Wet etching device for LED (light-emitting diode) chip

Abstract

The utility model belongs to the technical field of LED chips, and discloses an LED chip wet etching device which comprises an etching groove, a motor and a material box, the motor is arranged above the etching groove, an output shaft of the motor is connected with the material box, and the material box is hollow and suspended in the etching groove. And a plurality of accommodating units which are sequentially distributed at intervals from top to bottom and are convenient for horizontally bearing LED chip sources are arranged in the material box. According to the utility model, the material box is driven by the motor to rotate, so that a film source in the material box is in full contact with a solution in the tank body, bubbles at the edge of a small hole are not easy to remain in the rotating process under the influence of fluid mechanics, and the solution enters the small hole more easily, so that the solution fully reacts with a film layer in the hole, and the reaction sufficiency, the pattern uniformity and the yield are increased.

Description

TECHNICAL FIELD

[0001] The utility model belongs to LED chip technical field, concretely relates to a LED chip wet etching device. BACKGROUND

[0002] At present, the common wet etching in the industry is the method of tank type soaking, that is, the LED chip source to be etched is put into the tank body of the machine table together with the box by the conveying structure, a certain capacity of solution is filled in the tank body, the chip source is soaked in the solution for a certain time, and the surface film layer is taken out and cleaned after reacting with the solution to obtain the required pattern. However, for the pattern of the chip source with many small holes, the small holes are prone to insufficient reaction due to the attachment of bubbles, resulting in incomplete etching, pattern loss, abnormal performance and other process problems, and causing product yield loss. CONTENT OF THE UTILITY MODEL

[0003] The utility model provides a LED chip wet etching device in view of the deficiency in the background art, and the LED chip source to be etched is rotated and soaked in the etching tank together with the box, fluid mechanics is used to reduce surface bubbles and adsorption effect, so that the solution can enter the inside of the small hole more easily, thereby fully reacting with the film layer in the hole and reducing incomplete etching in the small hole, and the product yield is improved.

[0004] To achieve the above-mentioned purpose, the technical solution of the utility model is as follows:

[0005] A LED chip wet etching device, characterized in that: it comprises an etching tank, a motor and a box, the motor is arranged above the etching tank, the output shaft of the motor is connected to the box, the box is hollow and suspended in the etching tank, and a plurality of accommodating units for horizontally carrying the LED chip source are arranged in the box from top to bottom.

[0006] Preferably, the box comprises a top plate, a bottom plate and an integer multiple of four support assemblies, every four support assemblies form a group and are connected perpendicularly between the top plate and the bottom plate, each group of support assemblies comprises one movable column and three fixed columns arranged in a circumferential array, a plurality of pressure blocks corresponding one by one and cooperating with each other are arranged in the movable column and each fixed column from top to bottom, and the pressure blocks form the accommodating unit for horizontally carrying the LED chip source.

[0007] Preferably, the number of the support assemblies is four groups, and the four groups of support assemblies are arranged in a rectangular array.

[0008] Preferably, the movable column is located at the edge of the top plate and the bottom plate, and is detachably connected between the top plate and the bottom plate.

[0009] Preferably, the movable column is connected with an upper connecting rod at the upper end and a lower connecting rod at the lower end, the upper connecting rod is connected with an upper clamping groove arranged on the top plate, the upper connecting rod penetrates through the upper clamping groove and is connected with a limiting nut through screwing, the lower connecting rod is connected with a lower clamping groove arranged on the bottom plate, and the end of the lower connecting rod is connected with a limiting cap abutting against the lower end surface of the bottom plate, and the outer diameters of the upper connecting rod and the lower connecting rod are smaller than the outer diameter of the movable column.

[0010] Preferably, the horizontal section of the upper clamping groove and the lower clamping groove is L-shaped.

[0011] Preferably, the bottom of the bottom plate is provided with a supporting leg, and the height of the supporting leg is greater than the height of the limiting cap.

[0012] Preferably, the top end of the material box is connected with a lifting assembly, and a suspension assembly is detachably connected between the lifting assembly and the output shaft of the motor.

[0013] Preferably, the lifting assembly comprises a lifting rod and a lifting plate, the lifting rod is connected to the middle part of the bottom end of the lifting plate, and the outer diameter of the lifting rod is smaller than the outer diameter of the lifting plate, the suspension assembly comprises a lifting tool, a suspension rod and a sleeve, the lifting tool is detachably connected with the lifting plate and the lifting rod, the lower end of the suspension rod is connected with the lifting tool, and the upper end of the suspension rod is connected with the sleeve, and the output shaft of the motor is inserted into the sleeve and connected through bolt assembly.

[0014] Preferably, the lifting tool comprises an upper plate body, a lower plate body and a supporting rod, the upper plate body is arranged above the lower plate body in parallel and connected with the lower plate body through the supporting rod located at the four top corners, a groove matched with the lifting rod is arranged on the bottom plate, the distance between the upper plate body and the lower plate body is greater than the thickness of the lifting plate, a positioning hole is arranged on the lifting plate, and the positioning hole is connected with the matched holes arranged on the upper plate body and the lower plate body through a positioning pin.

[0015] Compared with the prior art, the utility model has the beneficial effects as follows:

[0016] (1) The utility model discloses a motor drives the rotation of the material box, makes the slice source in the material box and the solution in the groove body fully contact, in the process of rotating, under the influence of fluid mechanics, the bubble on the edge of the small hole is not easy to remain, and the solution is more easy to enter the inside of the small hole, thereby fully reacting with the membrane layer in the hole, the fullness of the reaction, the uniformity of the figure and the yield are increased.

[0017] (2) The utility model discloses a novel and reasonable material box structure, can realize batch corrosion treatment to the slice source, and the movable column is detachably connected with the top plate and the bottom plate, so that the slice source is conveniently filled and the material is conveniently taken.

[0018] (3) The utility model discloses a motor output shaft and the material box are detachably connected through the suspension assembly, so that the use is convenient, and the practicality is strong. BRIEF DESCRIPTION OF DRAWINGS

[0019] Other features, objects, and advantages of the present application will become more apparent from the following detailed description of non-limiting embodiments thereof, when read in conjunction with the accompanying drawings.

[0020] Figure 1 It is a schematic view of the structure of the present application;

[0021] Figure 2 It is a top view of the structure of the present application;

[0022] Figure 3 It is a schematic view of the structure of the present application Figure 2 It is a schematic view of the structure of the present application

[0023] Figure 4 It is a schematic view of the structure of the present application Figure 3 It is a schematic view of the structure of the present application

[0024] Figure 5 It is a schematic view of the structure of the present application

[0025] Figure 6 It is a schematic view of the structure of the present application

[0026] In the figure: 1, etching tank, 2, motor, 3, material box, 301, top plate, 302, bottom plate, 303, movable column, 304, fixed column, 305, pressure block, 306, through hole, 307, upper connecting rod, 308, lower connecting rod, 309, upper clamping groove, 3010, limiting nut, 3011, lower clamping groove, 3012, limiting cap, 3013, supporting leg, 4, accommodating unit, 5, suspension assembly, 501, suspension rod, 502, sleeve, 503, upper plate body, 504, lower plate body, 505, supporting rod, 506, groove, 6, lifting rod, 7, lifting plate, 8, bolt, 9, positioning hole, 10, fitting hole, 11, positioning pin. DETAILED DESCRIPTION

[0027] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all the embodiments.

[0028] In the description of the present application, it should be understood that the terms "middle", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0029] In the utility model, unless another explicit provision and limitation, the terms "arrange", "install", "connect", "connect", "fix" and so on should do the broad sense understanding, for example, can be fixed connection, also can be detachable connection, can be mechanical connection, can be direct connection, also can be indirectly connected through the intermediate medium. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0030] As Figure 1 The LED chip wet etching device shown in the figure, including etching tank 1, motor 2, material box 3, motor is arranged in the upper portion of etching tank, motor can be fixed installation mode, also can be lifting installation mode, specific according to actual need freely adjusts, in the embodiment, motor is fixedly suspended on the equipment rack, the output shaft of motor is connected material box, material box is hollow and is suspended in etching tank, the inside of material box is equipped with multiple containing units 4 that are sequentially spaced and are convenient for horizontal bearing LED chip piece source from top to bottom, sequentially place multiple LED chip piece sources in the containing unit of material box, the rotating speed of motor can be set as 10-60rpm, the rotating direction can be set as clockwise or counterclockwise, make wafer and tank body solution fully contact by rotating, in the rotating process, under the influence of fluid mechanics, bubble is not easy to remain in the edge of small hole, solution is more easily entered into the inside of small hole, to fully react with the membrane layer in the hole, increase the fullness of reaction, pattern uniformity and yield.

[0031] As Figures 1 to 4 The material box includes top plate 301, bottom plate 302 and the integer multiple of four support assemblies, every four support assemblies are a group and are vertically connected between top plate and bottom plate, every group of support assemblies includes one movable column 303 and three fixed columns 304 in circumferential array distribution, movable column, every fixed column is sequentially spaced from top to bottom and is equipped with multiple pressure blocks 305 that are one-to-one corresponding and mutually cooperate, the spacing between two pressure blocks adjacent to each other is 0.3-1cm, forms the containing unit for horizontal bearing LED chip piece source, in the embodiment, the material box includes four groups of support assemblies, can carry out wet etching to four groups of piece sources simultaneously, improves work efficiency, four groups of support assemblies are in rectangular array distribution, the top plate and bottom plate corresponding to every group of support assemblies are provided with through hole 306, to facilitate the immersion of solution, movable column is located at the edge of top plate and bottom plate, and is detachably connected between top plate and bottom plate, facilitates the filling and fixing of every group of piece sources.

[0032] As Figures 2 to 5As shown, the upper end of the movable column is connected with an upper connecting rod 307, and the lower end is connected with a lower connecting rod 308, the upper connecting rod is connected with an upper clamping groove 309 arranged on the top plate, the upper connecting rod penetrates the upper clamping groove and is threadedly connected with a limiting nut 3010, the lower connecting rod is connected with a lower clamping groove 3011 arranged on the bottom plate, and the end portion of the lower connecting rod is connected with a limiting cap 3012 abutting against the lower end surface of the bottom plate, the outer diameters of the upper connecting rod and the lower connecting rod are smaller than the outer diameter of the movable column, each group of the tablet source is sequentially placed on the pressure blocks of the three fixed columns from bottom to top or from top to bottom, and then the movable column is embedded into the upper clamping groove at the edge of the top plate and the lower clamping groove at the edge of the bottom plate, wherein the inner diameter of the upper clamping groove matches the outer diameter of the upper connecting rod, the inner diameter of the lower clamping groove matches the outer diameter of the lower connecting rod, the lower end of the movable column is positionally limited by the limiting cap, and the upper end of the movable column is locked and fixed by screwing the limiting nut, so that the tablet source is prevented from being thrown out of the box during the rotating soaking process. The horizontal section of the upper clamping groove and the lower clamping groove is L-shaped, and the stability between the movable column and the top plate and the bottom plate can be further improved. The bottom plate is provided with a supporting leg 3013, the height of the supporting leg is greater than the height of the limiting cap, and the assembly of the movable column is facilitated.

[0033] In combination Figure 1 And Figure 6 As shown, in order to facilitate the assembly of the motor and the box, the top end of the box is connected with a hoisting assembly, and a suspension assembly 5 is detachably connected between the hoisting assembly and the output shaft of the motor. The hoisting assembly comprises a hoisting rod 6 and a hoisting plate 7, the hoisting rod is connected to the middle part of the bottom end of the hoisting plate, and the outer diameter of the hoisting rod is smaller than the outer diameter of the hoisting plate. The suspension assembly comprises a lifting tool, a suspension rod 501 and a sleeve 502, the lifting tool is detachably connected with the lifting plate and the lifting rod, the lower end of the suspension rod is connected with the lifting tool, and the upper end is connected with the sleeve, the output shaft of the motor is inserted into the sleeve and assembled by bolts 8, which is convenient to disassemble and assemble, the output shaft of the motor and the sleeve are both provided with bolt holes, the lifting tool comprises an upper plate body 503, a lower plate body 504 and a supporting rod 505, the upper plate body is arranged above the lower plate body in parallel, and is connected with the lower plate body through the supporting rods located at the four top corners, a recess 506 matched with the hoisting rod is formed in the bottom plate, the distance between the upper plate body and the lower plate body is greater than the thickness of the hoisting plate, a positioning hole 9 is formed in the hoisting plate, and the positioning hole is connected with a matching hole 10 arranged on the upper plate body and the lower plate body through a positioning pin 11. During assembly, the hoisting rod is embedded into the recess, at this time the hoisting plate is located between the upper plate body and the lower plate body, and then the positioning pin 11 is inserted into the positioning hole and the matching hole to realize horizontal locking. Since the inner diameter of the recess is smaller than the outer diameter of the hoisting plate, the lower plate body can bear the hoisting plate.

[0034] The use method of the utility model is as follows:

[0035] For example Figures 1 to 6As shown, first, the LED chip sources to be etched are embedded into each accommodating unit 4 of the material box 3 one by one, then the movable column 303 of each set of supporting assembly is embedded into the top plate 301 and the bottom plate 302, and the movable column 303 is locked and fixed by using the limiting nut 3010. The lifting assembly at the top end of the material box 3 is assembled and connected with the suspension assembly 5, then the material box 3 is placed in the etching tank, the sleeve 502 of the suspension assembly 5 is assembled and connected with the output shaft of the motor 2 through the bolt 8, the motor 2 is started, the material box 3 is driven to rotate, and the chip sources can be rotated and soaked.

[0036] The basic principle and main features of the present application and the advantages of the present application are shown and described above, and it is obvious for those skilled in the art that the present application is not limited to the details of the above exemplary embodiments, and the present application can be realized in other specific forms without departing from the spirit or basic characteristics of the present application. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-limiting, the scope of the present application is defined by the appended claims rather than the above description, and therefore all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application.

Claims

1. An LED chip wet etching apparatus, characterized by: The utility model provides a corrosion tank, motor, material box, the motor is located corrosion tank's top, and the output shaft of motor connects material box, material box is openwork and hangs in corrosion tank, the inside of material box is equipped with a plurality of from top to bottom interval distribution and convenient horizontal bearing LED chip piece source's accommodating unit.

2. The LED chip wet etching device of claim 1, wherein: The material box includes a top plate, a bottom plate, and an integer multiple of four support assemblies, every four support assemblies form a group and are connected vertically between the top plate and the bottom plate, each group of support assemblies includes one movable column and three fixed columns arranged in a circumferential array, a plurality of corresponding pressure blocks are sequentially and spacedly arranged on the movable column and each fixed column from top to bottom, forming an accommodating unit for horizontally bearing LED chip piece sources.

3. The LED chip wet etching apparatus of claim 2, wherein: The number of support assemblies is four groups, and the four groups of support assemblies are arranged in a rectangular array.

4. The LED chip wet etching apparatus of claim 2, wherein: The movable column is located at the edge of the top plate and the bottom plate and is detachably connected between the top plate and the bottom plate.

5. The LED chip wet etching apparatus of claim 4, wherein: The upper end of the movable column is connected with an upper connecting rod, and the lower end is connected with a lower connecting rod, the upper connecting rod is connected with an upper clamping groove arranged on the top plate in a matched manner, the upper connecting rod penetrates through the upper clamping groove and is threadedly connected with a limiting nut, the lower connecting rod is connected with a lower clamping groove arranged on the bottom plate in a matched manner, and the end portion of the lower connecting rod is connected with a limiting cap abutting against the lower end surface of the bottom plate, and the outer diameters of the upper connecting rod and the lower connecting rod are smaller than the outer diameter of the movable column.

6. The LED chip wet etching apparatus of claim 5, wherein: The horizontal cross sections of the upper clamping groove and the lower clamping groove are both L-shaped.

7. The LED chip wet etching apparatus of claim 5, wherein: The bottom of the bottom plate is provided with a supporting leg, and the height of the supporting leg is greater than the height of the limiting cap.

8. The LED chip wet etching apparatus of claim 2, wherein: The top end of the material box is connected with a lifting assembly, and the lifting assembly is detachably connected with a suspension assembly between the output shaft of the motor.

9. The LED chip wet etching apparatus of claim 8, wherein: The lifting assembly includes a lifting rod and a lifting plate, the lifting rod is connected to the middle part of the bottom end of the lifting plate, and the outer diameter of the lifting rod is smaller than the outer diameter of the lifting plate, the suspension assembly includes a lifting tool, a suspension rod, and a sleeve, the lifting tool is detachably connected with the lifting plate and the lifting rod, the lower end of the suspension rod is connected with the lifting tool, and the upper end is connected with the sleeve, and the output shaft of the motor is inserted into the sleeve and connected through bolt assembly.

10. The LED chip wet etching apparatus of claim 9, wherein: The lifting tool includes an upper plate body, a lower plate body, and a supporting rod, the upper plate body is arranged above the lower plate body in parallel, and is connected with the lower plate body through the supporting rod located at the four top corners, a groove matching the lifting rod is formed on the bottom plate, the distance between the upper plate body and the lower plate body is greater than the thickness of the lifting plate, a positioning hole is formed on the lifting plate, and the positioning hole is connected with the matching hole arranged on the upper plate body and the lower plate body through a positioning pin.

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