Fast assembly mechanism for excimer gas circulation device

Abstract

The utility model discloses a quick mounting mechanism for an excimer gas circulating device, which relates to the technical field of excimer gas circulating devices, and comprises two groups of auxiliary plates which can be respectively mounted at two open ends of a cylinder, each auxiliary plate is provided with a limiting hole and an operation window, the limiting hole is used for inserting a rotor, and the operation window is used for operating the rotor. When the two sets of auxiliary plates are installed at the two open ends of the barrel correspondingly, the fan can be limited to the designated position in the barrel, and then the fan is fixed through the operation window. According to the utility model, the two groups of auxiliary plates are respectively arranged at the two open ends of the barrel body, and the position of the fan is limited by utilizing the limiting holes, so that the whole device is quick, simple and convenient to mount and dismount, the working efficiency is improved, and the stability of the fan in the barrel body is ensured at the same time.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of excimer gas circulating device, specifically relates to a quick -mounting mechanism for excimer gas circulating device. BACKGROUND

[0002] In the 1990s, with the introduction of excimer laser into the field of semiconductor lithography production, a large number of excimer lasers enter the industrial production line, which greatly promotes the development of high-repetition, narrow linewidth, long life and high stability excimer laser technology. At the same time, other microstructure processing and material processing and other industrial applications, such as liquid crystal panel annealing, microstructure processing and surface treatment, also promote the vigorous development of high-power excimer laser technology. As an essential part of excimer laser, excimer gas plays a very important role in it.

[0003] As shown in Figure 1 The existing excimer gas circulating device generally includes a cylinder 101 with two open ends, and a fan 102 and a series of auxiliary components can be installed inside the cylinder 101 through the two open ends of the cylinder 101. The end of the fan 102 has a rotor 103. After installation, the end cover is set at both open ends of the cylinder 101 for sealing, and the excimer gas is filled into the cylinder 101 for subsequent use.

[0004] Since the cylinder of the excimer gas circulating device is slender, that is, its length is designed to be longer, and the size of the fan adapted thereto is also slender, therefore, the technician will be limited in operation when assembling the fan in the specified position inside the cylinder, and needs to adjust the position of the fan repeatedly several times to accurately install it in the specified position inside the cylinder, which is relatively cumbersome.

[0005] Based on this, we propose a quick-mounting mechanism for excimer gas circulating device to solve the above problems. CONTENT OF THE UTILITY MODEL

[0006] The utility model aims at: in order to solve the problem in the prior art, and propose a kind of quick-mounting mechanism for excimer gas circulating device, the mechanism can be moved with the position of two groups of auxiliary plates by the setting of two groups of auxiliary plates, when two groups of auxiliary plates position is assembled on the cylinder, the fan will also be in the specified position of installation.

[0007] To solve the above problems, the utility model provides the following technical scheme:

[0008] A kind of quick mounting mechanism for excimer gas circulating device, including two groups of auxiliary plates that can be installed at the two open ends of cylinder respectively, limit hole and operating window are opened on the auxiliary plate, limit hole is used for the rotor to be inserted, when two groups of auxiliary plates are installed at the two open ends of cylinder respectively, fan will be limited at specified position inside the cylinder, then the fixing operation of fan is carried out through operating window.

[0009] As a further scheme of the utility model: the limit hole is provided with fastener for locking rotor.

[0010] As a further scheme of the utility model: the fastener includes a plurality of adjusting screw rods, and one end of each adjusting screw rod can extend into the limit hole.

[0011] As a further scheme of the utility model: a plurality of adjusting screw rods are arranged along the radial direction of the limit hole, and a plurality of adjusting screw rods form a size-adjustable clamping area at one end of the limit hole.

[0012] As a further scheme of the utility model: the fastener includes a fixing seat arranged on the auxiliary plate, and two oppositely arranged clamping blocks are movably arranged on the fixing seat, the two clamping blocks are distributed on both sides of the limit hole, a bidirectional threaded rod is movably arranged on the fixing seat, the bidirectional threaded rod has two threaded segments with opposite threads, and the two clamping blocks are threadedly sleeved on the two threaded segments.

[0013] As a further scheme of the utility model: the fixing seat is arranged on the side of the auxiliary plate facing the cylinder.

[0014] As a further scheme of the utility model: a plurality of assembly holes are uniformly arranged on the auxiliary plate, and a pin shaft is arranged on each assembly hole and can be locked on the cylinder.

[0015] As a further scheme of the utility model: the operating window is rectangular and located above the limit hole.

[0016] Compared with the prior art, the utility model has the following beneficial effects:

[0017] 1、The quick mounting mechanism is ingenious, two groups of auxiliary plates are installed at the two open ends of the cylinder, the position of the fan is limited by the limit hole, so that the installation and disassembly process of the whole device becomes fast and simple, improves the work efficiency, and ensures the stability of the fan in the cylinder.

[0018] 2、The fastener arranged at the limit hole can not only firmly lock the rotor, but also can be positioned and adjusted to prevent loosening or displacement during work, thereby ensuring the stability and reliability of the whole quick mounting mechanism.

[0019] 3、The fastener adopts the design of multiple adjusting screws, making the locking process more flexible and controllable. Each adjusting screw can be independently adjusted, ensuring that the rotor is uniformly and firmly clamped in the limiting hole, improving the locking effect.

[0020] 4、The adjusting screw is arranged radially along the limiting hole and forms a clamping area at one end of the limiting hole. This design can more effectively clamp the rotor and prevent it from moving in any direction, further enhancing the stability and safety of the quick mounting mechanism.

[0021] 5、The fastener adopts the combined design of a fixed seat, a clamping block and a bidirectional threaded rod, making the locking process more convenient and efficient. By rotating the bidirectional threaded rod, two clamping blocks can be simultaneously driven to move in opposite directions, achieving rapid clamping and locking of the rotor.

[0022] 6、The fixed seat is arranged on the side of the auxiliary plate facing the cylinder. This design makes the fastener more concealed and does not interfere with other parts of the quick mounting mechanism, and also facilitates maintenance and replacement. BRIEF DESCRIPTION OF DRAWINGS

[0023] The utility model will be further described below in combination with the drawings.

[0024] Figure 1 is the three-dimensional structure schematic diagram of the excimer gas circulating device in the prior art;

[0025] Figure 2 is the working state structure schematic diagram of the utility model;

[0026] Figure 3 is the three-dimensional structure schematic diagram of the utility model setting the first fastener;

[0027] Figure 4 is the front view structure schematic diagram of the utility model setting the second fastener.

[0028] In the drawing: 101, cylinder; 102, fan; 103, rotor;

[0029] 1, auxiliary plate; 2, limiting hole; 3, operation window; 4, adjusting screw; 5, fixed seat; 6, clamping block; 7, bidirectional threaded rod; 8, assembly hole. DETAILED DESCRIPTION

[0030] The technical solutions in the embodiments of the utility model will be clearly and completely described below in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0031] As Figures 2-4 shown, a quick mounting mechanism for a excimer gas circulating device, comprising two sets of auxiliary plates, the auxiliary plate 1 is provided with a limiting hole 2 and an operation window 3, the operation window 3 is set as a rectangle and is located above the limiting hole 2. Among them: the limiting hole 2 is used for the rotor 103 to be inserted, and the operation window 3 is used for the technician to set operation.

[0032] When the fan 102 is installed by using the quick mounting mechanism of the application, the specific installation process is: after the fan 102 to be installed is placed inside the cylinder body 101, two sets of auxiliary plates 1 can be placed at the opening ends of the cylinder body 101 respectively, and the limiting hole 2 on the auxiliary plate 1 is adapted to be sleeved on the rotor 103 of the fan 102. In this state, the fan 102 as a whole is connected between the two sets of auxiliary plates 1, that is, the fan 102 and the two sets of auxiliary plates 1 form a moving whole, and then the position of the auxiliary plate 1 at the opening end of the cylinder body 101 is adjusted until the assembly hole 8 on the auxiliary plate 1 is opposite to the assembly hole position at the opening end of the cylinder body 101, that is, the position of the auxiliary plate 1 is adjusted to the accurate installation position, at which time the pin shaft or the like can be inserted into the assembly hole to complete the locking of the auxiliary plate 1 on the cylinder body 101. During the adjustment of the two sets of auxiliary plates 1, the position of the fan 102 is driven inside the cylinder body 101, and when the positions of the two sets of auxiliary plates 1 are adjusted and locked, the position of the fan 102 is driven to the specified position inside the cylinder body 101, which is the position to be installed of the fan 102, and then the technician can install the fan 102 by putting his hands through the operation window 3. During the installation process, the fan 102 is lifted by the two sets of auxiliary plates 1, so manual lifting is not required, which is simple and convenient to use.

[0033] Because different types of fans 102 have rotors 103 with different diameters, in order to adapt to the installation of different types of fans 102, the application is provided with fasteners for locking the rotor 103 at the limiting hole 2, and the fasteners have the following two designs:

[0034] (1) As Figure 3 shown, the first type of fastener includes a plurality of adjustment screws 4 which are screw-mounted on the auxiliary plate 1, and one end of each adjustment screw 4 can extend into the limiting hole 2. The plurality of adjustment screws 4 are arranged along the radial direction of the limiting hole 2, and the plurality of adjustment screws 4 at one end of the limiting hole 2 form a clamping area. When the diameter of the rotor 103 is smaller than the limiting hole 2 and is inserted into the limiting hole 2, the corresponding adjustment screw 4 can be driven to rotate until the clamping area is adjusted to be smaller to clamp and fix the rotor 103. It should be noted that in order to ensure the coaxiality between the limiting hole 2 and the rotor 103, the number of turns of the adjustment screw 4 can be kept consistent each time, that is, the circular clamping area formed is coaxial with the limiting hole 2.

[0035] (2) Figure 4 As shown, the second type of fastener includes a fixed seat 5 mounted on the auxiliary plate 1, and two opposing clamping blocks 6 are movably mounted on the fixed seat 5. The two clamping blocks 6 are distributed on both sides of the limiting hole 2. A bidirectional threaded rod 7 is movably mounted on the fixed seat 5. The bidirectional threaded rod 7 has two threaded sections with opposite threads. The two clamping blocks 6 are respectively threaded onto the two threaded sections. The fixed seat 5 is located on the side of the auxiliary plate 1 facing the cylinder 101. When the diameter of the rotor 103 is smaller than that of the limiting hole 2 and it is inserted into the limiting hole 2, the bidirectional threaded rod 7 can be driven to rotate, causing the two clamping blocks 6 to move closer to each other. The two clamping blocks 6 move closer to each other synchronously, with the same movement trend. Thus, while the two clamping blocks 6 clamp and fix the rotor 103, they can also ensure the coaxial relationship between the rotor 103 and the limiting hole 2.

[0036] The above description provides a detailed account of one embodiment of the present invention. However, this description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the patent coverage of the present invention.

Claims

1. A quick attachment mechanism for an excimer gas circulation device, characterized by, The utility model provides a kind of auxiliary plate (1) of fan (102) and the fixing method of wind turbine (103), including two groups of auxiliary plate (1) can be respectively installed in the both open ends of barrel (101), the limiting hole (2) and operating window (3) are opened in the auxiliary plate (1), limiting hole (2) is used for rotor (103) to be inserted, when two groups of auxiliary plate (1) are respectively installed in the both open ends of barrel (101), fan (102) will be limited at the specified position inside barrel (101), then the fixing operation of fan (102) is carried out through operating window (3).

2. The quick attachment mechanism for a excimer gas circulation device according to claim 1, wherein The limiting hole (2) is provided with a fastener for locking the rotor (103).

3. The quick attachment mechanism for a excimer gas circulation device according to claim 2, wherein The fastener includes a plurality of adjustment screws (4) threaded on the auxiliary plate (1), and one end of each adjustment screw (4) can extend into the limiting hole (2).

4. The quick attachment mechanism for a excimer gas circulation device according to claim 3, wherein The plurality of adjustment screws (4) are arranged along the radial direction of the limiting hole (2), and the plurality of adjustment screws (4) at one end of the limiting hole (2) collectively form a size-adjustable clamping area.

5. The quick attachment mechanism for a excimer gas circulation device according to claim 2, wherein The fastener includes a fixing seat (5) provided on the auxiliary plate (1), and two oppositely arranged clamping blocks (6) are movably provided on the fixing seat (5), the two clamping blocks (6) are distributed on both sides of the limiting hole (2), a bidirectional threaded rod (7) is movably provided on the fixing seat (5), the bidirectional threaded rod (7) has two threaded segments with opposite threads, and the two clamping blocks (6) are threadedly sleeved on the two threaded segments, respectively.

6. The quick attachment mechanism for a excimer gas circulation device according to claim 5, wherein The fixing seat (5) is provided on the side of the auxiliary plate (1) facing the barrel (101).

7. The quick mount mechanism for an excimer gas circulation device according to any one of claims 1 to 6, wherein A plurality of assembly holes (8) are uniformly provided on the auxiliary plate (1), and a pin shaft is provided on each assembly hole (8) and can be locked on the barrel (101).

8. The quick mount mechanism for an excimer gas circulation device according to any one of claims 1 to 6, wherein The operating window (3) is rectangular and located above the limiting hole (2).

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