Drain valve and drain valve monitoring system

Abstract

The utility model provides a drain valve. The drain valve comprises a valve body, an extension rod and an opening and closing sensor. The valve body comprises a shell and a cylindrical valve element, and the cylindrical valve element is arranged in an inner cavity of the shell. The first valve element end face of the valve element and the inner wall of the first end of the shell define a gas injection valve chamber. A liquid inlet and a liquid outlet are formed in the side wall of the shell, and a liquid channel is formed in the valve element. An elastic piece is arranged between the second valve element end face of the valve element and the second end of the shell. The extension rod is fixedly arranged on the end face of the second valve element. The end face of the second end of the shell is provided with an opening for the extension rod to enter and exit the shell. The opening and closing sensor is arranged on the outer side of the second end of the shell and comprises a signal transmitter and a signal receiver which are oppositely arranged. According to the technical scheme, the extension condition of the extension rod can be detected through the opening and closing sensor, a technician is helped to know the opening and closing state of the drain valve in time, the technician can take countermeasures in time when a fault occurs, and therefore production safety and efficiency are better guaranteed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of valves, in particular to a liquid discharge valve and a liquid discharge valve monitoring system. BACKGROUND

[0002] In the process of semiconductor processing, wet etching is a commonly used wafer etching technology, which is widely used in various process flows such as thin film removal, pattern etching, patternless etching, wafer cleaning, etc. In the wet etching process, various chemical liquids may be used, such as various acid and alkali liquids. After the process is completed, the chemical liquid in the reactor needs to be completely discharged in order to carry out the subsequent process.

[0003] Generally, a pipeline for discharging chemical liquid and a corresponding switch valve are arranged below the reactor, and the valve opening time is controlled by a pre-set program to ensure that the chemical liquid can be completely discharged. However, in the prior art, the actual opening and closing of the valve is usually not effectively monitored, so various production accidents may occur, such as: the valve cannot be normally opened during liquid discharge, or it is accidentally closed after being opened, which may cause the chemical liquid to be not discharged or not completely discharged, resulting in residual chemical liquid in the reactor, affecting the subsequent process. Since it is difficult for the technician to discover the problem and take measures at the first time when the valve fails, the entire process may be scrapped, causing significant economic losses. CONTENT OF THE INVENTION

[0004] The purpose of the present application is to provide a liquid discharge valve and a liquid discharge valve monitoring system, which detects the extension of the extension rod through the opening and closing sensor, helps the technician to know the opening and closing state of the liquid discharge valve in time, so that the technician can take measures in time when the fault occurs, thereby better guaranteeing the production safety and efficiency.

[0005] In a first aspect, the application provides a liquid discharge valve, which comprises a valve body, an extension rod and an opening and closing sensor. The valve body comprises a shell and a cylindrical valve core. The shell comprises a first end, a second end and an internal cavity extending from the first end to the second end. The cylindrical valve core is arranged in the internal cavity of the shell and can reciprocate along the first end to the second end. The valve core comprises a first valve core end face and a second valve core end face. The first valve core end face and the inner wall of the first end of the shell form a closed gas injection valve chamber. The first end surface of the shell is provided with a gas inlet and outlet port communicating with the gas injection valve chamber. The predetermined position of the side wall between the first end and the second end of the shell is provided with a liquid inlet and a liquid outlet. The valve core is internally provided with a liquid passage. When the valve core is between the first predetermined position and the second predetermined position in the shell, the two ends of the liquid passage are respectively communicated with the liquid inlet and the liquid outlet. The second valve core end face and the second end of the shell are provided with an elastic member for applying an elastic force to the valve core away from the inner wall of the second end of the shell. The extension rod is fixedly arranged on the second valve core end face, and the end surface of the second end of the shell is provided with an opening for the extension rod to enter and exit the shell. The opening and closing sensor is arranged outside the second end of the shell and comprises a signal transmitter and a signal receiver arranged opposite to each other. When the extension rod extends outside the shell, the signal transmitter and the signal receiver are respectively located on both sides of the extension rod.

[0006] In an implementable scheme, the liquid discharge valve comprises a plurality of opening and closing sensors. Each opening and closing sensor comprises a signal transmitter and a signal receiver arranged opposite to each other. The plurality of opening and closing sensors are uniformly distributed along the length direction of the extension rod.

[0007] In an implementable scheme, the liquid discharge valve further comprises an adapter ring detachably arranged outside the shell. The opening and closing sensor is fixedly connected with the adapter ring.

[0008] In an implementable scheme, the surface of the extension rod is provided with a scale for indicating the opening degree of the valve core.

[0009] In an implementable scheme, the outside of the opening and closing sensor is provided with a light shield cover.

[0010] In an implementable scheme, the elastic member is a spring or an elastic sheet.

[0011] In an implementable scheme, the opening and closing sensor is an infrared sensor or a laser sensor.

[0012] In an implementable scheme, the first valve core end face is provided with a sealing layer.

[0013] In a second aspect, the application further provides a liquid discharge valve monitoring system, which comprises at least one liquid discharge valve, a gas source and a gas pressure detection device. The gas source is connected with the gas inlet and outlet port. The surface of the shell of the valve body is provided with a gas pressure detection port for communicating with the gas injection valve chamber. The gas pressure detection device is connected with the gas pressure detection port.

[0014] In an implementable solution, the liquid discharge valve monitoring system further comprises a gas source, a controller and an alarm, wherein the controller is signal connected with the opening and closing sensor, the gas pressure detection device, the gas source and the alarm respectively.

[0015] Compared with the prior art, the application has at least the following beneficial effects:

[0016] The application provides a liquid discharge valve, which is provided with an extension rod and an opening and closing sensor. When the valve core moves to a specified position interval so that two ends of a liquid passage are respectively communicated with a liquid inlet and a liquid outlet, the extension rod is extended out of the shell under the driving of the valve core, a signal emitted by a signal emitter is blocked by the extended part of the extension rod and cannot reach a signal receiver. Therefore, whether the two ends of the liquid passage are communicated with the liquid inlet and the liquid outlet can be effectively judged by detecting whether the signal receiver can receive the signal. In this way, a technician can know whether the liquid discharge valve can normally discharge waste liquid in time and take corresponding measures, such as shutdown and maintenance, to avoid greater loss.

[0017] Further, the liquid discharge valve provided by the application can be provided with a plurality of opening and closing sensors which are uniformly distributed along the length direction of the extension rod, so that the extension length of the extension rod can be detected, and the technician can master the specific opening size of the valve core, understand the current fault severity and take corresponding measures. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some of the embodiments of the application, and therefore should not be regarded as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained without creative labor.

[0019] Figure 1 is a cross-sectional view of the liquid discharge valve according to the embodiment of the application;

[0020] Figure 2 is a second schematic view of the liquid discharge valve;

[0021] Figure 3 is a third schematic view of the liquid discharge valve;

[0022] Figure 4 is a fourth schematic view of the liquid discharge valve;

[0023] Figure 5 is a schematic view of the liquid discharge valve monitoring system according to the embodiment of the application.

[0024] In the figure: 1, housing; 2, valve core; 3, elastic member; 4, extension rod; 5, opening and closing sensor; 6, adapter ring; 7, air pressure detection device; 8, air source; 9, controller; 10, alarm; 101, gas injection valve chamber; 102, air inlet and outlet; 103, liquid inlet; 104, liquid outlet; 105, air pressure detection port; 201, first valve core end face; 202, second valve core end face; 203, liquid passage; 501, signal transmitter; 502, signal receiver. DETAILED DESCRIPTION

[0025] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some but not all of the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative labor are within the scope of protection of the present application.

[0027] As Figure 1 and Figure 2As shown, the application provides a liquid discharge valve, which comprises a valve body, an extension rod 4 and an opening-closing sensor 5. The valve body comprises a shell 1 and a cylindrical valve core 2. The shell 1 comprises a first end and a second end, and an internal cavity extending from the first end to the second end. The cylindrical valve core 2 is arranged in the internal cavity of the shell 1 in a reciprocating manner from the first end to the second end. The valve core 2 comprises a first valve core end face 201 and a second valve core end face 202. The first valve core end face 201 of the valve core 2 and the inner wall of the first end of the shell 1 form a closed gas injection valve chamber 101. The first end surface of the shell 1 is provided with a gas inlet and outlet port 102 communicating with the gas injection valve chamber 101. The predetermined position of the sidewall between the first end and the second end of the shell 1 is provided with a liquid inlet port 103 and a liquid outlet port 104. The valve core 2 is internally provided with a liquid passage 203. When the valve core 2 is between the first predetermined position and the second predetermined position in the shell 1, the two ends of the liquid passage 203 are respectively communicated with the liquid inlet port 103 and the liquid outlet port 104. The second valve core end face 202 of the valve core 2 and the second end of the shell 1 are provided with an elastic member 3 for applying an elastic force to the valve core 2 away from the inner wall of the second end of the shell 1. The extension rod 4 is fixedly arranged on the second valve core end face 202, and the end surface of the second end of the shell 1 is provided with an opening for the extension rod 4 to enter and exit the shell 1. The opening-closing sensor 5 is arranged outside the second end of the shell 1 and comprises a signal transmitter 501 and a signal receiver 502 arranged oppositely. When the extension rod 4 extends out of the shell 1, the signal transmitter 501 and the signal receiver 502 are respectively located on both sides of the extension rod 4.

[0028] Preferably, the elastic member 3 can be a spring or an elastic sheet, and the opening-closing sensor 5 can be an infrared sensor or a laser sensor. A sealing layer can be arranged on the first valve core end face 201 to ensure the airtightness of the gas injection valve chamber 101. The sealing layer can be made of rubber or silicone, which is not limited here. In addition, a light shield (not shown in the figure) can be arranged outside the opening-closing sensor 5 to avoid interference of the signal receiver 502 by external irrelevant signals.

[0029] In use, when no gas is injected into the gas injection valve chamber 101, the two ends of the liquid passage 203 are not in communication with the liquid inlet 103 and the liquid outlet 104, at this time the elastic member 3 is in a natural state, the extension rod 4 is located inside the housing 1, and the signal emitted by the signal emitter 501 can directly reach the signal receiver 502. A gas pump or a gas cylinder or other external gas source is used to inject gas into the gas injection valve chamber 101 through the gas inlet and outlet 102, so that the gas pressure inside the gas injection valve chamber 101 rises, which can push the valve core 2 to move towards the second end of the housing 1 and compress the elastic member 3. When the pressure applied by the gas injection valve chamber 101 to the valve core 2 is balanced with the elastic force of the elastic member 3, the valve core 2 reaches between the first predetermined position and the second predetermined position, and the two ends of the liquid passage 203 are in communication with the liquid inlet 103 and the liquid outlet 104 respectively. At this time, the extension rod 4 is extended out of the housing 1 under the drive of the valve core 2, and the signal emitted by the signal emitter 501 is blocked by the part of the extension rod 4 extended out, and cannot reach the signal receiver 502. Therefore, by detecting whether the signal receiver 502 can receive the signal, it can be effectively judged whether the two ends of the liquid passage 203 are in communication with the liquid inlet 103 and the liquid outlet 104, so that the technical personnel can know whether the liquid discharge valve can normally discharge the waste liquid in time, and corresponding measures can be taken, such as shutdown for maintenance, to avoid greater losses.

[0030] In an embodiment, as Figure 3As shown, the drain valve can include a plurality of opening and closing sensors 5, each of which includes a signal transmitter 501 and a signal receiver 502 arranged oppositely, and the plurality of opening and closing sensors 5 are uniformly distributed along the length direction of the extension rod 4. In actual work, the liquid inlet 103, the liquid outlet 104 and the two ends of the liquid channel 203 each have a certain width, when the valve core 2 reaches the fully open position between the first predetermined position and the second predetermined position, the liquid inlet 103, the liquid outlet 104 and the two ends of the liquid channel 203 are completely aligned, at this time the drain valve reaches the maximum drain flow. If the valve core 2 is located between the first predetermined position and the second predetermined position but deviates from the fully open position, there will be a certain misalignment between the liquid inlet 103, the liquid outlet 104 and the two ends of the liquid channel 203, resulting in that the drain flow of the drain valve is lower than the maximum drain flow, and the waste liquid cannot be completely discharged within the preset time, thereby affecting the subsequent process flow. When the gas pressure in the gas injection valve chamber 101 deviates from the preset value, the elastic member 3 cannot be normally compressed, or the friction between the valve core 2 and the inner wall of the shell 1 unexpectedly increases, which may cause the valve core 2 to be insufficiently opened, thereby negatively affecting the entire process flow. After setting a plurality of opening and closing sensors 5, the plurality of groups of signal transmitters 501 and signal receivers 502 can not only detect whether the extension rod 4 is extended, but also detect the extension length of the extension rod 4. Before use, the relationship between the extension length of the extension rod 4 and the valve core opening degree (i.e. the drain flow of the drain valve) can be tested, and the valve core opening degree indicated by each opening and closing sensor 5 can be marked according to the test results. In this way, when the signal emitted by the specified opening and closing sensor 5 is blocked by the extension rod 4, the technician can master the specific opening degree of the valve core 2, so as to understand the current fault severity and take corresponding measures. The number and distribution of the specific opening and closing sensors 5 can be arranged according to the actual situation, which is not limited here.

[0031] In an embodiment, as shown in Figure 4 The drain valve further includes an adapter ring 6 detachably arranged outside the shell 1, and the opening and closing sensor 5 is fixedly connected with the adapter ring 6. After setting the adapter ring 6, when the signal transmitter 501 or the signal receiver 502 fails, or the signal direction is deviated due to external force, the overall replacement of all opening and closing sensors 5 can be realized by detaching the adapter ring 6, so as to restore the drain valve to normal working state as soon as possible. The adapter ring 6 can be fixedly connected with the outside of the shell 1 by screwing or buckling, and the specific connection mode is not limited here.

[0032] In an embodiment, the surface of the extension rod 4 is provided with a scale (not shown in the figure) for indicating the opening degree of the valve core 2. After setting the scale, more detailed observation of the opening degree of the valve core 2 can be realized by manual method, so that when the opening and closing sensor 5 fails, manual observation can be temporarily used to reduce the occurrence of work interruption as much as possible.

[0033] As Figure 5 shown, the application also provides a drain valve monitoring system, which comprises at least one drain valve, and further comprises a gas source 8 and a gas pressure detection device 7. As Figure 1 shown, the gas source 8 is connected with the gas inlet and outlet 102, and a gas pressure detection port 105 for communicating with the gas injection valve chamber 101 can be arranged on the surface of the valve body shell 1, and the gas pressure detection device 7 is connected with the gas pressure detection port 105. The gas pressure detection device 7 can obtain the gas pressure state in the gas injection valve chamber 101 in real time, so when the opening and closing sensor 5 detects that the valve core 2 is not opened or the opening degree is insufficient, the technician can determine whether the fault is caused by incorrect gas supply pressure through the gas pressure detection device 7, thereby improving the efficiency of troubleshooting.

[0034] In addition, the drain valve monitoring system can also include a controller 9 and an alarm 10. The controller 9 is respectively connected with the opening and closing sensor 5, the gas pressure detection device 7, the gas source 8 and the alarm 10. In use, the gas source 8 injects gas into the gas injection valve chamber 101 through the gas inlet and outlet 102, pushes the valve core 2 to move towards the second end of the shell 1 and compresses the elastic member 3, so that the valve core 2 reaches between the first predetermined position and the second predetermined position, and the liquid passage 203 forms a complete liquid discharge path with the liquid inlet 103 and the liquid outlet 104, so that the waste liquid is discharged through the drain valve. If the gas source 8 does not provide sufficient gas pressure for the gas injection valve chamber 101, causing the valve core 2 to move out of position, affecting the liquid discharge flow of the drain valve, or even causing the drain valve to be unable to discharge liquid, the alarm 10 will issue an alarm and inform the technician that there is a gas pressure problem in the gas injection valve chamber 101, so that the technician can quickly take corresponding measures for the gas source problem. Similarly, if the alarm 10 issues an alarm but the gas pressure detection device 7 does not detect a gas pressure problem in the gas injection valve chamber 101, the technician can quickly take corresponding inspection and rectification measures for non-gas source problems.

[0035] The above only describes the preferred embodiments of the application and is not intended to limit the application. Those skilled in the art can make various changes and modifications to the application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the application shall be included in the protection scope of the application.

Claims

1. A drain valve characterized by, The application relates to a liquid injection valve. The valve body comprises a shell (1) and a cylindrical valve core (2), the shell (1) comprises a first end and a second end and an internal cavity extending from the first end to the second end, the cylindrical valve core (2) is arranged in the internal cavity of the shell (1) in a reciprocating manner from the first end to the second end, the valve core (2) comprises a first valve core end face (201) and a second valve core end face (202), the first valve core end face (201) of the valve core (2) and the inner wall of the first end of the shell (1) form a closed gas injection valve chamber (101), the first end surface of the shell (1) is provided with an air inlet and outlet (102) communicating with the gas injection valve chamber (101), a liquid inlet (103) and a liquid outlet (104) are arranged at a predetermined position of the side wall between the first end and the second end of the shell (1), a liquid channel (203) is arranged in the valve core (2), when the valve core (2) is between a first predetermined position and a second predetermined position in the shell (1), the two ends of the liquid channel (203) are communicated with the liquid inlet (103) and the liquid outlet (104) respectively, an elastic element (3) is arranged between the second valve core end face (202) of the valve core (2) and the second end of the shell (1), and the elastic element (3) is used for applying an elastic force to the valve core (2) away from the inner wall of the second end of the shell (1). An extension rod (4) is fixedly arranged on the second valve core end face (202), and the end surface of the second end of the shell (1) is provided with an opening for the extension rod (4) to enter and exit the shell (1). An opening and closing sensor (5) is arranged outside the second end of the shell (1) and comprises a signal transmitter (501) and a signal receiver (502) arranged oppositely, when the extension rod (4) extends outside the shell (1), the signal transmitter (501) and the signal receiver (502) are located on the two sides of the extension rod (4) respectively.

2. The drain valve according to claim 1, wherein The liquid injection valve comprises a plurality of opening and closing sensors (5), each opening and closing sensor (5) comprises a signal transmitter (501) and a signal receiver (502) arranged oppositely, and the plurality of opening and closing sensors (5) are uniformly distributed along the length direction of the extension rod (4).

3. The drain valve according to claim 2, wherein An adapter ring (6) is detachably arranged outside the shell (1), and the opening and closing sensor (5) is fixedly connected with the adapter ring (6).

4. The drain valve according to claim 1, wherein The surface of the extension rod (4) is provided with a scale for indicating the opening degree of the valve core (2).

5. The drain valve according to claim 1, wherein An optical shield is arranged outside the opening and closing sensor (5).

6. The drain valve according to claim 1, wherein The elastic element (3) is a spring or an elastic sheet.

7. The drain valve according to claim 1, wherein The opening and closing sensor (5) is an infrared sensor or a laser sensor.

8. The drain valve of claim 1, wherein, A sealing layer is arranged on the first valve core end face (201).

9. A drain valve monitoring system, comprising: The liquid discharge valve comprises at least one valve body as claimed in any one of claims 1-8, a gas source (8) connected to the gas inlet and outlet (102), a gas pressure detection port (105) provided on the surface of the valve body housing (1) for communicating with the gas injection valve chamber (101), and a gas pressure detection device (7) connected to the gas pressure detection port (105).

10. The drain valve monitoring system of claim 9, wherein, The liquid discharge valve further comprises a controller (9) and an alarm (10), wherein the controller (9) is respectively connected to the opening and closing sensor (5), the gas pressure detection device (7), the gas source (8) and the alarm (10) in signal connection.

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