Vacuum generator
By designing a compact inlet and outlet connector structure and a noise reduction assembly, the problems of high noise and complex structure of vacuum generators are solved, making it suitable for semiconductor manufacturing environments and achieving low noise and compact vacuum extraction.
Patent Information
- Application Number
- CN202520172614.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-24
- Publication Date
- 2025-12-19
- Estimated Expiration
- 2035-01-24
AI Technical Summary
Existing vacuum generators are too noisy and have a complex structure, making them difficult to use in space-constrained applications.
It adopts inlet and outlet connectors connected in sequence, combined with silencing components and connectors made of perfluororesin material. It uses Bernoulli's principle to perform vacuuming and reduces noise through silencing components, resulting in a simple and compact structure.
It achieves ease of use in space-constrained application scenarios while reducing noise, making it suitable for high-process semiconductor chip manufacturing environments.
Smart Images

Figure CN223690055U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the field of vacuum generator, specifically relates to a vacuum generator. BACKGROUND
[0002] The vacuum generator is the component that utilizes Bernoulli's principle to produce relative vacuum, when high speed air enters the pipeline, because the cross section in the pipeline gradually reduces, the pressure in the pipeline gradually increases, makes the air suction hole connected in the pipeline produce negative pressure, causes the air around the air suction hole to be sucked into the pipeline, flows out along with the air, thereby makes the relative vacuum in the vicinity of the air suction hole, can vacuumize the product, but the existing vacuum generator when air enters the vacuum generator when using because the noise is too big, and the structure of the existing vacuum generator is too complex, therefore needs a kind of vacuum generator that can solve the problem of excessive noise and simple structure. SUMMARY
[0003] The utility model solves the technical problems that the existing vacuum generator when air enters the vacuum generator when using because the noise is too big, and the structure of the existing vacuum generator is too complex, the utility model provides a kind of vacuum generator, adopts the import connecting piece and outlet connecting piece of sequentially connected and constitutes vacuum generator, keeps the small and compact of vacuum generator whole, is favorable in the application scene of limited space to use, is connected with gas source by gas source pipe, and the purpose of vacuumizing is realized by connecting the air suction pipe and vacuumizing product, to solve the defects caused by prior art.
[0004] To solve the above technical problems, the utility model provides the following technical scheme:
[0005] A kind of vacuum generator, wherein, containing the import connecting piece and outlet connecting piece of connection, first inner cavity is arranged in the import connecting piece, second inner cavity is arranged in the outlet connecting piece, the first inner cavity is communicated with the second inner cavity;
[0006] The side of the import connecting piece near the outlet connecting piece is provided with annular groove arranged in the periphery of the first inner cavity, so that the import connecting piece is located in the inside of the annular groove to form an annular limiting piece, the outlet connecting piece is provided with annular mounting block inserted into the annular groove, the annular limiting piece is inserted into the annular mounting block to make the first inner cavity and the second inner cavity communicate, and a gap is provided between the annular limiting piece and the annular mounting block, so that the gas at the installation port flows into the second inner cavity to vacuumize the product;
[0007] The import connecting piece is provided with installation port communicated with the annular groove;
[0008] The outer side of the outlet connector is provided with a sound-absorbing assembly inserted into the second inner cavity, which comprises a connecting pipe and a sound-absorbing pipe, the connecting pipe is detachably connected to the outlet connector, the sound-absorbing pipe is detachably connected to the connecting pipe, and a plurality of sound-absorbing holes are arranged on the inner wall of the sound-absorbing pipe, which can reduce the noise of the vacuum generator during use.
[0009] The vacuum generator has the inlet connector and the outlet connector welded and connected, so that the inlet connector and the outlet connector form a sealed state.
[0010] The vacuum generator has the length of the annular groove greater than the length of the annular mounting block, so that the annular groove has a certain space to communicate with the mounting port for vacuumizing.
[0011] The vacuum generator has the diameter of the first inner cavity decreasing stepwise from the outside to the annular limiting piece, the first inner cavity is coaxial with the inlet connector, the diameter of the second inner cavity decreases stepwise from the outside to the annular mounting block, and the second inner cavity is coaxial with the outlet connector.
[0012] The inlet connector and the outlet connector are made of perfluorinated resin material, and the existing vacuum generators are made of metal material. The inlet connector and the outlet connector are made of perfluorinated resin material without metal ions, and can be used in semiconductor high-process chip manufacturing environment, such as vacuum grabbing and liquid pumping.
[0013] The outer side of the inlet connector is provided with a nozzle arranged in the first inner cavity, which effectively increases the flow rate of air.
[0014] The sound-absorbing pipe is connected to the inner thread of the connecting pipe through the outer thread, a circle of fixing grooves is arranged on the periphery of the connecting pipe, a ball is arranged in each fixing groove, and a trapezoidal limiting block matched with the ball is arranged on the port of the sound-absorbing pipe.
[0015] The end of the inlet connector away from the outlet connector is connected with an air source pipe through the first inner cavity, the end of the sound-absorbing pipe away from the inlet connector is connected with an exhaust pipe, and an air suction pipe is connected to the mounting port.
[0016] In the aforementioned vacuum generator, the gas source pipe, the exhaust pipe, and the intake pipe are all PFA pipes. PFA is a perfluoroalkoxy resin, which is a modified polytetrafluoroethylene. The temperature can reach 260 degrees Celsius. PFA resin is a relatively new melt-processable fluoroplastic.
[0017] In one of the aforementioned vacuum generators, a handle is installed on the inlet connector.
[0018] In use, the aforementioned vacuum generator connects the gas source pipe and the suction pipe to the inlet connector, connects the exhaust pipe to the silencer pipe, connects the suction pipe to the product requiring vacuuming, and connects the gas source to the gas source pipe for injecting gas. Generally, the gas source is air. After the gas source is injected, the gas flows at high speed from the first inner cavity into the second inner cavity (reducing the pressure between the first and second inner cavities) and simultaneously draws the gas out of the product requiring vacuuming through the annular groove (the gas inside the product flows into the second inner cavity from the suction pipe under atmospheric pressure). This working principle is Bernoulli's principle, the core of which lies in the inverse relationship between flow velocity and pressure: in fluid dynamics, when the fluid velocity increases, it is often accompanied by a decrease in pressure. This is because the conservation of energy requires a balance between the kinetic energy and pressure energy of the fluid, thereby achieving the extraction of gas from the product.
[0019] The technical solution provided by the present invention for a vacuum generator has the following technical effects:
[0020] The vacuum generator is constructed by sequentially connecting the inlet and outlet connectors, maintaining its compact size and making it suitable for use in space-constrained applications. It achieves vacuuming by connecting to the air source via the air supply pipe and to the vacuum pump via the suction pipe. The added silencing component reduces noise during operation. The structure is simple and easy to use. Attached Figure Description
[0021] Figure 1 This is a schematic diagram of the structure of a vacuum generator according to the present invention;
[0022] Figure 2 This is a cross-sectional structural diagram of a vacuum generator according to the present invention;
[0023] Figure 3 This is a schematic diagram of the structure of the inlet connector in a vacuum generator according to the present invention;
[0024] Figure 4 This is a schematic diagram of the structure of the outlet connector in a vacuum generator according to the present invention;
[0025] Figure 5The utility model relates to a structure schematic view of the sound attenuation assembly in the vacuum generator.
[0026] Figure 6 The utility model relates to a structure schematic view of the sound attenuation assembly in the vacuum generator.
[0027] Among them, the sign is as follows:
[0028] Inlet connecting piece 100, outlet connecting piece 200, gas source pipe 300, exhaust pipe 400, air suction pipe 500, sound attenuation assembly 600, first inner chamber 101, annular recess 102, annular limiting piece 103, mounting port 104, handle 105, second inner chamber 201, annular mounting block 202, connecting pipe 601, sound attenuation pipe 602, ball 603, trapezoidal limiting block 604. Specific implementation
[0029] In order to make the technical means, the creation characteristics, the purpose and the effect of the utility model easy to understand, the technical scheme in the embodiment of the utility model is clearly and completely described below in combination with specific drawings, obviously, the described embodiment is a part of the embodiment of the utility model, not all the embodiments.
[0030] Based on the embodiment in the utility model, all other embodiments obtained by the person skilled in the art without making creative labor belong to the scope of the utility model protection.
[0031] It is known that the structure, the proportion, the size and the like shown in the drawings attached to the specification are only used to cooperate with the content disclosed in the specification for understanding and reading by the person skilled in the art, and not used to limit the limiting conditions that the utility model can be implemented, so it does not have the technical essence, any modification of structure, change of proportion relationship or adjustment of size, as long as it does not affect the effect and the purpose that the utility model can produce, falls within the scope of the technical content disclosed by the utility model.
[0032] At the same time, the terms such as "upper", "lower", "left", "right", "intermediate" and "one" cited in the specification are only for the clear understanding of the description, not for limiting the scope of the utility model that can be implemented, the change or adjustment of the relative relationship is also regarded as the scope of the utility model that can be implemented without substantially changing the technical content.
[0033] A preferred embodiment of the utility model provides a kind of vacuum generator, purpose is to adopt the inlet connecting piece and outlet connecting piece of sequentially connected and constitute vacuum generator, keep the small and compact of vacuum generator whole, it is favorable to use in the application scene of limited space, by gas source pipe and gas source connection, air suction pipe and vacuum product are connected to realize the purpose of vacuumizing.
[0034] As shown in Figures 1-5 A vacuum generator, comprising a connected inlet connector 100 and an outlet connector 200, the inlet connector 100 and the outlet connector 200 are welded to form a sealed state, a first inner cavity 101 is provided in the inlet connector 100, a second inner cavity 201 is provided in the outlet connector 200, the first inner cavity 101 and the second inner cavity 201 are communicated, an annular groove 102 is provided on the side of the inlet connector 100 close to the outlet connector 200, the annular groove 102 is arranged on the periphery of the first inner cavity 101, so that the inlet connector 100 inside the annular groove 102 forms an annular limiting piece 103, the outlet connector 200 is provided with an annular mounting block 202 inserted into the annular groove 102, the length of the annular groove 102 is greater than the length of the annular mounting block 202, so that the annular groove 102 has a certain space to communicate with the mounting port 104 for vacuumizing, the annular limiting piece 103 is inserted into the annular mounting block 202 to make the first inner cavity 101 and the second inner cavity 201 communicated, and a gap is provided between the annular limiting piece 103 and the annular mounting block 202, so that the gas at the mounting port 104 flows into the second inner cavity 201 to vacuumize the product;
[0035] The inlet connector 100 is provided with a mounting port 104 communicated with the annular groove 102;
[0036] As shown in Figure 5 The outer side of the outlet connector 200 is provided with a sound attenuation assembly 600 inserted into the inside of the second inner cavity 201, the sound attenuation assembly 600 comprises a connecting pipe 601 and a sound attenuation pipe 602, the connecting pipe 601 is detachably connected to the outlet connector 200, the sound attenuation pipe 602 is detachably connected to the connecting pipe 601, the inner wall of the sound attenuation pipe 602 is provided with a plurality of sound collecting holes, which can reduce the noise of the vacuum generator during use, the sound attenuation pipe 602 is connected to the connecting pipe 601 through the matching of the external thread and the internal thread of the connecting pipe 601, a circle of fixing grooves is provided on the periphery of the connecting pipe 601, a ball 603 is installed in each fixing groove, a trapezoidal limiting block 604 matching the ball is installed on the port of the sound attenuation pipe 602, when the connecting pipe 601 is installed on the outlet connector 200, the sound attenuation pipe 602 is installed on the connecting pipe 601 by rotating the sound attenuation pipe 602, and the trapezoidal limiting block 604 of the sound attenuation pipe 602 abuts against the ball 603 to fix the connecting pipe 601 on the outlet connector 200.
[0037] The diameter of the first inner cavity 101 decreases step by step from the outside to the annular limiting piece 103, the first inner cavity 101 is coaxial with the inlet connector 100, the diameter of the second inner cavity 201 decreases step by step from the outside to the annular mounting block 202, and the second inner cavity 201 is coaxial with the outlet connector 200.
[0038] The inlet connecting piece 100 and the outlet connecting piece 200 are made of a perfluorinated resin material, and the existing vacuum generator is made of metal material, so that the inlet connecting piece 100 and the outlet connecting piece 200 are made of a perfluorinated resin material, without metal ions, and can be used in a semiconductor high-process chip manufacturing environment, such as vacuum grabbing and liquid pumping.
[0039] The nozzle arranged in the first inner cavity 101 is arranged on the outer side end of the inlet connecting piece 100, so that the flow rate of air is effectively increased.
[0040] The air source pipe 300 is connected to the first inner cavity 101 at the end of the inlet connecting piece 100 away from the outlet connecting piece 200, the exhaust pipe 400 is connected to the end of the muffler pipe 602 away from the inlet connecting piece 100, and the air suction pipe 500 is connected to the mounting port 104, and the air source pipe 300, the exhaust pipe 400 and the air suction pipe 500 are PFA pipes.
[0041] The handle 105 is arranged on the inlet connecting piece 100.
[0042] In use, the air source pipe 300 and the air suction pipe 500 are connected to the inlet connecting piece 100, the exhaust pipe 400 is connected to the muffler pipe 602, the air suction pipe 500 is connected to a product to be pumped, the air source is connected to the air source pipe 300 for injection, and the air source is generally air, after the air source is injected, the air source flows into the second inner cavity 201 at a high speed while the pressure of the first inner cavity 101 and the second inner cavity 201 is reduced (the product internal gas flows into the second inner cavity 201 from the air suction pipe 500 under atmospheric pressure), and the gas in the product to be pumped is sucked out through the annular groove 102 (the product internal gas flows into the second inner cavity 201 from the air suction pipe 500 under atmospheric pressure), and the working principle is the Bernoulli principle, and the core is the inverse relationship between flow rate and pressure: in fluid dynamics, when the flow rate of fluid increases, the pressure is often reduced, because the energy conservation requires the balance adjustment between the kinetic energy and the pressure energy of the fluid, and the product internal gas is sucked out.
[0043] In summary, the vacuum generator of the utility model has the advantages that the inlet connecting piece and the outlet connecting piece are sequentially connected to form the vacuum generator, the whole vacuum generator is small and compact, and is beneficial to use in a limited space application scene, the air source pipe is connected to the air source, the air suction pipe is connected to the vacuum product to achieve the purpose of vacuum pumping, and the structure is simple and convenient to use.
[0044] The specific embodiments of the utility model are described above. It needs to be understood that the utility model is not limited to the above specific embodiments, wherein the equipment and structures not described in detail should be understood as being implemented in the ordinary way in the art; the skilled in the art can make various modifications or make several simple deductions, modifications or replacements within the scope of the claims, which does not affect the essential content of the utility model.
Claims
1. A vacuum generator, characterized by The application relates to a connecting piece comprising a connecting inlet connecting piece and an outlet connecting piece, wherein a first inner cavity is arranged in the inlet connecting piece, a second inner cavity is arranged in the outlet connecting piece, and the first inner cavity and the second inner cavity are communicated. An annular groove is arranged on one side of the inlet connecting piece close to the outlet connecting piece, and the annular groove is arranged on the periphery of the first inner cavity, so that an annular limiting piece is formed in the interior of the annular groove, an annular mounting block is arranged on the outlet connecting piece and inserted into the annular groove, the annular limiting piece is inserted into the annular mounting block, so that the first inner cavity and the second inner cavity are communicated, and a gap is arranged between the annular limiting piece and the annular mounting block. An installation port is arranged on the inlet connecting piece and communicated with the annular groove. A sound elimination assembly is arranged on the outer side of the outlet connecting piece and inserted into the interior of the second inner cavity, the sound elimination assembly comprises a connecting pipe and a sound elimination pipe, the connecting pipe is detachably connected to the outlet connecting piece, and the sound elimination pipe is detachably connected to the connecting pipe.
2. A vacuum generator as claimed in claim 1, characterized in that The inlet connecting piece and the outlet connecting piece are welded.
3. A vacuum generator as claimed in claim 1, characterized in that The length of the annular groove is greater than the length of the annular mounting block.
4. A vacuum generator as claimed in claim 1, characterized in that The diameter of the first inner cavity is stepwise decreased from the outside to the annular limiting piece. The diameter of the second inner cavity is stepwise decreased from the outside to the annular mounting block.
5. A vacuum generator as claimed in claim 1, characterized in that The inlet connecting piece and the outlet connecting piece are made of perfluorinated resin material.
6. A vacuum generator as claimed in claim 1, characterized in that A nozzle is arranged on the outer side end of the inlet connecting piece and arranged in the first inner cavity.
7. A vacuum generator as claimed in claim 1, characterized in that The sound elimination pipe is matched and connected to the inner thread of the connecting pipe through the outer thread, a circle of fixing grooves is arranged on the periphery of the connecting pipe, a trapezoidal limiting block matched with the ball is arranged on the port of the sound elimination pipe, and the ball is arranged in each fixing groove.
8. A vacuum generator as claimed in claim 1, characterized in that A gas source pipe is connected to the first inner cavity through the inlet connecting piece away from the outlet connecting piece, an exhaust pipe is connected to the sound elimination pipe away from the inlet connecting piece, and a gas suction pipe is connected to the installation port.
9. A vacuum generator as claimed in claim 8, characterized in that The gas source pipe, the exhaust pipe and the gas suction pipe are PFA pipes.
10. A vacuum generator as claimed in claim 1, characterized in that A handle is arranged on the inlet connecting piece.