Film coating device for inner wall of long and thin pipe with medium-small caliber and deep inner hole

Abstract

The utility model discloses a film coating device for the inner wall of a long and thin tube with a medium-small caliber and a deep inner hole, and belongs to the technical field of film coating. The coating equipment consists of a control unit and a coating unit. The control unit comprises a vacuum chamber and a gas inlet system, the vacuum chamber is used for installing and placing the pipe and providing a vacuum environment, and the gas inlet system is used for injecting working gas into the vacuum chamber. The coating unit is composed of a target material, a magnetic coil and a driving mechanism, and the target material is installed on the central axis in the pipe. The magnetic coil provides a uniform magnetic field environment for the coating device, the output end of the driving mechanism is mechanically connected with the target material and the magnetic coil, and synchronous transmission control between the target material and the magnetic coil is ensured. The device is particularly suitable for quickly and efficiently coating the inner wall of a long and thin pipe with a deep inner hole and the caliber of 40mm or below, and the quality of a film layer is excellent. The magnetic core in the target material is externally arranged, so that the diameter of the target material is reduced, disassembly and assembly are simplified, the manufacturing difficulty and cost are reduced, and the economic benefit is improved.

Description

Technical Field

[0001] This utility model belongs to the field of coating technology, specifically relating to a coating device for the inner wall of a slender tube with a deep inner hole of small or medium diameter. Background Technology

[0002] Due to their unique advantages, slender pipes with deep inner bores of small and medium diameters have been widely used in key fields such as petrochemicals, gas transportation, and weaponry. However, in practical applications, the inner walls of these pipes often face challenges from harsh environments such as corrosion, oxidation, wear, erosion, and ablation. Therefore, depositing or coating a protective film on the inner wall of the pipe has become a widely accepted and efficient surface treatment method, effectively improving the surface properties of the pipe. This protective film provides the inner wall with multiple protective properties, including oxidation resistance, corrosion resistance, wear resistance, and ablation resistance, which is of great significance for extending the service life of key components such as high-pressure petrochemical small-diameter pipelines, pipelines transporting highly corrosive, toxic, and harmful gases, and artillery barrels.

[0003] In existing technologies, when using magnetron sputtering to coat the inner walls of pipes, the permanent magnets are placed inside the target, causing the target to occupy a significant amount of space within the pipe. For small- to medium-diameter pipes, this arrangement reduces the target-substrate distance between the target and the inner wall of the pipe, shortening the particle acceleration path and resulting in insufficient deposition energy. This, in turn, affects the quality of the coating layer and makes it difficult to meet the performance requirements of the pipe inner wall under harsh operating conditions. Furthermore, this design increases the difficulty of loading and unloading small- to medium-diameter pipes and the target. Due to the limited space inside the pipe, it is difficult to effectively arrange the target's cooling piping system, leading to poor heat dissipation of the internal permanent magnets. This results in high temperatures, causing magnet demagnetization and further affecting the long-term stability and reliability of the coating equipment.

[0004] In current technologies, magnetron sputtering coating typically uses a target of the same length as the tube. However, manufacturing suitable targets for small- to medium-diameter, deep-bore, slender tubes is relatively complex in design and extremely difficult to process. This not only makes it difficult to guarantee the accuracy and purity of the target but also significantly increases costs. Furthermore, the challenges of transporting and installing ultra-long targets further exacerbate the cost and complexity of the entire process. Utility Model Content

[0005] To address the aforementioned deficiencies or improvement needs of existing technologies, this invention provides a coating device for the inner wall of slender tubes with deep internal holes of small to medium diameter. The core innovation of this technical solution lies in separating the target material from the magnetic field generator and utilizing the controllable loading of an external magnetic field to achieve controllable and adjustable deposition sputtering. This innovative device and coating method effectively solves problems existing in the prior art, such as excessively small target-substrate distance, short particle acceleration distance, and insufficient deposition energy. It also addresses the challenges of loading and unloading slender tubes with deep internal holes and the heat dissipation problem of the permanent magnet inside the target material. This technological improvement not only enhances the efficiency and quality of coating but also provides a more economical and reliable solution for coating applications in slender tubes with deep internal holes of small to medium diameter.

[0006] To achieve the above objectives, in a first aspect, this utility model provides a coating device for the inner wall of a slender tube with a deep inner hole of small or medium diameter, the coating device comprising a control unit and a coating unit;

[0007] The control unit includes a vacuum chamber and an air intake module. The vacuum chamber is used to install and place small-diameter deep-bore slender tubes and provide the required vacuum environment. The air intake module is used to inject the required working gas into the vacuum chamber.

[0008] The coating unit includes a target material, a magnetic coil, and a driving module. The target material is installed on the central axis inside a slender tube with a deep inner hole of a small or medium diameter.

[0009] The magnetic coil is arranged on the wall of the vacuum chamber to provide a uniform magnetic field environment for the coating device;

[0010] The magnetic coil is slidably sleeved on the wall of the vacuum chamber and arranged coaxially with the target material. The output end of the drive module is connected to the target material and the magnetic coil respectively to drive the target material and the magnetic coil to move synchronously along the axial direction of the tube.

[0011] The inner diameter of the tube is <110mm.

[0012] Optionally, the drive module includes a drive component and a support frame. The output end of the drive component is connected to the support frame in a transmission manner. The support frame has a first support rod and a plurality of second support rods. The first support rod is located between the plurality of second support rods. The first support rod is fixedly connected to the target material, and the plurality of second support rods are fixedly connected to the magnetic coil.

[0013] Optionally, the driving component is a linear motion module or a cylinder.

[0014] Optionally, the length of the tube is <7000 mm.

[0015] Optionally, the target material is provided with a cooling channel, one end of which is connected to the water inlet pipe and the other end of which is connected to the water outlet pipe.

[0016] Optionally, both ends of the cooling channel are arranged towards the drive module, and the cooling channel has a U-shaped structure.

[0017] Optionally, the wall of the vacuum chamber is provided with a plurality of slide rails extending along the axial direction of the tube, and the magnetic coil slides in cooperation with the plurality of slide rails.

[0018] Optionally, the coating unit further includes a first motor and a second motor. The output end of the drive module is connected to the first motor and the second motor respectively. The output shaft of the first motor is connected to the target material, and the output shaft of the second motor is connected to the magnetic coil. The output shafts of the first motor and the second motor are both arranged along the axial direction of the tube and rotate in opposite directions.

[0019] Optionally, the coating apparatus further includes a heating coil, which is coaxially sleeved on the outer wall of the tube, and the output end of the drive module is connected to the heating coil to drive the target material and the heating coil to move synchronously along the axial direction of the tube.

[0020] The aforementioned improved technical features can be combined with each other as long as they do not conflict with each other.

[0021] In summary, the beneficial effects of the above-described technical solutions conceived by this utility model compared with the prior art include:

[0022] The coating apparatus provided in this embodiment is specifically designed for the inner walls of slender tubes with deep inner holes of small to medium diameter. Its core innovation lies in separating the target material from the magnetic field generator and utilizing the controllable loading of an external magnetic field to achieve controllable and adjustable deposition sputtering processes. The following are some advantages of this technical solution:

[0023] 1. Improved Coating Quality: This invention designs the magnetic core in the target material as external, which not only helps to reduce the target diameter but also effectively solves problems such as excessively close target-substrate distance, short particle acceleration paths, and insufficient deposition energy in existing technologies. These improvements significantly enhance coating efficiency and quality, thereby meeting the performance requirements of pipeline inner walls under harsh working conditions.

[0024] 2. Simplified loading and unloading process: In response to the challenges of loading and unloading long and slender tubes with deep inner bores, this utility model simplifies the loading and unloading process through innovative design, making the loading and unloading of the target material more convenient and reducing the difficulty of operation.

[0025] 3. Optimize target heat dissipation: Increase the space of the target cooling pipeline system to effectively avoid the high temperature problem caused by insufficient heat dissipation of permanent magnets, thereby preventing magnet demagnetization and enhancing the durability of the equipment.

[0026] 4. Improved economic efficiency: This technological improvement not only reduces manufacturing costs but also increases production efficiency, providing an economical and reliable solution for coating applications of small-diameter, deep-bore, slender tubes.

[0027] In summary, through these technological improvements, this utility model enhances the stability and reliability of the coating equipment, ensures the continuous and stable operation of the coating process, and brings significant technological progress to related industrial applications. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of a coating device for the inner wall of a slender tube with a deep inner hole of small or medium diameter provided in this embodiment of the present invention;

[0029] Figure 2 This is a flowchart of a coating method for the inner wall of a slender tube with a deep inner hole of small or medium diameter, provided by an embodiment of this utility model.

[0030] In all the accompanying drawings, the same reference numerals denote the same technical features, specifically:

[0031] 1. Vacuum chamber; 11. Air inlet; 12. Guide rod; 2. Target material; 21. Cooling channel; 3. Magnetic coil; 4. Drive component; 5. Support frame; 51. First support rod; 52. Second support rod; 6. Heating coil; 100. Tube. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only for explaining the present utility model and are not intended to limit the present utility model. Furthermore, the technical features involved in the various embodiments of the present utility model described below can be combined with each other as long as they do not conflict with each other.

[0033] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0035] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0036] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature. Example

[0037] Figure 1 This is a schematic diagram of a coating device for the inner wall of a slender tube with a deep inner hole of small or medium diameter, provided by an embodiment of this utility model. Figure 1 As shown, the coating apparatus includes a control unit and a coating unit.

[0038] The control unit includes a vacuum chamber 1 for mounting and placing a small-diameter deep-bore slender tube 100 and an air intake module (not shown). The vacuum chamber 1 is used to mount and place the small-diameter deep-bore slender tube and provide the required vacuum environment. The air intake module is used to inject the required working gas into the vacuum chamber.

[0039] The coating assembly includes a target 2, a magnetic coil 3, and a drive module. The target 2 is installed inside the tube 100 and is located on the central axis of the tube 100. The magnetic coil 3 is slidably sleeved on the wall of the vacuum chamber 1 (to provide a uniform magnetic field environment for the coating device) and is arranged coaxially with the target 2. The output end of the drive module is connected to the target 2 and the magnetic coil 3 respectively to drive the target 2 and the magnetic coil 3 to move synchronously along the axial direction of the tube 100.

[0040] In the embodiment of this utility model, a coating device for the inner wall of a small-diameter, deep-bore, slender tube is provided. When coating the inner wall of a small-diameter, deep-bore, slender tube 100, the vacuum chamber 1 provides a vacuum environment, while the air intake module can inject the required working gas into the vacuum chamber 1, so that the working gas is subsequently ionized under the action of the magnetic coil 3 and bombards the target material 2.

[0041] Furthermore, since the target material 2 is installed inside the tube 100 and located on the central axis of the tube 100, the magnetic coil 3 is slidably sleeved on the wall of the vacuum chamber 1 and coaxially arranged with the target material 2. The output end of the drive module is connected to the target material 2 and the magnetic coil 3 respectively (the magnetic coil 3 provides the magnetic field). On the one hand, the target material 2 can be set inside the tube 100 and the magnetic coil 3 can be set on the wall of the vacuum chamber 1, eliminating the need for a permanent magnet to be placed inside the target material 2. This allows for separate installation of the two materials, which not only facilitates the separate installation of the target material 2 and the magnetic coil 3, but also reduces the volume of the target material 2, making it easier to install the target material 2 in small- or medium-diameter tubes 100. At the same time, the target-substrate distance between the target material 2 and the tube 100 is increased, increasing the acceleration distance of the particles and improving the coating quality. On the other hand, driven by the drive module, the target material 2 and the magnetic coil 3 move synchronously. While ensuring that they are uniformly coated along the axial direction of the tube 100 while remaining relatively stationary, there is no need to set excessively long target material 2 and magnetic coil 3, which greatly reduces the axial length of target material 2 and magnetic coil 3, reduces the manufacturing difficulty of target material 2 and magnetic coil 3, and thus reduces costs.

[0042] In other words, the coating device provided by this utility model for the inner wall of a slender tube with a deep inner hole of small and medium diameter can not only effectively reduce the manufacturing difficulty of the target material 2 and the magnetic coil 3 and reduce the cost, but also facilitate the installation of the target material 2 in the tube 100 of small and medium diameter, and increase the acceleration distance of the particles, thereby improving the coating quality.

[0043] Furthermore, this coating apparatus is suitable for small to medium diameter tubes 100 with deep, slender inner holes. Specifically, the length of the tube 100 is <7000mm, and the inner diameter of the tube 100 is <100mm, making it particularly suitable for slender tubes with deep inner holes of 40mm and below. The formed film can be a metal, ceramic coating, or multiphase composite coating, and the film can also be a composite multilayer or gradient structure; this invention does not impose any limitations on these aspects.

[0044] For example, the target material 2 can have a diameter of <30mm and a length of <2000mm. The vacuum chamber 1 has an inner diameter of 50-500mm and a length of <10000mm, which not only facilitates the installation and placement of the tube 100, but also provides a vacuum environment. The magnetic coil 3 can have a diameter of 50-550mm and a length of <2000mm.

[0045] For example, the working gas injected into the air intake module can be a variety of gases such as argon, nitrogen, or methane. The vacuum chamber 1 has multiple spaced air inlets 11, each of which is connected to the air intake module.

[0046] It is readily understood that in other embodiments of this utility model, the coating apparatus may further include two coating units, which are arranged correspondingly at both ends of the tube 100, that is, coating is performed simultaneously from both ends of the tube 100 to the middle of the tube 100, thereby improving the coating efficiency.

[0047] In one implementation of this utility model, the drive module includes a drive component 4 and a support frame 5. The output end of the drive component 4 is connected to the support frame 5 in a transmission manner. The support frame 5 has a first support rod 51 and a plurality of second support rods 52. The first support rod 51 is located between the plurality of second support rods 52. The first support rod 51 is fixedly connected to the target material 2, and the plurality of second support rods 52 are fixedly connected to the magnetic coil 3.

[0048] In the above embodiment, the driving component 4 can drive the support frame 5 to move horizontally, and the support frame 5 can simultaneously drive the first support rod 51 and multiple second support rods 52 to move horizontally, thereby driving the target material 2 and multiple magnetic coils 3 to move horizontally synchronously. The multiple second support rods 52 serve to support and connect the magnetic coils 3.

[0049] For example, a sealing ring is installed in the vacuum chamber 1, and a first support rod 51 is installed in the sealing ring and passes through the vacuum chamber 1. The drive unit 4 and the support frame 5 are located outside the vacuum chamber 1.

[0050] In addition, the drive component 4 can be a linear motion module or a cylinder, and this utility model does not limit it in this regard.

[0051] To ensure the reliability of the target 2 during movement, a guide rod 12 is slidably inserted into the vacuum chamber 1. The target 2 is coaxially connected to the guide rod 12, and the target 2 is located between the guide rod 12 and the drive component 4.

[0052] In another implementation of this utility model, the driving module may further include two driving units, namely, the output end of one driving unit is connected to the magnetic coil 3 for transmission, and the output end of the other driving unit is connected to the target material 2 for transmission. The two driving units are synchronously controlled by an electronic control program, thereby realizing the synchronous driving movement of the magnetic coil 3 and the target material 2.

[0053] See also Figure 1 The target material 2 is equipped with a cooling channel 21. One end of the cooling channel 21 is connected to the water inlet pipe, and the other end is connected to the water outlet pipe. The cooling channel 21 can realize water inlet and outlet. During the coating process, the flow of water and its heat absorption capacity can remove excess heat from the target material 2, thereby providing cooling and heat dissipation protection for the coating device.

[0054] Furthermore, both ends of the cooling channel 21 are arranged towards the drive module, and the cooling channel 21 can be a U-shaped structure. The U-shaped structure of the cooling channel 21 can increase the heat dissipation efficiency.

[0055] In this embodiment, the wall of the vacuum chamber 1 is provided with a plurality of slide rails extending along the axial direction of the tube 100, and the magnetic coil 3 slides in cooperation with the plurality of slide rails. The slide rails guide the sliding of the magnetic coil 3.

[0056] For example, the magnetic coil 3 is fixed to the slider, and the slider slides in conjunction with the slide rail.

[0057] In one implementation of this utility model, the coating unit further includes a first motor and a second motor (not shown in the figure). The output end of the drive module is connected to the first motor and the second motor respectively. The output shaft of the first motor is connected to the target material 2, and the output shaft of the second motor is connected to the magnetic coil 3. The output shafts of the first motor and the second motor are both arranged along the axial direction of the tube and rotate in opposite directions.

[0058] It is easy to understand that while the drive module drives the first motor, the second motor, the target material 2 and the magnetic coil 3 to move horizontally for coating, the first motor simultaneously drives the target material 2 to rotate clockwise, while the second motor drives the magnetic coil 3 to rotate counterclockwise, so that the target material 2 rotates in different directions, thereby improving the density and uniformity of the coating.

[0059] In this embodiment, the coating apparatus further includes a heating coil 6, which is coaxially sleeved on the outer wall of the tube 100, and the output end of the drive module is connected to the heating coil 6 for transmission, so as to drive the target material 2 and the heating coil 6 to move synchronously along the axial direction of the tube 100. The heating coil 6 can make the tube 100 reach the temperature required for coating.

[0060] Figure 2 This is a flowchart of a coating method for the inner wall of a slender tube with a deep inner bore of small or medium diameter, provided by an embodiment of this utility model. Figure 2 As shown, the coating method is based on the above-described coating apparatus and includes:

[0061] S1. Place tube 100 in vacuum chamber 1.

[0062] S2. Gas is injected into the vacuum chamber through the air intake module, and power is provided. The negative terminal of the bias power supply is connected to the tube 100, and the negative terminal of the sputtering power supply is connected to the target 2. The vacuum chamber is the positive terminal and connected to the ground.

[0063] S3. The target material 2 and the magnetic coil 3 are driven to move back and forth synchronously along the axial direction of the tube 100 through the drive module. The ionized working gas bombards the target material 2 and coats the inner wall of the tube 100.

[0064] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A coating apparatus for the inner wall of a slender tube with a deep inner bore of small to medium diameter, characterized in that, The coating apparatus includes a control unit and a coating unit; The control unit includes a vacuum chamber (1) and an air intake module. The vacuum chamber (1) is used to install and place small-diameter deep inner hole slender tubes and provide the required vacuum environment. The air intake module is used to inject the required working gas into the vacuum chamber. The coating unit includes a target (2), a magnetic coil (3) and a driving module. The target (2) is installed on the central axis inside a small-diameter deep inner hole slender tube (100). The magnetic coil (3) is arranged on the wall of the vacuum chamber (1) to provide a uniform magnetic field environment for the coating device; The magnetic coil (3) is slidably sleeved on the wall of the vacuum chamber and is arranged coaxially with the target material (2). The output end of the drive module is connected to the target material (2) and the magnetic coil (3) respectively to drive the target material (2) and the magnetic coil (3) to move synchronously along the axial direction of the tube (100).

2. The coating apparatus for the inner wall of a slender tube with a deep inner bore of small or medium diameter according to claim 1, characterized in that, The drive module includes a drive component (4) and a support frame (5). The output end of the drive component (4) is connected to the support frame (5) in a transmission manner. The support frame (5) has a first support rod (51) and a plurality of second support rods (52). The first support rod (51) is located between the plurality of second support rods (52). The first support rod (51) is fixedly connected to the target material (2). The plurality of second support rods (52) are fixedly connected to the magnetic coil (3).

3. The coating apparatus for the inner wall of a slender tube with a deep inner bore of small or medium diameter according to claim 2, characterized in that, The driving component (4) is a linear motion module or a cylinder.

4. The coating apparatus for the inner wall of a slender tube with a deep inner bore of small or medium diameter according to claim 1, characterized in that, The length of the tube (100) is <7000mm, and the inner diameter of the tube (100) is <110mm.

5. A coating apparatus for the inner wall of a slender tube with a deep inner bore of small or medium diameter, as described in claim 1, characterized in that, The target material (2) is provided with a cooling channel (21), one end of which is used to connect with the water inlet pipe and the other end of which is used to connect with the water outlet pipe.

6. A coating apparatus for the inner wall of a slender tube with a deep inner bore of small or medium diameter, as described in claim 5, characterized in that, Both ends of the cooling channel (21) are arranged toward the drive module, and the cooling channel (21) has a U-shaped structure.

7. A coating apparatus for the inner wall of a slender tube with a deep inner bore according to any one of claims 1-6, characterized in that, The vacuum chamber (1) is provided with a plurality of slide rails extending along the axial direction of the tube (100) on its wall, and the magnetic coil (3) slides in cooperation with the plurality of slide rails.

8. A coating apparatus for the inner wall of a slender tube with a deep inner bore according to any one of claims 1-6, characterized in that, The coating unit also includes a first motor and a second motor. The output end of the drive module is connected to the first motor and the second motor respectively. The output shaft of the first motor is connected to the target material (2) and the output shaft of the second motor is connected to the magnetic coil (3). The output shafts of the first motor and the second motor are both arranged along the axial direction of the tube (100) and rotate in opposite directions.

9. A coating apparatus for the inner wall of a slender tube with a deep inner bore according to any one of claims 1-6, characterized in that, The coating device further includes a heating coil (6), which is coaxially sleeved on the wall of the tube (100), and the output end of the drive module is connected to the heating coil (6) to drive the target material (2) and the heating coil (6) to move synchronously along the axial direction of the tube (100).

Images