Boat structure and coating equipment

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a boat structure and coating equipment, and solves the problem that the loading and unloading difficulty is high due to the fact that gaps among a plurality of metal sheets borne by the boat structure are small in the prior art. The boat structure comprises a first boat and a second boat, the first boat comprises a first insulating frame, a first connecting assembly and a first electrode assembly, and the first electrode assembly is configured to be conductively connected with a plurality of first sub-metal sheets; the second boat comprises a second insulating frame, a second connecting assembly and a second electrode assembly; the second electrode assembly is configured to be conductively connected with the plurality of second sub-metal sheets; when the first insulating frame and the second insulating frame are connected, at least one second sub-metal sheet is inserted between two adjacent first sub-metal sheets, and any two adjacent sub-metal sheets are configured to be connected with power supplies with different polarities. According to the boat structure and the coating equipment provided by the invention, the loading and unloading difficulty of the metal sheets on the boat structure is reduced, and the efficiency is improved.

Description

Technical Field

[0001] This disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a boat structure and coating equipment. Background Technology

[0002] Lithium-ion batteries are a type of battery that uses lithium metal or lithium alloys as positive / negative electrode materials and a non-aqueous electrolyte solution. They are characterized by high energy density, lightweight, fast charging and discharging, and long lifespan, and have a wide range of applications. To improve the energy density of lithium-ion batteries, the electrode sheets used in lithium-ion batteries are coated with a thin film of silicon-containing material on both sides of the metal sheet in the thickness direction using plasma-enhanced chemical vapor deposition (PECVD) equipment.

[0003] As a carrier for coating multiple metal sheets in a PECVD device, the boat structure has a small spacing between the multiple metal sheets to ensure the coating effect on both sides of the multiple metal sheets on the boat structure. This makes it difficult to load and unload the multiple metal sheets on the boat structure, which in turn leads to a reduction in coating efficiency. Utility Model Content

[0004] In view of this, the present disclosure provides a boat structure and a coating equipment to solve the problem in the related art that the small gap between the multiple metal sheets supported by the boat structure leads to a large assembly difficulty.

[0005] In a first aspect, one embodiment of this disclosure provides a boat structure configured to support a plurality of metal sheets. The boat structure includes a first boat and a second boat. The metal sheets include a first metal sheet and a second metal sheet. The first metal sheet includes a plurality of first sub-metal sheets that are interconnected or disconnected. The second metal sheet includes a plurality of second sub-metal sheets that are interconnected or disconnected. The first boat includes: a first insulating frame; a first connecting assembly connected to the first insulating frame, the first connecting assembly and the first insulating frame enclosing a first reaction space; a plurality of first sub-metal sheets detachably connected to the first connecting assembly, and the plurality of first sub-metal sheets being spaced apart along a first direction in the first reaction space; and a first electrode assembly connected to the first insulating frame, the first electrode assembly being configured to be electrically connected to the plurality of first sub-metal sheets. The second boat includes: a second insulating frame; and a second insulating frame. The first insulating frame is detachably connected to the second insulating frame; a second connecting assembly is connected to the second insulating frame, the second connecting assembly and the second insulating frame enclosing a second reaction space; a plurality of second sub-metal sheets are detachably connected to the second connecting assembly, and the plurality of second sub-metal sheets are spaced apart along a first direction in the second reaction space; a second electrode assembly is connected to the second insulating frame, and the second electrode assembly is configured to be electrically connected to the plurality of second sub-metal sheets; wherein, when the first insulating frame and the second insulating frame are connected, the first reaction space and the second reaction space overlap, at least one second sub-metal sheet is inserted between two adjacent first sub-metal sheets, and among the plurality of spaced sub-metal sheets, any two adjacent sub-metal sheets are configured to be connected to power sources of different polarities to have opposite polarities.

[0006] In some embodiments, a first electrode assembly is configured to provide a positive or negative electrode to a plurality of first sub-metal sheets, and a second electrode assembly is configured to provide an electrode opposite to that of the first sub-metal sheets to a plurality of second sub-metal sheets. When the first insulating frame and the second insulating frame are connected, each second sub-metal sheet is sequentially inserted between each pair of adjacent first sub-metal sheets. Alternatively, the first electrode assembly is configured to provide both positive and negative electrodes to a plurality of first sub-metal sheets such that the positive and negative electrodes of the plurality of first sub-metal sheets located in the first reaction space are arranged alternately, and the second electrode assembly is configured to provide both positive and negative electrodes to a plurality of second sub-metal sheets such that the positive and negative electrodes of the plurality of second sub-metal sheets located in the second reaction space are arranged alternately. When the first insulating frame and the second insulating frame are connected, each group of consecutive even-numbered second sub-metal sheets is sequentially inserted between each pair of adjacent first sub-metal sheets, and adjacent first sub-metal sheets and second sub-metal sheets are configured with opposite polarities.

[0007] In some embodiments, the first connecting assembly includes: a first link group fixedly connected to a first insulating frame; a second link group movably connected to the first insulating frame, with the first link group and the second link group disposed opposite to each other on both sides of the first insulating frame in a second direction, the second direction being perpendicular to the first direction, at least one of the first link group and the second link group being electrically connected to a first electrode assembly, and a plurality of mutually disconnected first sub-metal plates being respectively connected to the first link group and the second link group at both ends in the first direction; and / or, the second connecting assembly includes: a third link group fixedly connected to a second insulating frame; a fourth link group movably connected to the second insulating frame, with the third link group and the fourth link group disposed opposite to each other on both sides of the second insulating frame in a second direction, at least one of the third link group and the fourth link group being electrically connected to a second electrode assembly, and a plurality of mutually connected second sub-metal plates being wound around the third link group and the fourth link group.

[0008] In some embodiments, when each second sub-metal piece is sequentially inserted between each pair of adjacent first sub-metal pieces, the first linkage group includes: a plurality of first fixing rods, spaced apart along a first direction on the first insulating frame, the plurality of first fixing rods being electrically connected to the first electrode assembly; the second linkage group includes: a plurality of first hanging rods, spaced apart along a first direction, the plurality of first hanging rods being movably connected to the first insulating frame, the first hanging rods corresponding one-to-one with the first fixing rods in a second direction, and the two ends of the first sub-metal piece being detachably connected to the corresponding two first fixing rods and the first hanging rods; when each group of consecutive even-numbered second sub-metal pieces is sequentially inserted between each pair of adjacent first sub-metal pieces, the first linkage group includes: a plurality of second fixing rods, spaced apart along a first direction on the first insulating frame, the plurality of second fixing rods being electrically connected to the first electrode assembly, the first sub-metal piece being detachably connected to the first fixing rods; a plurality of third fixing rods, spaced apart along a first direction on the first insulating frame, the second... The fixing rod is located in the second direction on the side of the third fixing rod near the second link group, and the second and third fixing rods are staggered in the first direction. Multiple third fixing rods are electrically connected to the first electrode assembly, which is configured to provide opposite polarities to the second and third fixing rods. The second link group includes: multiple second hanging rods spaced apart along the first direction, movably connected to the first insulating frame, with each second hanging rod corresponding to a second fixing rod in the second direction; and multiple third hanging rods spaced apart along the first direction, movably connected to the first insulating frame. The second hanging rods are located in the second direction on the side of the third hanging rod near the first link group, with each third hanging rod corresponding to a third fixing rod in the second direction. They are located in any two adjacent first sub-metal plates in the first reaction space, with the two ends of one first sub-metal plate detachably connected to the second fixing rod and the second hanging rod, and the two ends of the other first sub-metal plate detachably connected to the third fixing rod and the third hanging rod, respectively.

[0009] In some embodiments, where each set of an even number of consecutive second sub-metal pieces is sequentially inserted between each pair of adjacent first sub-metal pieces, the first electrode assembly includes: a first electrode block disposed on a first insulating frame, the first electrode block being electrically connected to a plurality of second fixing rods; a second electrode block disposed on the first insulating frame, a first gap being formed between the first electrode block and the second electrode block, the second electrode block being electrically connected to a plurality of third fixing rods, the first electrode block and the second electrode block being configured to have opposite polarities, and the first gap being configured to be greater than the distance between any two adjacent sub-metal pieces when the first insulating frame and the second insulating frame are connected.

[0010] In some embodiments, when each second sub-metal piece is sequentially inserted between each pair of adjacent first sub-metal pieces, the third linkage group includes: multiple sets of first rod groups, spaced apart along a first direction on the second insulating frame, each first rod group including at least one fourth fixing rod, the fourth fixing rod being electrically connected to the second electrode assembly; the fourth linkage group includes: multiple sets of second rod groups, spaced apart along the first direction, the multiple sets of second rod groups being movably connected to the second insulating frame, the multiple sets of second rod groups being staggered with the multiple sets of first rod groups in a second direction, each second rod group including at least one fourth hanging rod, a first preset gap between adjacent first rod groups and second rod groups, and interconnected second sub-metal pieces wound around the fourth fixing rod and the fourth hanging rod, with the second sub-metal pieces located in the second reaction space configured such that their orthogonal projection onto the second insulating frame in the second direction is located at the first preset gap; when each set of two consecutive second sub-metal pieces is sequentially inserted between each pair of adjacent first metal pieces, the third linkage group includes: multiple sets of third rod groups, spaced apart along the first direction on the second insulating frame, each set of third rod groups including two or more fifth fixing rods spaced apart along the first direction. The fifth fixing rod is electrically connected to the second electrode assembly; multiple sets of fourth rods are spaced apart along the first direction on the second insulating frame, each set corresponding to a third rod set. The fourth rod sets are located in the second direction on the side of the third rod sets away from the fourth connecting rod sets, and the distance between any two adjacent sets of fourth rods is less than the distance between any two adjacent sets of third rods. Each set of fourth rods includes two or more sixth fixing rods spaced apart along the first direction. Each set of sixth fixing rods is electrically connected to the second electrode assembly, which is configured to provide opposite current to the fifth and sixth fixing rods. Electrode; The fourth linkage group includes: multiple sets of fifth linkages, spaced apart along a first direction, multiple sets of fifth linkages are movably connected to a second insulating frame, and multiple sets of fifth linkages are staggered with multiple sets of third linkages in a second direction, the fourth linkage and the fifth linkages have a second preset gap in the first direction, the fifth linkage includes two or more fifth hanging rods spaced apart along the first direction, one of which is a second sub-metal plate connected to each other and wrapped around the fifth fixed rod and the fifth hanging rod, and the second sub-metal plate located in the second reaction space is configured such that its orthogonal projection onto the second insulating frame in the second direction is located in the second preset gap;Multiple sets of sixth rods are arranged at intervals along a first direction and are movably connected to a second insulating frame. Each set of sixth rods corresponds one-to-one with a set of fifth rods. In the second direction, the sixth rods are located on the side of the fifth rods away from the third connecting rods, and the distance between any two adjacent sets of sixth rods is less than the distance between any two adjacent sets of fifth rods. The third and sixth rod sets have a third preset gap in the first direction. Each set of sixth rods includes two or more sixth hanging rods arranged at intervals along the first direction. Another interconnected second sub-metal plate is wound around the sixth fixed rod and the sixth hanging rod, and the second sub-metal plate located in the second reaction space is configured such that its orthogonal projection onto the second insulating frame in the second direction is located within the third preset gap.

[0011] In some embodiments, where each set of two consecutive second sub-metal sheets is sequentially inserted between each pair of adjacent first sub-metal sheets, the second electrode assembly includes: a third electrode block disposed on the second insulating frame, the third electrode block being electrically connected to a plurality of fifth fixing rods; a fourth electrode block disposed on the second insulating frame, a second gap being formed between the third electrode block and the fourth electrode block, the fourth electrode block being electrically connected to a plurality of third fixing rods, the third electrode block and the fourth electrode block being configured to have opposite polarities, and the second gap being configured to be greater than the distance between any two adjacent sub-metal sheets when the first insulating frame and the second insulating frame are connected.

[0012] In some embodiments, when the first connecting assembly includes a first link group and a second link group, the first connecting assembly further includes: a first tension adjusting member connected to the first insulating frame and connected to the second link group, the first tension adjusting member being configured to actuate the second link group to keep the first sub-metal sheet connected to the first link group and the second link group in a tensioned state; when the second connecting assembly includes a third link group and a fourth link group, the second connecting assembly further includes: a second tension adjusting member connected to the second insulating frame and connected to the fourth link group, the second tension adjusting member being configured to actuate the fourth link group to keep the second sub-metal sheet connected to the third link group and the fourth link group in a tensioned state.

[0013] In some embodiments, the first tensioning adjustment member includes: a torsion bar rotatably connected to a first insulating frame, the torsion bar being connected to a second linkage group, the torsion bar having a first axis; a torsion spring sleeved on the torsion bar, the torsion spring having a first connecting end and a second connecting end respectively fixedly connected to the torsion bar and the first insulating frame, a first angle being formed between the first connecting end and the first axis and the second connecting end and the first axis; wherein, when the torsion bar is rotated to reduce the first angle to a second angle, one end of the first sub-metal piece is wound around the second linkage group, the rotation direction of the torsion bar being the same as the winding direction of the first sub-metal piece; and / or, the second tensioning adjustment member includes: a carrier plate, a fourth linkage group connected to the carrier plate, the carrier plate being movably connected to the second insulating frame, the carrier plate being configured to be able to approach or move away from the third linkage group in a second direction; an elastic member disposed between the carrier plate and the second insulating frame, wherein when the carrier plate is driven to move towards the third linkage group to deform the elastic member under pressure, the second sub-metal piece is respectively connected to the third linkage group and the fourth linkage group.

[0014] In some embodiments, the device further includes: a plurality of guide posts connected to a first insulating frame; a plurality of guide sleeves having guide holes, each guide post extending into a guide hole and detachably connected to a guide sleeve, the guide sleeves being connected to a second insulating frame, and at least one of a first electrode assembly and a second electrode assembly being connected to a power source; wherein, when one of the second electrode assembly and the first electrode assembly is connected to the power source, the plurality of guide posts are electrically connected to the first electrode assembly, and the guide sleeves are electrically connected to the second electrode assembly.

[0015] Secondly, embodiments of this disclosure also provide a coating apparatus, including the boat structure described above, the boat structure being configured to carry a plurality of metal sheets; and a furnace body having a furnace cavity, the furnace cavity being configured to accommodate the boat structure carrying the metal sheets.

[0016] This disclosure provides a boat structure and coating equipment. During the loading and unloading of metal sheets into and out of the boat structure, a first metal sheet can be loaded and unloaded onto a first boat, and a second metal sheet onto a second boat, respectively. The first and second boats are then combined, allowing multiple sub-metal sheets of the first and second metal sheets to be arranged in a spaced-apart configuration within the reaction space. This method enables the multiple sub-metal sheets in the combined boat structure to achieve double-sided coating within the reaction chamber. Furthermore, during the loading and unloading of the first and second metal sheets onto their respective boats, the large gaps between adjacent sub-metal sheets on each boat facilitate convenient and rapid operation, reducing loading and unloading difficulty and improving work efficiency.

[0017] In addition, at least a portion of the first or second metal sheet may include interconnected sub-metal sheets, which reduces the cutting time for breaking the metal sheet into sub-metal sheets and allows multiple interconnected sub-metal sheets to be quickly removed from the boat together, further improving work efficiency. Attached Figure Description

[0018] The above and other objects, features, and advantages of this disclosure will become more apparent from the more detailed description of the embodiments thereof in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this disclosure and form part of the specification. They are used together with the embodiments of this disclosure to explain the disclosure and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0019] Figure 1 The diagram shown is a schematic diagram of a coating apparatus provided in an embodiment of this disclosure.

[0020] Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure.

[0021] Figure 3 The image shown is a partial exploded view of a boat structure provided in an embodiment of this disclosure.

[0022] Figure 4 The diagram shown is a schematic representation of an application scenario of the boat structure provided in an embodiment of this disclosure.

[0023] Figure 5 The diagram shown is a schematic of a first sub-metal sheet and a second sub-metal sheet arranged in a boat structure according to an embodiment of the present disclosure.

[0024] Figure 6 The diagram shown is a schematic of a first sub-metal sheet and a second sub-metal sheet arranged in a boat structure according to another embodiment of the present disclosure.

[0025] Figure 7 The diagram shown is a schematic representation of a first boat provided in an embodiment of this disclosure.

[0026] Figure 8 The image shown is a top view of a first boat provided in an embodiment of this disclosure.

[0027] Figure 9 The image shown is a top view of a first boat provided in another embodiment of this disclosure.

[0028] Figure 10 The diagram shown is a schematic diagram of a first boat with a first sub-metal sheet arranged in an embodiment of the present disclosure.

[0029] Figure 11 The image shown is a right view of a first boat provided in an embodiment of this disclosure.

[0030] Figure 12 for Figure 11 A magnified view of region A of the first boat shown.

[0031] Figure 13 The diagram shown is a schematic representation of a second boat provided in an embodiment of this disclosure.

[0032] Figure 14 The image shown is a top view of a second boat provided in an embodiment of this disclosure.

[0033] Figure 15 for Figure 14 The diagram shows the second boat with the second sub-metal sheet arranged on it.

[0034] Figure 16 The image shown is a top view of a second boat provided in another embodiment of this disclosure.

[0035] Figure 17 for Figure 16 The diagram shows the second boat with the second sub-metal sheet arranged on it.

[0036] Figure 18 The diagram shown is a schematic diagram of a second tensioning adjustment member in a second boat according to an embodiment of this disclosure.

[0037] Figure label:

[0038] 100. Coating equipment; 10. Boat structure; 20. Furnace body; 201. Furnace cavity; 202. Furnace opening; 1. First boat; 11. First insulating frame; 11a. First reaction space; 12. First connecting assembly; 121. First connecting rod assembly; 1211. First fixing rod; 1212. Second fixing rod; 1213. Third fixing rod; 122. Second connecting rod assembly; 1221. First hanging rod; 1222. Second hanging rod; 1223. Third hanging rod; 13. First electric... Electrode assembly; 131, fifth electrode block; 132, first electrode block; 133, second electrode block; 14, first tension adjustment component; 141, torsion bar; 141a, first axis; 142, torsion spring; 1421, first connecting end; 1422, second connecting end; 143, baffle; 15, guide post; 2, second boat; 21, second insulating frame; 21a, second reaction space; 21b, accommodating space; 22, second connecting assembly; 22a, first preset gap; 221. Third link group; 2211. First link group; 2211a. Fourth fixed link; 2212. Third link group; 2212a. Fifth fixed link; 2213. Fourth link group; 2213a. Sixth fixed link; 222. Fourth link group; 2221. Second link group; 2221a. Fourth hanging rod; 2222. Fifth link group; 2222a. Fifth hanging rod; 2223. Sixth link group; 2223a. Sixth hanging rod; 23. Second electrode assembly; 231 232. Sixth electrode block; 233. Third electrode block; 234. Fourth electrode block; 24. Second tension adjustment component; 241. Carrier plate; 242. Elastic component; 243. Push rod; 25. Guide sleeve; 30. Metal sheet; 301. First metal sheet; 3011. First sub-metal sheet; 302. Second metal sheet; 3021. Second sub-metal sheet; 302a. First second sub-metal sheet; 302b. Second second sub-metal sheet; X, First direction; Y, Second direction. Detailed Implementation

[0039] The technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this disclosure.

[0040] Figure 1 The diagram shown is a schematic diagram of a coating apparatus provided in an embodiment of this disclosure. Figure 2 The diagram shown is a schematic diagram of a boat structure provided in an embodiment of this disclosure. Figure 3 The image shown is a partial exploded view of a boat structure provided in an embodiment of this disclosure. Figure 4 The diagram shown is a schematic representation of an application scenario of the boat structure provided in an embodiment of this disclosure. Figure 5 The diagram shown is a schematic of a first sub-metal sheet and a second sub-metal sheet arranged in a boat structure according to an embodiment of the present disclosure. Figure 6 The diagram shown is a schematic representation of a first and second sub-metal sheet arranged in a boat structure according to another embodiment of this disclosure. For ease of observation, [the diagram is shown in the original text]. Figure 5 and Figure 6 The first metal sheet is represented by a thick solid line, and the second metal sheet by a thin solid line. Arrow X points in the first direction, and arrow Y points in the second direction. The first direction X and the second direction Y are perpendicular to each other and both are perpendicular to the vertical direction.

[0041] This disclosure provides a boat structure, such as Figures 1 to 6 The coating equipment 100 is used in a coating equipment 100, wherein the boat structure 10 is configured to carry at least one metal sheet 30, and the coating equipment 100 is configured to process multiple metal sheets 30 in the boat structure 10.

[0042] It is understood that the coating equipment 100 can be a PECVD equipment. The PECVD equipment includes a furnace body 20 having at least one furnace opening 202. The furnace body 20 has a furnace cavity 201 communicating with the furnace opening 202. A boat structure 10 carrying a metal sheet 30 can enter and exit the furnace cavity 201 from the furnace opening 202. In the furnace cavity 201, the two surfaces of the metal sheet 30 carried in the boat structure 10 along the thickness direction are respectively coated with a silicon-based material to form a positive electrode sheet or a negative electrode sheet for lithium batteries. The specific structure of the coating equipment 100 will not be described in detail.

[0043] Optionally, the metal sheet 30 includes a first metal sheet 301 and a second metal sheet 302. The first metal sheet 301 includes a plurality of first sub-metal sheets 3011 that are interconnected or disconnected, and the second metal sheet 302 includes a plurality of second sub-metal sheets 3021 that are interconnected or disconnected. The first metal sheet 301 and the second metal sheet 302 may have the same or different dimensions. The metal sheet 30 is configured as a thin metal sheet for fabricating electrodes, and its specific material and thickness can be selected according to requirements without specific limitations. For example, the plurality of disconnected first sub-metal sheets 3011 can be understood as a whole first metal sheet 301 cut along its length into multiple unconnected segments at equal or unequal intervals, with each segment serving as a first sub-metal sheet 3011, and the whole first metal sheet 301 before being cut serving as a plurality of interconnected first sub-metal sheets 3011. The definition of the plurality of interconnected or disconnected second sub-metal sheets 3021 can be found in the relevant description of the first sub-metal sheet 3011, and will not be repeated here.

[0044] Specifically, the boat structure 10 includes a first boat 1 and a second boat 2. The first boat 1 includes a first insulating frame 11, a first connecting assembly 12, and a first electrode assembly 13. The first connecting assembly 12 is connected to the first insulating frame 11, and the first connecting assembly 12 and the first insulating frame 11 enclose a first reaction space 11a. A plurality of first sub-metal sheets 3011 are detachably connected to the first connecting assembly 12, and the plurality of first sub-metal sheets 3011 are arranged at intervals along a first direction X in the first reaction space 11a. The first electrode assembly 13 is connected to the first insulating frame 11, and the first electrode assembly 13 is configured to be electrically connected to the plurality of first sub-metal sheets 3011.

[0045] The second boat 2 includes a second insulating frame 21, a second connecting assembly 22, and a second electrode assembly 23. The second insulating frame 21 is detachably connected to the first insulating frame 11. The second connecting assembly 22 is connected to the second insulating frame 21, and the second connecting assembly 22 and the second insulating frame 21 enclose a second reaction space 21a. A plurality of second sub-metal sheets 3021 are detachably connected to the second connecting assembly 22, and the plurality of second sub-metal sheets 3021 are arranged at intervals along a first direction X in the second reaction space 21a. The second electrode assembly 23 is connected to the second insulating frame 21 and is configured to be electrically connected to the plurality of second sub-metal sheets 3021.

[0046] In this configuration, when the first insulating frame 11 and the second insulating frame 21 are connected, the first reaction space 11a and the second reaction space 21a overlap, at least one second sub-metal piece 3021 is inserted between two adjacent first sub-metal pieces 3011, and among the multiple spaced sub-metal pieces, any two adjacent sub-metal pieces are configured to be connected to power sources of different polarities to have opposite polarities.

[0047] The boat structure 10 provided in this disclosure allows for the loading and unloading of metal sheets 30. During this process, the first metal sheet 301 can be loaded and unloaded onto the first boat 1, and the second metal sheet 302 onto the second boat 2. Then, the first boat 1 and the second boat 2 are combined together, so that multiple sub-metal sheets of the first metal sheet 301 and the second metal sheet 302 are arranged in a spaced-apart configuration within the reaction space. This method enables the multiple sub-metal sheets in the combined boat structure 10 to meet the double-sided coating requirements within the reaction chamber. Furthermore, during the loading and unloading of the first metal sheet 301 and the second metal sheet 302 onto their respective boats, the larger gaps between adjacent sub-metal sheets on each boat facilitate quick and easy operation, reducing loading and unloading difficulty and improving work efficiency.

[0048] In addition, at least a portion of the first metal sheet 301 or the second metal sheet 302 may include interconnected sub-metal sheets, which reduces the cutting time for breaking the metal sheet 30 into sub-metal sheets and allows multiple interconnected sub-metal sheets to be quickly removed from the boat together, further improving work efficiency.

[0049] Optionally, the first insulating frame 11 and the second insulating frame 21 can be configured as hollow square frame structures with the same or different structures and dimensions, and the first insulating frame 11 and the second insulating frame 21 can be made of quartz material with insulating properties, without specific limitations.

[0050] Optionally, the two opposite polarities include a positive electrode and a negative electrode. Whether the sub-metal sheet is actually configured as a positive electrode or a negative electrode can be adjusted according to actual needs. As long as the first boat 1 and the second boat 2 are combined together, the positive and negative electrodes of the multiple sub-metal sheets located in the reaction space are arranged alternately along the first direction X, so that when the power is turned on, glow discharge can be generated between the positive and negative electrodes of the sub-metal sheets in the furnace cavity 201 of the furnace body 20, so that the reaction gas is finally deposited on the surface of the sub-metal sheet, thereby realizing double-sided coating of the sub-metal sheets in the reaction space.

[0051] Optionally, after combining the first boat 1 and the second boat 2, the distance between any two adjacent sub-metal plates can be the same or different. The distance between two adjacent sub-metal plates can be adaptively adjusted according to actual needs.

[0052] It is understood that the first reaction space 11a can refer to the area enclosed by the plurality of first sub-metal sheets 3011 that can be coated within the first metal sheet 301 connected by the first connecting component 12 on the first boat 1, and the second reaction space 21a can refer to the area enclosed by the plurality of second sub-metal sheets 3021 that can be coated within the second metal sheet 302 connected by the second connecting component 22 on the second boat 2. After the first boat 1 and the second boat 2 are combined, the first reaction space 11a and the second reaction space 21a can partially overlap or coincide, without specific limitations.

[0053] In some embodiments, such as Figure 5 The first electrode assembly 13 is configured to provide a positive or negative electrode to a plurality of first sub-metal sheets 3011, and the second electrode assembly 23 is configured to provide an electrode opposite to the first sub-metal sheets 3011 to a plurality of second sub-metal sheets 3021. When the first insulating frame 11 and the second insulating frame 21 are connected, each second sub-metal sheet 3021 is sequentially inserted between each two adjacent first sub-metal sheets 3011.

[0054] In some embodiments, such as Figure 6The first electrode assembly 13 is configured to provide positive and negative electrodes to a plurality of first sub-metal sheets 3011, such that the positive and negative electrodes of the plurality of first sub-metal sheets 3011 located in the first reaction space 11a are arranged alternately. The second electrode assembly 23 is configured to provide positive and negative electrodes to a plurality of second sub-metal sheets 3021, such that the positive and negative electrodes of the plurality of second sub-metal sheets 3021 located in the second reaction space 21a are arranged alternately. When the first insulating frame 11 and the second insulating frame 21 are connected, each group of consecutive even-numbered second sub-metal sheets 3021 is sequentially inserted between each pair of adjacent first sub-metal sheets 3011, and adjacent first sub-metal sheets 3011 and second sub-metal sheets 3021 are configured with opposite polarities.

[0055] It should be emphasized that it is also possible to... Figure 5 The multiple interconnected second sub-metal pieces 3021 are configured as multiple disconnected second sub-metal pieces 3021, and the multiple disconnected first sub-metal pieces 3011 are configured as multiple interconnected first sub-metal pieces 3011. Similarly, it is also possible to... Figure 6 The multiple first sub-metal pieces 3011 that are interconnected are configured as multiple first sub-metal pieces 3011 that are disconnected from each other, and the multiple second sub-metal pieces 3021 that are disconnected from each other are configured as multiple second sub-metal pieces 3021 that are interconnected. The choice can be made according to actual needs and is not specifically limited.

[0056] like Figure 3 and Figure 4 The first connecting assembly 12 includes a first connecting rod group 121 and a second connecting rod group 122. The first connecting rod group 121 is fixedly connected to the first insulating frame 11. The second connecting rod group 122 is movably connected to the first insulating frame 11. The first connecting rod group 121 and the second connecting rod group 122 are arranged opposite to each other on both sides of the first insulating frame 11 in the second direction Y. At least one of the first connecting rod group 121 and the second connecting rod group 122 is electrically connected to the first electrode assembly 13. A plurality of first sub-metal plates 3011 that are disconnected from each other are respectively connected to the first connecting rod group 121 and the second connecting rod group 122 at both ends in the first direction X.

[0057] The second connecting assembly 22 includes a third link group 221 and a fourth link group 222. The third link group 221 is fixedly connected to the second insulating frame 21. The fourth link group 222 is movably connected to the second insulating frame 21. The third link group 221 and the fourth link group 222 are arranged opposite to each other on both sides of the second insulating frame 21 in the second direction Y. At least one of the third link group 221 and the fourth link group 222 is electrically connected to the second electrode assembly 23. A plurality of second sub-metal sheets 3021 connected to each other are wound around the third link group 221 and the fourth link group 222.

[0058] Understandably, in the first boat 1, the first link group 121 and the second link group 122 connect multiple disconnected first sub-metal pieces 3011, and arrange the multiple first sub-metal pieces 3011 at intervals along the first direction X. In the second boat 2, the third link group 221 and the fourth link group 222 connect multiple interconnected second sub-metal pieces 3021, and arrange the multiple second sub-metal pieces 3021 at intervals along the first direction X. This ensures that when the first boat 1 and the second boat 2 are combined, the second sub-metal pieces 3021 can be smoothly inserted between adjacent first sub-metal pieces 3011, and the link groups used to connect the sub-metal pieces will not interfere with the combination of the first boat 1 and the second boat 2.

[0059] Optionally, the first link group 121 and the second link group 122 may also connect a plurality of interconnected first sub-metal plates 3011, and the third link group 221 and the fourth link group 222 may also connect a plurality of disconnected second sub-metal plates 3021, without specific limitation.

[0060] Optionally, when the first metal plate 301 and the second metal plate 302 connected to the first boat 1 and the second boat 2 are both multiple disconnected sub-metal plates, the structures of the first boat 1 and the second boat 2 can be set to be the same. That is, the specific mating structure of the first link group 121 and the second link group 122 in the first boat 1 for connecting the multiple first sub-metal plates 3011 can be the same as the specific mating structure of the third link group 221 and the fourth link group 222 in the second boat 2 for connecting the multiple second sub-metal plates 3021. When one of the first metal plates 301 and the second metal plate 302 connected to the first boat 1 and the second boat 2 is set to multiple interconnected sub-metal plates and the other is set to multiple disconnected sub-metal plates, the structures of the first boat 1 and the second boat 2 can be set to be different and can be adapted to the actual situation.

[0061] The following describes in detail the specific structures of the first boat 1 and the second boat 2 in the boat structure 10, taking the first metal sheet 301 connected to the first boat 1, which includes multiple disconnected first sub-metal sheets 3011, and the second metal sheet 302 connected to the second boat 2, which includes multiple interconnected second sub-metal sheets 3021.

[0062] Figure 7 The diagram shown is a schematic representation of a first boat provided in an embodiment of this disclosure. Figure 8 The image shown is a top view of a first boat provided in an embodiment of this disclosure. Figure 9 The image shown is a top view of a first boat provided in another embodiment of this disclosure. Figure 10 The diagram shown is a schematic diagram of a first boat with a first sub-metal sheet arranged in an embodiment of the present disclosure. Figure 11The image shown is a right view of a first boat provided in an embodiment of this disclosure. Figure 12 for Figure 11 A magnified view of region A of the first boat shown.

[0063] like Figure 5 and Figure 8 When each second sub-metal piece 3021 is sequentially inserted between each two adjacent first sub-metal pieces 3011, the first linkage group 121 includes a plurality of first fixing rods 1211, and the second linkage group 122 includes a plurality of first hanging rods 1221. The plurality of first fixing rods 1211 are arranged at intervals along the first direction X on the first insulating frame 11, and the plurality of first fixing rods 1211 are electrically connected to the first electrode assembly 13. The plurality of first hanging rods 1221 are arranged at intervals along the first direction X, and the plurality of first hanging rods 1221 are movably connected to the first insulating frame 11. The first hanging rods 1221 correspond one-to-one with the first fixing rods 1211 in the second direction Y. The two ends of the first sub-metal piece 3011 are detachably connected to the corresponding two first fixing rods 1211 and the first hanging rods 1221.

[0064] It is understood that the first fixing rod 1211 and the first hanging rod 1221 can be configured as circular rod structures, and the two ends of the first sub-metal piece 3011 can be respectively wrapped around the first fixing rod 1211 and the first hanging rod 1221 and clamped and fixed by clips. Furthermore, the first fixing rod 1211 and the first hanging rod 1221 are provided with limiting blocks at least at a distance away from the first insulating frame 11 to prevent the wrapped first sub-metal piece 3011 from falling off.

[0065] Optionally, the shape of the first fixing rod 1211 and the length of the first hanging rod 1221 extending in the vertical direction can be adaptively adjusted according to the specific size of the first sub-metal piece 3011 to which they are connected, without being specifically limited.

[0066] In an optional embodiment, the first electrode assembly 13 includes a fifth electrode block 131 disposed on the first insulating frame 11. The fifth electrode block 131 is electrically connected to a plurality of first fixing rods 1211, such that a plurality of first sub-metal sheets 3011 wound around the first fixing rods 1211 are configured to have the same polarity as the fifth electrode block 131.

[0067] like Figure 6 , Figure 7 , Figure 9 and Figure 10In the case where an even number of consecutive second sub-metal pieces 3021 are sequentially inserted between each pair of adjacent first sub-metal pieces 3011, the first linkage group 121 includes a plurality of second fixing rods 1212 and a plurality of third fixing rods 1213. The plurality of second fixing rods 1212 are spaced apart along a first direction X on the first insulating frame 11, and are electrically connected to a first electrode assembly 13. The first sub-metal pieces 3011 are detachably connected to the first fixing rods 1211. The plurality of third fixing rods 1213 are spaced apart along the first direction X on the first insulating frame 11. The second fixing rods 1212 are located in the second direction Y on the side of the third fixing rods 1213 closer to the second linkage group 122, and the second fixing rods 1212 and third fixing rods 1213 are staggered in the first direction X. The plurality of third fixing rods 1213 are electrically connected to the first electrode assembly 13, which is configured to provide opposite polarities to the second fixing rods 1212 and the third fixing rods 1213.

[0068] The second linkage group 122 includes multiple second hanging rods 1222 and multiple third hanging rods 1223. The multiple second hanging rods 1222 are arranged at intervals along the first direction X, and the multiple second hanging rods 1222 are movably connected to the first insulating frame 11. The second hanging rods 1222 correspond one-to-one with the second fixed rods 1212 in the second direction Y. Multiple third hanging rods 1223 are arranged at intervals along the first direction X. The multiple third hanging rods 1223 are movably connected to the first insulating frame 11. The second hanging rod 1222 is located on the side of the third hanging rod 1223 near the first connecting rod group 121 in the second direction Y. The third hanging rod 1223 corresponds one-to-one with the third fixed rod 1213 in the second direction Y. It is located in any two adjacent first sub-metal pieces 3011 in the first reaction space 11a. The two ends of one of the first sub-metal pieces 3011 are detachably connected to the second fixed rod 1212 and the second hanging rod 1222, respectively. The two ends of the other first sub-metal piece 3011 are detachably connected to the third fixed rod 1213 and the third hanging rod 1223, respectively.

[0069] It is understandable that the staggered arrangement of each adjacent second fixed rod 1212 and third fixed rod 1213 in the second direction Y, and the staggered arrangement of each adjacent second hanging rod 1222 and third hanging rod 1223 in the second direction Y, ensures that each of the second fixed rod 1212, third fixed rod 1213, second hanging rod 1222, and third hanging rod 1223 has a certain amount of empty space around it. This facilitates the operator to wrap and fix the first sub-metal sheet 3011 onto the corresponding rod, further improving the metal sheet loading efficiency. Furthermore, when assembling the first boat 1 and the second boat 2, the arrangement of the second fixed rod 1212, third fixed rod 1213, second hanging rod 1222, and third hanging rod 1223 provides clearance space for the linkage assembly on the second boat 2, avoiding interference.

[0070] In an optional embodiment, the first electrode assembly 13 includes a first electrode block 132 and a second electrode block 133 disposed on the first insulating frame 11. The first electrode block 132 is electrically connected to a plurality of second fixing rods 1212, and the second electrode block 133 is electrically connected to a plurality of third fixing rods 1213. A first gap exists between the first electrode block 132 and the second electrode block 133. The first electrode block 132 and the second electrode block 133 are configured to have opposite polarities, and the first gap is configured to be greater than the distance between any two adjacent sub-metal sheets when the first insulating frame 11 and the second insulating frame 21 are connected.

[0071] like Figure 11 and Figure 12 The first boat 1 also includes a first tension adjustment member 14, which is connected to the first insulating frame 11 and connected to the second linkage group 122. The first tension adjustment member 14 is configured to drive the second linkage group 122 to keep the first sub-metal plate 3011 connected to the first linkage group 121 and the second linkage group 122 in a tensioned state.

[0072] It is understandable that during the process of placing the boat structure 10 into the furnace cavity 201 to coat the metal sheet, the multiple first sub-metal sheets 3011 are easily extended along the length direction when heated. The first tension adjustment member 14 can drive the second linkage group 122 to move so that the extended first sub-metal sheets 3011 can still maintain a tensioned state, thereby ensuring the coating effect.

[0073] Specifically, the first tensioning adjustment member 14 includes a torsion bar 141 and a torsion spring 142. The torsion bar 141 is rotatably connected to the first insulating frame 11 and is connected to the second linkage group 122. The torsion bar 141 has a first axis 141a. The torsion spring 142 is sleeved on the torsion bar 141 and has a first connecting end 1421 and a second connecting end 1422 that are respectively fixedly connected to the torsion bar 141 and the first insulating frame 11. A first angle is formed between the first connecting end 1421 and the first axis 141a and the second connecting end 1422 and the first axis 141a. When the torsion bar 141 is rotated to reduce the first angle to a second angle, one end of the first sub-metal piece 3011 is wound around the second linkage group 122. The rotation direction of the torsion bar 141 is the same as the winding direction of the first sub-metal piece 3011.

[0074] Optionally, multiple torsion bars 141 and torsion springs 142 can be provided, and each set of torsion bars 141 and torsion springs 142 can be connected to a hanging rod so that each first sub-metal piece 3011 connected to the hanging rod can always be kept in a taut state.

[0075] Optionally, the first tension adjustment member 14 may also include a plurality of baffles 143, each baffle 143 being connected to the first insulating frame 11 and extending to one side of a hanging rod, with the baffle 143 and the side wall of the hanging rod being clearance-fitted.

[0076] Figure 13 The diagram shown is a schematic representation of a second boat provided in an embodiment of this disclosure. Figure 14 The image shown is a top view of a second boat provided in an embodiment of this disclosure. Figure 15 for Figure 14 The diagram shows the second boat with the second sub-metal sheet arranged on it. Figure 16 The image shown is a top view of a second boat provided in another embodiment of this disclosure. Figure 17 for Figure 16 The diagram shows the second boat with the second sub-metal sheet arranged on it. Figure 18 The diagram shown is a schematic diagram of a second tensioning adjustment member in a second boat according to an embodiment of this disclosure.

[0077] like Figure 5 , Figure 14 and Figure 15 When each second sub-metal piece 3021 is sequentially inserted between each two adjacent first sub-metal pieces 3011, the third linkage group 221 includes multiple sets of first linkage groups 2211 and multiple sets of second linkage groups 2221. The multiple sets of first linkage groups 2211 are arranged at intervals along the first direction X on the second insulating frame 21. Each first linkage group 2211 includes at least one fourth fixing rod 2211a, which is electrically connected to the second electrode assembly 23. Multiple sets of second rod groups 2221 are arranged at intervals along the first direction X. The multiple sets of second rod groups 2221 are movably connected to the second insulating frame 21. The multiple sets of second rod groups 2221 are arranged alternately with multiple sets of first rod groups 2211 in the second direction Y. The second rod group 2221 includes at least one fourth hanging rod 2221a. There is a first preset gap 22a between adjacent first rod groups 2211 and second rod groups 2221. The interconnected second sub-metal pieces 3021 are wound around the fourth fixed rod 2211a and the fourth hanging rod 2221a. The second sub-metal pieces 3021 located in the second reaction space 21a are configured such that their orthogonal projection in the second direction Y toward the second insulating frame 21 is located in the first preset gap 22a.

[0078] In an optional embodiment, the second electrode assembly 23 includes a sixth electrode block 231 disposed on the second insulating frame 21. The sixth electrode block 231 is electrically connected to a plurality of fourth fixing rods 2211a, such that the second sub-metal sheet 3021 wound around the fourth fixing rods 2211a is configured to have the same polarity as the sixth electrode block 231.

[0079] like Figure 4 , Figure 16 and Figure 17When two consecutive second sub-metal pieces 3021 are sequentially inserted between two adjacent first sub-metal pieces 3011, the third link group 221 includes multiple third link groups 2212 and multiple fourth link groups 2213. The multiple third link groups 2212 are arranged at intervals along the first direction X on the second insulating frame 21. Each third link group 2212 includes two or more fifth fixing rods 2212a arranged at intervals along the first direction X. The fifth fixing rods 2212a are electrically connected to the second electrode assembly 23. Multiple sets of fourth rod groups 2213 are spaced apart along the first direction X on the second insulating frame 21. Each set of fourth rod groups 2213 corresponds to a third rod group 2212. The fourth rod groups 2213 are located on the side of the third rod group 2212 away from the fourth connecting rod group 222 in the second direction Y. The distance L2 between any two adjacent sets of fourth rod groups 2213 is less than the distance L1 between any two adjacent sets of third rod groups 2212. Each set of fourth rod groups 2213 includes two or more sixth fixed rods 2213a spaced apart along the first direction X. Each set of sixth fixed rods 2213a is electrically connected to the second electrode assembly 23. The second electrode assembly 23 is configured to provide opposite electrodes to the fifth fixed rod 2212a and the sixth fixed rod 2213a.

[0080] The fourth linkage group 222 includes multiple fifth linkage groups 2222 and multiple sixth linkage groups 2223. The multiple fifth linkage groups 2222 are arranged at intervals along the first direction X. The multiple fifth linkage groups 2222 are movably connected to the second insulating frame 21. The multiple fifth linkage groups 2222 are staggered with multiple third linkage groups 2212 in the second direction Y. The fourth linkage group 2213 and the fifth linkage group 2222 have a second preset gap in the first direction X. The fifth linkage group 2222 includes two or more fifth hanging rods 2222a arranged at intervals along the first direction X. One of the interconnected second sub-metal pieces 3021 (as the first second sub-metal piece 302a) is wound around the fifth fixed rod 2212a and the fifth hanging rod 2222a. The second sub-metal piece 3021 located in the second reaction space 21a is configured such that its orthographic projection in the second direction Y toward the second insulating frame 21 is located at the second preset gap. Multiple sets of sixth rod groups 2223 are arranged at intervals along the first direction X. These sets of sixth rod groups 2223 are movably connected to the second insulating frame 21. Each set of sixth rod groups 2223 corresponds one-to-one with a set of fifth rod groups 2222. The sixth rod groups 2223 are located in the second direction Y on the side of the fifth rod group 2222 away from the third connecting rod group 221. The distance between any two adjacent sets of sixth rod groups 2223 is less than the distance between any two adjacent sets of fifth rod groups 2222. The third rod group 2212 and the sixth rod group 222... 3. In the first direction X, there is a third preset gap. Each group of sixth rods 2223 includes two or more sixth hanging rods 2223a arranged at intervals along the first direction X. Another interconnected second sub-metal piece 3021 (as a second second sub-metal piece 302b) is wound around the sixth fixed rod 2213a and the sixth hanging rod 2223a. The second sub-metal piece 3021 located in the second reaction space 21a is configured such that the orthogonal projection of the second insulating frame 21 in the second direction Y is located in the third preset gap.

[0081] It is understandable that the first preset gap 22a, the second preset gap and the third preset gap can be equal to or slightly greater than the thickness of the wound second sub-metal sheet 3021.

[0082] In an optional embodiment, the second electrode assembly 23 includes a third electrode block 232 and a fourth electrode block 233. The third electrode block 232 is disposed on the second insulating frame 21 and is electrically connected to a plurality of fifth fixing rods 2212a. The fourth electrode block 233 is disposed on the second insulating frame 21, and a second gap is formed between the third electrode block 232 and the fourth electrode block 233. The fourth electrode block 233 is electrically connected to a plurality of third fixing rods 1213. The third electrode block 232 and the fourth electrode block 233 are configured to have opposite polarities, and the second gap is configured to be greater than the distance between any two adjacent sub-metal sheets when the first insulating frame 11 and the second insulating frame 21 are connected.

[0083] like Figure 13 and Figure 18 The second connecting assembly 22 also includes a second tension adjusting member 24, which is connected to the second insulating frame 21 and connected to the fourth link group 222. The second tension adjusting member 24 is configured to drive the fourth link group 222 to keep the second sub-metal plate 3021 connected to the third link group 221 and the fourth link group 222 in a tensioned state.

[0084] Specifically, the second tension adjustment member 24 includes a carrier plate 241 and an elastic member 242. The fourth linkage group 222 is connected to the carrier plate 241, and the carrier plate 241 is movably connected to the second insulating frame 21. The carrier plate 241 is configured to move closer to or further away from the third linkage group 221 along the second direction Y. The elastic member 242 is disposed between the carrier plate 241 and the second insulating frame 21. When the carrier plate 241 is driven to move closer to the third linkage group 221, causing the elastic member 242 to be deformed under pressure, the second sub-metal piece 3021 is connected to the third linkage group 221 and the fourth linkage group 222 respectively.

[0085] Optionally, the second insulating frame 21 may enclose a vertically penetrating accommodating space 21b on the side where the fourth link assembly 222 is located, and the carrier plate 241 is located in the accommodating space 21b. The carrier plate 241 may be slidably connected to the second insulating frame 21 so that the carrier plate 241 can slide relative to the second insulating frame 21 in the second direction Y to move closer to or away from the third link assembly 221.

[0086] Optionally, the second tension adjustment member 24 may also include a push rod 243. The second insulating frame 21 is provided with a through hole communicating with the accommodating space 21b. The push rod 243 is movably connected to the through hole so that the length of the push rod 243 extending into the accommodating space 21b can be adjusted by pushing the push rod 243 under the action of external force. The push rod 243 is located on the side of the carrier plate 241 away from the elastic member 242 in the second direction Y. Pushing the push rod 243 along the second direction Y towards the direction closer to the third linkage group 221, the end of the push rod 243 located in the accommodating space 21b can abut against the carrier plate 241 and drive the carrier plate 241 to slide towards the direction closer to the third linkage group 221. The elastic member 242 is compressed and deformed until the fourth linkage group 222 is moved to a position where the second sub-metal piece 3021 can be wound. After the second sub-metal piece 3021 is wound around the fourth linkage group 222 and the third linkage group 221, the external force of the push rod 243 is removed. Under the restoring force of the elastic member 242, the second sub-metal piece 3021 can always be kept in a tensioned state.

[0087] like Figure 2 and Figure 3The boat structure 10 also includes a plurality of guide posts 15 and a plurality of guide sleeves 25. The plurality of guide posts 15 are connected to the first insulating frame 11, and the plurality of guide sleeves 25 are provided with guide holes. Each guide post 15 extends into the guide hole and is detachably connected to the guide sleeve 25. The guide sleeve 25 is connected to the second insulating frame 21. At least one of the first electrode assembly 13 and the second electrode assembly 23 is connected to a power source.

[0088] Understandably, when assembling the first boat 1 and the second boat 2, simply matching and connecting the guide post 15 and the guide sleeve 25 one by one can easily and quickly complete the assembly of the two boats, complete the insertion of the first sub-metal piece 3011 and the second sub-metal piece 3021, and improve efficiency.

[0089] In addition, when only one of the second electrode assembly 23 and the first electrode assembly 13 is powered on, the plurality of guide posts 15 are electrically connected to the first electrode assembly 13, and the guide sleeve 25 is electrically connected to the second electrode assembly 23.

[0090] For example, the first electrode block 132 in the first electrode assembly 13 can be electrically connected to the third electrode block 232 through the cooperation of a set of guide posts 15 and guide sleeves 25, and the second electrode block 133 in the first electrode assembly 13 can be electrically connected to the fourth electrode block 233 through the cooperation of another guide post 15 and guide sleeves 25. The third electrode block 232 and the fourth electrode block 233 of the second electrode assembly 23 are respectively connected to the power supply so that one of the third electrode block 232 and the fourth electrode block 233 is the positive electrode and the other is the negative electrode.

[0091] This disclosure also provides a coating apparatus, such as Figure 1 and Figure 2 The coating equipment 100 includes a boat structure 10 and a furnace body 20. The boat structure 10 is configured to carry a plurality of metal sheets 30, and the furnace body 20 has a furnace cavity 201 configured to accommodate the boat structure 10 carrying the metal sheets 30.

[0092] It is understood that the boat structure 10 can be referred to the relevant descriptions of the above embodiments, and will not be repeated here.

[0093] In the embodiments of this disclosure, unless otherwise specified, the connection can be a detachable connection using bolts and nuts, screws, clips, magnetic attraction, etc. In some connections where there is no particular requirement for a detachable fit, a non-detachable connection can be achieved through welding, bonding, or other methods.

[0094] The basic principles of this disclosure have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this disclosure are merely examples and not limitations, and should not be considered as essential features of each embodiment of this disclosure. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the scope of this disclosure to the necessity of employing the aforementioned specific details for implementation.

[0095] The block diagrams of devices, apparatuses, devices, and systems disclosed herein are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0096] It should also be noted that in the apparatus, devices, and methods of this disclosure, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions to this disclosure.

[0097] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of this disclosure. Therefore, this disclosure is not intended to be limited to the aspects shown herein, but rather to be carried out within the widest scope consistent with the principles and novel features disclosed herein.

[0098] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this disclosure to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations therein.

Claims

1. A boat structure, characterized in that, Configured to support multiple metal sheets, the boat structure includes a first boat and a second boat, the metal sheets include a first metal sheet and a second metal sheet, the first metal sheet includes a plurality of first sub-metal sheets that are interconnected or disconnected, and the second metal sheet includes a plurality of second sub-metal sheets that are interconnected or disconnected, wherein... The first vessel includes: First insulating frame; A first connecting component is connected to the first insulating frame. The first connecting component and the first insulating frame enclose a first reaction space. A plurality of first sub-metal sheets are detachably connected to the first connecting component, and the plurality of first sub-metal sheets are spaced apart in the first reaction space along a first direction. A first electrode assembly is connected to the first insulating frame, and the first electrode assembly is configured to be electrically connected to a plurality of first sub-metal sheets; The second vessel includes: The second insulating frame is detachably connected to the first insulating frame; The second connecting component is connected to the second insulating frame. The second connecting component and the second insulating frame enclose a second reaction space. A plurality of second sub-metal sheets are detachably connected to the second connecting component, and the plurality of second sub-metal sheets are spaced apart in the second reaction space along the first direction. A second electrode assembly is connected to the second insulating frame, and the second electrode assembly is configured to be electrically connected to a plurality of second sub-metal sheets; In this configuration, when the first insulating frame and the second insulating frame are connected, the first reaction space and the second reaction space overlap, at least one second sub-metal sheet is inserted between two adjacent first sub-metal sheets, and among a plurality of spaced sub-metal sheets, any two adjacent sub-metal sheets are configured to be connected to power sources of different polarities to have opposite polarities.

2. The boat structure according to claim 1, characterized in that, The first electrode assembly is configured to provide a positive or negative electrode to a plurality of first sub-metal sheets, and the second electrode assembly is configured to provide an electrode opposite to that of the first sub-metal sheets to a plurality of second sub-metal sheets. When the first insulating frame and the second insulating frame are connected, each second sub-metal sheet is sequentially inserted between each two adjacent first sub-metal sheets. or, The first electrode assembly is configured to provide positive and negative electrodes to a plurality of first sub-metal sheets such that the positive and negative electrodes of the plurality of first sub-metal sheets located in the first reaction space are arranged alternately. The second electrode assembly is configured to provide positive and negative electrodes to a plurality of second sub-metal sheets such that the positive and negative electrodes of the plurality of second sub-metal sheets located in the second reaction space are arranged alternately. When the first insulating frame and the second insulating frame are connected, each group of consecutive even-numbered second sub-metal sheets is sequentially inserted between each pair of adjacent first sub-metal sheets, and adjacent first sub-metal sheets and second sub-metal sheets are configured with opposite polarities.

3. The boat structure according to claim 2, characterized in that, The first connection component includes: The first link assembly is fixedly connected to the first insulating frame; A second linkage group is movably connected to the first insulating frame, and the first linkage group and the second linkage group are disposed opposite each other on both sides of the first insulating frame in a second direction perpendicular to the first direction. At least one of the first linkage group and the second linkage group is electrically connected to the first electrode assembly. A plurality of mutually disconnected first sub-metal plates are respectively connected to the first linkage group and the second linkage group at both ends in the first direction; and / or, The second connection component includes: The third link assembly is fixedly connected to the second insulating frame; The fourth link group is movably connected to the second insulating frame, and the third link group and the fourth link group are disposed opposite to each other on both sides of the second insulating frame in the second direction. At least one of the third link group and the fourth link group is electrically connected to the second electrode assembly, and a plurality of second sub-metal sheets connected to each other are wound around the third link group and the fourth link group.

4. The boat structure according to claim 3, characterized in that, When each of the second sub-metal pieces is sequentially inserted between each two adjacent first sub-metal pieces The first linkage assembly includes: A plurality of first fixing rods are arranged at intervals along the first direction on the first insulating frame, and the plurality of first fixing rods are electrically connected to the first electrode assembly; The second linkage assembly includes: Multiple first hanging rods are arranged at intervals along the first direction. The multiple first hanging rods are movably connected to the first insulating frame. The first hanging rods correspond one-to-one with the first fixed rods in the second direction. The two ends of the first sub-metal plate are detachably connected to the corresponding two first fixed rods and the first hanging rods. In the case where each consecutive even number of second sub-metal pieces are inserted between each pair of adjacent first sub-metal pieces, The first linkage assembly includes: A plurality of second fixing rods are arranged at intervals along the first direction on the first insulating frame, the plurality of second fixing rods are electrically connected to the first electrode assembly, and the first sub-metal sheet is detachably connected to the first fixing rods; A plurality of third fixing rods are spaced apart along the first direction on the first insulating frame. The second fixing rod is located on the side of the third fixing rod closer to the second connecting rod group in the second direction, and the second fixing rod and the third fixing rod are staggered in the first direction. The plurality of third fixing rods are electrically connected to the first electrode assembly, which is configured to provide opposite polarities to the second fixing rod and the third fixing rod. The second linkage assembly includes: Multiple second hanging rods are arranged at intervals along the first direction, and the multiple second hanging rods are movably connected to the first insulating frame. The second hanging rods correspond one-to-one with the second fixed rods in the second direction. Multiple third hanging rods are arranged at intervals along the first direction. The multiple third hanging rods are movably connected to the first insulating frame. The second hanging rod is located on the side of the third hanging rod closer to the first connecting rod group in the second direction. The third hanging rod corresponds one-to-one with the third fixed rod in the second direction and is located in any two adjacent first sub-metal plates in the first reaction space. The two ends of one of the first sub-metal plates are detachably connected to the second fixed rod and the second hanging rod, respectively. The two ends of the other first sub-metal plate are detachably connected to the third fixed rod and the third hanging rod, respectively.

5. The boat structure according to claim 4, characterized in that, In the case where each consecutive even number of second sub-metal pieces are inserted between each pair of adjacent first sub-metal pieces, The first electrode assembly includes: A first electrode block is disposed on the first insulating frame, and the first electrode block is electrically connected to a plurality of second fixing rods; A second electrode block is disposed on the first insulating frame, a first gap is formed between the first electrode block and the second electrode block, the second electrode block is electrically connected to a plurality of the third fixing rods, the first electrode block and the second electrode block are configured to have opposite polarities, and the first gap is configured to be greater than the distance between any two adjacent sub-metal sheets when the first insulating frame and the second insulating frame are connected.

6. The boat structure according to claim 4, characterized in that, When each of the second sub-metal pieces is sequentially inserted between each two adjacent first sub-metal pieces The third linkage assembly includes: Multiple sets of first rod groups are arranged at intervals along the first direction on the second insulating frame. Each first rod group includes at least one fourth fixed rod, which is electrically connected to the second electrode assembly. The fourth linkage assembly includes: Multiple sets of second rods are arranged at intervals along the first direction. The multiple sets of second rods are movably connected to the second insulating frame. The multiple sets of second rods are arranged alternately with the multiple sets of first rods in the second direction. Each second rod set includes at least one fourth hanging rod. There is a first preset gap between adjacent first rod sets and second rod sets. The second sub-metal plates connected to each other are wound around the fourth fixed rod and the fourth hanging rod. The second sub-metal plates located in the second reaction space are configured such that their orthogonal projection onto the second insulating frame in the second direction is located at the first preset gap. In the case where each set of two consecutive second sub-metal pieces is sequentially inserted between each pair of adjacent first sub-metal pieces... The third linkage assembly includes: Multiple sets of third rods are arranged at intervals along the first direction on the second insulating frame. Each set of third rods includes two or more fifth fixed rods arranged at intervals along the first direction. The fifth fixed rods are electrically connected to the second electrode assembly. Multiple sets of fourth rods are spaced apart along the first direction in the second insulating frame. Each set of fourth rods corresponds one-to-one with a set of third rods. The fourth rods are located on the side of the third rods away from the fourth connecting rods in the second direction, and the distance between any two adjacent sets of fourth rods is less than the distance between any two adjacent sets of third rods. Each set of fourth rods includes two or more sixth fixing rods spaced apart along the first direction. Each set of sixth fixing rods is electrically connected to the second electrode assembly, which is configured to provide opposite electrodes to the fifth and sixth fixing rods. The fourth linkage assembly includes: Multiple sets of fifth rods are arranged at intervals along the first direction. The multiple sets of fifth rods are movably connected to the second insulating frame. The multiple sets of fifth rods are staggered with the multiple sets of third rods in the second direction. The fourth rod group and the fifth rod group have a second preset gap in the first direction. The fifth rod group includes two or more fifth hanging rods arranged at intervals along the first direction. A second sub-metal plate connected to each other is wound around the fifth fixed rod and the fifth hanging rod. The second sub-metal plate located in the second reaction space is configured such that its orthogonal projection onto the second insulating frame in the second direction is located at the second preset gap. Multiple sets of sixth rods are arranged at intervals along the first direction. The multiple sets of sixth rods are movably connected to the second insulating frame. The multiple sets of sixth rods correspond one-to-one with the multiple sets of fifth rods. The sixth rods are located on the side of the fifth rods away from the third connecting rods in the second direction, and the distance between any two adjacent sets of sixth rods is less than the distance between any two adjacent sets of fifth rods. The third rods and the sixth rods have a third preset gap in the first direction. Each set of sixth rods includes two or more sixth hanging rods arranged at intervals along the first direction. Another second sub-metal plate connected to each other is wound around the sixth fixed rod and the sixth hanging rod. The second sub-metal plate located in the second reaction space is configured such that its orthogonal projection onto the second insulating frame in the second direction is located in the third preset gap.

7. The boat structure according to claim 6, characterized in that, In the case where each set of two consecutive second sub-metal pieces is sequentially inserted between each pair of adjacent first sub-metal pieces... The second electrode assembly includes: A third electrode block is disposed on the second insulating frame, and the third electrode block is electrically connected to the plurality of the fifth fixing rods; A fourth electrode block is disposed on the second insulating frame. A second gap exists between the third electrode block and the fourth electrode block. The fourth electrode block is electrically connected to a plurality of the third fixing rods. The third electrode block and the fourth electrode block are configured to have opposite polarities, and the second gap is configured to be greater than the distance between any two adjacent sub-metal sheets when the first insulating frame and the second insulating frame are connected.

8. The boat structure according to any one of claims 3-7, characterized in that, In the case where the first connecting assembly includes the first link group and the second link group... The first connection component further includes: A first tension adjustment member is connected to the first insulating frame and is connected to the second linkage group. The first tension adjustment member is configured to drive the second linkage group to keep the first sub-metal plate connected to the first linkage group and the second linkage group in a tensioned state. In the case where the second connecting assembly includes the third link group and the fourth link group... The second connection component also includes: The second tensioning adjustment member is connected to the second insulating frame and is also connected to the fourth linkage group. The second tensioning adjustment member is configured to drive the fourth linkage group to keep the second sub-metal plate connected to the third linkage group and the fourth linkage group in a tensioned state.

9. The boat structure according to claim 8, characterized in that, The first tension adjusting member includes: A torsion bar is rotatably connected to the first insulating frame, the torsion bar is connected to the second linkage group, and the torsion bar has a first axis. A torsion spring is sleeved on the torsion bar. The torsion spring has a first connecting end and a second connecting end that are respectively fixedly connected to the torsion bar and the first insulating frame. There is a first included angle between the first connecting end and the first line connecting the first axis and the second connecting end and the second line connecting the second line connecting the first axis. Wherein, when the torsion bar is rotated to reduce the first included angle to the second included angle, one end of the first sub-metal piece is wound around the second connecting rod assembly, and the rotation direction of the torsion bar is the same as the winding direction of the first sub-metal piece; and / or, The second tension adjusting member includes: A carrier plate, the fourth linkage group is connected to the carrier plate, the carrier plate is movably connected to the second insulating frame, and the carrier plate is configured to move closer to or further away from the third linkage group along the second direction; An elastic element is disposed between the carrier plate and the second insulating frame. When the carrier plate is driven to move toward the third link group to deform the elastic element under pressure, the second sub-metal sheet is respectively connected to the third link group and the fourth link group.

10. The boat structure according to any one of claims 1-7, characterized in that, Also includes: Multiple guide posts are connected to the first insulating frame; Multiple guide sleeves are provided with guide holes, each of the guide posts extends into the guide hole and is detachably connected to the guide sleeve, the guide sleeve is connected to the second insulating frame, and at least one of the first electrode assembly and the second electrode assembly is connected to the power supply; When only one of the second electrode assembly and the first electrode assembly is powered on, the plurality of guide posts are electrically connected to the first electrode assembly, and the guide sleeve is electrically connected to the second electrode assembly.

11. A coating apparatus, characterized in that, include: The boat structure according to any one of claims 1-10, wherein the boat structure is configured to support a plurality of metal sheets; The furnace body has a furnace cavity configured to accommodate a boat structure that carries the metal sheet.

Images