Substrate clamping and carrying device

By introducing a cam follower and a motor-driven height adjustment mechanism into the substrate clamping device, the problem of cumbersome clamping height adjustment in the prior art is solved, achieving fast and flexible clamping adaptability and simplifying the operation process.

CN223665442UActive Publication Date: 2025-12-12ESHER SEMICON TECH (JIANGSU) CO LTD
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Patent Information

Application Number
CN202423241059.8
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-26
Publication Date
2025-12-12
Estimated Expiration
2034-12-26

AI Technical Summary

Technical Problem

Existing substrate clamping devices require cumbersome disassembly and adjustment when dealing with substrates of different heights, making it difficult to achieve fast and efficient clamping adaptability.

Method used

The height adjustment mechanism, which employs a cam follower and a motor-driven mechanism, achieves automatic adjustment of the clamp height through a non-circular groove design. Combined with a double-headed cylinder and a linear sensor, it ensures clamping accuracy and speed.

Benefits of technology

It enables quick adjustment of clamping height without disassembly, improving clamping flexibility and efficiency and simplifying the operation process.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a substrate clamping and carrying device, which relates to the technical field of semiconductor processing, and comprises a mounting seat, a clamp mechanism and a height adjusting mechanism, and the height adjusting mechanism is arranged on the mounting seat; the height adjusting mechanism comprises a cam, a cam follower and a first driving piece used for driving the cam to rotate. The clamp mechanism is arranged at the suspension end of the cam follower; materials are clamped through the clamp mechanism, when the clamping height needs to be adjusted, the cam is driven by the first driving piece to rotate, the cam follower is made to move in the annular groove, and due to the fact that the annular groove is in a non-circular ring shape, when the cam rotates, the height of the cam follower is changed, and the height of the clamp mechanism is adjusted. Therefore, the clamping height of the clamp mechanism is adjusted, the device does not need to be disassembled and assembled, and convenience and rapidness are achieved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor processing, specifically is a substrate clamping and carrying device. BACKGROUND

[0002] The substrate clamping and carrying mechanism is a commonly used mechanism on a semiconductor packaging device, which moves a lead frame or a substrate from a feeding platform to a glue drawing, patching and discharging station to complete a chip mounting process.

[0003] Most of the existing packaging device clamping mechanisms are single-acting clamping or double-acting clamping. The single-acting clamping is that the lower clamping jaw adjusts the working surface to the same height as the track through the adjusting mechanism, and the upper clamping jaw opens and closes to realize the clamping function. When the lead frame has a concave part, the lower clamping jaw working surface needs to be adjusted again, and the clamping jaw working position needs to be corrected after the adjustment. The double-acting clamping is that the upper and lower clamping jaws are driven by electromagnets to act simultaneously to realize the center clamping. When the clamping height of the product is inconsistent, it needs to be disassembled and adjusted, which is complicated.

[0004] Therefore, there is an urgent need for a substrate clamping and carrying device. SUMMARY

[0005] In view of the problems in the prior art, the utility model solves the problems by the following technical structure.

[0006] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme:

[0007] A substrate clamping and carrying device, comprising: a mounting seat, a clamp mechanism and a height adjusting mechanism, the height adjusting mechanism is arranged on the mounting seat;

[0008] The height adjusting mechanism comprises a cam, a cam follower and a first driving member for driving the cam to rotate, the cam is arranged on one side of the mounting seat, the side of the cam away from the mounting seat is provided with a non-circular ring-shaped ring groove, one end of the cam follower is slidably clamped in the ring groove;

[0009] The clamp mechanism is arranged on the suspended end of the cam follower.

[0010] Further features are,

[0011] The first driving member is a motor, the motor is arranged on the mounting seat, and the cam is arranged on the output end of the motor.

[0012] The clamp mechanism comprises a carrier plate, an upper clamp plate, a lower clamp plate and a second driving member, one side of the carrier plate is connected with a cam follower, the upper clamp plate and the lower clamp plate are arranged on the side of the carrier plate away from the cam follower, and the second driving member is used for driving the upper clamp plate and the lower clamp plate to move towards or away from each other.

[0013] One side of the mounting seat is provided with a slide rail extending in the vertical direction, and the upper clamp plate and the lower clamp plate are slidably arranged on the slide rail.

[0014] The slide rail is provided with two slide rails which are arranged in parallel.

[0015] The second driving member is a double-head cylinder, two ends of the double-head cylinder are connected with the upper clamp plate and the lower clamp plate respectively, and the double-head cylinder is arranged on the carrier plate.

[0016] A linear sensor for detecting the distance between the upper clamp plate and the lower clamp plate is arranged between the upper clamp plate and the lower clamp plate.

[0017] A push plate is further arranged on one side of the upper clamp plate, and a material pushing port is arranged at the end of the push plate away from the upper clamp plate.

[0018] One side of the lower clamp plate extends directly below the material pushing port.

[0019] The above structure of the utility model can achieve the following beneficial effects:

[0020] The clamp mechanism is used for clamping the material, when the clamping height needs to be adjusted, the first driving member is used for driving the cam to rotate, the cam follower moves in the ring groove, because the ring groove is not a circular ring, when the cam rotates, the height of the cam follower changes, the height of the clamp mechanism is adjusted, and the clamping height of the clamp mechanism is adjusted, without disassembling the device, the device is convenient and fast. BRIEF DESCRIPTION OF DRAWINGS

[0021] Fig. 1 It is a structural schematic view of the embodiment;

[0022] Fig. 2 It is a structural schematic view of part of the structure in the embodiment;

[0023] Fig. 3 It is a top view of the cam in the embodiment.

[0024] In the figure: 1, mounting seat; 2, clamp mechanism; 21, carrier plate; 22, upper clamp plate; 23, lower clamp plate; 24, slide rail; 25, double-head cylinder; 3, height adjustment mechanism; 31, cam; 311, ring groove; 32, cam follower; 33, motor; 4, push plate; 41, material pushing port. DETAILED DESCRIPTION

[0025] In order to make the person skilled in the art better understand the technical scheme of the present application, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by the person skilled in the art without creative labor should belong to the protection scope of the present application.

[0026] It should be noted that the terms "comprising" and "having" and any variations thereof in the specification and claims of the present application and the above drawings are intended to cover non-exclusive inclusion, for example, a process, method, device, product or equipment comprising a series of steps or units does not have to be limited to the clearly listed steps or units, but can include other steps or units that are not clearly listed or inherent to the process, method, product or equipment.

[0027] The above and other embodiments of the present application will be described in detail below with reference to the accompanying drawings. Figs. 1-3 The present application will be described in further detail.

[0028] Reference will be made to the accompanying drawings Figs. 1-3 As shown in the drawings, a substrate clamping and carrying device comprises a mounting base 1, a clamp mechanism 2 and a height adjusting mechanism 3, the height adjusting mechanism 3 is arranged on the mounting base 1.

[0029] The height adjusting mechanism 3 comprises a cam 31, a cam follower 32 and a first driving member for driving the cam 31 to rotate, the cam 31 is arranged on one side of the mounting base 1, a non-circular ring-shaped ring groove 311 (such as an elliptical ring, etc.) is arranged on the side of the cam 31 away from the mounting base 1, one end of the cam follower 32 is slidingly clamped in the ring groove 311. Fig. 3 As shown in the drawings, the ring groove 311 can be an elliptical ring, etc.), one end of the cam follower 32 is slidingly clamped in the ring groove 311.

[0030] The clamp mechanism 2 is arranged on the suspended end of the cam follower 32.

[0031] Based on the above structure, the material is clamped by the clamp mechanism 2, when the clamping height needs to be adjusted, the cam 31 is driven to rotate by the first driving member, so that the cam follower 32 moves in the ring groove 311. Since the ring groove 311 is a non-circular ring, when the cam 31 rotates, the height of the cam follower 32 changes, so that the height of the clamp mechanism 2 is adjusted, and the clamping height of the clamp mechanism 2 is adjusted. Without disassembling the device, it is convenient and fast.

[0032] Further optimization is that, as Fig. 1As shown, the first driving member can be a motor 33, the motor 33 is arranged on the mounting base 1, the cam 31 is coaxially arranged on the output end of the motor 33, and the motor 33 drives the cam 31 to rotate.

[0033] As shown in Fig. 1 and Fig. 2 The clamp mechanism 2 includes a carrier plate 21, an upper clamp plate 22, a lower clamp plate 23, and a second driving member. One side of the carrier plate 21 is connected with the cam follower 32, the upper clamp plate 22 and the lower clamp plate 23 are arranged on the side of the carrier plate 21 away from the cam follower 32, the second driving member is used to drive the upper clamp plate 22 and the lower clamp plate 23 to move towards or away from each other, the upper clamp plate 22 and the lower clamp plate 23 are arranged in sequence from top to bottom, and the second driving member is used to drive the upper clamp plate 22 and the lower clamp plate 23 to move towards each other to clamp the material. In order to limit the movement of the upper clamp plate 22 and the lower clamp plate 23, a slide rail 24 extending in the vertical direction is arranged on one side of the mounting base 1, the upper clamp plate 22 and the lower clamp plate 23 are both slidingly arranged on the slide rail 24, and the slide rail 24 is provided with two slide rails 24, the two slide rails 24 are arranged in parallel, and the stability of the upper clamp plate 22 and the lower clamp plate 23 is improved.

[0034] Further optimization is that in order to make the upper clamp plate 22 and the lower clamp plate 23 move towards or away from each other synchronously, the second driving member can be a double-head cylinder 25, both ends of the double-head cylinder 25 are connected with the upper clamp plate 22 and the lower clamp plate 23 respectively, the double-head cylinder 25 is arranged on the carrier plate 21, and the control air path of the double-head cylinder 25 adopts three groups of electromagnetic valves for control. The rodless cavity adopts a separate electromagnetic valve for control to realize the fast opening of the clamp mechanism 2. The rod cavity adopts two groups of electromagnetic valves to realize fast and slow speed adjustment. When only one electromagnetic valve is opened, the compressed air passes through the damping hole to slow down, and the clamp mechanism 2 clamps slowly. When two electromagnetic valves act simultaneously, the compressed air avoids the damping hole, and the clamp mechanism 2 realizes fast clamping. The air path part adopts a compact air path block design, the air path block is provided with an inlet connector, an outlet connector and an electromagnetic valve, and the specific air path and the damping hole are designed inside the air path block. In order to obtain the thickness of the clamped material, a linear sensor (for example, a high-precision magnetic induction linear sensor) for detecting the distance between the upper clamp plate 22 and the lower clamp plate 23 is arranged between the upper clamp plate 22 and the lower clamp plate 23.

[0035] As shown in Fig. 1 and Fig. 2As shown, the device further comprises a pushing plate 4 arranged on one side of the upper clamp plate 22, and the pushing plate 4 is provided with a pushing port 41 at the end away from the upper clamp plate 22, and one side of the lower clamp plate 23 extends to the position directly below the pushing port 41, so that when it is needed to push the material on the material track, the device is moved to one side of the material (the state that the upper clamp 22 and the lower clamp 23 are away from each other to avoid interference with the material or scratch the material), and then the upper clamp 22 is driven to descend to the pushing port 41 to be arranged on one side of the material, and then the device is driven to move to one side of the material to push the material, and the pushing plate 4 is installed on the upper clamp 22 through a rotating shaft, and the other end of the rotating shaft is pressed on a force sensor by a steel ball, and when the product pushing process is blocked, the force sensor output value is abnormal, and safety detection can be performed.

[0036] In summary, the material is clamped by the clamp mechanism 2, when it is needed to adjust the clamping height, the first driving member is driven to rotate the cam 31, and the cam follower 32 is moved in the ring groove 311, since the ring groove 311 is a non-circular ring, when the cam 31 rotates, the height of the cam follower 32 changes, so that the height of the clamp mechanism 2 is adjusted, and the clamping height of the clamp mechanism 2 is adjusted, and the device does not need to be disassembled, which is convenient and fast.

[0037] The above is only the preferred embodiment of the application, and the utility model is not limited to the above examples. It can be understood that other improvements and changes directly derived or thought by those skilled in the art without departing from the spirit and concept of the utility model should be considered to be included in the protection scope of the utility model.

Claims

1. A substrate clamping and carrying device, characterized by, The utility model relates to a kind of height-adjustable clamp mechanism, including: mounting seat (1), clamp mechanism (2) and height adjustment mechanism (3), the height adjustment mechanism (3) is set on mounting seat (1); The height adjustment mechanism (3) includes cam (31), cam follower (32) and the first driving piece for driving the rotation of cam (31), the cam (31) is set on the side of mounting seat (1), the cam (31) is set with non-circular ring-shaped ring groove (311) on the side away from mounting seat (1), one end of the cam follower (32) is slidably clamped in ring groove (311); The clamp mechanism (2) is set on the suspended end of cam follower (32). The first driving piece is motor (33), the motor (33) is set on mounting seat (1), and the cam (31) is set on the output end of motor (33).

2. The substrate holding and carrying apparatus according to claim 1, wherein: The clamp mechanism (2) includes carrier plate (21), upper clamp plate (22), lower clamp plate (23) and second driving piece, one side of the carrier plate (21) is connected with cam follower (32), the upper clamp plate (22) and the lower clamp plate (23) are set on the side of carrier plate (21) away from cam follower (32), and the second driving piece is used to drive the movement of upper clamp plate (22) and lower clamp plate (23) towards or away from each other.

3. The substrate handling system of claim 2, wherein: One side of the mounting seat (1) is provided with slide rail (24) extending in vertical direction, and the upper clamp plate (22) and the lower clamp plate (23) are slidably arranged on the slide rail (24).

4. The substrate handling system of claim 3, wherein: The slide rail (24) is provided with two, and the two slide rails (24) are arranged in parallel.

5. The substrate handling system of claim 4, wherein: The second driving piece is double-head cylinder (25), and the two ends of the double-head cylinder (25) are connected with the upper clamp plate (22) and the lower clamp plate (23) respectively, and the double-head cylinder (25) is arranged on the carrier plate (21).

6. The substrate handling system of claim 3, wherein: A linear sensor for detecting the distance between the upper clamp plate (22) and the lower clamp plate (23) is arranged between the upper clamp plate (22) and the lower clamp plate (23).

7. The substrate handling system of claim 3, wherein: The utility model also includes push plate (4), the push plate (4) is set on one side of upper clamp plate (22), and the push plate (4) is provided with push material port (41) on the end away from the upper clamp plate (22).

8. The substrate handling system of claim 3, wherein: One side of the lower clamp plate (23) extends directly below the push material port (41).

9. The substrate handling system of claim 8, wherein: ​