PVD jig

Abstract

The utility model discloses a PVD (Physical Vapor Deposition) jig which comprises a workpiece base suitable for being matched with a workpiece to fix the workpiece; the workpiece base is provided with a serial connection hole; and the series connection unit is suitable for penetrating through the series connection holes so as to connect and fix the multiple workpiece bases in series. Through the design of introducing the series connection units and the workpiece bases, one or more workpieces can be installed on each workpiece base, and the multiple workpiece bases can be fixed and connected together in series through the series connection units at the same time to form a whole for coating treatment. Therefore, the serially connected workpieces only need to be integrally placed in the PVD furnace every time and then integrally taken out after film coating is completed, the taking and placing frequency of a single workpiece is greatly reduced, the production period is remarkably shortened through the batch processing mode, and the overall production efficiency is improved; due to the fact that frequent taking and placing operation is reduced, the workload of workers is greatly relieved, and the manual operation cost is correspondingly reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of workpiece surface treatment, and in particular to a PVD jig. BACKGROUND

[0002] PVD (Physical Vapor Deposition) process, namely physical vapor deposition, is a technology of depositing a thin film with certain special functions on the surface of a substrate by vaporizing the surface of a material source (solid or liquid) into gaseous atoms or molecules or partially ionizing into ions under vacuum conditions, and through a low-pressure gas (or plasma) process, which is one of the main surface treatment technologies.

[0003] In the PVD process, when coating films on products of different shapes, sizes and materials, a crucial link is to reasonably design and use jigs. The jig not only bears the heavy task of firmly fixing the workpiece, but also plays a crucial role of shielding the part of the workpiece that does not need to be coated, so as to ensure that the coating film accurately covers the predetermined area of the product surface and gives it the desired target color or characteristics.

[0004] However, there is a significant limitation in the design of the jigs commonly used in the current PVD process: most jigs can only install and process one workpiece at a time. This one-to-one processing mode causes a significant efficiency bottleneck in the coating process. Specifically, after clamping a workpiece, the worker needs to put it into the PVD furnace, and after completing the coating, it needs to be taken out, that is, each workpiece needs to be taken in and out of the PVD furnace once. This frequent and tedious process not only greatly increases the workload of manual operation, but also directly prolongs the overall production cycle and reduces production efficiency. CONTENT OF THE INVENTION

[0005] The purpose of the embodiment of the present application is to provide a PVD jig which can solve the above-mentioned problems existing in the prior art.

[0006] In order to achieve the above-mentioned purpose, the following technical solutions are adopted in the present application:

[0007] On the one hand, a PVD jig is provided, comprising:

[0008] A workpiece base adapted to cooperate with a workpiece to fix the workpiece; the workpiece base is provided with a stringing hole;

[0009] A stringing unit adapted to pass through the stringing hole to string and fix a plurality of workpiece bases.

[0010] Optionally, any two adjacent workpiece bases form a clamping space adapted to clamp a workpiece.

[0011] Optionally, each of the workpiece bases has a first clamping surface and a second clamping surface, the first clamping surface and the second clamping surface being two opposite surfaces on the workpiece base, in any two adjacent workpiece bases, the first clamping surface of one workpiece base is arranged opposite to the second clamping surface of the other workpiece base.

[0012] Optionally, the stringing unit comprises at least two stringing rods, and each of the workpiece bases is correspondingly provided with at least two stringing holes.

[0013] Optionally, the stringing rod is provided with a threaded portion, and a detachable nut is mounted on the threaded portion, the nut being adapted to tightly press the workpiece bases stringed on the stringing rod.

[0014] Optionally, each of the stringing rods is fixedly provided with a baffle, the baffle being arranged in a spaced manner with the nut, and the nut and the baffle cooperate to tightly press the workpiece bases stringed on the stringing rod.

[0015] Optionally, the stringing unit further comprises a connecting rod, and the connecting rod fixedly connects the at least two stringing rods.

[0016] Optionally, the cover unit is further provided with a covering unit, and the covering unit is adapted to be mounted on the workpiece base and cover the surface of the workpiece that needs to be covered.

[0017] Optionally, the covering unit comprises a first covering module and a second covering module respectively mounted on two opposite sides of the workpiece base, and the first covering module and the second covering module are respectively adapted to cover two opposite surfaces of the workpiece.

[0018] Optionally, the covering unit further comprises a fixing clamp, and the fixing clamp clamps and fixes the first covering module and the second covering module.

[0019] Optionally, the first covering module and / or the second covering module is provided with a positioning hole, and the workpiece base is provided with a positioning protrusion corresponding to the positioning hole, and the first covering module and / or the second covering module is positioned by being buckled with the positioning protrusion through the positioning hole.

[0020] Optionally, the first covering module and the second covering module are provided with an edge close to the surface of the workpiece on a side close to a film-coated area of the workpiece, the width of the edge is not less than 0.5 mm, and the gap between the edge and the surface of the workpiece is not greater than 0.1 mm.

[0021] Optionally, each of the workpieces is correspondingly provided with one first covering module and one second covering module.

[0022] Optionally, the first covering module and / or the second covering module are arranged to include a support and a plurality of shielding pieces connected to the support, the shielding pieces being arranged one-to-one corresponding to the workpieces; the support and the shielding pieces are integrally formed.

[0023] Optionally, the first covering module and / or the second covering module are arranged to include a support and a plurality of shielding pieces connected to the support, the shielding pieces being arranged one-to-one corresponding to the workpieces; the support and the shielding pieces are integrally formed.

[0024] Optionally, the first covering module and the second covering module are respectively arranged in a concave disc shape including a bottom plate and a rim arranged around the periphery of the bottom plate.

[0025] The PVD jig provided by the present application has the following beneficial effects: in the PVD jig, a stringing unit and a workpiece base are introduced, one or more workpieces can be installed on each workpiece base, and the plurality of workpiece bases can be fixed by the stringing unit and strung together to form an integral whole for coating film processing. In this way, the stringed workpieces are only needed to be put into the PVD furnace as a whole each time, and taken out as a whole after coating film processing, so that the taking and placing frequency of the single workpiece is greatly reduced, the production cycle is significantly shortened, and the overall production efficiency is improved. Since the frequent taking and placing operations are reduced, the work burden of the workers is greatly reduced, and the labor operation cost is correspondingly reduced. In addition, during the coating film processing, the utilization rate of the PVD furnace is significantly improved, since a plurality of workpieces can be processed at a time, the idle time of the equipment waiting for workpiece replacement is greatly reduced, so that the overall use efficiency and resource utilization rate of the equipment are improved. BRIEF DESCRIPTION OF DRAWINGS

[0026] The present application will be further described in detail below according to the drawings and embodiments.

[0027] Figure 1 FIG. 1 is a structural schematic diagram of one embodiment of the PVD jig described in the present application;

[0028] Figure 2 FIG. 2 is an exploded schematic diagram of the structure shown in FIG. 1; Figure 1

[0029] Figure 3 FIG. 3 is a structural schematic diagram of another embodiment of the PVD jig described in the present application;

[0030] Figure 4 FIG. 4 is an exploded schematic diagram of the structure shown in FIG. 3; Figure 3

[0031] Figure 5 FIG. 5 is a structural schematic diagram of the second covering module in FIG. 4; Figure 4 ​​​

[0032] Figure 6 Structure diagram of another embodiment of the second covering module described in the embodiments of the present application;

[0033] Figure 7 Structure diagram of another embodiment of the second covering module described in the embodiments of the present application; Figure 6 Structure diagram of another embodiment of the second covering module described in the embodiments of the present application;

[0034] Figure 8 Structure diagram of another embodiment of the second covering module described in the embodiments of the present application;

[0035] Figure 9 Structure diagram of another embodiment of the second covering module described in the embodiments of the present application; Figure 8 Structure diagram of another embodiment of the second covering module described in the embodiments of the present application;

[0036] Figure 10 Structure diagram of another embodiment of the second covering module described in the embodiments of the present application; Figure 9 Structure diagram of another embodiment of the second covering module described in the embodiments of the present application.

[0037] In the drawings:

[0038] 1, workpiece base; 11, stringing hole; 12, positioning protrusion; 2, workpiece; 3, stringing unit; 31, stringing rod; 32, connecting rod; 33, nut; 34, baffle; 4, covering unit; 401, welt; 402, positioning hole; 403, bracket; 404, shielding piece; 405, bottom plate; 406, edge covering; 41, first covering module; 42, second covering module; 43, fixing clamp. DETAILED DESCRIPTION

[0039] In order to make the technical problems solved by the present application, the technical solutions adopted and the technical effects reached more clear, the technical solutions of the embodiments of the present application are described in further detail below. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0040] In the description of the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, can be fixedly connected, or can be detachably connected, or can be integrated; can be mechanically connected, or can be electrically connected; can be directly connected, or can be indirectly connected through an intermediate medium; can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0041] In the present application, unless specifically stated and limited otherwise, a first feature "on" or "under" a second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "over" the second feature includes that the first feature is directly above and obliquely above the second feature, or only means that the first feature is higher in horizontal height than the second feature. The first feature "under", "below" and "underneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or only means that the first feature is lower in horizontal height than the second feature.

[0042] In the PVD process, when coating films on products of different shapes, sizes and materials, a crucial link is to reasonably design and use jigs. The jig not only bears the heavy task of firmly fixing the workpiece, but also plays a crucial role in shielding the part of the workpiece that does not need to be coated, so as to ensure that the coating film accurately covers the predetermined area of the product surface and gives it the desired target color or characteristics.

[0043] However, the jig design commonly used in the current PVD process has a significant limitation: most jigs can only install and process one workpiece at a time. This one-to-one processing mode causes a significant efficiency bottleneck in the coating process. Specifically, after clamping a workpiece, the worker needs to put it into the PVD furnace, and then take it out after coating is completed, that is, each workpiece needs to be taken in and out of the PVD furnace once. This frequent and tedious process not only greatly increases the workload of manual operation, but also directly prolongs the overall production cycle and reduces production efficiency.

[0044] To overcome the above technical problems, with reference to Figures 1-2 The embodiment provides a PVD jig which comprises a workpiece base 1 and a stringing unit 3. The workpiece base 1 is adapted to cooperate with a workpiece 2 to fix the workpiece 2. The workpiece base 1 is provided with a stringing hole 11. The stringing unit 3 is adapted to pass through the stringing hole 11 to fix a plurality of workpiece bases 1 in series.

[0045] In the embodiment, the workpiece base 1 is used to fix the workpiece 2. When specifically arranged, the workpiece base 1 can be arranged according to the specific form of the workpiece 2 and the surface that needs to be shielded, so that the workpiece 2 can be reliably installed on the workpiece base 1, and the surface in contact with the workpiece base 1 is the surface that needs to be shielded. When the workpiece 2 and the jig are put into the PVD furnace together, the surface of the workpiece 2 that is not shielded is coated.

[0046] In some embodiments, as Figure 2The workpiece 2 shown in the figure is the side cover of a smart watch, which needs to be plated with a metal film around the side cover. Therefore, the inner and outer surfaces of the side cover need to be shielded. At this time, the workpiece base 1 is designed in a shape corresponding to the inner and outer surfaces of the side cover. After the side cover is clamped on the workpiece base 1, only the peripheral part of the side cover is exposed.

[0047] In actual implementation, according to actual needs, one workpiece 2 can be installed on one workpiece base 1, or multiple workpieces 2 can be installed on one workpiece base 1, as long as the problem of mutual shielding between the workpieces 2 is avoided.

[0048] In summary, in the PVD jig of the embodiment, by introducing the design of the stringing unit 3 and the workpiece base 1, one or more workpieces 2 can be installed on each workpiece base 1, and multiple workpiece bases 1 can be fixed and strung together by the stringing unit 3 to form a whole for coating film processing. In this way, only the whole of the strung workpieces 2 needs to be put into the PVD furnace each time, and the whole is taken out after the coating film is completed, greatly reducing the number of taking and placing of single workpieces 2. This batch processing mode significantly shortens the production cycle and improves the overall production efficiency. Since the frequent taking and placing operations are reduced, the work burden of the workers is greatly reduced, and the labor operation cost is correspondingly reduced. In addition, during the coating process, the utilization rate of the PVD furnace is significantly improved. Since multiple workpieces 2 can be processed at one time, the idle time of the equipment waiting for workpiece replacement is greatly reduced, thereby improving the overall use efficiency and resource utilization rate of the equipment.

[0049] In an embodiment, a clamping space suitable for clamping the workpiece 2 is formed between any two adjacent workpiece bases 1.

[0050] In this embodiment, a clamping space suitable for clamping the workpiece 2 is formed between any two adjacent workpiece bases 1. This design allows the workpiece base 1 and the workpiece 2 to be arranged in a staggered manner, and each workpiece 2 is clamped and fixed by the workpiece bases 1 on both sides. This design has the following beneficial effects:

[0051] Improve the stability of the workpiece 2: The workpiece 2 is clamped by the workpiece bases 1 on both sides, effectively preventing the workpiece 2 from moving or deforming due to high temperature or other factors during the coating process. This stability is crucial for ensuring the quality and consistency of the coating film.

[0052] Simplify the clamping process: Since the workpiece 2 is naturally clamped by the workpiece base 1, no additional clamps or fasteners are needed to fix the workpiece 2. This not only simplifies the clamping process, but also reduces errors that may occur during the clamping process. In addition, multiple workpiece bases 1 can be fixed by stringing with the stringing unit 3, thereby achieving reliable fixation of multiple workpieces 2. This not only improves efficiency by stringing multiple workpiece bases 1, but also achieves reliable fixation of the workpieces 2.

[0053] Space-saving: The staggered arrangement between the workpiece bases 1 and the workpieces 2 allows multiple workpieces 2 to be closely arranged together, thereby saving space within the coating equipment, which is of great significance to improve the utilization rate of the coating equipment and reduce production costs.

[0054] Enhanced coating uniformity: Since the workpieces 2 are stably clamped between the workpiece bases 1, their positions are relatively fixed during the coating process, which helps to ensure that the coating uniformly covers the predetermined area of the workpieces 2, improving the coating quality and consistency.

[0055] Improved production efficiency: Due to the simplified clamping process and improved stability of the workpieces 2, workers can complete the clamping work faster and start the coating process, which helps to shorten the production cycle and improve overall production efficiency. During specific clamping, the workpiece bases 1 and the workpieces 2 can be sequentially connected, i.e., one workpiece base 1 is connected to the connecting unit 3, then a workpiece 2 is installed on the workpiece base 1, and then the next workpiece base 1 is installed, and so on.

[0056] In one embodiment, each workpiece base 1 has a first clamping surface and a second clamping surface, which are two opposite surfaces on the workpiece base 1. In any two adjacent workpiece bases 1, the first clamping surface of one workpiece base 1 is arranged opposite to the second clamping surface of the other workpiece base 1.

[0057] Specifically, the first clamping surface and the second clamping surface are respectively arranged corresponding to the surfaces of the workpieces 2 that need to be shielded. The workpieces 2 are clamped between the clamping surfaces of the two workpiece bases 1, which enhances the stability of the workpieces 2. At the same time, this design can also accurately shield the parts of the workpieces 2 that do not need to be coated, which helps to ensure that the coating only covers the predetermined area of the workpieces 2, improving the coating quality and consistency.

[0058] In one embodiment, the connecting unit 3 includes at least two connecting rods 31, and each workpiece base 1 is provided with at least two connecting holes 11.

[0059] By connecting the workpiece bases 1 with at least two connecting rods 31, the stability of the connection can be significantly enhanced. This multi-point connection method can effectively prevent the workpiece bases 1 from moving or deforming due to high temperature or other factors during the coating process, thereby ensuring the smooth progress of the coating process.

[0060] In one embodiment, the connecting rod 31 is provided with a threaded portion, and a detachable nut 33 is installed on the threaded portion, which is suitable for tightly pressing the workpiece bases 1 connected on the connecting rod 31.

[0061] The fixing of the nut 33 can simplify the mounting and dismounting process of the workpiece base 1, and the worker only needs to simply tighten or loosen the nut 33 to realize the fixing or release of the workpiece base 1. This design not only improves the work efficiency, but also reduces the errors and damages caused by improper operation. In specific implementation, the diameter of the stringing rod 31 should be smaller than the stringing hole 11 on the workpiece base 1, and the diameter of the nut 33 should be larger than the through hole on the workpiece base 1. During operation, the stringing hole 11 of the workpiece base 1 is aligned with the stringing rod 31 for stringing, and after the installation of multiple workpiece bases 1 and workpieces 2 is completed, the nut 33 is screwed in for fixing.

[0062] In an embodiment, a baffle 34 is fixedly arranged on each stringing rod 31, and the baffle 34 is arranged in a spaced manner with the nut 33. The nut 33 and the baffle 34 cooperate to tightly abut the stringing rod 31 and the workpiece base 1 stringed thereon.

[0063] Specifically, the baffle 34 is a structure fixed on the stringing rod 31. When the first workpiece base 1 is installed, the workpiece base 1 abuts against the baffle 34, and the baffle 34 can limit the workpiece base 1 from being separated from the stringing rod 31. After the stringing of multiple workpiece bases 1 is completed, the nut 33 is installed and fixed. Since the baffle 34 is fixedly arranged on the stringing rod 31, the worker does not need to additionally find or fix a support point when installing and adjusting the workpiece base 1, which simplifies the installation and adjustment process and improves the work efficiency.

[0064] In an embodiment, the stringing unit 3 further includes a connecting rod 32, and the connecting rod 32 is fixedly connected with at least two stringing rods 31.

[0065] The connecting rod 32 not only fixes the relative positions of the stringing rods 31, but also enables multiple stringing rods 31 to be kept relatively parallel. This parallel arrangement is conducive to the stringing work, and the worker can more easily string the workpiece bases 1 to multiple stringing rods 31 at the same time without worrying about the misalignment or inclination therebetween. Therefore, due to the presence of the connecting rod 32, the worker can complete the stringing work more quickly, thereby shortening the production cycle and improving the production efficiency.

[0066] In addition, the connecting rod 32 can also serve as a handle for taking and placing, so that the entire stringing unit 3 can be easily moved from one position to another, further improving the convenience of operation.

[0067] In some products, double-color plating is required. In specific operation, a layer of colored film is plated on the surface of the workpiece 2 as a whole, then a covering device is installed, then a second layer of colored film is plated on the area not covered, and thus a double-color product is obtained.

[0068] In order to achieve the above purpose, reference is made toFigures 3-10 In some embodiments, a covering unit 4 is further included, which is adapted to be mounted on the workpiece base 1 and covers the surface of the workpiece 2 that needs to be shielded.

[0069] The covering unit 4 can accurately cover the surface of the workpiece 2 that needs to be shielded, which is the basis for realizing the double-color coating process. In specific implementation, by first coating a layer of film of a color on the entire surface of the workpiece 2, then mounting the covering unit 4, and then coating a second layer of film of a second color on the area not covered, a product with two different colors can finally be obtained.

[0070] The covering unit 4 is mounted on the workpiece base 1, which realizes covering the surface of the workpiece 2 without causing clamping damage to the surface of the workpiece 2.

[0071] In an embodiment, the covering unit 4 includes a first covering module 41 and a second covering module 42 mounted on two opposite sides of the workpiece base 1 respectively, and the first covering module 41 and the second covering module 42 are adapted to cover two opposite sides of the workpiece 2 respectively.

[0072] The covering unit 4 adopts a modular design, so that the first covering module 41 and the second covering module 42 can be independently mounted and dismounted, which improves the flexibility of operation, making it easier for workers to complete the dismounting and mounting work of the covering unit 4, and meets the needs of covering two opposite sides of the workpiece 2.

[0073] In an embodiment, the covering unit 4 further includes a fixing clamp 43, which clamps and fixes the first covering module 41 and the second covering module 42.

[0074] The use of the fixing clamp 43 significantly enhances the stability of the covering unit 4, which can ensure that the first covering module 41 and the second covering module 42 are tightly fitted on the workpiece base 1. By clamping the first covering module 41 and the second covering module 42, the fixing clamp 43 can prevent them from loosening or shifting due to high temperature, vibration or other external factors during the coating process, which is important for ensuring the smooth progress of the coating process and the consistency of the coating quality.

[0075] The design of the fixing clamp 43 makes the mounting and dismounting process of the covering unit 4 more convenient, workers only need to place the first covering module 41 and the second covering module 42 in the corresponding positions of the workpiece base 1, and then clamp them using the fixing clamp 43, which reduces the complexity and uncertainty in the operation process and improves the work efficiency.

[0076] In an embodiment, the first covering module 41 and / or the second covering module 42 are provided with positioning holes 402, and the workpiece base 1 is provided with positioning protrusions 12 corresponding to the positioning holes 402, and the first covering module 41 and / or the second covering module 42 are positioned by buckling the positioning holes 402 and the positioning protrusions 12.

[0077] The cooperation of the positioning holes 402 and the positioning protrusions 12 not only provides accurate guidance, but also enhances the stability of the covering modules during the coating process. Since the covering modules are firmly fixed on the workpiece base 1, they can be prevented from loosening or shifting during the coating process due to high temperature, vibration or other external factors.

[0078] In an embodiment, the first covering module 41 and the second covering module 42 are provided with a hem 401 near the side of the coating area of the workpiece 2, which is used to close to the surface of the workpiece 2. The width of the hem 401 is not less than 0.5mm, and the gap between the hem 401 and the surface of the workpiece 2 is not more than 0.1mm.

[0079] The small gap (not more than 0.1mm) between the hem 401 and the surface of the workpiece 2 ensures that the covering module will not be in direct contact with the surface of the workpiece 2 during the coating process, thereby avoiding scratches on the surface of the workpiece 2 caused by friction or close contact, which is crucial for protecting the surface quality of the precision workpiece 2. Figure 5 、 Figure 7 or Figure 10 The width L of the hem 401 is set to be not less than 0.5mm, which, together with the small gap (not more than 0.1mm) between the hem 401 and the workpiece 2, forms an effective barrier. During the secondary coating process, even if the coating material has a certain tendency to splash or penetrate under high pressure or high temperature conditions, the hem 401 can effectively block these materials and prevent them from overflowing into the shaded area, thereby ensuring the accuracy and consistency of the coating effect.

[0080] In an embodiment, referring to Figures 3-5 Each of the workpieces 2 is provided with a first covering module 41 and a second covering module 42.

[0081] Since each workpiece 2 corresponds to a first covering module 41 and a second covering module 42, the number of covering units 4 can be flexibly adjusted according to actual production needs. According to actual needs, a corresponding number of covering units 4 are installed, which can avoid unnecessary waste of resources, for example, in the case of a small number of workpieces 2, there is no need to install too many covering modules, thereby saving materials and space. Since each workpiece 2 corresponds to a covering unit 4, when a certain covering module is damaged or worn, it can be easily removed and replaced without affecting the production of other workpieces 2, which reduces maintenance costs and improves the overall reliability and service life of the equipment.

[0082] In an embodiment, referring to Figures 6-7 , the first covering module 41 and / or the second covering module 42 are provided to include a bracket 403 and a plurality of shielding pieces 404 connected to the bracket 403, the shielding pieces 404 are provided one-to-one corresponding to the workpieces 2; the bracket 403 and the shielding pieces 404 are integrally formed.

[0083] Each shielding piece 404 is provided one-to-one corresponding to the workpiece 2, which means that each workpiece 2 can be accurately shielded, and this accuracy is crucial to ensure the smooth progress of the plating process and the consistency of the plating quality. In addition, since the shielding piece 404 and the bracket 403 are integrally formed, their connection is more firm, further enhancing the shielding effect. Since the shielding piece 404 and the bracket 403 are integrally formed, the installation process becomes simpler, and the worker only needs to place the covering module on the jig to cover the workpiece 2, and ensure that the shielding piece 404 is tightly attached to the surface of the workpiece 2. This way, the worker can complete the shielding of multiple workpieces 2 at one time, simplifying the worker's operation process.

[0084] Preferably, in this structure, the bracket 403 and the shielding piece 404 are integrally stamped and formed, which has the advantages of simple, fast and low cost forming.

[0085] In an embodiment, referring to Figures 6-7 , the first covering module 41 and / or the second covering module 42 are provided to include a bracket 403 and a plurality of shielding pieces 404 connected to the bracket 403, the shielding pieces 404 are provided one-to-one corresponding to the workpieces 2; the bracket 403 and the shielding pieces 404 are integrally formed.

[0086] The difference between this embodiment and the previous embodiment is that the bracket 403 and the shielding piece 404 are separately formed and then welded, which is suitable for the case where the shielding piece 404 has a complex structure and is difficult to be integrally formed with the bracket 403.

[0087] In an embodiment, referring toFigures 9-10 The first covering module 41 and the second covering module 42 are respectively provided in a concave disc structure including a bottom plate 405 and a rim 406 surrounding the periphery of the bottom plate 405.

[0088] The first covering module 41 and the second covering module 42 in the concave disc structure can cover the workpiece 2, and the structure is simple and can be directly formed by sheet metal processing.

[0089] In the structure of the rim 406, the side close to the film-coated area of the workpiece 2 is the above-mentioned edge 401, which is provided with a groove structure matching the surface of the workpiece 2 to ensure that it can be close enough to the surface of the workpiece 2 after installation.

[0090] On the other hand, the embodiment also provides a PVD film-coating method based on the above-mentioned PVD jig, which comprises the following steps:

[0091] S1. Clamping the workpiece 2 on the workpiece base 1;

[0092] S2. Connecting and fixing a plurality of workpiece bases 1 clamping the workpiece 2 on the connection unit 3 to obtain an assembly one;

[0093] S3. Placing the assembly one into a PVD furnace to coat a first layer of film on the surface of the workpiece 2;

[0094] S4. Taking out the assembly one and installing the covering unit 4 to obtain an assembly two;

[0095] S5. Placing the assembly two into a PVD furnace to coat a second layer of film on the part of the surface of the workpiece 2 not covered.

[0096] The PVD film-coating method based on the embodiment can quickly complete the film-coating work of a plurality of workpieces 2 at one time and can also realize two-color film-coating, which has the advantages of high efficiency and low cost.

[0097] In the description herein, it should be understood that the terms "upper", "lower", "left", "right", and the like orientation or position relationship are only for the convenience of description and simplification of operation, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.

[0098] In the description of the present specification, the description referring to the terms "an embodiment", "an example" and the like means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are contained in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example.

[0099] In addition, it should be understood that although the present specification describes only one embodiment, but not every embodiment contains only one independent technical solution, the description of the specification is only for the sake of clarity, the skilled in the art should be regarded as a whole, the technical solution in each example can also be appropriately combined, form other embodiments that the skilled in the art can understand.

[0100] The technical principles of the present application are described above in combination with specific embodiments. These descriptions are only for the purpose of explaining the principles of the present application, and cannot be interpreted as limiting the scope of protection of the present application in any way. Based on the explanation here, the skilled in the art can think of other specific embodiments of the present application without creative labor, and these ways will fall within the scope of protection of the present application.

Claims

1. A PVD tool, characterized in that, The utility model provides a workpiece clamping device, which comprises: a workpiece base (1) adapted to cooperate with a workpiece (2) to fix the workpiece (2); the workpiece base (1) is provided with a stringing hole (11); a stringing unit (3) adapted to pass through the stringing hole (11) to string and fix a plurality of the workpiece bases (1).

2. The PVD fixture of claim 1, wherein, An assembly space adapted to clamp the workpiece (2) is formed between any two adjacent workpiece bases (1).

3. The PVD fixture of claim 2, wherein, Each of the workpiece bases (1) has a first clamping surface and a second clamping surface, which are two opposite surfaces of the workpiece base (1); in any two adjacent workpiece bases (1), the first clamping surface of one workpiece base (1) is arranged opposite to the second clamping surface of the other workpiece base (1).

4. The PVD fixture of claim 1, wherein, The stringing unit (3) comprises at least two stringing rods (31), and each of the workpiece bases (1) is correspondingly provided with at least two stringing holes (11).

5. The PVD fixture of claim 4, wherein, The stringing rod (31) is provided with a threaded portion, and a detachable nut (33) is mounted on the threaded portion; the nut (33) is adapted to tightly press the workpiece bases (1) stringed on the stringing rod (31).

6. The PVD fixture of claim 5, wherein, Each of the stringing rods (31) is fixedly provided with a baffle (34), which is arranged apart from the nut (33); the nut (33) and the baffle (34) cooperate to tightly press the workpiece bases (1) stringed on the stringing rod (31).

7. The PVD fixture of claim 4, wherein, The stringing unit (3) further comprises a connecting rod (32) fixedly connecting the at least two stringing rods (31).

8. The PVD fixture of claim 1, wherein, The utility model further comprises a covering unit (4) adapted to be mounted on the workpiece base (1) and cover the surface of the workpiece (2) that needs to be covered.

9. The PVD fixture of claim 8, wherein, The covering unit (4) comprises a first covering module (41) and a second covering module (42) mounted on two opposite sides of the workpiece base (1) respectively; the first covering module (41) and the second covering module (42) are adapted to cover two opposite surfaces of the workpiece (2) respectively.

10. The PVD fixture of claim 9, wherein, The covering unit (4) further comprises a fixing clamp (43) clamping and fixing the first covering module (41) and the second covering module (42).

11. The PVD fixture of claim 9, wherein, The first covering module (41) and / or the second covering module (42) are provided with a positioning hole (402), and the workpiece base (1) is provided with a positioning protrusion (12) corresponding to the positioning hole (402); the first covering module (41) and / or the second covering module (42) are positioned by buckling the positioning hole (402) and the positioning protrusion (12).

12. The PVD fixture of claim 9, wherein, The first covering module (41) and the second covering module (42) are provided with an edge (401) close to the surface of the workpiece (2) on one side close to a film-coated area of the workpiece (2); the width of the edge (401) is not less than 0.5 mm, and the gap between the edge (401) and the surface of the workpiece (2) is not greater than 0.1 mm.

13. The PVD fixture of claim 9, wherein, Each of the workpieces (2) is provided with one first covering module (41) and one second covering module (42).

14. The PVD fixture of claim 9, wherein, The first covering module (41) and / or the second covering module (42) is provided with a support (403) and a plurality of shielding pieces (404) connected with the support (403), the shielding pieces (404) are provided one by one corresponding to the workpieces (2); the support (403) and the shielding pieces (404) are in an integrated structure.

15. The PVD fixture of claim 9, wherein, The first covering module (41) and / or the second covering module (42) is provided with a support (403) and a plurality of shielding pieces (404) connected with the support (403), the shielding pieces (404) are provided one by one corresponding to the workpieces (2); the support (403) and the shielding pieces (404) are in an integrated structure.

16. The PVD fixture of claim 9, wherein, The first covering module (41) and the second covering module (42) are respectively provided in a concave disc structure including a bottom plate (405) and a rim (406) surrounding the periphery of the bottom plate (405).

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