two slide rods (24) away from the through hole (22), a sliding plate (26) is fixedly connected between the other ends of the two slide rods (24), springs (27) are sleeved on the slide rods (24) between the support plates (23) and the sliding plate (26), and two insertion rods (28) are fixedly connected to the other side of the sliding plate (26). Slidingly connected guide rods (29) penetrate through both ends of the sliding plate (26), and both ends of the guide rods (29) are fixedly connected with the back plate (2).

2. A magnetron sputter cathode forming device according to claim 1, characterized in that A push piece (30) is fixedly connected to the lower end of the baffle (25).

3. A magnetron sputter cathode forming device according to claim 2, characterized in that The upper end of the triangular block (13) is a plane, and the lower end is an edge.

4. A magnetron sputter cathode forming device according to claim 3, characterized in that The end of the insertion rod (28) away from the sliding plate (26) is in a semispherical structure.

5. A magnetron sputter cathode forming device according to claim 4, characterized in that Positioning holes (14) are formed in both sides of the target body (1), and positioning columns (31) are fixedly connected to both sides of the upper end of the back plate (2).

6. A magnetron sputter cathode forming device according to claim 5, characterized in that The upper end of the positioning column (31) is in a semispherical structure.

7. A magnetron sputter cathode forming device according to claim 6, characterized in that A concave circular groove (15) is formed in the upper end face of the target body (1), and a central table (16) is fixedly connected to the central part of the circular groove (15).

8. A magnetron sputter cathode forming device according to claim 1, characterized in that ​

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