Carrier for bearing substrate

Abstract

The utility model relates to a carrier for bearing a substrate, and belongs to the technical field of semiconductor processing. The top of the lower carrier plate is provided with a placing area for placing a substrate, the lower carrier plate is provided with a plurality of positioning columns at the outer edge of the placing area, the lower carrier plate is provided with a plurality of positioning through holes matched with the positioning columns, the lower carrier plate is also provided with a plurality of fixed magnetic sheets at the outer edge of the placing area, and the fixed magnetic sheets are matched with the positioning columns. And the fixed magnetic sheet is magnetically matched with the upper cover plate. The substrate and carrier assembling device has the effect of improving the substrate and carrier assembling efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing, in particular to a carrier for carrying a substrate. BACKGROUND

[0002] A semiconductor substrate is a substrate material used for producing and manufacturing semiconductor devices. It not only physically supports the semiconductor devices, but also carries the circuit structure to realize the circuit function. The quality and performance of the substrate directly affect the reliability and performance of the semiconductor devices.

[0003] Before packaging the chip and the substrate, the substrate needs to be fixed in a specific carrier. The carrier is used to protect and position the substrate. The existing carrier usually includes a lower plate and an upper cover plate. The substrate is placed on the top of the lower plate, and then the upper cover plate is placed on the top of the substrate. The substrate is pressed tightly on the lower plate by means of buckling.

[0004] For the related technology in the above, the disassembly of the upper cover plate and the lower plate is relatively cumbersome, which affects the packaging efficiency of the substrate and the chip. CONTENT OF THE INVENTION

[0005] In order to improve the assembly efficiency of the substrate and the carrier, the present application provides a carrier for carrying a substrate.

[0006] The carrier for carrying a substrate provided by the present application adopts the following technical scheme:

[0007] A carrier for carrying a substrate includes a lower plate and an upper cover plate. The lower plate is provided with a placement area for placing a substrate on the top. The lower plate is provided with a plurality of positioning columns along the outer edge of the placement area. The lower plate is provided with a plurality of positioning through holes matched with the positioning columns. The lower plate is also provided with a plurality of fixed magnetic sheets along the outer edge of the placement area. The fixed magnetic sheets and the upper cover plate are magnetically matched.

[0008] By adopting the above technical scheme, when assembling the substrate and the carrier, the substrate is placed in the placement area, and then the upper cover plate is installed on the top of the substrate. The positioning columns of the upper cover plate and the positioning through holes are correspondingly inserted to ensure the accurate pressing of the substrate. The fixed magnetic sheets and the upper cover plate are attracted to realize the fixation of the upper cover plate and the carrier. Compared with the prior art, the assembly structure of the upper cover plate and the lower plate of the present application has the effects of simple structure and convenient disassembly.

[0009] Optionally, the positioning columns and the fixed magnetic sheets are arranged in a rectangular array on the lower plate, and the upper cover plate is provided with a positioning through hole corresponding to each positioning column.

[0010] By adopting the above technical scheme, the positioning through holes and the positioning columns are arranged in a rectangular array, which can provide uniform support and positioning in all directions, ensure stability when stressed, and improve the positioning effect.

[0011] Optionally, the end of the positioning column is provided with a guide spherical surface.

[0012] By adopting the above technical scheme, the guide spherical surface can guide the insertion of the upper cover plate and the positioning column, thereby further improving the assembly efficiency of the upper cover plate and the positioning column.

[0013] Optionally, the opposite two side walls of the download plate are provided with a push gap.

[0014] By adopting the above technical scheme, the push gap provided on the two sides of the download plate can facilitate the worker to insert the fingers into the push gap, thereby facilitating the disassembly and separation of the upper cover plate from the download plate, reducing the use of other tools and thereby reducing the probability of damage to the upper cover plate.

[0015] Optionally, the placement area is provided with a plurality of water through holes.

[0016] By adopting the above technical scheme, the water through hole is provided, so that the cleaning liquid can flow back and forth in the water through hole during the cleaning process of the carrier, thereby improving the cleaning effect and having good drainage and drying effect.

[0017] Optionally, the download plate is provided with a flow separation groove on the opposite two sides of the placement area, and the two ends of the flow separation groove penetrate the side wall of the download plate.

[0018] By adopting the above technical scheme, the flow separation groove is provided, so that the excess cleaning liquid in the placement area can flow to the flow separation groove, thereby further improving the drainage effect.

[0019] Optionally, the flow separation groove is provided with an extension groove extending to the placement area.

[0020] By adopting the above technical scheme, the extension groove is provided, so that the cleaning liquid in the placement area can flow to the flow separation groove through the extension groove, and then be discharged from the two ends of the flow separation groove, thereby further improving the drainage effect.

[0021] Optionally, the download plate is provided with two groups of placement areas, and the two groups of placement areas are arranged at intervals along the length direction of the download plate, and the flow separation groove is arranged along the width direction of the download plate.

[0022] By adopting the above technical scheme, the two groups of placement areas are provided, so that two groups of substrates can be placed on the download plate at one time, that is, the flip device can process two groups of substrates at the same time, thereby improving the processing efficiency.

[0023] Optionally, the download plate is provided with a stepped groove on the two sides in the length direction.

[0024] By adopting the technical scheme, the stepped groove is arranged, the thickness of the two sides of the loading plate is reduced, and the whole loading plate is facilitated to slide on the track of the flip device.

[0025] To sum up, the present application has at least one of the following beneficial technical effects:

[0026] 1. The present application realizes the positioning and insertion of the loading plate and the upper cover plate through the cooperation of the positioning column and the positioning through hole, and guarantees the integrity of the compression of the substrate;

[0027] 2. The fixing method of the magnetic sheet has the effects of convenient fixing and labor-saving disassembly;

[0028] 3. The arrangement of the water through hole and the shunt groove makes the loading plate have good drainage and drying effects during the cleaning process. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 is a schematic diagram of the overall structure of the embodiment of the present application.

[0030] Figure 2 is an exploded schematic diagram of the embodiment of the present application.

[0031] Figure 3 is a schematic diagram of the bottom structure of the loading plate of the embodiment of the present application.

[0032] Reference signs: 1, loading plate; 11, placement area; 12, mounting through hole; 13, mounting bolt; 15, insertion through hole; 16, push gap; 17, water through hole; 18, shunt groove; 181, extension groove; 19, stepped groove; 2, upper cover plate; 21, compression through hole; 22, positioning through hole; 3, positioning column; 31, guide spherical surface; 32, mounting screw hole; 4, fixed magnetic sheet. DETAILED DESCRIPTION

[0033] The following will be described in detail in combination with the accompanying Figures 1-3 The present application will be further described in detail.

[0034] The embodiment of the present application discloses a loading plate for carrying a substrate.

[0035] Refer to Figure 1 A loading plate for carrying a substrate includes a loading plate 1 and an upper cover plate 2. The loading plate 1 and the upper cover plate 2 are both rectangular metal plate bodies.

[0036] The top of the loading plate 1 is provided with two placement areas 11 for placing the substrate along the length direction. The two placement areas 11 are symmetrically arranged along the center axis of the length direction of the loading plate 1. The upper cover plate 2 has two compression through holes 21 corresponding to the placement areas 11 one by one.

[0037] Refer to Figure 1 and Figure 2The download plate 1 is provided with two groups of positioning columns 3 for positioning the upper cover plate 2 on opposite sides of the placement area 11. The spacing of each group of positioning columns 3 is less than the width of the placement area 11, and each group of positioning columns 3 is arranged at intervals along the width direction of the download plate 1, so that the four positioning columns 3 are arranged in a rectangular array. The download plate 1 is provided with mounting through holes 12 for mounting the positioning columns 3, and the mounting through holes 12 are stepped holes. The upper cover plate 2 is provided with positioning through holes 22 corresponding to the eight positioning columns 3.

[0038] In combination Figure 3 The end of the positioning column 3 towards the upper cover plate 2 is provided with a guide spherical surface 31 for improving the insertion efficiency of the download plate 1 and the upper cover plate 2. The other end of the positioning column 3 is also provided with a mounting screw hole 32 coaxially arranged with the mounting through hole 12. The bottom of the download plate 1 is provided with a mounting bolt 13 for connecting the positioning column 3 at the mounting through hole 12.

[0039] The download plate 1 is provided with fixing magnetic sheets 4 for fixing the upper cover plate 2 on opposite sides of the placement area 11. The spacing of each group of fixing magnetic sheets 4 is greater than the width of the placement area 11, and the four fixing magnetic sheets 4 are also arranged in a rectangular array. The download plate 1 is provided with insertion through holes 15 penetrating through the two side end faces and for inserting the fixing magnetic sheets 4, and the fixing magnetic sheets 4 are in the form of a circular column as a whole, which is inserted into the insertion through hole 15 to realize the fixation with the download plate 1.

[0040] When the upper cover plate 2 and the positioning column 3 are inserted and matched, the upper cover plate 2 has a tendency to move towards the download plate 1 under the action of the fixing magnetic sheet 4, thereby realizing the fixation of the download plate 1 and the upper cover plate 2.

[0041] The download plate 1 is also provided with a pulling gap 16 on both sides in the length direction, which corresponds to the placement area 11. Through the arrangement of the pulling gap 16, it is convenient for the staff or lifting equipment to lift and separate the upper cover plate 2 from the download plate 1, and the disassembly is more convenient.

[0042] The substrate and the carrier are installed and then subjected to a cleaning process. In order to improve the cleaning and drainage effect of the carrier, the download plate 1 is uniformly provided with a plurality of water through holes 17 in the placement area 11, and the water through holes 17 are arranged in a rectangular array. The download plate 1 is also provided with a shunt groove 18 on both sides of the placement area 11.

[0043] The shunt groove 18 extends along the width direction of the download plate 1 and penetrates through the two side walls of the download plate 1. The shunt groove 18 located at both ends of the download plate 1 also has an extension groove 181 extending towards the placement area 11. In this embodiment, the download plate 1 has three extension grooves 181, and the extension grooves 181 all extend into the placement area 11, so that the excess cleaning liquid in the placement area 11 can be transported to the shunt groove 18 through the extension groove 181, and then discharged through the two ends of the shunt groove 18.

[0044] In order to facilitate the sliding of the carrier on the track of the flip device, the outer edges of the length direction of the download plate 1 are also provided with stepped grooves 19 for reducing the thickness of the two sides of the download plate 1.

[0045] The implementation principle of the carrier for carrying the substrate is that two substrates are positioned and placed in the placement area 11, the positioning column 3 can limit the two sides of the substrate to ensure the parallelism of the placement of the substrate, then the upper cover plate 2 is placed towards the top of the substrate, under the action of the positioning column 3 and the positioning through hole 22, the positioning and assembly of the upper cover plate 2 and the download plate 1 are realized, then under the action of the fixed magnetic sheet 4, the upper cover plate 2 tightly presses the substrate on the download plate 1.

[0046] The above are preferred embodiments of the present application, which do not limit the protection scope of the present application, so: any equivalent changes made according to the structure, shape, principle of the present application should be covered within the protection scope of the present application.

Claims

1. A carrier for a substrate, comprising a lower plate (1) and an upper cover plate (2), characterized in that, The download plate (1) is provided with a placing area (11) on the top for placing the substrate, a plurality of positioning columns (3) are arranged outside the placing area (11), the download plate (1) is provided with a plurality of positioning through holes (22) matched with the positioning columns (3), and a plurality of fixed magnetic sheets (4) are arranged outside the placing area (11).

2. The substrate carrying carrier of claim 1, wherein, The positioning columns (3) and the fixed magnetic sheets (4) are arranged in a rectangular array on the download plate (1), and the upper cover plate (2) is provided with a positioning through hole (22) corresponding to each positioning column (3).

3. The substrate carrying carrier of claim 1, wherein, The end of the positioning column (3) is provided with a guide spherical surface (31).

4. The substrate carrying carrier of claim 1, wherein, The opposite two side walls of the download plate (1) are provided with a push gap (16).

5. The substrate carrying carrier of claim 1, wherein, The placing area (11) is provided with a plurality of water through holes (17).

6. The substrate carrying carrier of claim 1, wherein, The download plate (1) is provided with a shunt groove (18) on the opposite two sides of the placing area (11), and the two ends of the shunt groove (18) penetrate the side wall of the download plate (1).

7. The substrate carrying carrier of claim 6, wherein, The shunt groove (18) is provided with an extension groove (181) extending to the placing area (11).

8. The substrate carrying carrier of claim 6, wherein, The download plate (1) is provided with two groups of placing areas (11), and the two groups of placing areas (11) are arranged at intervals along the length direction of the download plate (1), and the shunt groove (18) is arranged along the width direction of the download plate (1).

9. The substrate carrying carrier of claim 1, wherein, The download plate (1) is provided with a stepped groove (19) on the length direction.

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