Ultrahigh vacuum internal weight lifting driving device

Abstract

The utility model discloses an ultrahigh vacuum internal weight lifting driving device, which relates to the technical field of vacuum lifting, and comprises an electric cylinder, a driving device and a lifting device, the upper side of the flange is connected with the lower wall of the vacuum chamber, and the lower side is connected with the electric cylinder; the jacking plate is positioned in the vacuum chamber for bearing a heavy object and is connected with the telescopic part; the corrugated pipe surrounds the outer side of the telescopic part, and the upper and lower ends of the corrugated pipe are connected with the jacking plate and the flange respectively; according to the utility model, the jacking plate in the vacuum chamber is driven to move up and down through the electric cylinder telescopic part, so that lifting driving of a heavy object is realized; the electric cylinder is fixed in the vacuum chamber through a flange; and the electric cylinder is isolated from the vacuum chamber through the corrugated pipe, displacement of the jacking plate can be adapted, and good vacuum compatibility is achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a vacuum lifting technology field, especially in a kind of superhigh vacuum internal heavy lifting drive device. BACKGROUND

[0002] In the superhigh vacuum chamber, lifting drive device is used to lift, move or position the heavy goods in the chamber, so as to carry out various process operations or experimental researches.For example, in vacuum coating process, lifting drive device can accurately send the heavy goods to be coated to the predetermined coating position.The components of lifting drive device must have good vacuum compatibility, avoid releasing gas or generating other pollutants in vacuum environment, affect the vacuum degree.However, the lifting drive device suitable for vacuum internal heavy goods in prior art is relatively lacking. SUMMARY

[0003] The utility model discloses a superhigh vacuum internal heavy lifting drive device to solve the problems in the prior art.

[0004] To achieve the above object, the utility model provides the following technical scheme:

[0005] A superhigh vacuum internal heavy lifting drive device, comprising:

[0006] Electric cylinder, with telescopic part;

[0007] Flange, upper side is connected with the lower wall of vacuum chamber, and lower side is connected with the electric cylinder;

[0008] Jacking plate, located in vacuum chamber and supports heavy goods, is connected with telescopic part;

[0009] Bellows, around the outside of telescopic part, upper and lower ends are connected with jacking plate and flange respectively.

[0010] Further, the upper side of the flange is provided with a plurality of sealing rings matched with the lower wall of the vacuum chamber.

[0011] Further, the fixed part of the electric cylinder is provided with a plurality of circumferentially distributed arc-shaped holes, and a first bolt is arranged in the arc-shaped hole;The lower side of the flange is provided with a plurality of threaded holes matched with the first bolt.

[0012] Further, the lower end of the bellows is integrally connected with the inner edge of the flange.

[0013] Further, the upper end of the bellows is integrally connected with a top block, and the top block is connected with the jacking plate and the telescopic part.

[0014] Further, the top block and the telescopic part are connected through threads.

[0015] Further, the jacking plate is provided with a plurality of second bolts, and the top block is provided with a plurality of threaded holes matched with the second bolts.

[0016] Compared with the prior art, the utility model has the advantages that:

[0017] The utility model discloses a jacking device for heavy object, which comprises a vacuum chamber, a plurality of top blocks arranged in the vacuum chamber, a plurality of jacking plates arranged on the top blocks, a plurality of electric cylinders arranged on the jacking plates, a plurality of flanges arranged on the vacuum chamber, and a plurality of corrugated pipes arranged between the flanges and the electric cylinders. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is a three-dimensional structure schematic view of the utility model.

[0019] Figure 2 It is a partial cross-section structure schematic view of the utility model.

[0020] Figure 3 It is a first perspective view schematic view of the utility model.

[0021] Figure 4 It is a second perspective view schematic view of the utility model.

[0022] In the drawing: 1, electric cylinder;2, flange;3, corrugated pipe;4, top block;5, jacking plate;6, sealing ring;7, arc-shaped hole;8, first bolt;9, second bolt;10, telescopic part. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the utility model more clearly, the following will be further described in detail by combining with the drawings and examples. It should be understood that the specific examples described here are only used to explain the utility model, and are not used to limit the utility model, that is, the described examples are only a part of the examples of the utility model, not all examples. The components of the utility model embodiments described and shown in the drawings can be arranged and designed in various different configurations.

[0024] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connection" that can appear should be understood broadly, for example, can be fixedly connected, or integrally connected, can be mechanically connected, or electrically connected, can be directly connected, or indirectly connected through an intermediate medium, can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to specific circumstances.

[0025] In the description of the utility model, it is necessary to explain that, unless there is definite stipulation and limitation, the term "provided with" that can appear should be understood in a broad sense, for example, the object of "provided with" can be a part of the body, can also be arranged separately from the body and connected on the body, the connection can be detachable connection, also can be undetachable connection.

[0026] The utility model is further described in detail below in combination with embodiments.

[0027] The utility model provides the specific embodiment of the superhigh vacuum internal heavy object lifting drive arrangement:

[0028] Please refer to Figures 1-4 , the superhigh vacuum internal heavy object lifting drive arrangement, including electric cylinder 1, flange 2, jacking plate 5 and bellows 3.

[0029] The high-performance electric cylinder 1 used in the embodiment is used for lifting, has high shaft concentricity and can lift heavy objects, and the maximum lifting weight in the chamber can reach 200KG; the external drive is excellent in precision for controlling the lifting distance of the superheavy object in the vacuum chamber; the electric cylinder 1 has a fixed part and an extension part 10; the high-performance electric cylinder 1 has a long service life, and the driving continuous extension service life can reach one million times.

[0030] The flange 2 is annular, the upper side of the flange 2 is connected with the lower wall of the vacuum chamber, and the lower side is connected with the electric cylinder 1; a plurality of through holes are uniformly distributed on the circumference of the upper side of the flange 2, a plurality of threaded holes corresponding to the through holes of the flange 2 are arranged on the lower side of the lower wall of the vacuum chamber, and the flange 2 can be fixed on the lower side of the lower wall of the vacuum chamber through bolts. The lower wall of the vacuum chamber is provided with a hole corresponding to the center of the flange 2.

[0031] A plurality of arc-shaped holes 7 are uniformly distributed on the circumference of the fixed part of the electric cylinder 1, and a first bolt 8 is arranged in the arc-shaped hole 7; a plurality of threaded holes matched with the first bolt 8 are arranged on the lower side of the flange 2. The number of arc-shaped holes 7 and first bolts 8 is four. The threaded holes on the lower side of the flange 2 are uniformly distributed on the circumference, and the number is at least twelve. The threaded holes on the lower side of the flange 2 are located on the inner ring side of the through holes on the flange 2.

[0032] A plurality of sealing rings 6 are arranged on the upper side of the flange 2 and abut against the lower wall of the vacuum chamber, and an annular groove for placing the sealing ring 6 is arranged on the upper side of the flange 2. In the embodiment, three sealing rings 6 are arranged, two of which are circular in cross section and one is triangular in cross section; the flange 2 and the vacuum chamber are well sealed through the multiple sealing rings 6, which meets the requirement of superhigh vacuum sealing.

[0033] The telescopic part 10 extends into the vacuum chamber through a hole in the lower wall of the vacuum chamber. The jacking plate 5 is connected with the upper end of the telescopic part 10 and is located in the vacuum chamber to support the heavy object. The telescopic part 10 is extended and retracted by the electric cylinder 1, and the jacking plate 5 supports the heavy object to be lifted in the vacuum chamber.

[0034] In order to isolate the electric cylinder 1 from the inside of the vacuum chamber, the bellows 3 is arranged in the embodiment. The bellows 3 is wrapped outside the telescopic part 10, and the upper and lower ends of the bellows 3 are connected with the jacking plate 5 and the flange 2, respectively. The bellows 3 can isolate the gap of the electric cylinder 1 from the vacuum chamber and can be lifted with the jacking plate 5 without affecting the lifting of the jacking plate 5 to the heavy object.

[0035] In order to ensure the sealing effect of the connection of the bellows 3, the lower end of the bellows 3 is integrally connected with the inner edge of the flange 2, and the upper end of the bellows 3 is integrally connected with the top block 4. The top block 4 is connected with the jacking plate 5 and the telescopic part 10, that is, the bellows 3 is connected with the jacking plate 5 through the top block 4, and the telescopic part 10 is connected with the jacking plate 5 through the top block 4.

[0036] The top block 4 seals the upper end of the bellows 3. The lower middle of the top block 4 is provided with a threaded hole, and the upper end of the telescopic part 10 is provided with an external thread, so that the top block 4 is connected with the telescopic part 10 through the thread. The jacking plate 5 is provided with a plurality of second bolts 9, and the upper side of the top block 4 is provided with a plurality of threaded holes matched with the second bolts 9. The flange 2, the bellows 3 and the top block 4 form an integrated structure to realize the sealing isolation of the electric cylinder 1 and the vacuum chamber, and adapt to the ultra-high vacuum sealing requirement.

[0037] During installation, the flange 2, the bellows 3 and the top block 4 are installed on the telescopic part 10, and the top block 4 is screwed on the telescopic part 10 through the thread;

[0038] The flange 2 is connected with the fixed part of the electric cylinder 1 through the first bolt 8. The arc-shaped hole 7 is used for adjusting the position of the first bolt 8 to adapt to the uncertainty of the thread hole position of the flange 2 after the top block 4 is screwed, and more thread holes of the flange 2 can correspond to the first bolt 8.

[0039] The flange 2 is fixed on the lower wall of the vacuum chamber.

[0040] Finally, the jacking plate 5 is fixed on the upper side of the top block 4 in the vacuum chamber by the second bolt 9.

[0041] Finally, it needs to be pointed out that the above only describes the preferred embodiments of the present application and is not used to limit the present application. Although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still make modifications to the technical solutions recorded in the foregoing embodiments without creative labor, or make equivalent replacements to some technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. An ultra-high vacuum internal weight lifting drive apparatus, characterized by, The utility model relates to a vacuum lifting device, including: Electric cylinder (1) have telescopic portion (10), Flange (2) upside with vacuum chamber lower wall connection, downside with electric cylinder (1) connection, Jacking plate (5) are located in vacuum chamber and support heavy object with telescopic portion (10) connection, Bellows (3) are surrounded in telescopic portion (10) outside, and the upper and lower ends are connected with jacking plate (5) and flange (2) respectively.

2. The ultra-high vacuum internal weight lifting drive according to claim 1, characterized in that The upper side of the flange (2) is provided with a plurality of sealing rings (6) adhered to the lower wall of the vacuum chamber.

3. The ultra-high vacuum internal weight lifting drive according to claim 1, characterized in that The fixed part of the electric cylinder (1) is provided with a plurality of circumferentially distributed arc-shaped holes (7), and the first bolts (8) are arranged in the arc-shaped holes (7); the lower side of the flange (2) is provided with a plurality of threaded holes matched with the first bolts (8).

4. The ultra-high vacuum internal weight lifting drive of claim 1, wherein, The lower end of the bellows (3) is integrally connected with the inner edge of the flange (2).

5. The ultra-high vacuum internal weight lifting drive of claim 1, wherein, The upper end of the bellows (3) is integrally connected with a top block (4), and the top block (4) is connected with the jacking plate (5) and the telescopic portion (10).

6. The ultra-high vacuum internal weight lifting drive according to claim 5, characterized in that The top block (4) is connected with the telescopic portion (10) through threads.

7. The ultra-high vacuum internal weight lifting drive according to claim 5, characterized in that A plurality of second bolts (9) are arranged through the jacking plate (5), and the upper side of the top block (4) is provided with a plurality of threaded holes matched with the second bolts (9).

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