Vacuum drying oven with blower device

By introducing a blower and filtration system into the vacuum drying oven, the problem of long chip cooling time was solved, enabling rapid cooling and efficient production.

CN223580419UActive Publication Date: 2025-11-21WUXI MARIT TECH CO LTD
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Patent Information

Application Number
CN202423250187.9
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-27
Publication Date
2025-11-21
Estimated Expiration
2034-12-27

AI Technical Summary

Technical Problem

Existing chip drying ovens require a significant amount of time to cool naturally after chip manufacturing, which impacts production efficiency.

Method used

A vacuum drying chamber with a blower was designed. Air flow is controlled by a wall-mounted blower and an electromagnetic control valve. Combined with an adjustable rotating drum and filter plate system, rapid cooling and filtration are achieved.

Benefits of technology

It enables rapid cooling of the chip, reduces waiting time, improves production efficiency, and ensures air quality through a removable filter plate.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a vacuum drying box with a blower device, belongs to the technical field of vacuum drying boxes, solves the problem that a chip is inconvenient to cool, and comprises a box body, the inner wall of the box body is fixedly connected with a blower mechanism, and the outer surface of the box body is fixedly connected with a filtering mechanism and a control panel. The air blowing mechanism comprises a drying cavity fixedly connected to the inner wall of the box body, the inner wall of the drying cavity is rotationally connected with a rotating cylinder, and a plurality of sets of through holes are formed in the outer surface of the rotating cylinder. By starting a wall type air blower and an electromagnetic control valve, the wall type air blower can pump external air flow into a fixed pipeline after filtering through a first filter plate and a second filter plate, then an electric telescopic rod is started, the position of an air outlet of a rotating cylinder is conveniently adjusted, the air flow is conveniently blown to different positions in a drying cavity, and the drying effect is improved. And therefore, the interior of the drying cavity can be quickly cooled, and the chip can be cooled conveniently.
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Description

Technical Field

[0001] This utility model relates to the field of vacuum drying oven technology, and in particular to a vacuum drying oven with a blower. Background Technology

[0002] The chip manufacturing process is an extremely complex and precise process involving multiple key steps such as photolithography, etching, deposition, and doping. During these steps, chips inevitably come into contact with various chemical reagents, solvents, and cleaning solutions, resulting in the presence of moisture, organic residues, and other volatile impurities on and inside the chip surface. Therefore, a vacuum dryer is required. A vacuum drying oven mainly consists of a chamber, a vacuum system, a heating system, shelves, and a control system.

[0003] In existing chip drying ovens, after the chips have undergone vacuum drying during the chip manufacturing process, they are often still at a high temperature. This means that the chips need to wait a lot of time to cool down naturally after drying, which seriously affects production efficiency and makes it difficult to cool the chips. Utility Model Content

[0004] (a) Technical problems to be solved

[0005] To address the problems existing in the prior art, this utility model provides a vacuum drying oven with a blower.

[0006] (II) Technical Solution

[0007] To achieve the above objectives, this utility model provides the following technical solution: a vacuum drying oven with a blower, comprising a box body, a blower mechanism fixedly connected to the inner wall of the box body, and a filter mechanism and a control panel fixedly connected to the outer surface of the box body. The blower mechanism includes a drying cavity fixedly connected to the inner wall of the box body, a rotating cylinder rotatably connected to the inner wall of the drying cavity, multiple sets of through holes opened on the outer surface of the rotating cylinder, a sealing shell fixedly connected to the outer surface of the drying cavity, a wall-mounted blower fixedly connected to the outer surface of the box body, and a fixed frame fixedly connected to the outer surface of the box body. The filter mechanism includes a fixed frame fixedly connected to the outer surface of the box body, a first filter plate and a second filter plate slidably connected to the inner wall of the fixed frame, and mounting plates fixedly connected to the outer surfaces of both the first and second filter plates, with pins slidably connected to the outer surface of the mounting plates.

[0008] In a preferred embodiment of the vacuum drying oven with a blower device described in this utility model, a rotating shaft is fixedly connected to the outer surface of the rotating cylinder, and a gear is fixedly connected to one end of the rotating shaft through the outer surface of the drying chamber. A rack is meshed with the outer surface of the gear.

[0009] By adopting the above technical solution, the rack and pinion slides to drive the gear to rotate, which makes it easier for the airflow to be blown to different positions in the drying chamber.

[0010] In a preferred embodiment of the vacuum drying oven with a blower described in this utility model, a fixed plate and an electric telescopic rod are fixedly connected to the outer surface of the drying chamber, a connecting frame is fixedly connected to the output end of the electric telescopic rod, the outer surface of the connecting frame is fixedly connected to the outer surface of the rack rod, and the outer surface of the connecting frame is slidably connected to the outer surface of the fixed plate.

[0011] By adopting the above technical solution, the connecting frame slides on the outer surface of the fixed plate, which helps to prevent the rack and pinion from separating.

[0012] As a preferred embodiment of the vacuum drying oven with a blower described in this utility model, a fixed pipe is fixedly connected to the outer surface of the sealed shell, and an electromagnetic control valve is fixedly connected to the other end of the fixed pipe. The other end of the electromagnetic control valve is fixedly connected to the air outlet of the wall-mounted blower through a flexible hose.

[0013] By adopting the above technical solution, the electromagnetic control valve facilitates the control of whether there is airflow in the fixed pipeline, thereby facilitating the sealing of the drying chamber.

[0014] In a preferred embodiment of the vacuum drying oven with a blower described in this utility model, a pin hole is provided on the outer surface of the oven body at the position of the pin rod, and the outer surface of the pin rod is slidably connected to the outer surface of the pin hole.

[0015] By adopting the above technical solution, the first and second filter plates can be easily cleaned and replaced by sliding pin rod.

[0016] In a preferred embodiment of the vacuum drying oven with a blower described in this utility model, the upper end of the pin rod is fixedly connected to a pull block, the outer surface of the pull block is slidably connected to the outer surface of the mounting plate, and the lower surface of the pull block is fixedly connected to a spring, the lower end of the spring being fixedly connected to the outer surface of the mounting plate.

[0017] By adopting the above technical solution, the spring makes the pin rod elastic. When the force that pulls the pin rod upward disappears, the spring will drive the pin rod to return to its original position.

[0018] (III) Beneficial Effects

[0019] This invention provides a vacuum drying oven with a blower. It has the following advantages:

[0020] 1. By starting the wall-mounted blower and the solenoid control valve, the wall-mounted blower can pump the outside air flow into the fixed pipe after it is filtered through the first filter plate and the second filter plate. Then, the electric telescopic rod is started to adjust the position of the air outlet of the rotating cylinder, so that the air flow can be blown to different positions in the drying chamber, thereby facilitating the rapid cooling of the inside of the drying chamber and facilitating the cooling of the chip.

[0021] 2. The first and second filter plates can reduce impurities in the airflow, thereby preventing dust from entering the drying chamber. By pulling the pull block, the pull block moves upward, causing the pin rod to move, which separates the pin rod from the pin hole and stretches the spring, thus facilitating the separation of the first and second filter plates from the fixed frame, making it easy to clean and replace the first and second filter plates. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0024] Figure 2 This is a schematic diagram of the overall rear cross-sectional structure of this utility model;

[0025] Figure 3 This is a side sectional view of the overall structure of this utility model;

[0026] Figure 4 This is a top view cross-sectional structural diagram of the entire utility model.

[0027] In the diagram, 1. Housing; 2. Blower mechanism; 201. Drying chamber; 202. Rotating cylinder; 203. Sealing shell; 204. Wall-mounted blower; 205. Electromagnetic control valve; 206. Fixed pipe; 207. Connecting frame; 208. Fixing plate; 209. Electric telescopic rod; 210. Gear; 211. Rack; 212. Rotating shaft; 3. Filtering mechanism; 301. First filter plate; 302. Mounting plate; 303. Spring; 304. Pin rod; 305. Pull block; 306. Fixing frame; 307. Second filter plate; 4. Control panel. Detailed Implementation

[0028] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0029] Example 1

[0030] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4 This is the first embodiment of the present invention. This embodiment provides a vacuum drying oven with a blower device, including a box body 1. A blower mechanism 2 is fixedly connected to the inner wall of the box body 1, and a filter mechanism 3 and a control panel 4 are fixedly connected to the outer surface of the box body 1. The blower mechanism 2 includes a drying chamber 201 fixedly connected to the inner wall of the box body 1. A rotating cylinder 202 is rotatably connected to the inner wall of the drying chamber 201. Multiple sets of through holes are opened on the outer surface of the rotating cylinder 202. A sealing shell 203 is fixedly connected to the outer surface of the drying chamber 201. A wall-mounted blower 204 is fixedly connected to the outer surface of the box body 1.

[0031] Specifically, a rotating shaft 212 is fixedly connected to the outer surface of the rotating cylinder 202. One end of the rotating shaft 212 passes through the outer surface of the drying chamber 201 and is fixedly connected to a gear 210. A rack rod 211 is meshed with the outer surface of the gear 210. A fixed plate 208 and an electric telescopic rod 209 are fixedly connected to the outer surface of the drying chamber 201. A connecting frame 207 is fixedly connected to the output end of the electric telescopic rod 209. The outer surface of the connecting frame 207 is fixedly connected to the outer surface of the rack rod 211, and the outer surface of the connecting frame 207 is slidably connected to the outer surface of the fixed plate 208. A fixed pipe 206 is fixedly connected to the outer surface of the sealed shell 203. An electromagnetic control valve 205 is fixedly connected to the other end of the fixed pipe 206. The other end of the electromagnetic control valve 205 is fixedly connected to the air outlet of the wall blower 204 through a flexible hose.

[0032] The wall-mounted blower 204 and the solenoid control valve 205 are then activated. The wall-mounted blower 204 can pump the outside air flow into the fixed pipe 206 after it has been filtered through the first filter plate 301 and the second filter plate 307. Then, the electric telescopic rod 209 is activated to adjust the position of the air outlet of the rotating cylinder 202, so that the air flow can be blown to different positions inside the drying chamber 201, thereby facilitating rapid cooling of the inside of the drying chamber 201 and cooling of the chip.

[0033] Example 2

[0034] Reference Figure 1 , Figure 2 , Figure 3 and Figure 4This is the second embodiment of the present invention. This embodiment is based on the previous embodiment. The filter mechanism 3 includes a fixed frame 306 fixedly connected to the outer surface of the housing 1. The inner wall of the fixed frame 306 is slidably connected to a first filter plate 301 and a second filter plate 307. The outer surfaces of the first filter plate 301 and the second filter plate 307 are both fixedly connected to a mounting plate 302. The outer surface of the mounting plate 302 is slidably connected to a pin rod 304.

[0035] Specifically, a pin hole is provided on the outer surface of the housing 1 at the position of the pin rod 304. The outer surface of the pin rod 304 is slidably connected to the outer surface of the pin hole. A pull block 305 is fixedly connected to the upper end of the pin rod 304. The outer surface of the pull block 305 is slidably connected to the outer surface of the mounting plate 302. A spring 303 is fixedly connected to the lower surface of the pull block 305. The lower end of the spring 303 is fixedly connected to the outer surface of the mounting plate 302.

[0036] Furthermore, the first filter plate 301 and the second filter plate 307 can reduce impurities in the airflow, thereby facilitating the prevention of dust from entering the drying chamber 201. By pulling the pull block 305, the pull block 305 moves upward, causing the pin rod 304 to move, so that the pin rod 304 and the pin hole are separated, and the spring 303 is stretched, thereby facilitating the separation of the first filter plate 301 and the second filter plate 307 from the fixed frame 306, making it easier to clean and replace the first filter plate 301 and the second filter plate 307.

[0037] Working principle: After the chip drying is completed, open the door panel and start the wall-mounted blower 204 and the solenoid control valve 205. The wall-mounted blower 204 pumps the outside air into the fixed pipe 206 after filtering it through the first filter plate 301 and the second filter plate 307. Then, start the electric telescopic rod 209. The output end of the electric telescopic rod 209 drives the connecting frame 207 to slide on the outer surface of the fixed plate 208. The sliding of the connecting frame 207 drives the two sets of rack rods 211 to slide. The sliding of the rack rods 211 drives the gear 210 to rotate. The rotation of the gear 210 drives the rotating shaft 212 and the rotating cylinder 202 to rotate, thereby facilitating the adjustment of the position of the air outlet of the rotating cylinder 202. This design allows airflow to be directed to different locations within the drying chamber 201, facilitating rapid cooling of the interior of the drying chamber 201 and the chip. The first filter plate 301 and the second filter plate 307 reduce impurities in the airflow, preventing dust from entering the drying chamber 201. Pulling the pull block 305 causes it to move upward, moving the pin rod 304 and separating it from the pin hole. This also stretches the spring 303, allowing the first filter plate 301 and the second filter plate 307 to be separated from the fixed frame 306, facilitating cleaning and replacement of the first filter plate 301 and the second filter plate 307.

[0038] It should be noted that in this paper, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.

Claims

1. A vacuum drying oven with air blowing means, comprising a housing (1), characterized in that: The inner wall of the box (1) is fixedly connected with a blowing mechanism (2), and the outer surface of the box (1) is fixedly connected with a filtering mechanism (3) and a control panel (4); The blowing mechanism (2) comprises a drying cavity (201) fixedly connected to the inner wall of the box (1), the inner wall of the drying cavity (201) is rotatably connected with a rotating cylinder (202), the outer surface of the rotating cylinder (202) is provided with a plurality of through holes, and the outer surface of the drying cavity (201) is fixedly connected with a sealing shell (203), and the outer surface of the box (1) is fixedly connected with a wall type air blower (204); The filtering mechanism (3) comprises a fixed frame (306) fixedly connected to the outer surface of the box (1), the inner wall of the fixed frame (306) is slidably connected with a first filter plate (301) and a second filter plate (307), and the outer surface of the first filter plate (301) and the second filter plate (307) is fixedly connected with a mounting plate (302), and the outer surface of the mounting plate (302) is slidably connected with a latch rod (304).

2. A vacuum drying oven with air blowing device according to claim 1, characterized in that: The outer surface of the rotating cylinder (202) is fixedly connected with a rotating shaft (212), one end of the rotating shaft (212) penetrates through the outer surface of the drying cavity (201) and is fixedly connected with a gear (210), and the outer surface of the gear (210) is meshingly connected with a rack rod (211).

3. A vacuum drying oven with air blowing device according to claim 2, characterized in that: The outer surface of the drying cavity (201) is fixedly connected with a fixed plate (208) and an electric telescopic rod (209), the output end of the electric telescopic rod (209) is fixedly connected with a connecting frame (207), the outer surface of the connecting frame (207) is fixedly connected with the outer surface of the rack rod (211), and the outer surface of the connecting frame (207) is slidably connected with the outer surface of the fixed plate (208).

4. A vacuum drying oven with air blowing device according to claim 3, characterized in that: The outer surface of the sealing shell (203) is fixedly connected with a fixed pipe (206), the other end of the fixed pipe (206) is fixedly connected with an electromagnetic control valve (205), and the other end of the electromagnetic control valve (205) is fixedly connected with the air outlet of the wall type air blower (204) through a hose.

5. The vacuum drying oven with air blowing device according to claim 1, characterized in that: The outer surface of the box (1) is provided with a latch hole at the position matched with the latch rod (304), and the outer surface of the latch rod (304) is slidably connected with the outer surface of the latch hole.

6. A vacuum drying oven with air blowing device according to claim 5, characterized in that: The upper end of the latch rod (304) is fixedly connected with a pull block (305), the outer surface of the pull block (305) is slidably connected to the outer surface of the mounting plate (302), and the lower surface of the pull block (305) is fixedly connected with a spring (303), and the lower end of the spring (303) is fixedly connected to the outer surface of the mounting plate (302).