Aluminum nitride heater

Abstract

The utility model discloses an aluminum nitride heater which comprises an aluminum nitride ceramic base, the upper surface of the aluminum nitride ceramic base is fixedly connected with an inner aluminum nitride ceramic cylinder, a nickel rod is arranged on the outer surface of the inner aluminum nitride ceramic cylinder, and an outer aluminum nitride ceramic cylinder is arranged on the outer surface of the nickel rod. A barrel cover is arranged on the outer surface of the outer aluminum nitride ceramic barrel, a heat insulation ring is fixedly connected to the outer surface of the outer aluminum nitride ceramic barrel, and by arranging a filter screen, the possibility that external impurities enter the inner portion of the inner aluminum nitride ceramic barrel through exhaust holes can be avoided, so that the heating effect of the heater is improved; the filter screen can be detached by arranging a first threaded hole, a bolt and a second threaded hole, the practicability is improved, the outer aluminum nitride ceramic cylinder can be separated by arranging a buckle seat and a connecting assembly, so that damaged parts in the heater can be overhauled, and the cost loss caused by the fact that the whole heater needs to be replaced after being damaged is avoided.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of heater, especially relates to aluminum nitride heater. BACKGROUND

[0002] In the semiconductor chip encapsulation and electronic component manufacturing process, the performance requirement of heater is extremely high, needs fast temperature rise, accurate temperature control and good thermal uniformity. And aluminum nitride becomes the ideal heater material in the semiconductor chip encapsulation and electronic component manufacturing because of its excellent thermal conductivity, good mechanical strength and low thermal expansion coefficient

[0003] But the existing aluminum nitride heater still has certain defects, for example: the air hole on the aluminum nitride is usually exposed outside, which can cause the foreign matter to enter the heater interior through the air hole, and then affect the heating effect of the heater. Secondly, the aluminum nitride heater is usually an integrated structure, which can not be repaired when the internal fault occurs, but the whole heater needs to be replaced, the cost is high, and the practicability is poor. UTILITY MODEL CONTENTS

[0004] The utility model discloses a aluminum nitride heater, can avoid the possibility that the foreign matter enters the aluminum nitride ceramic cylinder interior through the exhaust hole, can improve the heating effect of the heater, can disassemble the filter screen, can improve the practicability, can separate the outer aluminum nitride ceramic cylinder, so that the damaged component in the heater is repaired, avoids the cost loss of needing to replace the whole after being damaged.

[0005] The utility model discloses a aluminum nitride heater, can avoid the possibility that the foreign matter enters the aluminum nitride ceramic cylinder interior through the exhaust hole, can improve the heating effect of the heater, can disassemble the filter screen, can improve the practicability, can separate the outer aluminum nitride ceramic cylinder, so that the damaged component in the heater is repaired, avoids the cost loss of needing to replace the whole after being damaged.

[0006] Aluminum nitride ceramic base, the upper surface of aluminum nitride ceramic base is fixedly connected with inner aluminum nitride ceramic cylinder, the outer surface of inner aluminum nitride ceramic cylinder is provided with nickel bar, the outer surface of nickel bar is provided with outer aluminum nitride ceramic cylinder, the outer surface of outer aluminum nitride ceramic cylinder is provided with cylinder cover, the outer surface of outer aluminum nitride ceramic cylinder is fixedly connected with heat insulation ring, the outer surface of heat insulation ring is fixedly connected with handle, the upper surface of cylinder cover is provided with exhaust hole, the upper surface of cylinder cover is provided with first threaded hole, the inner surface of first threaded hole is threadedly connected with bolt, the outer surface of bolt is threadedly connected with filter screen, the outer surface of outer aluminum nitride ceramic cylinder is fixedly connected with buckle seat.

[0007] The utility model relates to a connecting assembly, including T fixed box, tab, limit board, spring, fixed block, fixed seat, two -way lead screw, limit block, limit ring and hexagonal block, the inner surface of T fixed box is connected with tab slidingly, both ends of spring all are fixedly connected with limit board, the inner surface of fixed seat is rotatably connected with two -way lead screw, the upper surface of limit board is fixedly connected with fixed block, the front end of two -way lead screw is fixedly connected with limit block, the outer surface of two -way lead screw is fixedly connected with limit ring, the rear end of two -way lead screw is fixedly connected with hexagonal block.

[0008] According to the aluminum nitride heater, the outer surface of the filter screen is provided with a second threaded hole, the inner surface of the second threaded hole is matched with the bolt, and the filter screen is convenient to disassemble and replace.

[0009] According to the aluminum nitride heater, the outer surface of the buckle seat is provided with a through hole, the inner surface of the through hole is matched with the T-shaped fixed box, and the speed of installing the outer aluminum nitride ceramic cylinder is improved.

[0010] According to the aluminum nitride heater, the upper surface of the T-shaped fixed box is provided with a limiting groove, the inner surface of the limiting groove is matched with the fixed block, and the movement of the fixed block is limited.

[0011] According to the aluminum nitride heater, the upper surface of the aluminum nitride ceramic base is fixedly connected with the outer aluminum nitride ceramic cylinder, and the nickel rod is electrically connected with the external power supply.

[0012] According to the aluminum nitride heater, the inner surface of the exhaust hole is matched with the filter screen, the upper side of the first threaded hole corresponds to the second threaded hole, and the filter screen is convenient to install.

[0013] According to the aluminum nitride heater, the outer surface of the limiting plate is fixedly connected with the tab, and the outer surface of the two-way lead screw is threadedly connected with the fixed block.

[0014] According to the aluminum nitride heater, the outer surface of the aluminum nitride ceramic base is fixedly connected with the T-shaped fixed box, and the number of the connecting assemblies is two and is distributed on the left and right.

[0015] Compared with the prior art, the utility model has the beneficial effects that:

[0016] By setting the filter screen, the possibility that external impurities enter the inner aluminum nitride ceramic cylinder through the exhaust hole can be avoided, so that the heating effect of the heater is improved, and the filter screen can be disassembled by cooperating the first threaded hole, the bolt and the second threaded hole, so that the practicability is improved.

[0017] By setting the buckle seat and the connecting assembly, the outer aluminum nitride ceramic cylinder can be separated, so that the damaged parts in the heater can be repaired, and the cost loss caused by replacing the whole after damage can be avoided.

[0018] The additional aspects and advantages of the present application will be in part apparent and in part pointed out hereinafter in the description of the application. BRIEF DESCRIPTION OF DRAWINGS

[0019] The present application will be further described with reference to the drawings and examples.

[0020] Figure 1 It is a whole structure schematic view of the aluminum nitride heater of the present application;

[0021] Figure 2 It is Figure 1 It is an enlarged schematic view of the structure at A in the middle;

[0022] Figure 3 It is a whole structure sectional view of the aluminum nitride heater of the present application;

[0023] Figure 4 It is an exploded schematic view of the whole structure of the aluminum nitride heater of the present application;

[0024] Figure 5 It is a schematic view of the internal partial structure of the aluminum nitride heater of the present application;

[0025] Figure 6 It is an exploded schematic view of the internal partial structure of the aluminum nitride heater of the present application.

[0026] LEGEND:

[0027] 1, aluminum nitride ceramic base; 2, inner aluminum nitride ceramic cylinder; 3, nickel rod; 4, outer aluminum nitride ceramic cylinder; 5, heat insulation ring; 6, handle; 7, cylinder cover; 8, exhaust hole; 9, first threaded hole; 10, bolt; 11, filter screen; 12, buckle seat; 13, connecting assembly; 14, T-shaped fixing box; 15, protruding block; 16, limiting plate; 17, spring; 18, fixing block; 19, fixing seat; 20, bidirectional lead screw; 21, limiting block; 22, limiting ring; 23, hexagonal block; 24, second threaded hole; 25, through hole; 26, limiting groove. DETAILED DESCRIPTION

[0028] This part will describe the specific embodiments of the present application in detail, the preferred embodiments of the present application are shown in the drawings, the role of the drawings is to supplement the description of the text part with figures, so that people can intuitively and visually understand each technical feature and the overall technical scheme of the present application, but it cannot be understood as the limitation of the protection scope of the present application.

[0029] Referring to Figures 1-6The utility model discloses aluminium nitride heater, it includes: aluminium nitride ceramic base 1, the upper surface fixed connection of aluminium nitride ceramic base 1 has inner aluminium nitride ceramic cylinder 2, the outer surface of inner aluminium nitride ceramic cylinder 2 is provided with nickel bar 3, the outer surface of nickel bar 3 is provided with outer aluminium nitride ceramic cylinder 4, the outer surface of outer aluminium nitride ceramic cylinder 4 is provided with cylinder cover 7, the outer surface fixed connection of outer aluminium nitride ceramic cylinder 4 has heat insulating ring 5, the outer surface fixed connection of heat insulating ring 5 has handle 6, the upper surface of cylinder cover 7 is provided with exhaust hole 8, the upper surface of cylinder cover 7 is provided with first threaded hole 9, the inner surface threaded connection of first threaded hole 9 has bolt 10, the outer surface threaded connection of bolt 10 has filter screen 11, the outer surface fixed connection of outer aluminium nitride ceramic cylinder 4 has buckle seat 12, the outer surface of filter screen 11 is provided with second threaded hole 24, the inner surface of second threaded hole 24 is adapted with bolt 10, the outer surface of buckle seat 12 is provided with through -hole 25, the upper surface of aluminium nitride ceramic base 1 is fixedly connected with outer aluminium nitride ceramic cylinder 4, nickel bar 3 is electrically connected with external power supply, the inner surface of exhaust hole 8 is adapted with filter screen 11, and the upper side of first threaded hole 9 corresponds with second threaded hole 24.

[0030] Connecting assembly 13, connecting assembly 13 includes T-shaped fixed box 14, lug 15, limit plate 16, spring 17, fixed block 18, fixed seat 19, bidirectional screw 20, limit block 21, limit ring 22 and hexagonal block 23, the inner surface of T-shaped fixed box 14 is slidably connected with lug 15, both ends of spring 17 are fixedly connected with limit plate 16, the inner surface of fixed seat 19 is rotatably connected with bidirectional screw 20, the upper surface of limit plate 16 is fixedly connected with fixed block 18, the front end of bidirectional screw 20 is fixedly connected with limit block 21, the outer surface of bidirectional screw 20 is fixedly connected with limit ring 22, the rear end of bidirectional screw 20 is fixedly connected with hexagonal block 23, the inner surface of through -hole 25 is adapted with T-shaped fixed box 14, the upper surface of T-shaped fixed box 14 is provided with limit slot 26, the inner surface of limit slot 26 is adapted with fixed block 18, the outer surface of limit plate 16 is fixedly connected with lug 15, the outer surface of bidirectional screw 20 is screw connected with fixed block 18, the outer surface of aluminium nitride ceramic base 1 is fixedly connected with T-shaped fixed box 14, and the number of connecting assembly 13 is two and is distributed left and right.

[0031] Working principle: the aluminum nitride heater in use, 3 access to external power supply, heat, then heat through 2, 4 transmission, realize the material inside 2 heating, under the action of 11, can avoid foreign impurities through 8 into the inside of 1, so as to improve the service life of the heater, when the heater fails, rotate 23, drive 20 to rotate, then through 18, 16 drive both sides 15 into the inside of 14, and make 17 compression, that is, can remove the restriction of 15 to 12, then pull out 1 downward, that is, can make 4 to separate, make 3 exposed, in order to repair personnel to 3 overhaul, avoid the cost loss of the heater damage need to be replaced directly, overhaul, the outer aluminum nitride ceramic cylinder 4 is sleeved on the outside of the inner aluminum nitride ceramic cylinder 2, and is in contact with the nickel rod 3, then the through hole 25 on the buckle seat 12 is aligned with the T-shaped fixed box 14 and is inserted, when the lug 15 is exposed, reverse rotation hexagonal block 23, that is, can make both sides of the lug 15 expand outward under the resilience of the spring 17 and the cooperation of the bidirectional screw 20, realize the limiting fixed installation of the outer aluminum nitride ceramic cylinder 4 as a whole, simple and convenient.

[0032] The embodiments of the utility model are explained in detail above in combination with the drawings, but the utility model is not limited to the above-mentioned embodiments, and various changes can be made within the knowledge range possessed by the ordinary skilled in the art without departing from the purpose of the utility model.

Claims

1. An aluminum nitride heater, comprising an aluminum nitride ceramic base (1), wherein an inner aluminum nitride ceramic cylinder (2) is fixedly connected to the upper surface of the aluminum nitride ceramic base (1), a nickel rod (3) is disposed on the outer surface of the inner aluminum nitride ceramic cylinder (2), an outer aluminum nitride ceramic cylinder (4) is disposed on the outer surface of the nickel rod (3), and a cylinder cover (7) is disposed on the outer surface of the outer aluminum nitride ceramic cylinder (4), characterized in that, A heat insulation ring (5) is fixedly connected to the outer surface of the outer aluminum nitride ceramic cylinder (4), and a handle (6) is fixedly connected to the outer surface of the heat insulation ring (5). An exhaust hole (8) is provided on the upper surface of the cylinder cover (7), and a first threaded hole (9) is provided on the upper surface of the cylinder cover (7). A bolt (10) is threadedly connected to the inner surface of the first threaded hole (9), and a filter screen (11) is threadedly connected to the outer surface of the bolt (10). A buckle seat (12) is fixedly connected to the outer surface of the outer aluminum nitride ceramic cylinder (4). The connecting assembly (13) includes a T-shaped fixing box (14), a protrusion (15), a limiting plate (16), a spring (17), a fixing block (18), a fixing seat (19), a two-way lead screw (20), a limiting block (21), a limiting ring (22), and a hexagonal block (23). The inner surface of the T-shaped fixing box (14) is slidably connected to the protrusion (15). Both ends of the spring (17) are fixedly connected to the limiting plate (16). The inner surface of the fixing seat (19) is rotatably connected to the two-way lead screw (20). The upper surface of the limiting plate (16) is fixedly connected to the fixing block (18). The front end of the two-way lead screw (20) is fixedly connected to the limiting block (21). The outer surface of the two-way lead screw (20) is fixedly connected to the limiting ring (22). The rear end of the two-way lead screw (20) is fixedly connected to the hexagonal block (23).

2. The aluminum nitride heater according to claim 1, characterized in that, The outer surface of the filter screen (11) is provided with a second threaded hole (24), and the inner surface of the second threaded hole (24) is adapted to the bolt (10).

3. The aluminum nitride heater according to claim 1, characterized in that, The outer surface of the buckle seat (12) is provided with a through hole (25), and the inner surface of the through hole (25) is adapted to the T-shaped fixing box (14).

4. The aluminum nitride heater according to claim 1, characterized in that, The upper surface of the T-shaped fixing box (14) is provided with a limiting groove (26), and the inner surface of the limiting groove (26) is adapted to the fixing block (18).

5. The aluminum nitride heater according to claim 1, characterized in that, The upper surface of the aluminum nitride ceramic base (1) is fixedly connected to the outer aluminum nitride ceramic cylinder (4), and the nickel rod (3) is electrically connected to an external power source.

6. The aluminum nitride heater according to claim 1, characterized in that, The inner surface of the vent (8) is adapted to the filter screen (11), and the upper part of the first threaded hole (9) corresponds to the second threaded hole (24).

7. The aluminum nitride heater according to claim 1, characterized in that, The outer surface of the limiting plate (16) is fixedly connected to the protrusion (15), and the outer surface of the bidirectional lead screw (20) is threadedly connected to the fixing block (18).

8. The aluminum nitride heater according to claim 1, characterized in that, The outer surface of the aluminum nitride ceramic base (1) is fixedly connected to the T-shaped fixing box (14), and the number of the connecting components (13) is two and distributed on the left and right.

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