Waste gas purifier for silane production

Abstract

The utility model discloses a waste gas purifier for silane production, which relates to the technical field of silane production, and comprises a gas inlet pipeline and a purification box, the rear side of the purification box is fixedly connected with a spare box, the top of the spare box is fixedly connected with a sealing plate through a mounting plate, the bottom of the sealing plate penetrates into the spare box, and the spare box is fixedly connected with a gas inlet pipeline. An electric telescopic rod fixedly connected with the mounting plate is arranged on one side of the standby box, and U-shaped frames are arranged on the two sides of the inner wall of the purifying box and the two sides of the inner wall of the standby box correspondingly. And then the adsorption assembly in the saturated state in the purification box is moved into the standby box under the driving of the driving assembly to wait for subsequent replacement, and meanwhile, a new adsorption assembly in the standby box is moved into the purification box, so that the adsorption assembly is conveniently and automatically replaced, the time consumed by replacement is greatly shortened, manpower and material resources are saved, and the production efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silane production, specifically to a waste gas purifier for silane production. BACKGROUND

[0002] Silane is a compound formed by silicon and hydrogen, and is a general term for a series of compounds, which is an important chemical raw material and is mainly used in the semiconductor industry. In the production process of silane, the synthesis of silane gas usually releases a certain amount of waste gas, which contains harmful substances and poses a potential threat to the environment and human health. In order to ensure the environmental protection requirements of the silane production process, the purification treatment of waste gas is particularly important.

[0003] At present, the waste gas purifier usually uses an adsorption assembly to treat the waste gas in the production of silane. However, after the existing adsorption assembly is saturated, it needs to be disassembled and replaced manually, which affects the production efficiency and is time-consuming and laborious. UTILITY MODEL CONTENT

[0004] In view of the shortcomings of the prior art, the utility model provides a waste gas purifier for silane production, which solves the problem that the existing adsorption assembly needs to be disassembled and replaced manually after being saturated, which affects the production efficiency and consumes a lot of manpower and material resources.

[0005] To achieve the above purpose, the utility model is implemented by the following technical scheme: a waste gas purifier for silane production, comprising an air inlet pipeline and a purification tank, the rear side of the purification tank is fixedly connected with a standby tank, the top of the standby tank is fixedly connected with a sealing plate through a mounting plate, and the bottom of the sealing plate penetrates into the interior of the standby tank, one side of the standby tank is provided with an electric telescopic rod fixedly connected with the mounting plate.

[0006] The inner walls of the purification tank and the standby tank are provided with U-shaped frames on both sides, and an adsorption assembly is movably arranged between the two U-shaped frames.

[0007] Preferably, the driving assembly comprises an outer shell, a first motor is fixedly connected to the bottom of the inner wall of the outer shell, a lead screw is fixedly connected to the output end of the first motor, a sliding block is threadedly connected to the surface of the lead screw, the bottom of the sliding block is slidably connected with the bottom of the inner wall of the outer shell, one side of the sliding block is fixedly connected with the outer side of the U-shaped frame, and the two sides of the purification tank and the standby tank are provided with movable grooves matched with the sliding blocks.

[0008] Preferably, a spray tank is fixedly connected to the bottom of the purification tank, a water distribution pipe is fixedly connected to one side of the inner wall of the spray tank, a plurality of spray pipes are communicated on the surface of the water distribution pipe, and spray heads are fixedly connected to the bottom of the spray pipes.

[0009] Preferably, the air inlet of the air inlet pipe is connected with one side of the spray tank, and the side of the spray tank away from the air inlet pipe is connected with a liquid outlet pipe.

[0010] Preferably, the top of the spray tank and the bottom of the purification tank are both provided with a through groove, and the top of the purification tank is connected with an air outlet pipe.

[0011] Preferably, the inner wall of the air inlet pipe is fixedly connected with a filter screen, and the middle part of the filter screen is fixedly connected with a fixed plate.

[0012] Preferably, the surface of the fixed plate is fixedly connected with a second motor through a protective shell, the output end of the second motor is fixedly connected with a connecting rod, one side of the filter screen is provided with a brush plate which is slidingly connected with the outer side of the fixed plate, and one end of the connecting rod is fixedly connected with the surface of the brush plate.

[0013] Preferably, the bottom of the air inlet pipe and one side of the filter screen are connected with a discharge pipe.

[0014] Beneficial effects

[0015] The utility model provides a waste gas purifier for silane production. Compared with prior art, the following beneficial effects are achieved:

[0016] (1) the waste gas purifier for silane production, by the sealing plate is extracted to the standby box, then under the drive of driving assembly the adsorption component in the saturation state in the purification tank is removed to the standby box and waits subsequent replacement, while the new adsorption component in the standby box moves to the purification tank, it is convenient to replace the adsorption component automatically, greatly reduces the time of replacement consumption, saves manpower and material resources, improves production efficiency.

[0017] (2) the waste gas purifier for silane production, in the process that waste gas enters the air inlet pipe, the filter screen removes the large particle material and impurity in waste gas, and the subsequent purification efficiency is improved, and the brush assembly can clean the impurities on the filter screen, prevent the impurities from blocking the filter hole, keep the unobstructed and filtration efficiency of the filter screen. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 It is the schematic view of the utility model structure;

[0019] Figure 2 It is the sectional view of the spray tank structure of the utility model;

[0020] Figure 3 It is the sectional view of the spray tank and air inlet pipe structure of the utility model;

[0021] Figure 4 It is the side view of the internal structure of the air inlet pipe of the utility model;

[0022] Figure 5 It is the schematic view of internal structure of the purification tank and the standby tank of the utility model.

[0023] In the figure: 1, air inlet pipeline; 2, purification tank; 3, standby tank; 4, mounting plate; 5, sealing plate; 6, electric telescopic rod; 7, U-shaped frame; 8, adsorption assembly; 9, drive assembly; 91, shell; 92, first motor; 93, screw rod; 94, sliding block; 95, movable slot; 10, spray tank; 11, water distribution pipe; 12, spray pipe; 13, spray head; 14, liquid outlet pipe; 15, through slot; 16, air outlet pipe; 17, filter screen; 18, fixed plate; 19, second motor; 20, connecting rod; 21, brush plate; 22, discharge pipe. DETAILED DESCRIPTION

[0024] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0025] Embodiment one

[0026] Please refer to Figure 1 、 Figure 2 and Figure 5 , the utility model provides a kind of waste gas purifier for silane production, including air inlet pipeline 1 and purification tank 2, the rear side of purification tank 2 is fixedly connected with standby tank 3, and the rear side of standby tank 3 is hingedly connected with tank door, and the top of standby tank 3 is fixedly connected with sealing plate 5 by mounting plate 4, and the bottom of sealing plate 5 is penetrated to the inside of standby tank 3, for sealing between purification tank 2 and standby tank 3, and one side of standby tank 3 is provided with electric telescopic rod 6 fixedly connected with mounting plate 4, for driving sealing plate 5 to move up and down;

[0027] The inner wall of purification tank 2 and standby tank 3 is provided with U-shaped frame 7 on both sides, and adsorption assembly 8 is movably arranged between two U-shaped frames 7, and adsorption assembly 8 includes activated carbon adsorption net, molecular sieve and HEPA filter screen, and the outer side of each U-shaped frame 7 is provided with drive assembly 9;

[0028] The driving assembly 9 comprises a shell 91 fixed outside the purification tank 2, a first motor 92 fixedly connected to the bottom of the inner wall of the shell 91, and a screw rod 93 fixedly connected to the output end of the first motor 92, and a sliding block 94 threadedly connected to the surface of the screw rod 93, and the bottom of the sliding block 94 is slidably connected to the bottom of the inner wall of the shell 91, and one side of the sliding block 94 is fixedly connected to the outer side of the U-shaped frame 7, and the two sides of the purification tank 2 and the standby tank 3 are provided with movable grooves 95 matched with the sliding block 94.

[0029] The bottom of the purification tank 2 is fixedly connected with a spray tank 10, one side of the inner wall of the spray tank 10 is fixedly connected with a water distribution pipe 11, one side of the water distribution pipe 11 penetrates to the outside of the spray tank 10 through a pipeline and is connected in communication with an external spraying system, a plurality of spray pipes 12 are in communication with the surface of the water distribution pipe 11, and a spray head 13 is fixedly connected to the bottom of the spray pipe 12, the gas inlet of the gas inlet pipeline 1 is in communication with one side of the spray tank 10, and the side of the spray tank 10 away from the gas inlet pipeline 1 is connected with a liquid outlet pipe 14, and the top of the spray tank 10 and the bottom of the purification tank 2 are both provided with a through groove 15, and the top of the purification tank 2 is connected with a gas outlet pipe 16.

[0030] Through the above structure, the pretreated exhaust gas enters the spray tank 10 through the gas inlet pipeline 1, the external spraying liquid sprays into the spray tank 10 through the water distribution pipe 11, the plurality of spray pipes 12 and the spray head 13, fully contacts with the exhaust gas, adsorbs the harmful substances therein, and then the treated exhaust gas enters the purification tank 2, is adsorbed and treated by the adsorption assembly 8, and the purified gas is discharged through the gas outlet pipe 16;

[0031] When the adsorption assembly 8 is in a saturated state, the sealing plate 5 is driven upward by the electric telescopic rod 6, after the sealing plate 5 moves out of the standby tank 3, the driving assemblies on the upper and lower sides are started, the first motor 92 drives the screw rod 93 to rotate, under the sliding guidance of the sliding block 94, the adsorption assembly 8 in a saturated state on the lower side is moved to the standby tank 3, and at the same time, the adsorption assembly 8 in the standby tank 3 is moved into the purification tank 2, after the replacement is completed, the sealing plate 5 is restored to the original position, and the purification work can continue, and at this time, by opening the door of the standby tank 3, the adsorption assembly 8 in a saturated state can be taken out of the U-shaped frame 7, a new adsorption assembly 8 is reinstalled in the standby tank 3 for next replacement and use, so that the adsorption assembly 8 can be automatically replaced, the time consumed for replacement is greatly reduced, manpower and material resources are saved, and production efficiency is improved.

[0032] Example two

[0033] On the basis of example one, please refer to Figures 1 to 4As shown, the inner wall of the air inlet pipeline 1 is fixedly connected with a filter screen 17, the middle part of the filter screen 17 is fixedly connected with a fixed plate 18, the surface of the fixed plate 18 is fixedly connected with a second motor 19 through a protective shell, the output end of the second motor 19 is fixedly connected with a connecting rod 20, one side of the filter screen 17 is provided with a brush plate 21 which is slidingly connected with the outer side of the fixed plate 18, one end of the connecting rod 20 is fixedly connected with the surface of the brush plate 21, and the bottom of the air inlet pipeline 1 and one side of the filter screen 17 are communicated with a discharge pipe 22.

[0034] Through the arrangement of the above structure, when in use, the exhaust gas enters the air inlet pipeline 1, the filter screen 17 removes the large particle substances and impurities in the exhaust gas, improves the subsequent purification efficiency, the second motor 19 is started to drive the connecting rod 20 to rotate, the connecting rod 20 drives the brush plate 21 to rotate, the brush plate 21 sweeps the impurities on the filter screen 17, the valve of the discharge pipe 22 is opened to discharge the impurities cleaned out of the air inlet pipeline 1, prevents the impurities from blocking the filter holes, and maintains the smoothness and filtering efficiency of the filter screen 17.

[0035] Meanwhile, the contents not described in detail in the specification all belong to the prior art known by those skilled in the art, and the model parameters of each electric appliance are not specifically limited, and the conventional equipment suitable for the equipment can be used.

[0036] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A waste gas purifier for silane production, comprising a gas inlet pipe (1) and a purifying tank (2), characterized in that: The rear side of the purification tank (2) is fixedly connected with a standby tank (3), the top of the standby tank (3) is fixedly connected with a sealing plate (5) through a mounting plate (4), and the bottom of the sealing plate (5) penetrates into the inside of the standby tank (3), and one side of the standby tank (3) is provided with an electric telescopic rod (6) fixedly connected with the mounting plate (4); The purification tank (2) and the standby tank (3) are provided with U-shaped frames (7) on the two sides of the inner wall, and an adsorption assembly (8) is movably arranged between the two U-shaped frames (7), and the outer side of each U-shaped frame (7) is provided with a driving assembly (9).

2. A waste gas cleaner for silane production according to claim 1, characterized in that: The driving assembly (9) comprises a housing (91), a first motor (92) is fixedly connected to the bottom of the inner wall of the housing (91), and the output end of the first motor (92) is fixedly connected with a lead screw (93), and the surface of the lead screw (93) is threadedly connected with a sliding block (94), one side of the sliding block (94) is fixedly connected with the outer side of the U-shaped frame (7), and the two sides of the purification tank (2) and the standby tank (3) are provided with movable grooves (95) matched with the sliding block (94).

3. A waste gas cleaner for silane production according to claim 1, characterized in that: The bottom of the purification tank (2) is fixedly connected with a spray tank (10), and one side of the inner wall of the spray tank (10) is fixedly connected with a water distribution pipe (11), a plurality of spray pipes (12) are communicated on the surface of the water distribution pipe (11), and a spray head (13) is fixedly connected to the bottom of the spray pipe (12).

4. A waste gas cleaner for silane production according to claim 3, characterized in that: The gas inlet of the air inlet pipeline (1) is communicated with one side of the spray tank (10), and the side of the spray tank (10) away from the air inlet pipeline (1) is communicated with a liquid outlet pipe (14).

5. A waste gas cleaner for silane production according to claim 3, characterized in that: The top of the spray tank (10) and the bottom of the purification tank (2) are both provided with a through groove (15), and the top of the purification tank (2) is communicated with an air outlet pipe (16).

6. A waste gas cleaner for silane production according to claim 1, characterized in that: The inner wall of the air inlet pipeline (1) is fixedly connected with a filter screen (17), and the middle of the filter screen (17) is fixedly connected with a fixed plate (18).

7. A waste gas cleaner for silane production according to claim 6, characterized in that: The surface of the fixed plate (18) is fixedly connected with a second motor (19) through a protection shell, and the output end of the second motor (19) is fixedly connected with a connecting rod (20), one side of the filter screen (17) is provided with a brush plate (21) slidably connected with the outer side of the fixed plate (18), and one end of the connecting rod (20) is fixedly connected with the surface of the brush plate (21).

8. A waste gas cleaner for silane production according to claim 6, characterized in that: The bottom of the air inlet pipeline (1) and one side of the filter screen (17) are communicated with a discharge pipe (22).

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