Photoresist bubble removing device

Abstract

The utility model relates to the technical field of photoresist production, in particular to a photoresist bubble removing device which comprises a shell, a stirring rod, a heating rod and a negative pressure bin, the top end and the left side of the shell are fixedly connected with sealing pipes respectively, the two sealing pipes are spirally connected with a feeding cover and a discharging cover respectively, the top end of the shell is fixedly connected with a motor, and the stirring rod is fixedly connected with the motor. A stirring rod is fixedly connected to the driving end of the motor, a plurality of fan blades are arranged on the outer side of the stirring rod, an inclined plate is fixedly connected to the inner wall of the side face of the shell, a heat conduction plate is arranged below the inclined plate, the heat conduction plate is fixedly connected with the shell, and a plurality of heating rods are installed on the heat conduction plate; the inner wall of the top end of the shell is fixedly connected with a negative pressure bin, the top end of the shell is fixedly connected with a high-speed motor, and through the arrangement of the motor and the stirring rod, a photoresist can be stirred, so that bubbles in the photoresist are rapidly brought to the surface of the photoresist and escape in the stirring process.

Description

Technical Field

[0001] This utility model relates to the field of photoresist production technology, specifically to a photoresist bubble removal device. Background Technology

[0002] Photoresist, also known as photoresist, is a key material used in industrial processes such as semiconductors and optoelectronics. It is mainly used in industrial processes such as electroplating or etching. It is a photosensitive material that uses light to depict structural patterns and has a direct impact on the production efficiency of semiconductor processes. Photoresist is generally composed of polymers, solvents, photosensitizers and other components. It can undergo a chemical reaction under light of a specific wavelength to achieve precise replication of circuit patterns.

[0003] During the processing of photoresist using a stirring and settling method, a large number of air bubbles will exist within the photoresist. The presence of air bubbles will lead to uneven photoresist coating, affecting the flowability and distribution of the photoresist, thereby affecting the pattern transfer quality during the photolithography process. Many traditional devices rely on simple stirring or settling methods to remove air bubbles. These methods are often inefficient and cannot effectively remove air bubbles inside the photoresist in a short time. Furthermore, due to the lack of an effective gas-liquid separation mechanism, the air bubbles in the photoresist cannot be completely broken and removed. The residual air bubbles not only affect the uniformity of the photoresist but may also lead to defects in the etching process, increasing the scrap rate of the product. Therefore, a photoresist air bubble removal device is proposed to address the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a photoresist bubble removal device to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A photoresist bubble removal device includes a shell, a stirring rod, a heating rod, and a negative pressure chamber. Sealing tubes are fixedly connected to the top and left side of the shell. A feed cover and a discharge cover are respectively spirally connected to the two sealing tubes. A motor is fixedly connected to the top of the shell, and the driving end of the motor is fixedly connected to the stirring rod. Several blades are provided on the outer side of the stirring rod. An inclined plate is fixedly connected to the inner wall of the side of the shell. A heat-conducting plate is located below the inclined plate and is fixedly connected to the shell. Several heating rods are installed on the heat-conducting plate. A negative pressure chamber is fixedly connected to the inner wall of the top of the shell. A high-speed motor is fixedly connected to the top of the shell, and a connecting rod is fixedly connected to the driving end of the high-speed motor. The connecting rod passes through the shell and the negative pressure chamber and is fixedly connected to a centrifugal chamber. A suction tube is rotatably connected to the bottom of the centrifugal chamber, and the outer side of the suction tube is fixedly connected to the negative pressure chamber. A notch is provided at the top of the centrifugal chamber, and a breathable mesh is installed inside the notch.

[0007] Preferably, a control module is fixedly connected to the right side of the housing, and the control module is provided with a control line, which is fixedly connected to the heat-conducting plate.

[0008] Preferably, an airtight pipe is fixedly connected to the right side of the negative pressure chamber, the airtight pipe passes through the shell and is fixedly connected to the air pump, and the air pump is fixedly connected to the shell.

[0009] Preferably, the bottom end of the straw has a notch, and the bottom end of the straw is higher than the highest end of the inclined plate.

[0010] Preferably, the negative pressure chamber is located in the upper right corner inside the shell, and the bottom of the centrifugal chamber is funnel-shaped.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] 1. In this utility model, the photoresist can be stirred by the electric motor and stirring rod, so that the air bubbles inside the photoresist are quickly brought to the surface of the photoresist and escape during the stirring process.

[0013] 2. In this utility model, the photoresist is heated by the heat-conducting plate and heating rod. The heating process can reduce the viscosity of the photoresist, making it easier for bubbles to escape from the photoresist.

[0014] 3. In this utility model, a high-speed motor, connecting rod and centrifuge chamber are set to generate a strong centrifugal force to break the bubbles in the photoresist. The shear force generated by the high-speed rotation can tear the bubbles, so that the liquid released by the bubbles is immediately thrown against the container wall by the centrifugal force and compressed into a liquid flow that returns to the photoresist through the pipette. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0016] Figure 2 This utility model Figure 1 A schematic diagram of the structure at point A.

[0017] In the diagram: 1. Shell; 2. Feed cover; 3. Sealing pipe; 4. Discharge cover; 5. Motor; 6. Stirring rod; 7. Inclined plate; 8. Control module; 9. Heat-conducting plate; 10. Heating rod; 11. High-speed motor; 12. Vacuum pump; 13. Suction pipe; 14. Ventilation mesh; 15. Connecting rod; 16. Negative pressure chamber; 17. Airtight pipe; 18. Centrifuge chamber. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0020] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this utility model.

[0021] Please see Figure 1-2 This utility model provides a technical solution:

[0022] A photoresist bubble removal device includes a housing 1, a stirring rod 6, a heating rod 10, and a negative pressure chamber 16. Sealing tubes 3 are fixedly connected to the top and left side of the housing 1. The two sealing tubes 3 are respectively spirally connected to a feed cover 2 and a discharge cover 4. A motor 5 is fixedly connected to the top of the housing 1, and the driving end of the motor 5 is fixedly connected to the stirring rod 6. Several fan blades are provided on the outer side of the stirring rod 6. An inclined plate 7 is fixedly connected to the inner wall of the side of the housing 1, and a heat-conducting plate 9 is provided below the inclined plate 7. The heat-conducting plate 9 is fixedly connected to the housing 1. A number of heating rods 10 are installed on the heat-conducting plate 9. A negative pressure chamber 16 is fixedly connected to the inner wall of the top of the shell 1. A high-speed motor 11 is fixedly connected to the top of the shell 1. A connecting rod 15 is fixedly connected to the drive end of the high-speed motor 11. The connecting rod 15 passes through the shell 1 and the negative pressure chamber 16 and is fixedly connected to the centrifuge chamber 18. A straw 13 is rotatably connected to the bottom of the centrifuge chamber 18. The outer side of the straw 13 is fixedly connected to the negative pressure chamber 16. A notch is provided at the top of the centrifuge chamber 18. A breathable net 14 is installed in the notch of the centrifuge chamber 18.

[0023] A control module 8 is fixedly connected to the right side of the housing 1. The control module 8 is equipped with a control line, which is fixedly connected to the heat-conducting plate 9. The heating rod 10 on the heat-conducting plate 9 can be activated by the control module 8 to heat the photoresist inside the housing 1. An airtight pipe 17 is fixedly connected to the right side of the negative pressure chamber 16. The airtight pipe 17 passes through the housing 1 and is fixedly connected to the vacuum pump 12. The vacuum pump 12 is fixedly connected to the housing 1 and can generate negative pressure inside the negative pressure chamber 16. The bottom end of the suction tube 13 is notched. The bottom end of the suction tube 13 is higher than the highest end of the inclined plate 7 to prevent the inclined plate 7 from interfering with the suction tube 13 and to ensure that the bubbles can be sucked into the centrifuge chamber 18 by the suction tube 13. The negative pressure chamber 16 is located in the upper right corner inside the housing 1. The bottom end of the centrifuge chamber 18 is funnel-shaped, so that the photoresist can return to the housing 1 through the suction tube 13.

[0024] Workflow: All electrical components in this invention are equipped with an external power supply or a built-in battery. When using this device, first rotate and open the feed cover 2, and add the photoresist raw material into the housing 1 through the feed port. The design of the sealing tube 3 ensures the airtightness of the housing 1. Start the motor 5, and the stirring rod 6 connected to the drive end of the motor 5 begins to rotate. The outer side of the stirring rod 6 is equipped with several fan blades for stirring the photoresist, so that the air bubbles inside the photoresist are quickly brought to the surface of the photoresist and escape during the stirring process. The heating rod 10 on the heat-conducting plate 9 is started through the control module 8 to heat the photoresist inside the housing 1. Heating can reduce the viscosity of the photoresist, accelerate the escape of air bubbles, and promote the uniformity of the photoresist. The negative pressure chamber 16 is connected to the vacuum pump 12 through the airtight pipe 17. Start the vacuum pump 12, and the vacuum pump 12 starts to work, so that the negative pressure chamber 16 generates negative pressure. The setting of the venting mesh 14 also generates negative pressure in the centrifuge chamber 18. The bottom of the centrifuge chamber 18 rotates. A suction tube 13 is connected to the centrifuge chamber 16. Under negative pressure, bubbles are drawn into the centrifuge chamber 18 by the suction tube 13. The high-speed motor 11 is started, and the connecting rod 15 connected to the drive end of the high-speed motor 11 drives the centrifuge chamber 18 to rotate in the negative pressure chamber 16, generating a strong centrifugal force. The shear force generated by the high-speed rotation tears the bubbles in the photoresist. The liquid released by the bubbles is thrown against the inner wall of the centrifuge chamber 18 by the centrifugal force and compressed into a liquid flow. The vacuum pump 12 is turned off to balance the air pressure in the centrifuge chamber 18 and the shell 1, so that the photoresist returns to the shell 1 through the suction tube 13, realizing gas-liquid separation. After the process is completed, the discharge cover 4 is rotated to open and the photoresist after bubble removal is discharged from the discharge port. The design of the inclined plate 7 ensures that the photoresist can be discharged quickly. Through the above process, the photoresist bubble removal device can efficiently and thoroughly remove bubbles in the photoresist, improve the uniformity and quality of the photoresist, and meet the high standard requirements of semiconductor manufacturing and other fields.

[0025] Contents not described in detail in this specification are existing technologies known to those skilled in the art. Standard parts used in this invention can all be purchased commercially, and irregularly shaped parts can be custom-made according to the description and drawings. The specific connection methods for each part all employ conventional methods such as bolts, rivets, and welding, which are already mature technologies. The machinery, parts, and equipment all use conventional models from the prior art, and the circuit connections also employ conventional connection methods from the prior art, which will not be detailed here.

[0026] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A photoresist bubble removal device, comprising a housing (1), a stirring rod (6), a heating rod (10), and a negative pressure chamber (16), characterized in that: The top and left side of the shell (1) are fixedly connected to sealing tubes (3). The two sealing tubes (3) are respectively spirally connected to a feed cover (2) and a discharge cover (4). The top of the shell (1) is fixedly connected to a motor (5). The drive end of the motor (5) is fixedly connected to a stirring rod (6). The outer side of the stirring rod (6) is provided with several fan blades. The inner side wall of the shell (1) is fixedly connected to an inclined plate (7). A heat-conducting plate (9) is provided below the inclined plate (7). The heat-conducting plate (9) is fixedly connected to the shell (1). Several heating rods (10) are installed on the heat-conducting plate (9). A negative pressure chamber (16) is fixedly connected to the inner wall of the top of the shell (1). A high-speed motor (11) is fixedly connected to the top of the shell (1). A connecting rod (15) is fixedly connected to the drive end of the high-speed motor (11). The connecting rod (15) passes through the shell (1) and the negative pressure chamber (16) and is fixedly connected to the centrifuge chamber (18). A straw (13) is rotatably connected to the bottom of the centrifuge chamber (18). The outer side of the straw (13) is fixedly connected to the negative pressure chamber (16). A notch is provided at the top of the centrifuge chamber (18). A breathable net (14) is installed in the notch of the centrifuge chamber (18).

2. The photoresist bubble removal device according to claim 1, characterized in that: A control module (8) is fixedly connected to the right side of the housing (1). The control module (8) is provided with control lines, and the control lines of the control module (8) are fixedly connected to the heat-conducting plate (9).

3. The photoresist bubble removal device according to claim 1, characterized in that: An airtight pipe (17) is fixedly connected to the right side of the negative pressure chamber (16). The airtight pipe (17) passes through the shell (1) and is fixedly connected to the air pump (12). The air pump (12) is fixedly connected to the shell (1).

4. The photoresist bubble removal device according to claim 1, characterized in that: The straw (13) has a notch at its bottom end, and the bottom end of the straw (13) is higher than the highest end of the inclined plate (7).

5. The photoresist bubble removal device according to claim 1, characterized in that: The negative pressure chamber (16) is located in the upper right corner inside the shell (1), and the bottom of the centrifugal chamber (18) is funnel-shaped.

Images