Novel photoetching mask cleaning device
By designing a photomask cleaning device with an automatic positioning and cleaning mechanism, the problems of poor cleaning effect and low efficiency in traditional cleaning methods have been solved. This device achieves efficient all-round cleaning and drying of the photomask, avoiding damage to the photomask.
Patent Information
- Application Number
- CN202423180442.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-12-16
- Estimated Expiration
- 2034-12-23
AI Technical Summary
Traditional photomask cleaning methods result in poor cleaning effects, low efficiency, and easy damage to the photomask.
A photomask cleaning device was designed, which employs a positioning mechanism and a cleaning mechanism to achieve automatic positioning and all-round cleaning of the photomask. The upper and lower surfaces of the photomask are simultaneously cleaned and dried using a water spray housing and an air spray housing.
This method improves the cleaning efficiency of photomasks, avoids mask damage, and enables simultaneous cleaning and drying of the upper and lower surfaces of the mask, thus enhancing the cleaning effect.
Smart Images
Figure CN223669772U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor manufacturing, especially to a new photoetching mask plate cleaning device. BACKGROUND
[0002] In the semiconductor manufacturing process, the cleanliness of the photoetching mask plate is crucial to the quality of the chip. Since the photoetching mask plate will come into contact with various pollutants such as dust, particles and organic matter during use, it needs to be cleaned regularly. However, the traditional cleaning method has the following shortcomings:
[0003] The photoetching mask plate is cleaned by single-sided cleaning with cleaning liquid, and then the staff manually switches the cleaning surface of the photoetching mask plate. Therefore, the traditional cleaning method results in poor cleaning effect and low cleaning efficiency of the photoetching mask plate, and the photoetching mask plate is also easily damaged during the manual cleaning process. SUMMARY
[0004] The utility model discloses a new photoetching mask plate cleaning device, install the photoetching mask plate that needs to be cleaned between two positioning plates clamping, positioning, control second electric motor drive second drive frame moves, and the water spraying shell and the air spraying shell clean the upper and bottom of the photoetching mask plate simultaneously and comprehensively.
[0005] The first aspect of the present disclosure provides a new photoetching mask plate cleaning device, which specifically comprises: a cleaning main body, a set of positioning mechanisms are installed on the inner side of the cleaning main body, the positioning mechanisms are composed of a first electric motor, a first drive frame, a positioning plate and a positioning rod, there are two positioning plates in total, and a photoetching mask plate is installed between the two positioning plates, a set of cleaning mechanisms are installed on the inner side and the outer side of the cleaning main body, the cleaning mechanisms are composed of a second electric motor, a rotating shaft, a second drive frame, a water spraying shell and an air spraying shell, there are two sets of water spraying shells and air spraying shells in total, and the two sets of water spraying shells and air spraying shells are distributed above and below.
[0006] Further, an installation groove is formed on one side of the cleaning main body, and a filter screen is installed on the inner side of the installation groove.
[0007] Further, a stable groove is formed on the inner side of the cleaning main body, the first electric motor is installed inside the stable groove, a gear is installed on the outer side of the drive shaft of the first electric motor, a sliding block is arranged at the bottom position of the first drive frame, the sliding block has a T-shaped structure, two sliding grooves are formed at the bottom position of the cleaning main body, the sliding grooves have a T-shaped structure, the sliding block is installed inside the sliding grooves, there are two first drive frames in total, a set of meshing teeth are arranged on the inner side of the first drive frame, and the meshing teeth are engaged with the gear.
[0008] Further, the upper position of the first driving frame is provided with a positioning plate, one side of the positioning plate is provided with two symmetrically distributed positioning rods, the upper position of the first driving frame is provided with two sliding holes, the positioning rods pass through the interiors of the sliding holes, and one side of the positioning rods is provided with a supporting spring.
[0009] Further, the second electric motor is arranged at the outer side of the cleaning body, one side of the cleaning body is provided with two rotating holes, the two sides of the rotating shaft respectively pass through the interiors of the rotating holes, one side of the rotating shaft is provided with an incomplete gear, the other side of the rotating shaft is provided with a torsion spring, and the bottom position of the second driving frame is provided with a group of meshing teeth.
[0010] Further, the upper position of the cleaning body is provided with a sliding hole, the second driving frame passes through the interior of the sliding hole, one side of the second driving frame is provided with a threaded hole, a threaded rod passes through the interior of the threaded hole, and one side of the threaded rod is connected with the driving shaft of the second electric motor.
[0011] Further, one side of the second driving frame is provided with two stable plates with waist round holes, the outer sides of the water spraying shell and the air spraying shell are respectively provided with a group of threaded rods, the threaded rods pass through the interiors of the waist round holes and are provided with a nut outside.
[0012] Further, the two sides of the rotating shaft are respectively provided with an installation hole, the threaded rods of the bottom water spraying shell and the air spraying shell pass through the installation holes and are provided with a nut outside.
[0013] The novel photoetching mask cleaning device has the following beneficial effects:
[0014] The positioning mechanism is arranged to realize automatic positioning of the photoetching mask, the photoetching mask is simultaneously lifted after positioning, the upper and lower surfaces of the photoetching mask are simultaneously cleaned, the positioning mechanism comprises an electric motor and a spring-supported positioning plate, and the elasticity of the positioning plate avoids damage to the photoetching mask.
[0015] The cleaning mechanism is arranged to realize the effect that the upper and lower surfaces of the photoetching mask are simultaneously cleaned, the cleaning mechanism comprises a group of transversely moving water spraying shells and air spraying shells and a group of oscillating water spraying shells and air spraying shells, the two groups of water spraying shells and air spraying shells are cooperatively driven by gears, the transversely moving water spraying shells and air spraying shells clean and dry the upper surface of the photoetching mask, and the oscillating water spraying shells and air spraying shells clean and dry the bottom surface of the photoetching mask, so that the cleaning and drying efficiency of the two surfaces of the photoetching mask is improved. BRIEF DESCRIPTION OF DRAWINGS
[0016] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings of the embodiments will be briefly introduced.
[0017] The drawings in the following description are merely some embodiments of the present application, and are not a limitation of the present application.
[0018] In the drawings:
[0019] Figure 1 The rear view angle photolithography mask removal rear side structure schematic diagram of the present application is shown.
[0020] Figure 2 The rear view angle photolithography mask removal rear side structure schematic diagram of the present application is shown. Figure 1
[0021] Figure 3 The shaft side schematic diagram of the split structure of the cleaning device of the present application is shown.
[0022] Figure 4 The shaft side schematic diagram of the split structure of the cleaning device of the present application is shown.
[0023] Figure 5 The shaft side structure schematic diagram of the cleaning mechanism of the present application is shown from the bottom view angle.
[0024] Figure 6 The front view structure schematic diagram of the present application is shown. Figure 4
[0025] List of reference signs
[0026] 1, cleaning main body; 101, filter screen;
[0027] 2, positioning mechanism; 201, first electric motor; 202, first driving frame; 203, positioning plate; 204, positioning rod;
[0028] 3, photolithography mask;
[0029] 4, cleaning mechanism; 401, second electric motor; 402, rotating shaft; 403, second driving frame; 404, water spraying shell; 405, air jet shell. DETAILED DESCRIPTION
[0030] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme of the embodiments of the present application will be described clearly and completely below in combination with the drawings of the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the described embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.
[0031] Embodiment one: please refer to Figures 1 to 6 :
[0032] The utility model provides a new photoetching mask plate cleaning device, include: cleaning main body 1, the inside position of cleaning main body 1 installs a set of positioning mechanism 2, and positioning mechanism 2 is by first electric motor 201, first drive frame 202, positioning plate 203 and positioning rod 204 jointly composed, and the inside position of cleaning main body 1 is set with a stable groove, and first electric motor 201 is installed in the inside of stable groove, and stable groove realizes the installation position hiding and stable effect of first electric motor 201, and the drive shaft of first electric motor 201 is installed with a gear in the outside position, and the bottom position of first drive frame 202 is equipped with a sliding block, and the sliding block is T-shaped structure, and the bottom position of cleaning main body 1 is set with two sliding grooves, and the sliding groove is T-shaped structure, and the sliding block is installed in the inside of sliding groove, and the sliding block cooperates sliding groove and realizes the effect that first drive frame 202 circumferential, up and down positioning, and first drive frame 202 moves stably along the sliding groove, and first drive frame 202 has two, and the inside surface of first drive frame 202 is equipped with a set of meshing teeth, and the meshing teeth and gear engage, so control first electric motor 201 can drive two first drive frame 202 synchronous reverse movement;
[0033] In the embodiment of the present disclosure, as shown in the figure, Figures 1 to 6 As shown in the figure, positioning plate 203 has two, and a photoetching mask plate 3 is installed between the two positioning plates 203, a positioning plate 203 is installed above first drive frame 202, two symmetrical positioning rods 204 are arranged on one side of positioning plate 203, two sliding holes are formed above first drive frame 202, positioning rod 204 passes through the inside of the sliding hole, and positioning rod 204 realizes the effect of circumferential positioning of positioning plate 203, a supporting spring is installed outside positioning rod 204, the supporting spring elastically supports positioning plate 203 inward, control first electric motor 201 makes positioning plate 203 quickly position photoetching mask plate 3, and the setting of supporting spring avoids that positioning plate 203 clamps photoetching mask plate 3 and causes injury, an installation groove is formed on one side of cleaning main body 1, a filter screen 101 is installed in the inside of the installation groove, the filter screen 101 filters sewage cleaned by photoetching mask plate 3, so that the cleaned sewage can be recycled;
[0034] In the embodiment of the present disclosure, as shown in the figure, Figures 1 to 6As shown, a set of cleaning mechanisms 4 are installed on the inner and outer sides of the cleaning body 1, the cleaning mechanisms 4 are composed of a second electric motor 401, a rotating shaft 402, a second driving frame 403, a water spraying shell 404 and a gas spraying shell 405, the water spraying shell 404 and the gas spraying shell 405 are in two groups, the two groups of water spraying shell 404 and gas spraying shell 405 are distributed up and down, the second electric motor 401 is installed on the outer side of the cleaning body 1, the second electric motor 401 is stably installed on the outer side of the cleaning body 1 by cooperating with bolts, two rotating holes are opened on one side of the cleaning body 1, the two sides of the rotating shaft 402 respectively pass through the inside of the rotating hole, the rotating shaft 402 rotates in place stably at the position of the rotating hole, an incomplete gear is installed on one side of the rotating shaft 402, a torsion spring is installed on the other side of the rotating shaft 402, a set of meshing teeth are arranged at the bottom position of the second driving frame 403, the meshing teeth and the incomplete gear are engaged, so that the second driving frame 403 can drive the rotating shaft 402 to swing when moving, the rotating shaft 402 is reset by cooperating with the torsion spring, so that the rotating shaft 402 can drive the water spraying shell 404 and the gas spraying shell 405 to reciprocating swing, the water spraying shell 404 and the gas spraying shell 405 clean the bottom of the photomask 3 during the swinging process.
[0035] In the embodiments of the present disclosure, reference is made to Figures 1 to 6 As shown, a sliding hole is opened at the upper position of the cleaning body 1, the second driving frame 403 passes through the inside of the sliding hole, a threaded hole is opened on one side of the second driving frame 403, a threaded rod passes through the inside of the threaded hole, one side of the threaded rod is connected with the driving shaft of the second electric motor 401, the second electric motor 401 is controlled to drive the threaded hole to rotate, the threaded hole can control the second driving frame 403 to stably move transversely along the sliding hole when rotating, two stable plates with waist round holes are arranged on one side of the second driving frame 403, a set of threaded rods are respectively arranged on the outer sides of the water spraying shell 404 and the gas spraying shell 405, a nut is installed on the outside of the threaded rod passing through the waist round hole, the water spraying shell 404 and the gas spraying shell 405 are stably installed on one side of the second driving frame 403 by cooperating with the threaded rod, the second driving frame 403 drives the upper water spraying shell 404 and the gas spraying shell 405 to move synchronously when moving, the water spraying shell 404 and the gas spraying shell 405 clean the upper full range of the photomask 3, an installation hole is respectively opened on the two sides of the rotating shaft 402, the threaded rods of the bottom water spraying shell 404 and the gas spraying shell 405 pass through the installation hole and a nut is installed on the outside, the nut realizes the fastening effect of the installation position of the water spraying shell 404 and the gas spraying shell 405, so that the water spraying shell 404 and the gas spraying shell 405 are stably installed on the outside of the rotating shaft 402, the rotating shaft 402 drives the bottom water spraying shell 404 and the gas spraying shell 405 to swing when swinging, at this time the water spraying shell 404 and the gas spraying shell 405 automatically clean the bottom of the photomask 3.
[0036] Embodiment two, on the basis of embodiment one, reference Figures 1 to 6 As shown, a small water pump commonly used in the prior art cleaning device needs to be selected, a small dryer in the prior art needs to be selected, the discharge hole of the water spraying shell 404 and the air spraying shell 405 is a waist round hole structure, one connecting sleeve is arranged on one side of the water spraying shell 404 and the air spraying shell 405 respectively, the water spraying shell 404 is matched with the connecting sleeve and a small water pump through a flexible pipe, the air spraying shell 405 is matched with the connecting sleeve and a small dryer through a flexible pipe, the water spraying shell 404 is matched with the small water pump to clean the photolithography mask plate 3, after the cleaning of the photolithography mask plate 3 is completed, the air spraying shell 405 is matched with the small dryer to automatically and quickly dry the photolithography mask plate 3.
[0037] The working principle of the embodiment is as follows:
[0038] When the cleaning device is installed, the inner side position of the cleaning main body 1 is first installed with the first electric motor 201, the first driving frame 202, the positioning plate 203 and the positioning rod 204, then the rotating shaft 402 is inserted through the rotating hole of the cleaning main body 1, the threaded rod of the second electric motor 401 is installed on the outer side of the cleaning main body 1, the second driving frame 403 is installed on the upper position of the cleaning main body 1, and the water spraying shell 404 and the air spraying shell 405 are respectively installed on one side of the rotating shaft 402 and the second driving frame 403.
[0039] When the photolithography mask plate 3 is cleaned, the photolithography mask plate 3 to be cleaned is installed between the two positioning plates 203, the first electric motor 201 is controlled to drive the positioning plate 203 to move to clamp and position the photolithography mask plate 3, then the second electric motor 401 is controlled to drive the second driving frame 403 to move, at this time, the second driving frame 403 moves to drive the water spraying shell 404 and the air spraying shell 405 on the top to move synchronously, the water spraying shell 404 and the air spraying shell 405 clean the top of the photolithography mask plate 3 in all directions, the rotating shaft 402 swings to drive the water spraying shell 404 and the air spraying shell 405 at the bottom to swing, at this time, the water spraying shell 404 and the air spraying shell 405 automatically clean the bottom of the photolithography mask plate 3.
[0040] In this paper, the following points need to be noted:
[0041] 1. The drawings of the disclosed embodiment only relate to the structures involved in the disclosed embodiment, and other structures can refer to the general design.
[0042] 2. In the case of no conflict, the embodiments of the disclosure and the features in the embodiments can be combined with each other to obtain new embodiments.
[0043] The above merely describes specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto, and any person skilled in the art can easily think of changes or replacements within the technical scope disclosed by the present disclosure, which should be covered within the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be subject to the protection scope of the claims.
Claims
1. A new photomask cleaning apparatus comprising: The utility model provides a kind of new photoetching mask cleaning device, including cleaning main body (1), positioning mechanism (2) and cleaning mechanism (4), the inside position of the cleaning main body (1) is equipped with a set of positioning mechanism (2), it is characterized in that, positioning mechanism (2) is composed of first electric motor (201), first drive frame (202), positioning plate (203) and positioning rod (204) jointly, positioning plate (203) has two, and one photoetching mask (3) is installed between two positioning plates (203), the inside and outside position of the cleaning main body (1) is equipped with a set of cleaning mechanism (4), and cleaning mechanism (4) is composed of second electric motor (401), rotating shaft (402), second drive frame (403), water spraying shell (404) and air jet shell (405) jointly, and water spraying shell (404), air jet shell (405) have two groups, and two groups of water spraying shell (404), air jet shell (405) are distributed in upper and lower.
2. The new photoetching mask cleaning device according to claim 1, wherein, One mounting groove is formed on one side of the cleaning main body (1), and a filter screen (101) is mounted in the mounting groove.
3. The new photoetching mask cleaning device according to claim 1, wherein, A stable groove is formed on the inside of the cleaning main body (1), the first electric motor (201) is mounted in the stable groove, a gear is mounted on the outside of the drive shaft of the first electric motor (201), a sliding block is arranged at the bottom of the first drive frame (202), two sliding grooves are formed at the bottom of the cleaning main body (1), the sliding block is mounted in the sliding grooves, the first drive frame (202) has two, a set of meshing teeth are arranged on the inner side of the first drive frame (202), and the meshing teeth are engaged with the gear.
4. The new photoetching mask cleaning device according to claim 1, wherein, A positioning plate (203) is mounted above the first drive frame (202), two symmetrically distributed positioning rods (204) are arranged on one side of the positioning plate (203), two sliding holes are formed above the first drive frame (202), the positioning rods (204) pass through the inside of the sliding holes, and a supporting spring is mounted on the outside of the positioning rods (204).
5. The new photoetching mask cleaning device according to claim 1, wherein, The second electric motor (401) is mounted on the outside of the cleaning main body (1), two rotating holes are formed on one side of the cleaning main body (1), the rotating shaft (402) passes through the inside of the rotating holes, an incomplete gear is mounted on one side of the rotating shaft (402), a torsion spring is mounted on the other side of the rotating shaft (402), and a set of meshing teeth are arranged at the bottom of the second drive frame (403), and the meshing teeth are engaged with the incomplete gear.
6. The new photoetching mask cleaning device according to claim 1, wherein, The upper position of the cleaning body (1) is provided with a sliding hole, the second driving frame (403) passes through the inside of the sliding hole, one side of the second driving frame (403) is provided with a threaded hole, the inside of the threaded hole passes through a threaded rod, one side of the threaded rod is connected with the driving shaft of the second electric motor (401).
7. The new photoetching mask cleaning device according to claim 1, wherein, One side of the second driving frame (403) is provided with two stable plates with waist round holes, the outer side of the water spraying shell (404) and the air spraying shell (405) is respectively provided with a group of threaded rods, the threaded rods pass through the waist round holes and internally install a nut on the outer side.
8. The new photoetching mask cleaning device according to claim 1, wherein, The rotating shaft (402) is respectively provided with an installation hole on two sides, the threaded rods of the bottom water spraying shell (404) and the air spraying shell (405) pass through the installation holes and internally install a nut on the outer side.