Feeding device and machining equipment

Abstract

The utility model provides a feeding device and processing equipment. The feeding device comprises a material moving mechanism and a feeding mechanism, the material moving mechanism is used for carrying materials to a waiting position, the feeding mechanism comprises a feeding track and a feeding arm, the feeding arm is connected to the feeding track and can move relative to the feeding track, and the feeding arm is used for carrying the materials from the waiting position to a preset position. A first safety strip extending in the length direction of the feeding rail is arranged on the feeding rail, a first sensor is arranged on the feeding arm, and when the first sensor is located in the position area corresponding to the first safety strip, the material moving mechanism can move freely. When the first sensor moves to the position area corresponding to the first safety strip, the material moving mechanism does not collide with the feeding arm no matter how the material moving mechanism moves. Therefore, the feeding device is high in safety and stability.

Description

Technical Field

[0001] This utility model relates to the field of material processing technology, specifically to a feeding device and processing equipment having the same. Background Technology

[0002] A wafer is a silicon chip used to manufacture silicon semiconductor integrated circuits. It is called a wafer because of its circular shape. Various circuit element structures can be fabricated on silicon wafers to create IC products with specific electrical functions.

[0003] In automated manufacturing processes, wafer picking and loading are typically handled by a loading device. This loading device usually includes a picking mechanism and a loading mechanism. The picking mechanism moves the wafer to a waiting position. The loading mechanism moves the wafer from the waiting position to a predetermined position (e.g., the processing position). The processing equipment can then use this equipment to process the wafer at the predetermined position.

[0004] As mentioned above, in existing feeding devices, the active areas of the picking mechanism and the feeding mechanism overlap. This can easily lead to collisions between the picking mechanism and the feeding mechanism, resulting in damage to the wafer, the picking mechanism, and / or the feeding mechanism, which in turn causes processing to stop and seriously harms the user's interests. Utility Model Content

[0005] To at least partially address the problems existing in the prior art, according to one aspect of the present invention, a feeding device is provided. The feeding device includes a transferring mechanism and a feeding mechanism. The transferring mechanism is used to transport materials to a waiting position. The feeding mechanism includes a feeding track and a feeding arm. The feeding arm is connected to and movable relative to the feeding track. The feeding arm is used to transport materials from the waiting position to a predetermined position. A first safety bar extending along the length of the feeding track is provided on the feeding track. A first sensor is provided on the feeding arm. When the first sensor is located within the area corresponding to the first safety bar, the transferring mechanism can move freely.

[0006] For example, the material transfer mechanism includes a material transfer track and a material transfer arm. The material transfer arm is connected to the material transfer track and is movable relative to the material transfer track. A second safety bar and a third safety bar are respectively provided at both ends of the material transfer track. A second sensor is provided on the material transfer arm.

[0007] When the first sensor is located outside the area corresponding to the first safety strip, the second sensor is located within the area corresponding to the second safety strip, or the second sensor is located within the area corresponding to the third safety strip.

[0008] For example, the feeding track has a remote end away from the material transfer mechanism, and a first safety bar is positioned near the remote end.

[0009] Exemplarily, the length of the first safety strip is less than the length of the feeding track in the length direction of the feeding track.

[0010] Exemplarily, the feeding arm comprises a suction assembly, the suction assembly comprises a connecting support and a plurality of suction cups arranged on the connecting support, the connecting support is connected to the feeding track and is movable relative to the feeding track, and the suction assembly is used for suctioning the material to carry the material from the waiting position to the predetermined position.

[0011] Exemplarily, the suction assembly comprises a dustproof plate, the dustproof plate is connected to the connecting support and is located above the plurality of suction cups to shield the material suctioned by the suction assembly.

[0012] According to another aspect of the present application, a processing device is also provided. The processing device comprises any of the feeding devices described above.

[0013] Exemplarily, the processing device further comprises a positioning device, the positioning device is located at one side of the material moving mechanism, and the waiting position is located on the positioning device.

[0014] Exemplarily, the material moving mechanism is used for carrying the material to the waiting position along a first direction, the feeding mechanism is used for carrying the material from the waiting position to the predetermined position along a second direction perpendicular to the first direction, the positioning device is located at one side of the material moving mechanism in the second direction, and the positioning device is located at one side of the feeding track in the first direction.

[0015] Exemplarily, the positioning device comprises a carrier and two limiting strips, the two limiting strips both extend along the first direction, the two limiting strips are arranged on the carrier at two sides along the second direction respectively, and the waiting position is located on the carrier and between the two limiting strips.

[0016] The feeding device provided by the embodiment of the present application has the following advantages. The position of the first safety strip is reasonably set. When the first sensor moves to the position region corresponding to the first safety strip, the material moving mechanism will not collide with the feeding arm no matter how the material moving mechanism moves. Therefore, the feeding device has high safety and stability. When the feeding arm moves along the feeding track for a long distance, the range in which the feeding arm does not interfere with the material moving mechanism is larger. In this way, the length of the first safety strip can be appropriately increased to increase the time during which the material moving mechanism can move freely, so that the material moving mechanism can perform more operations, and the working efficiency of the feeding device can be improved. Therefore, the length of the first safety strip only needs to be changed to adapt to the range in which the material moving mechanism and the feeding arm do not interfere with each other, and the number of sensors does not need to be increased. In this way, the structure of the feeding device is more simple, and the cost is lower.

[0017] A series of simplified forms are introduced in the utility model content, which will be further described in detail in the specific embodiment part. The utility model content part does not mean trying to limit the key features and necessary technical features of the claimed technical solution, and even less means trying to determine the protection scope of the claimed technical solution.

[0018] The advantages and features of the utility model will be described in detail below in combination with the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0019] The following drawings of the utility model are hereby part of the utility model for understanding the utility model. The embodiments of the utility model and the description thereof shown in the drawings are used to explain the principle of the utility model. In the drawings,

[0020] Figure 1 It is a perspective view of the processing equipment according to an exemplary embodiment of the utility model;

[0021] Figure 2 It is Figure 1 It is a top view of the processing equipment shown in the figure;

[0022] Figure 3 It is Figure 1 It is a perspective view of the feeding device shown in the figure;

[0023] Figure 4 It is Figure 3 It is a perspective view of the feeding mechanism shown in the figure;

[0024] Figure 5 It is Figure 3 It is a perspective view of the material moving mechanism shown in the figure;

[0025] Figure 6 It is Figure 1 It is a perspective view of the positioning device from another angle shown in the figure.

[0026] Figure 7 It is Figure 6 It is a perspective view of the positioning device from another angle shown in the figure.

[0027] Among them, the above drawings include the following reference signs:

[0028] 100, feeding device; 200, material moving mechanism; 210, material moving track; 220, material moving arm; 221, clamping jaw; 222, finger cylinder; 223, micro track; 230, second safety bar; 240, third safety bar; 250, second sensor; 260, material moving lead screw module; 270, material moving drag chain; 300, feeding mechanism; 310, feeding track; 311, distal end; 320, feeding arm; 330, first safety bar; 340, first sensor; 350, suction assembly; 351, connecting bracket; 352, suction cup; 353, dustproof plate; 360, feeding lead screw module; 370, feeding drag chain; 380, lifting cylinder; 410, material box; 420, processing device; 430, positioning device; 431, carrier; 432, limiting bar; 433, synchronous wheel; 434, synchronous belt; 435, guide rail; 436, oil buffer; 437, cylinder in-place sensor; 438, in-seat detection sensor; 440, base; 810, waiting position; 820, predetermined position; 900, material. DETAILED DESCRIPTION

[0029] In the following description, numerous specific details are provided in order to provide a thorough understanding of the present application. One of ordinary skill in the art will realize, however, that the application can be practiced without one or more of these details. In other instances, well-known features have not been described in detail in order not to unnecessarily obscure the present application.

[0030] According to an aspect of the present application, a feeding device is provided. The feeding device can be used for feeding and unloading material. The material can include, but is not limited to, a wafer or a material plate. The feeding device can be applied to any suitable device, including but not limited to a processing device. Therefore, according to another aspect of the present application, a processing device is also provided. The feeding device and the processing device of the embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0031] As Figures 1-5As shown, the feeding device 100 can include a material moving mechanism 200 and a feeding mechanism 300. The material moving mechanism 200 can be used to carry the material 900 to a waiting position 810. The feeding mechanism 300 can include a feeding track 310 and a feeding arm 320. The feeding track 310 can extend in any suitable direction. The feeding arm 320 can be connected to the feeding track 310. Thus, the feeding arm 320 can move relative to the feeding track 310. The feeding arm 320 can be driven by any suitable means, such as a motor or a pneumatic cylinder. Exemplarily, the feeding mechanism 300 can further include a feeding lead screw module 360 and a feeding drag chain 370. A servo motor of the feeding lead screw module 360 can drive the feeding arm 320 to move relative to the feeding track 310. Cables and / or air pipes on the feeding mechanism 300 can be arranged on the feeding drag chain 370 to avoid entanglement due to movement of the feeding arm 320. The feeding arm 320 can be used to pick up the material 900, so that the material 900 can be carried from the waiting position 810 to a predetermined position 820. Depending on the material 900, the feeding arm 320 can adopt various types of arms known in the art or possibly to appear in the future, such as a magnetic suction arm, a clamping arm or a supporting arm. In the embodiment in which the feeding device 100 is applied to a processing apparatus, the processing apparatus can further include a material box 410 and a processing device 420. The material box 410 can be used to store the material 900. The material moving mechanism 200 can be used to carry the material 900 in the material box 410 to the waiting position 810. The processing device 420 can process the material 900 carried to the predetermined position 820. The processed material 900 can return to the waiting position 810 by manual or any other suitable means. Then, the material moving mechanism 200 can carry the material 900 at the waiting position 810 back to the material box 410.

[0032] The first safety strip 330 can be arranged on the feeding track 310 along the length direction (i.e. the extending direction) of the feeding track 310. The first safety strip 330 can be arranged on the feeding track 310 by any suitable means such as welding, clamping or connecting by a connecting member. The first sensor 340 can be arranged on the feeding arm 320. The first sensor 340 can be any type of sensor known in the art or to be developed in the future, including but not limited to a laser sensor or an infrared sensor. As the feeding arm 320 moves along the feeding track 310, the first sensor 340 can detect the first safety strip 330 when the first sensor 340 moves into the position area corresponding to the first safety strip 330. At this time, the material moving mechanism 200 can be freely movable. The freely movable means that the movable components (e.g. the material moving arm 220 described below) on the material moving mechanism 200 can be moved arbitrarily. That is, when the first sensor 340 moves into the position area corresponding to the first safety strip 330, the movable parts of the feeding arm 320 and the material moving mechanism 200 can not interfere with each other, so that no collision occurs. In this way, the material moving mechanism 200 can carry other materials 900 or perform other operations. When the first sensor 340 moves out of the position area corresponding to the first safety strip 330, the first sensor 340 cannot detect the first safety strip 330. At this time, the material moving mechanism 200 cannot be freely movable. Exemplarily, the material moving mechanism 200 can be stopped or moved within a limited area range to avoid interference with the feeding arm 320.

[0033] In some embodiments, when the feeding arm 320 picks up the material 900 at the waiting position 810, the first sensor 340 can be located outside the position area corresponding to the first safety strip 330. In this way, the material moving mechanism 200 cannot be freely movable, so as to avoid interference with the feeding arm 320. When the feeding arm 320 carries the material 900 to the predetermined position 820, the first sensor 340 can be located within the position area corresponding to the first safety strip 330. In this way, the material moving mechanism 200 can be freely movable.

[0034] In summary, the feeding device 100 provided by the embodiment of the present application has the following advantages. The position of the first safety strip 330 is set reasonably. When the first sensor 340 moves to the position area corresponding to the first safety strip 330, the material moving mechanism 200 will not collide with the feeding arm 320 no matter how the material moving mechanism 200 moves. Therefore, the feeding device 100 has high safety and stability. When the feeding arm 320 moves along the feeding track 310 for a long distance, the range in which the material moving mechanism 200 does not interfere with the feeding arm 320 is larger. In this way, the length of the first safety strip 330 can be appropriately increased to increase the time during which the material moving mechanism 200 can move freely, so that the material moving mechanism 200 can perform more operations, and the working efficiency of the feeding device 100 can be improved. Therefore, the range in which the material moving mechanism 200 does not interfere with the feeding arm 320 can be changed by changing the length of the first safety strip 330, and the number of sensors does not need to be increased. In this way, the structure of the feeding device 100 is more simple, and the cost is lower.

[0035] Exemplarily, as Figures 3-5As shown, the material moving mechanism 200 can include a material moving track 210 and a material moving arm 220. The material moving track 210 can extend along any suitable direction. The material moving arm 220 can be connected to the material moving track 210. In this way, the material moving arm 220 can move relative to the material moving track 210. The material moving arm 220 can be driven by any suitable means, such as a motor, or a pneumatic cylinder, etc. Exemplarily, the material moving mechanism 200 can further include a material moving lead screw module 260 and a material moving drag chain 270. A servo motor of the material moving lead screw module 260 can drive the material moving arm 220 to move relative to the material moving track 210. Cables and / or air pipes on the material moving mechanism 200 can be arranged on the material moving drag chain 270 to avoid being entangled due to the movement of the material moving arm 220. The material moving arm 220 can be used to pick up the material 900, so that the material 900 can be carried to the waiting position 810. Depending on the material 900, the material moving arm 220 can adopt various types of arms known in the art or possibly to appear in the future, such as a magnetic suction arm, a clamping arm, or a supporting arm. The two ends of the material moving track 210 can be respectively provided with a second safety strip 230 and a third safety strip 240. The second safety strip 230 and the third safety strip 240 can be the same or different in structure. The second safety strip 230 and the third safety strip 240 can respectively extend along the length direction (i.e. the extending direction) of the material moving track 210. The second safety strip 230 and the third safety strip 240 can be arranged on the material moving track 210 by any suitable means, such as welding, clamping, or connecting by a connecting piece, etc. The material moving arm 220 can be provided with a second sensor 250. The second sensor 250 can be selected from various types of sensors known in the art or possibly to appear in the future, including but not limited to a laser sensor or an infrared sensor. When the first sensor 340 is located outside the position area corresponding to the first safety strip 330, the second sensor 250 can be located within the position area corresponding to the second safety strip 230, or the second sensor 250 can be located within the position area corresponding to the third safety strip 240. As the material moving arm 220 moves along the material moving track 210, when the second sensor 250 moves into the position area corresponding to the second safety strip 230, the second sensor 250 can detect the second safety strip 230; when the second sensor 250 moves into the position area corresponding to the third safety strip 240, the second sensor 250 can detect the third safety strip 240. When the first sensor 340 is located outside the position area corresponding to the first safety strip 330, the material moving arm 220 can move at the two ends of the material moving track 210, so as to avoid the space in the middle of the material moving track 210 to avoid interference with the feeding arm 320. In this way, by the joint action of the first sensor 340 and the second sensor 250, interference between the material moving arm 220 and the feeding arm 320 can be prevented, so as to improve the reliability of the feeding device 100 and further reduce the probability of dangerous accidents.

[0036] For example, such as Figure 5 As shown, the transfer arm 220 may include grippers 221 and finger cylinders 222. The finger cylinder 222 may be connected to the transfer track 210 and is movable relative to the transfer track 210. The grippers 221 may be connected to the finger cylinder 222. The finger cylinder 222 may drive the grippers 221 to open and close, for transporting material 900 to the waiting position 810. The transfer arm 220 may also include a microrail 223, a spring (not shown), and a stop (not shown). The finger cylinder 222 is movable along the microrail 223. The spring may be connected between the stop and the finger cylinder 222. With this configuration, when the grippers 221 hold material 900, if the material 900 abuts against the grippers 221, the finger cylinder 222 will move along the microrail 223 to compress the spring. Once the material 900 is no longer pressed against the gripper 221, the spring releases its elastic potential energy to move the gripper 221 back to its initial position, thus preparing it for the next gripping of the material 900. This design allows for a flexible collision between the gripper 221 and the material 900, eliminating concerns about hard collisions during gripping. Furthermore, the gripper 221 can get as close as possible to grip the material 900, preventing it from falling due to inadequate gripping.

[0037] For example, such as Figures 3-5 As shown, the loading track 310 may have a remote end 311, away from the transfer mechanism 200. The first safety bar 330 may be positioned close to the remote end 311, thereby keeping it away from the transfer mechanism 200. This arrangement further ensures that the loading arm 320 and the transfer mechanism 200 will not collide when the first sensor 340 moves into the area corresponding to the first safety bar 330. Based on this, larger loading arms 320 and transfer arms 220 can be fitted for handling large materials 900.

[0038] For example, such as Figures 3-5 As shown, the length of the first safety bar 330 can be less than the length of the feeding track 310 along its length. With this configuration, as the feeding arm 320 moves along the feeding track 310, the first sensor 340 can move within and outside the area corresponding to the position of the first safety bar 330. The feeding mechanism 300 has a relatively simple structure, providing a good user experience.

[0039] For example, such as Figures 3-4As shown, the loading arm 320 may include an adsorption assembly 350. The adsorption assembly 350 may include a connecting bracket 351 and multiple suction cups 352. The connecting bracket 351 may be connected to the loading track 310. Furthermore, the connecting bracket 351 may be movable relative to the loading track 310. The multiple suction cups 352 may be disposed on the connecting bracket 351. The adsorption assembly 350 may be used to adsorb material 900 to transport material 900 from a waiting position 810 to a predetermined position 820. Specifically, one end of the multiple suction cups 352 may be connected to a vacuum device. The vacuum device may create a vacuum, and when the vacuum value of the multiple suction cups 352 reaches a predetermined value, the multiple suction cups 352 may adsorb material 900 at different positions to transport material 900 from the waiting position 810 to the predetermined position 820.

[0040] For example, such as Figure 4 As shown, the adsorption assembly 350 may also include a dustproof plate 353. The dustproof plate 353 can be connected to the connecting bracket 351. Furthermore, the dustproof plate 353 is located above the plurality of suction cups 352, thereby shielding the material 900 adsorbed by the adsorption assembly 350. Thus, the dustproof plate 353 can prevent dust and other contaminants from falling onto the material 900, thereby avoiding any impact on the processing of the material 900. In addition, the dustproof plate 353 also serves a protective function, preventing other components above the dustproof plate 353 from accidentally falling and damaging the material 900 adsorbed by the adsorption assembly 350.

[0041] For example, such as Figure 4 As shown, the loading arm 320 may also include a lifting cylinder 380. The lifting cylinder 380 may be connected between the loading track 310 and the connecting bracket 351. The lifting cylinder 380 may move relative to the loading track 310. The lifting cylinder 380 may drive the adsorption assembly 350 to lift and lower for picking up and placing materials 900 at the waiting position 810 and the predetermined position 820.

[0042] In embodiments where the feeding device 100 is applied to processing equipment, it is more specifically applied to a laser cutting machine for cutting wafers. For example... Figures 1-2As shown in Figs. 6-7, the processing apparatus can further include a positioning device 430. The positioning device 430 can be located at one side of the material moving mechanism 200. The waiting position 810 can be located on the positioning device 430. Thus, when the material moving mechanism 200 carries the material 900 (e.g., a silicon material wafer) to the waiting position 810, the positioning device 430 can position the material 900. The structure of the positioning device 430 can be arbitrary, for example, can include a positioning device that positions the material 900 by a magnetic attraction member, or a positioning device that positions the material 900 by a guide channel. In this way, the feeding arm 320 can accurately pick up the material 900, so as to carry the material 900 from the waiting position 810 to the predetermined position 820. In this way, the reliability of the processing apparatus is higher. Exemplarily, the processing apparatus can further include a base 440. The material moving mechanism 200, the feeding mechanism 300, and the positioning device 430 can all be arranged on the base 440. The base 440 can be used to be fixed to the ground or a table.

[0043] Exemplarily, as shown in Figs. 6-7, Figures 1-2 As shown in Figs. 6-7, the material moving mechanism 200 can be used to carry the material 900 to the waiting position 810 along the first direction X-X. Thus, the material moving track 210 can extend along the first direction X-X. The feeding mechanism 300 can be used to carry the material 900 from the waiting position 810 to the predetermined position 820 along the second direction Y-Y. Thus, the feeding track 310 can extend along the second direction Y-Y. The second direction Y-Y can be perpendicular to the first direction X-X. The positioning device 430 can be located at one side of the material moving mechanism 200 in the second direction Y-Y. And, the positioning device 430 can be located at one side of the feeding track 310 in the first direction X-X. In this way, the structure of the processing apparatus is compact, and the occupied space is smaller, so as to be applicable to more scenarios.

[0044] Exemplarily, as shown in Figs. 6-7, Figures 6-7As shown, the positioning device 430 can include a carrier 431 and two limit bars 432. The two limit bars 432 can each extend along the first direction X-X. The two limit bars 432 can be respectively arranged on the carrier 431 at two sides along the second direction Y-Y. The waiting position 810 can be located on the carrier 431. Moreover, the waiting position 810 can be located between the two limit bars 432. When the material moving mechanism 200 carries the material 900 to the waiting position 810, the two limit bars 432 can support the material 900. Then, the two limit bars 432 can be combined along the second direction Y-Y, so as to clamp and position the material 900. The two limit bars 432 can be driven by any suitable mode such as manually, motor or air cylinder. Exemplarily, the positioning device 430 can further include a synchronous wheel 433 and a synchronous belt 434 sleeved on the synchronous wheel 433. The synchronous wheel 433 can be arranged on the carrier 431. The two limit bars 432 can be connected to the synchronous belt 434. By moving on the synchronous wheel 433 through the synchronous belt 434, the two limit bars 432 can be synchronized to open and close. Exemplarily, the positioning device 430 can further include a guide rail 435 arranged on the carrier 431, an oil buffer 436, a cylinder to position sensor 437 and a seat detection sensor 438. The guide rail 435 can extend along the second direction Y-Y. The two limit bars 432 can slide along the guide rail 435. When the two limit bars 432 are combined in position, the two limit bars 432 can abut against the oil buffer 436. The oil buffer 436 can play a role of buffering and limiting, so as to prevent the two limit bars 432 from continuing to combine and damaging the material 900. In the embodiment in which the two limit bars 432 are driven by the air cylinder, when the air cylinder drives the two limit bars 432 to combine in position, the cylinder to position sensor 437 can detect the position of the air cylinder, so as to prevent the two limit bars 432 from continuing to combine and damaging the material 900. The seat detection sensor 438 can be used to detect whether there is a material on the positioning device 430, so as to prevent the material from colliding on the positioning device 430.

[0045] In the description of the present application, it should be understood that the orientation words such as "front", "back", "upper", "lower", "left", "right", "horizontal", "vertical", "perpendicular", "horizontal" and "top", "bottom" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description. Without being contrary, these orientation words do not indicate and imply that the indicated device or element must have a specific orientation or be constructed and operated in a specific orientation, so it cannot be understood as a limitation on the protection scope of the present application; the orientation words "inner" and "outer" refer to the inner and outer of the contour of each component itself.

[0046] For purposes of the description hereinafter, the terms "upper", "lower", "right", "left", "rear", "front", "vertical" and "horizontal" as can be perceived herein relative to the accompanying drawings refer to the orientation of the components being described. However, it is to be understood that the exemplary embodiments described herein can assume different orientations, except where otherwise indicated. The exemplary terminology can thus include the terms specified above, and those terms with "reverse", "mirror" and "opposite" to specify the orientation of the components or steps described herein relative to other ones, depending on the particular orientation being referred to. Additionally, such terminology can include currently known equivalents in means for performing the described operations and equivalents that are developed after the time of the described embodiments that performs substantially the same operations in substantially the same way to achieve the same results.

[0047] It is also important to note that the terms "including", "comprising", "consisting" and "consisting essentially of" used herein should be construed as open terms meaning that the listed steps or components can be either exclusively consist of the listed components or can include additional steps or components beyond those listed. It is also important to note that the terms "coupled" and "connected" as can be used herein can include the joining of two members together either directly or indirectly, either electrically, mechanically or otherwise, with the understanding that such joining can include additional members or components in between the two members.

[0048] It is to be understood that the singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. Preferred aspects of the exemplary embodiments are described herein, and combinations of such preferred aspects can also be employed to one skilled in the art. It should be understood that elements and components of these embodiments can also be provided in a combination of one or more aspects of the embodiments to provide further embodiments. It should also be understood that elements and components of these embodiments can also be provided as standalone embodiments that can be combined with other standalone elements or components.

[0049] It is to be understood that the singular forms "a", "an", and "the" include plural referents unless the context clearly dictates otherwise. Preferred aspects of the exemplary embodiments are described herein, and combinations of such preferred aspects can also be employed to one skilled in the art. It should be understood that elements and components of these embodiments can also be provided in a combination of one or more aspects of the embodiments to provide further embodiments. It should also be understood that elements and components of these embodiments can also be provided as standalone embodiments that can be combined with other standalone elements or components.

Claims

1. A feeding device, characterized in that, The material moving mechanism is used to carry the material to a waiting position, and the feeding mechanism includes a feeding track and a feeding arm connected to the feeding track and movable relative to the feeding track, and the feeding arm is used to carry the material from the waiting position to a predetermined position, wherein A first safety strip extending along the length direction of the feeding track is arranged on the feeding track, and a first sensor is arranged on the feeding arm, and when the first sensor is located in a position area corresponding to the first safety strip, the material moving mechanism can be freely moved.

2. The feeding device according to claim 1, characterized in that The material moving mechanism includes a material moving track and a material moving arm connected to the material moving track and movable relative to the material moving track, and two ends of the material moving track are respectively provided with a second safety strip and a third safety strip, and a second sensor is arranged on the material moving arm, wherein When the first sensor is located outside the position area corresponding to the first safety strip, the second sensor is located in the position area corresponding to the second safety strip, or the second sensor is located in the position area corresponding to the third safety strip.

3. The feeding device according to claim 1, characterized in that, The feeding track has a far end away from the material moving mechanism, and the first safety strip is arranged close to the far end.

4. The feeding device according to claim 3, characterized in that In the length direction of the feeding track, the length of the first safety strip is less than the length of the feeding track.

5. The feeding device according to claim 1, characterized in that, The feeding arm includes a suction assembly including a connecting bracket and a plurality of suction cups arranged on the connecting bracket, the connecting bracket being connected to the feeding track and movable relative to the feeding track, and the suction assembly is used to suck the material to carry the material from the waiting position to the predetermined position.

6. The feeding device according to claim 5, characterized in that The suction assembly includes a dustproof plate connected to the connecting bracket and located above the plurality of suction cups to shield the material sucked by the suction assembly.

7. A processing apparatus characterized by comprising: The feeding device includes the feeding device as claimed in any one of claims 1-6.

8. The processing apparatus of claim 7, wherein, The processing equipment further includes a positioning device located on one side of the material moving mechanism, and the waiting position is located on the positioning device.

9. The processing apparatus of claim 8, wherein, The material moving mechanism is used to carry the material to the waiting position along a first direction, the feeding mechanism is used to carry the material from the waiting position to the predetermined position along a second direction perpendicular to the first direction, the positioning device is located on one side of the material moving mechanism in the second direction, and the positioning device is located on one side of the feeding track in the first direction.

10. The processing apparatus of claim 9, wherein, The positioning device includes a carrier and two limiting strips, both of which extend along the first direction, and both of which are arranged on two sides of the carrier along the second direction, and the waiting position is located on the carrier and between the two limiting strips.

Images