Rotary machining table of laser machining production line

Abstract

The utility model discloses a rotary machining table of a laser machining production line, which comprises a rotary table, a rotary table and a rotary table, the multiple vacuum jigs are arranged on the bearing face at intervals in the circumferential direction of the rotary disc, and adsorption faces used for adsorbing and fixing workpieces are arranged on the faces, away from the rotary disc, of the vacuum jigs; the rotation driving mechanism is used for driving the turntable to rotate; the rotating joint extends in the axial direction of the rotating disc and is arranged on the bearing surface, the rotating joint comprises a first section connected with the rotating disc and a second section capable of rotating relative to the first section, and a vacuum channel communicated with the vacuum jig is formed in the rotating joint; and the vacuum generating mechanism is arranged on the second section of the rotating joint, and the working end of the vacuum generating mechanism is communicated with the vacuum channel. According to the rotary machining table of the laser machining production line, the occupied area of equipment can be remarkably reduced, continuous machining is achieved, and the machining efficiency and the machining precision are improved.

Description

Technical Field

[0001] This utility model belongs to the field of laser processing technology, specifically relating to a rotary processing table for a laser processing production line. Background Technology

[0002] Laser edge cleaning of silicon wafers is a method that uses laser technology to clean the edges of silicon wafers. It is widely used in semiconductor manufacturing, solar cell manufacturing and other fields.

[0003] Traditional silicon wafer laser edge-cleaning production lines consist of a processing table and loading and unloading conveyor belts located at both ends of the table. Silicon wafers are conveyed to the processing table via the loading conveyor belt for laser processing, and after processing, they are transported to the unloading station via the unloading conveyor belt. This layout results in a large footprint for the equipment, and the transfer time between the conveyor belts and the processing table is significant. Furthermore, the workpieces occupy processing stations during transfer, hindering continuous processing and impacting overall efficiency. Utility Model Content

[0004] The purpose of this application is to provide a rotary processing table for a laser processing production line, so as to solve the technical problems of existing silicon wafer laser edge clearing production lines, such as large area occupation, inability to achieve continuous processing, and low processing efficiency.

[0005] To achieve the above objectives, this application provides a rotary processing table for a laser processing production line, comprising:

[0006] Turntable, including the bearing surface;

[0007] Multiple vacuum fixtures are arranged at intervals along the circumference of the turntable on the bearing surface, and the side of the vacuum fixture facing away from the turntable is provided with an adsorption surface for adsorbing and fixing workpieces.

[0008] A rotary drive mechanism is used to drive the turntable to rotate;

[0009] A rotary joint is arranged on the bearing surface extending along the axial direction of the turntable. The rotary joint includes a first section connected to the turntable and a second section that can rotate relative to the first section. A vacuum channel communicating with the vacuum fixture is formed inside the rotary joint.

[0010] A vacuum generating mechanism is arranged in the second section of the rotary joint, and the working end of the vacuum generating mechanism is connected to the vacuum channel.

[0011] In one or more embodiments, the turntable includes a plurality of support arms arranged circumferentially, the support arms extending radially along the turntable, and each support arm corresponds to a vacuum fixture, the vacuum fixture being arranged on the corresponding support arm.

[0012] In one or more embodiments, the vacuum tool is in a U-shaped structure, and a U-shaped opening of the U-shaped structure is arranged to extend along a radial direction of the rotary table and is directed to a side away from the rotary joint, and a hollow portion corresponding to a position of the U-shaped opening is arranged on the bearing surface.

[0013] In one or more embodiments, a recessed portion matching the vacuum tool is arranged on the bearing surface, and the vacuum tool is embedded in the recessed portion and fixed.

[0014] In one or more embodiments, a first vacuum joint is arranged at one end of the vacuum tool close to the rotary joint, a second vacuum joint connected to the first vacuum joint is arranged on a side of the first section facing the vacuum tool, and the second vacuum joint is arranged in communication with the vacuum channel.

[0015] In one or more embodiments, the vacuum generating mechanism comprises:

[0016] a sleeve, one end of which is sleeved on the second section, and an inside of the sleeve is arranged in communication with the vacuum channel;

[0017] a gas cabinet, which is arranged at the other end of the sleeve, and an inside of the gas cabinet is arranged in communication with the inside of the sleeve;

[0018] a vacuum generator, which is arranged in the inside of the gas cabinet.

[0019] In one or more embodiments, a surface light source is further included, the surface light source is arranged on a side of the rotary table away from the vacuum tool, and the surface light source corresponds to a position of the vacuum tool, so that the surface light source can provide backlighting when a workpiece is processed.

[0020] In one or more embodiments, a support for supporting the surface light source is further included, the support comprises a bottom plate and a support leg for supporting the bottom plate, and the surface light source is arranged on the bottom plate.

[0021] The support further comprises a blowing plate arranged at one end of the bottom plate, the blowing plate is arranged at a blowing port on a side facing the surface light source, and a blowing channel in communication with the blowing port is formed in the inside of the blowing plate.

[0022] In one or more embodiments, the bottom plate is arranged to be inclined, and the bottom plate comprises a high end and a low end arranged oppositely, and the blowing plate is arranged at the high end.

[0023] In one or more embodiments, a position detection mechanism is further included, the position detection mechanism comprises a photoelectric sensor and a sensing sheet, the photoelectric sensor is arranged on a side of the rotary table away from the vacuum tool, the sensing sheet is arranged on a side of the rotary table facing the photoelectric sensor, and the sensing sheet corresponds to a position of the photoelectric sensor.

[0024] Compared with the prior art, the application has the beneficial effects that:

[0025] The rotating machining table of the laser machining production line can significantly reduce the equipment occupation area, realize continuous machining, and improve the machining efficiency and machining precision. BRIEF DESCRIPTION OF DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments described in the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0027] Figure 1 is a structural schematic view of an embodiment of the rotating machining table of the laser machining production line of the present application;

[0028] Figure 2 is Figure 1 is a partial enlarged view of A in

[0029] Figure 3 is a structural schematic view of an embodiment of the rotating machining table of the laser machining production line of the present application;

[0030] Figure 4 is a structural schematic view of another view of the rotating machining table of the laser machining production line of the present application;

[0031] Figure 5 is a structural schematic view of an embodiment of the mounting structure of the surface light source of the present application.

[0032] Shown in the drawings:

[0033] Rotating disc 10; bearing surface 101; recessed part 102; hollow part 103; support arm 104;

[0034] Vacuum jig 20; adsorption surface 201; first vacuum joint 202; U-shaped opening 203;

[0035] Rotary drive mechanism 30;

[0036] Rotary joint 40; first section 401; second section 402; second vacuum joint 403;

[0037] Vacuum generating mechanism 50; sleeve 501; gas tank 502; vacuum generator 503;

[0038] Position detection mechanism 60; photoelectric sensor 601; inductive sheet 602;

[0039] Surface light source 70;

[0040] 80; base plate 801; support leg 802; blower plate 803; blower outlet 804; high end 805; low end 806. Detailed Implementation

[0041] To enable those skilled in the art to better understand the technical solutions in this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this utility model.

[0042] Existing silicon wafer laser edge cleaning production lines cannot achieve continuous processing due to the workpieces occupying processing stations during transfer, which affects processing efficiency; at the same time, the linear station layout results in a large area occupied.

[0043] To address the aforementioned issues, the applicant has developed a novel rotary processing table for a laser processing production line. This rotary processing table comprises multiple circumferentially arranged workstations, enabling the rotational transport of workpieces and rapid transfer of different workstations to the processing location. This facilitates continuous processing and significantly improves processing efficiency.

[0044] Specifically, please refer to Figure 1 , Figure 1 This is a schematic diagram of one embodiment of the rotary processing table of the laser processing production line of this application.

[0045] like Figure 1 As shown, the rotary machining table includes a turntable 10, the turntable 10 includes a bearing surface 101, and four vacuum jigs 20 are arranged on the bearing surface 101 at uniform intervals along the circumference.

[0046] Each vacuum fixture 20 has an adsorption surface 201 arranged on the side opposite to the turntable 10 for adsorbing and fixing workpieces.

[0047] The rotary processing table also includes a rotary drive mechanism 30 for driving the turntable 10 to rotate. Specifically, in this embodiment, the rotary drive mechanism 30 is a motor. In other embodiments, any rotary drive element commonly used in the art can also be used to achieve the effect of this embodiment.

[0048] It can be understood that when the rotating disc 10 rotates, the four vacuum fixtures 20 can be driven to adjust positions, and one workpiece can be fixed on each vacuum fixture 20. In the same period, the workpieces on the four vacuum fixtures 20 can be in the processing stage, the waiting processing stage, the waiting feeding stage and the feeding stage respectively. When the workpiece in the processing stage is processed, the rotating disc 10 rotates to rotate the next workpiece to the laser processing head, so that continuous processing can be realized.

[0049] Further, in the rotating process, the workpiece located on the adsorption surface 201 of the vacuum fixture 20 bears a large centrifugal force. Therefore, it is crucial to ensure the vacuum degree inside the vacuum fixture 20 for the fixing stability of the workpiece during the rotating process of the rotating disc 10.

[0050] In the embodiment, in order to solve the problem of the vacuum degree during the rotating process of the vacuum fixture 20, a rotary joint 40 is arranged at the rotating center of the bearing surface 101 of the rotating disc 10.

[0051] Please refer to Figure 1 and Figure 2 , Figure 2 is Figure 1 a partial enlarged view of A. The rotary joint 40 is arranged on the bearing surface 101 and extends along the axial direction of the rotating disc 10. The rotary joint 40 includes a first segment 401 connected with the rotating disc 10 and a second segment 402 relatively rotatable with the first segment 401. The rotary joint 40 is internally formed with a vacuum passage (not shown in the figure) in communication with the vacuum fixture 20.

[0052] The second segment 402 of the rotary joint 40 is further arranged with a vacuum generating mechanism 50, and the working end of the vacuum generating mechanism 50 is arranged in communication with the vacuum passage.

[0053] Based on the above design, the first segment 401 of the rotary joint 40 can rotate with the rotating disc 10, and the second segment 402 remains relatively stationary. During the rotating process of the rotating disc 10, the vacuum generating mechanism 50 ensures the vacuum degree inside the vacuum fixture 20 in real time through the vacuum passage, thereby ensuring the fixing stability of the workpiece.

[0054] Specifically, in the embodiment, the vacuum fixture 20 is arranged with a first vacuum joint 202 close to one end of the rotary joint 40. One side of the first segment 401 facing the vacuum fixture 20 is arranged with a second vacuum joint 403 connected with the first vacuum joint 202, and the second vacuum joint 403 is arranged in communication with the vacuum passage.

[0055] In the embodiment, the vacuum generating mechanism 50 includes a sleeve 501 sleeved on one end of the second segment 402, and the inside of the sleeve 501 is arranged in communication with the vacuum passage. The other end of the sleeve 501 is fixed with a gas tank 502, the inside of the gas tank 502 is arranged in communication with the inside of the sleeve 501, and the inside of the gas tank 502 is further arranged with a plurality of vacuum generators 503.

[0056] The vacuum generator 503 first generates a vacuum inside the gas tank 502, and then forms a vacuum inside the vacuum tool 20 through the inside of the sleeve 501 and the vacuum channel.

[0057] Of course, in other embodiments, other commonly used vacuum generation mechanisms 50 can also be used, as long as the vacuum degree inside the vacuum tool 20 can be controlled through the rotary joint 40, and the effects of the present embodiment can be achieved.

[0058] In order to further improve the fixing stability and positioning accuracy of the vacuum tool 20, please refer to Figure 1 and Figure 3 , Figure 3 is a structural schematic diagram of a rotating disc embodiment of the present application.

[0059] As Figure 3 shown, the bearing surface 101 of the rotating disc 10 is also provided with a recess 102 matched with the vacuum tool 20, and the vacuum tool 20 is embedded in the recess 102 for fixation.

[0060] In order to facilitate the transfer of workpieces between the vacuum tool 20 and the conveying belt by the manipulator, the vacuum tool 20 in the present embodiment has a U-shaped structure, and the U-shaped opening 203 is arranged to extend along the radial direction of the rotating disc 10 and point to the side away from the rotary joint 40. The bearing surface 101 is provided with a hollow part 103 corresponding to the position of the U-shaped opening 203, so that the manipulator can directly enter the U-shaped opening 203 to clamp or place the workpiece.

[0061] Further, in order to optimize the design, the rotating disc 10 in the present embodiment includes a plurality of support arms 104 arranged in the circumferential direction. The support arms 104 are arranged to extend along the radial direction of the rotating disc 10, and the support arms 104 correspond one-to-one to the vacuum tools 20, and the vacuum tools 20 are arranged on the corresponding support arms 104.

[0062] In other embodiments, the rotating disc 10 can also have other structural forms, as long as the installation of the vacuum tool 20 can be achieved, and interference with other elements during rotation of the rotating disc 10 can be avoided, and the effects of the present embodiment can be achieved.

[0063] In order to realize the position detection of the rotating disc 10, the rotating machining table in the present embodiment further includes a position detection mechanism 60, please refer to Figure 4 , Figure 4 is a structural schematic diagram of another view of the rotating machining table of the laser processing production line.

[0064] As Figure 4As shown, the position detection mechanism 60 includes a photoelectric sensor 601 arranged on the side of the turntable 10 away from the vacuum tool 20, and a sensing sheet 602 arranged on the side of the turntable 10 facing the photoelectric sensor 601, the sensing sheet 602 corresponding to the position of the photoelectric sensor 601, so as to realize rotation position detection of the turntable 10 when the sensing sheet 602 rotates to the photoelectric sensor 601.

[0065] In the working process of the rotating machining table of the present application, the laser machining head applies laser to the workpiece located on the vacuum tool 20, and in order to avoid the influence of the fixed position error of the workpiece on the machining precision, a deviation correction camera for detecting the actual position of the workpiece is further arranged above the workpiece, which collects the positions of the four corners of the workpiece to correct the position for subsequent machining.

[0066] In order to improve the imaging quality of the deviation correction camera, please refer to Figure 1 and Figure 5 , Figure 5 is a structural schematic diagram of an embodiment of the mounting structure of the surface light source of the present application. In the embodiment, the rotating machining table further includes a surface light source 70 located on the side of the turntable 10 away from the vacuum tool 20, and the surface light source 70 corresponds to the position of the vacuum tool 20, so that the surface light source 70 can provide backlight during workpiece machining.

[0067] Specifically, the surface light source 70 is installed below the turntable 10 through a support 80, as shown in Figure 5 The support 80 includes a bottom plate 801 and a support leg 802 for supporting the bottom plate 801, and the surface light source 70 is arranged on the bottom plate 801.

[0068] Dust may be accumulated on the surface light source 70 during the laser machining process, which may affect the camera deviation correction. In order to avoid the influence of dust, the support 80 of the present embodiment further includes a blowing plate 803 arranged at one end of the bottom plate 801, and the blowing plate 803 is arranged on the side of the blowing port 804 facing the surface light source 70, and a blowing channel is formed in the blowing plate 803 and communicates with the blowing port 804.

[0069] Based on the above scheme, intermittent blowing to the surface of the surface light source 70 through the blowing plate 803 can effectively remove the dust accumulated on the surface light source 70, and ensure the camera deviation correction effect.

[0070] Further, in order to optimize the dust removal effect, in the present embodiment, the bottom plate 801 includes a high end 805 and a low end 806 arranged oppositely, and the blowing plate 803 is arranged at the high end 805, so as to blow the dust downward and avoid the possibility of secondary accumulation of dust.

[0071] The rotating machining table of the laser machining production line based on the above embodiments can significantly reduce the equipment occupation area, realize continuous machining, and improve the machining efficiency and machining precision.

[0072] It will be obvious to a person skilled in the art that the application is not limited to the details of the above-described exemplary embodiments, but that the application can be implemented in other concrete forms without departing from the spirit or essential characteristics of the application. The embodiments should, therefore, be considered in all respects as illustrative and not restrictive, the scope of the application being indicated by the appended claims rather than by the above description, and all changes which come within the meaning and range of equivalents of the claims are therefore intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the scope of the claims concerned.

[0073] Furthermore, it should be understood that although the present specification describes exemplary embodiments, the application is not limited to only one independent technical solution in each embodiment, and the specification is described in this way only for the sake of clarity, and a person skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by a person skilled in the art.

Claims

1. A rotary processing table for a laser processing production line, characterized in that, include: Turntable, including the bearing surface; Multiple vacuum fixtures are arranged at intervals along the circumference of the turntable on the bearing surface, and the side of the vacuum fixture facing away from the turntable is provided with an adsorption surface for adsorbing and fixing workpieces. A rotary drive mechanism is used to drive the turntable to rotate; A rotary joint is arranged on the bearing surface extending along the axial direction of the turntable. The rotary joint includes a first section connected to the turntable and a second section that can rotate relative to the first section. A vacuum channel communicating with the vacuum fixture is formed inside the rotary joint. A vacuum generating mechanism is arranged in the second section of the rotary joint, and the working end of the vacuum generating mechanism is connected to the vacuum channel.

2. The rotary machining table according to claim 1, characterized in that, The turntable includes a plurality of support arms arranged circumferentially, the support arms extending radially along the turntable, and each support arm corresponds to a vacuum fixture, with the vacuum fixture arranged on the corresponding support arm.

3. The rotary machining table according to claim 1, characterized in that, The vacuum fixture has a U-shaped structure, and the U-shaped opening extends radially along the turntable and points away from the rotary joint. The bearing surface is provided with a hollowed-out portion corresponding to the position of the U-shaped opening.

4. The rotary machining table according to claim 1, characterized in that, The bearing surface is provided with a recess that matches the vacuum fixture, and the vacuum fixture is embedded and fixed in the recess.

5. The rotary machining table according to claim 1, characterized in that, The vacuum fixture has a first vacuum connector at one end near the rotary joint, and a second vacuum connector connected to the first vacuum connector is arranged on the side of the first section facing the vacuum fixture. The second vacuum connector is connected to the vacuum channel.

6. The rotary machining table according to claim 1, characterized in that, The vacuum generating mechanism includes: A sleeve, one end of which is fitted onto the second section, and the interior of the sleeve is connected to the vacuum channel; A gas holder is arranged at the other end of the sleeve, and the interior of the gas holder is connected to the interior of the sleeve. A vacuum generator is located inside the gas holder.

7. The rotary machining table according to claim 1, characterized in that, It also includes a surface light source, which is arranged on the side of the turntable away from the vacuum fixture, and the position of the surface light source corresponds to that of the vacuum fixture, so that the surface light source can provide backlight during workpiece processing.

8. The rotary machining table according to claim 7, characterized in that, It also includes a bracket for supporting the surface light source, the bracket including a base plate and legs for supporting the base plate, the surface light source being arranged on the base plate; The bracket also includes a blower plate arranged at one end of the base plate. The blower plate is positioned at the air outlet on the side facing the surface light source, and an air channel communicating with the air outlet is formed inside the blower plate.

9. The rotary machining table according to claim 8, characterized in that, The base plate is inclined and includes a high end and a low end that are arranged opposite to each other, with the blower plate arranged at the high end.

10. The rotary machining table according to claim 1, characterized in that, It also includes a position detection mechanism, which includes a photoelectric sensor and a sensing plate. The photoelectric sensor is arranged on the side of the turntable away from the vacuum fixture, and the sensing plate is arranged on the side of the turntable facing the photoelectric sensor, with the sensing plate corresponding to the position of the photoelectric sensor.

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