Laser detection device and laser detection system

Abstract

The utility model provides a laser detection device and a laser detection system. The laser detection device and the laser detection system comprise an optical lens, a first detection module and a second detection module, the optical lens guides laser emitted by the light source to the first detection module; the first detection module performs first energy detection on a laser signal emitted by the light source; the second detection module is positioned on one side of the process table and is used for performing second energy detection on the laser signal of the light source processed by the processing optical system; the stability and attenuation coefficient of the laser light source can be obtained by integrating two times of energy detection, so that the semiconductor processing technology is optimized, and the semiconductor processing technology quality is monitored. The device has the advantages of being simple in structure, easy to implement and high in monitoring result accuracy.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of laser detection, especially to a laser detection device and a laser detection system. BACKGROUND

[0002] With the development of integrated circuit industry, the requirement of electronic device power performance and high frequency performance in new energy automobile, high speed rail and other fields is increasing, therefore, silicon carbide device with high voltage resistance and high switching power gradually becomes the focus of the industry. In the manufacturing of silicon carbide power device, laser annealing process is often used, laser annealing process makes wafer local rapid heating, then makes wafer rapid cooling, and lattice atoms can be rearranged into target structure to improve the electrical properties of semiconductor materials. However, laser annealing process is affected by laser light source performance, therefore, how to comprehensively monitor laser performance to improve semiconductor process has become one of the problems to be solved by the technical personnel in the field.

[0003] It should be noted that the above introduction to the technical background is only to facilitate the clear and complete description of the technical scheme of the utility model, and to facilitate the understanding of the technical personnel in the field. The above technical scheme cannot be considered as known by the technical personnel in the field only because it is described in the background technology part of the utility model. CONTENT OF THE UTILITY MODEL

[0004] In view of the above-mentioned defects of the prior art, the purpose of the utility model is to provide a laser detection device and a laser detection system, which are used to solve the problem that it is difficult to comprehensively monitor the laser performance in the prior art.

[0005] To achieve the above-mentioned purpose and other related purposes, the utility model provides a laser detection device, which at least comprises: an optical mirror, a first detection module and a second detection module; the optical mirror is located on the light source side, the optical mirror guides the laser emitted from the light source to the first detection module, and the laser signal incident to the first detection module is the first laser signal; the first detection module is located on the exit end of the optical mirror and comprises a first energy detection device; the first energy detection device detects the energy of the first laser signal; the second detection module is located on the process table side and comprises a second energy detection device; the laser signal processed by the processing optical system is the second laser signal, and the second energy detection device detects the energy of the second laser signal.

[0006] Optionally, the first detection module further comprises a beamsplitter and a pulse testing device; the beamsplitter splits the first laser signal into a first beamsplitting signal and a second beamsplitting signal; the pulse testing device performs pulse width detection on the first beamsplitting signal; and the first energy detection device performs energy detection on the second beamsplitting signal.

[0007] Optionally, the laser detection device further comprises a guide rail, and the optical mirror is a reflecting mirror and is arranged on the guide rail.

[0008] Optionally, the second detection module further comprises a light spot detection device configured to perform light spot detection on the second laser signal.

[0009] More optionally, the light spot detection device comprises a light-tight cylindrical structure, a light attenuation mirror and a light spot sensor; the light attenuation mirror and the light spot sensor are arranged in the cylindrical structure, the light attenuation mirror is arranged on a side close to an entrance of the light spot detection device, and the light spot sensor is arranged on a side away from the entrance of the light spot detection device.

[0010] To achieve the above object and other related objects, the utility model also provides a laser detection system, the laser detection system at least includes: light source, processing optical system, process platform and laser detection device, the light source transmits laser signal to the processing optical system, the processing optical system processes the laser signal of light source exit and transmits laser signal to the process platform, and the laser detection device carries out first energy detection to first laser signal and carries out second energy detection to second laser signal of light source through the processing optical system.

[0011] Optionally, the laser detection system further comprises a first cover plate and a first purger, the first cover plate is arranged on an entrance of the second energy detection device, and the first purger is arranged on a side of the entrance of the second energy detection device.

[0012] Optionally, when the second detection module comprises a light spot detection device, the laser detection system further comprises a second cover plate and a second purger, the second cover plate is arranged on an entrance of the light spot detection device, and the second purger is arranged on a side of the entrance of the second energy detection device.

[0013] More optionally, a light signal receiving surface of the light spot detection device, a light signal receiving surface of the second energy detection device and a processing surface of the process platform are located on the same horizontal plane.

[0014] Optionally, the laser detection system further comprises a computer processing module configured to process information of the first laser signal and the second laser signal.

[0015] The laser detection device and the laser detection system have the following beneficial effects:

[0016] 1、The utility model discloses a detection module is set respectively in the light source side and the process side to measure the energy value of laser light source respectively in the light source side and the process side, can know the stability of laser light source and the attenuation coefficient in transmission process, and the semiconductor processing technology is optimized and monitored.

[0017] 2、The utility model discloses a pulse testing device is set in the light source side, can know the power of laser light source, further optimizes and monitors the semiconductor processing technology.

[0018] 3、The utility model discloses a light spot detection device is set in the process side, can monitor the advantage and the shortcoming of semiconductor processing technology, ensures the quality of semiconductor processing. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is shown as the structure schematic diagram of the laser detection system of the utility model.

[0020] Figure 2 It is shown as the structure schematic diagram of the light spot detection device of the utility model.

[0021] ELEMENT NUMBER EXPLANATION

[0022] 1 laser detection device

[0023] 11 optical mirror

[0024] 12 first detection module

[0025] 1a first energy detection device

[0026] 1b beam splitter

[0027] 1c pulse testing device

[0028] 13 second detection module

[0029] 1d second energy detection device

[0030] 1e light spot detection device

[0031] 1e1 barrel structure

[0032] 1e2 light reducing mirror

[0033] 1e3 light spot sensor

[0034] 2 light source

[0035] 3 processing optical system

[0036] 4 process table

[0037] 5 first purger

[0038] 6 second purger DETAILED DESCRIPTION

[0039] The other advantages and effects of the present application can be easily understood by those skilled in the art from the content disclosed in the present application. The present application can also be implemented or applied in other different embodiments, and various modifications or changes can be made to the details in the present application based on different viewpoints and applications without departing from the spirit of the present application.

[0040] Reference will now be made to the drawings Figures 1-2 It should be noted that the diagrams provided in the present embodiment only schematically illustrate the basic concept of the present application, and thus the diagrams only show the components related to the present application rather than being drawn according to the number, shape and size of the components in actual implementation, and the shape, number and proportion of the components in actual implementation can be arbitrarily changed, and the layout pattern of the components can also be more complex.

[0041] In a semiconductor process, laser performance is crucial to the processing of semiconductors, and can comprehensively reflect the laser performance from the perspectives of the spot shape, energy size and stability of the laser signal, so the present application monitors the stability and attenuation coefficient of the laser signal by detecting the energy change of the laser signal, and monitors the spot shape of the laser signal. The specific scheme of the present application is as follows:

[0042] Embodiment one

[0043] As shown in Figure 1 , the present embodiment provides a laser detection device 1, which comprises an optical mirror 11, a first detection module 12 and a second detection module 13.

[0044] As shown in Figure 1 , the optical mirror 11 is located on the light source side, and the optical mirror 11 guides the laser emitted from the light source 2 to the first detection module 12. The laser signal incident to the first detection module 12 is the first laser signal.

[0045] Specifically, in the present embodiment, the purpose of setting the optical mirror 11 is to guide the laser emitted from the light source 2 out, so as to facilitate the performance detection of the laser emitted from the light source 2 by the first detection module 12. As an example, the optical mirror 11 can adopt a mirror to guide all the laser emitted from the light source 2 to the first detection module 12, at this time the guiding ratio of the optical mirror 11 is 100%; the optical mirror 11 can also adopt a beam splitter to guide part of the laser emitted from the light source to the first detection module 12, at this time the guiding ratio of the optical mirror 11 is the splitting ratio of the optical mirror 11. In actual application, the specific type of the optical mirror 11 is set according to actual needs, which is not limited to the present embodiment.

[0046] Specifically, in the embodiment, the laser detection device further comprises a guide rail, and the optical mirror 11 is a mirror arranged on the guide rail. As an example, the light source 2 is arranged to emit light to the machining optical system 3 in a horizontal direction, and the mirror is arranged on a guide rail in a vertical direction; when the first detection module 12 works, the mirror is moved into the light path between the light source 2 and the machining optical system 3 through the guide rail; when the machining optical system 3 works, the mirror is moved out of the light path between the light source 2 and the machining optical system 3 through the guide rail. In actual application, a device for moving the auxiliary optical mirror 11 can be arranged as needed, which is not limited to the embodiment.

[0047] As shown in Figure 1 , the first detection module 12 is located at the exit end of the optical mirror 11 and comprises a first energy detection device la; the first energy detection device la detects the energy of the first laser signal.

[0048] Specifically, in the embodiment, the first detection module 12 further comprises a beam splitter lb and a pulse test device lc; the beam splitter lb divides the first laser signal into a first split signal and a second split signal; the pulse test device lc detects the pulse width of the first split signal; and the first energy detection device la detects the energy of the second split signal. Specifically, the energy value of the second split signal is monitored throughout, and according to the extraction ratio of the optical mirror 11 and the splitting ratio of the beam splitter lb, the energy value of the first laser signal can be obtained in the case of splitting the first laser signal.

[0049] As shown in Figure 1 , the second detection module 13 is located on one side of the process table and comprises a second energy detection device ld; the laser signal processed by the machining optical system 3 from the light source 2 is a second laser signal, and the second energy detection device ld detects the energy of the second laser signal.

[0050] Specifically, in the embodiment, the second detection module 13 further comprises a spot detection device le, which detects the spot of the second laser signal. Further, as shown in Figure 2As shown, the light spot detection device 1e includes an opaque cylindrical structure 1e1, a neutral density filter 1e2, and a light spot sensor 1e3. The neutral density filter 1e2 and the light spot sensor 1e3 are disposed within the opaque cylindrical structure 1e1. The neutral density filter 1e2 is positioned near the light inlet of the light spot detection device 1e, and the light spot sensor 1e3 is positioned away from the light inlet. As an example, the light spot sensor 1e3 is an image sensor. The purpose of the neutral density filter 1e2 is to prevent excessive light energy from damaging the image sensor. The opaque cylindrical structure 1e1 is conical in shape, and the circular opening of the conical cylinder is the light inlet of the light spot detection device. The purpose of the opaque cylindrical structure 1e1 is to prevent external light signals from interfering with the light spot sensor 1e3. In practical applications, the shape of the opaque cylindrical structure 1e1 can be customized as needed, and is not limited to this embodiment.

[0051] Example 2

[0052] like Figure 1 As shown, this embodiment provides a laser detection system, which includes: a light source 2, a processing optical system 3, a process table 4, and the laser detection device 1 of Embodiment 1.

[0053] like Figure 1 As shown, the light source 2 transmits a laser signal to the processing optical system 3. The processing optical system 3 processes the laser signal emitted by the light source 2 and transmits the laser signal to the process table 4. The laser detection device 1 performs a first energy detection on the first laser signal emitted by the light source 2 and a second energy detection on the second laser signal emitted by the light source 2 after passing through the processing optical system 3.

[0054] Specifically, in this embodiment, the first detection module 12 and the second detection module 13 of the laser detection device 1 are located on the light source side and the process table side, respectively. The light source side refers to the area between the light source 2 and the processing optical system 3, and the process table side refers to the area between the processing optical system 3 and the process table 4.

[0055] Specifically, in this embodiment, the laser detection system further includes a first cover plate and a first purger 5. The first cover plate is disposed on the light inlet of the second energy detection device 1d, and the first purger 5 is disposed on one side of the light inlet of the second energy detection device 1d. As an example, such as... Figure 1 As shown, before the second energy detection device 1d receives the second laser signal, the first purger 5 starts working, and after the first purger 5 finishes purging, the first cover plate ( Figure 1 (Not shown) It opens automatically, and then the second energy detection device 1d starts working; the purpose of setting the first cover plate and the first purger 5 is to prevent carbon powder precipitated during the processing from contaminating the second energy detection device 1d.

[0056] Specifically, in the embodiment, the second detection module 13 includes the light spot detection device 1e, and the laser detection system further includes a second cover plate and a second purger 6. The second cover plate is arranged on the light inlet of the light spot detection device 1e, and the second purger 6 is arranged on the side of the light inlet of the light spot detection device 1e. As an example, as shown in Figure 1 Fig. 6, the second purger 6 starts to work before the light spot detection device 1e receives the second laser signal, and the second cover plate (not shown in the figure) is automatically opened after the second purger 6 finishes blowing, and then the light spot detection device 1e starts to work. The second cover plate and the second purger 6 are arranged to prevent the carbon powder generated in the processing process from polluting the light spot detection device 1e. Figure 1

[0057] Specifically, in the embodiment, the plane of the process table 4 is parallel to the plane of the second energy detection device 1d, and the process table 4 is translated to receive the second laser signal when the process table 4 works, and the second energy detection device 1d is translated to receive the second laser signal when the second energy detection device 1d works. The translation can prevent the physical vibration of the process table 4 and the second energy detection device 1d from affecting the laser detection and the process. As an example, the light signal receiving surface of the light spot detection device 1e, the light signal receiving surface of the second energy detection device 1d and the processing surface of the process table 4 are located on the same horizontal plane, so that the performance of the laser signal received by the process table 4, the laser signal received by the light spot detection device 1e and the laser signal received by the second energy detection device 1d is consistent, and the second energy detection device 1d, the process table 4 and the light spot detection device 1e receive the second laser signal by translation in turn.

[0058] Specifically, in the embodiment, the laser detection system further includes a computer processing module (not shown in the figure), which processes the information of the first laser signal and the second laser signal. As an example, the first detection module 12 obtains the energy value of the first laser signal, and the second detection module 13 obtains the energy value and the spot information of the second laser signal; the computer processing module can obtain the attenuation coefficient of the laser signal in the processing optical system 3 by comparing the energy value of the first laser signal with the energy value of the second laser signal, can obtain the stability of the laser signal by monitoring the change of the energy value of the first laser signal, and can monitor the quality of the processing process by monitoring the spot information of the second laser signal. In actual application, the specific type of the computer processing module can be set according to the requirement. Figure 1

[0059] ​​In summary, the utility model discloses two energy detection devices of light source side and process side carry out twice energy detection, can obtain the stability and attenuation coefficient of laser light source, to improve semiconductor processing technology, the utility model discloses the spot detection device of process side carries out spot detection to laser signal to the quality of monitoring processing technology, the utility model discloses the power of laser light source through the pulse test device of light source side to optimize semiconductor processing technology. Therefore the utility model can optimize and monitor the processing technology of semiconductor comprehensively, the utility model has simple structure, easy to realize and the advantages such as monitoring result comprehensive and accurate. Therefore, the utility model effectively overcomes the various shortcomings in the prior art and has high industrial utilization value.

[0060] The above embodiments only exemplarily illustrate the principles and effects of the utility model, and are not used to limit the utility model. Any person skilled in the art can modify or change the above embodiments without departing from the spirit and scope of the utility model. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the utility model should be covered by the claims of the utility model.

Claims

1. A laser detection device, characterized in that, The laser detection device includes at least: an optical mirror, a first detection module, and a second detection module; The optical mirror is located on one side of the light source. The optical mirror guides the laser emitted from the light source to the first detection module. The laser signal incident on the first detection module is the first laser signal. The first detection module is located at the emitting end of the optical mirror and includes a first energy detection device; the first energy detection device detects the energy of the first laser signal. The second detection module is located on one side of the process table and includes a second energy detection device; the laser signal after the light source is processed by the processing optical system is the second laser signal, and the second energy detection device detects the energy of the second laser signal.

2. The laser detection device according to claim 1, characterized in that: The first detection module further includes a beam splitter and a pulse testing device; the beam splitter divides the first laser signal into a first beam splitter signal and a second beam splitter signal; the pulse testing device performs pulse width detection on the first beam splitter signal; and the first energy detection device performs energy detection on the second beam splitter signal.

3. The laser detection device according to claim 1, characterized in that: The laser detection device also includes a guide rail, and the optical mirror is a reflector, which is mounted on the guide rail.

4. The laser detection device according to claim 1, characterized in that: The second detection module also includes a spot detection device, which performs spot detection on the second laser signal.

5. The laser detection device according to claim 4, characterized in that: The light spot detection device includes an opaque cylindrical structure, a neutral density (ND) mirror, and a light spot sensor. The ND mirror and the light spot sensor are disposed inside the cylindrical structure. The ND mirror is disposed on the side closer to the light inlet of the light spot detection device, and the light spot sensor is disposed on the side farther away from the light inlet of the light spot detection device.

6. A laser detection system, characterized in that, The laser inspection system includes at least: a light source, a processing optical system, a process table, and a laser inspection device based on any one of claims 1-5; The light source transmits laser signals to the processing optical system; the processing optical system processes the laser signals emitted by the light source and transmits them back to the processing table. The laser detection device performs a first energy detection on the first laser signal and a second energy detection on the second laser signal from the light source after passing through the processing optical system.

7. The laser detection system according to claim 6, characterized in that: The laser detection system further includes a first cover plate and a first purger. The first cover plate is disposed on the light inlet of the second energy detection device, and the first purger is disposed on one side of the light inlet of the second energy detection device.

8. The laser detection system according to claim 6, characterized in that: When the second detection module includes a spot detection device, the laser detection system further includes a second cover plate and a second purger. The second cover plate is disposed on the light inlet of the spot detection device, and the second purger is disposed on one side of the light inlet of the second energy detection device.

9. The laser detection system according to claim 8, characterized in that: The optical signal receiving surface of the spot detection device, the optical signal receiving surface of the second energy detection device, and the processing surface of the process table are located on the same horizontal plane.

10. The laser detection system according to claim 6, characterized in that: The laser detection system also includes a computer processing module, which processes the information of the first laser signal and the second laser signal.

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