Adsorption jig and adsorption platform

By setting densely distributed first adsorption holes and sparsely distributed second adsorption holes on the adsorption fixture, combined with the design of the gas storage chamber and the ventilation channel, the problem of unevenness caused by weak vacuum adsorption is solved, the flatness requirement of high-precision machining is achieved, and the risk of workpiece deformation and damage is reduced.

CN223700542UActive Publication Date: 2025-12-23HONGFUJIN PRECISION ELECTRONICS ZHENGZHOU
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Patent Information

Application Number
CN202423127854.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-12-18
Publication Date
2025-12-23
Estimated Expiration
2034-12-18

AI Technical Summary

Technical Problem

Traditional vacuum adsorption clamping devices are not secure enough for high-precision machining, resulting in unevenness in the product's processing area, making it difficult to meet the process requirements of high-precision machining.

Method used

An adsorption fixture was designed with densely distributed first adsorption holes and sparsely distributed second adsorption holes on the adsorption surface. It provides concentrated and uniform adsorption force through an air storage chamber and an air passage. Combined with a sealing structure and a clearance channel, it prevents airflow backflow. Sensors and limiting components are used to ensure accurate workpiece positioning.

Benefits of technology

It improves the flatness of the area to be processed, meets the requirements of high-precision processing, reduces the risk of workpiece deformation and damage, and ensures processing quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to the technical field of electronic product production, aims to solve the problem that the planeness of a to-be-processed area of a product is difficult to meet the requirement of a high-precision processing technology, and provides an adsorption jig and an adsorption platform. The adsorption jig comprises an adsorption base. The adsorption seat has an adsorption surface. The adsorption surface comprises a first adsorption area and a second adsorption area. The first adsorption area is used for adsorbing the to-be-machined area of the to-be-machined workpiece. The second adsorption area is used for adsorbing other areas except the to-be-machined area of the to-be-machined workpiece. The adsorption seat is provided with a plurality of first adsorption holes and a plurality of second adsorption holes. The first adsorption holes are located in the first adsorption area, and the second adsorption holes are located in the second adsorption area. The distribution density of the first adsorption holes in unit area is greater than that of the second adsorption holes. The device has the beneficial effects that the gap between the to-be-machined area of the to-be-machined workpiece and the first adsorption area can be reduced, the flatness of the to-be-machined area is reduced, and the to-be-machined area can meet the process requirement of high-precision machining.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of electronic product production, in particular to an adsorption jig and an adsorption platform. BACKGROUND

[0002] When producing and processing electronic product housings and other components, clamping and positioning is often required to further process the flat surfaces or curved surfaces of the components. Because traditional clamping and positioning is prone to scratching and deformation, reducing the yield, the commonly used clamping and positioning method is vacuum adsorption, which can effectively reduce the problem of clamping deformation.

[0003] However, when the product components require higher precision production and processing, the general vacuum adsorption clamping device will have the following problems. Because the vacuum adsorption is not firm, the product area to be processed is uneven, resulting in a height difference, which is difficult to meet the process requirements of high-precision processing. CONTENT OF THE INVENTION

[0004] Therefore, the present application provides an adsorption jig and an adsorption platform to solve the problem that the flatness of the product area to be processed cannot meet the process requirements of high-precision processing due to the insufficient firmness of vacuum adsorption.

[0005] An embodiment of the present application provides an adsorption jig. The adsorption jig includes an adsorption seat. The adsorption seat has an adsorption surface. The adsorption surface includes a first adsorption area and a second adsorption area. The first adsorption area is used to adsorb the area to be processed of the workpiece to be processed. The second adsorption area is used to adsorb other areas outside the area to be processed of the workpiece to be processed. The adsorption seat is provided with a plurality of first adsorption holes and a plurality of second adsorption holes. The plurality of first adsorption holes are located in the first adsorption area, and the plurality of second adsorption holes are located in the second adsorption area. The distribution density of the first adsorption holes per unit area is greater than that of the second adsorption holes.

[0006] A plurality of first adsorption holes and a plurality of second adsorption holes are opened in different areas of the adsorption surface, and the distribution density of the first adsorption holes per unit area is greater than that of the second adsorption holes. In this way, the plurality of first adsorption holes are distributed more densely in the first adsorption area. Compared with the second adsorption area, the adsorption force of the first adsorption area is greater and more concentrated, which helps to reduce the gap between the area to be processed of the workpiece to be processed and the first adsorption area, reduce the flatness of the area to be processed, and make the area to be processed meet the process requirements of high-precision processing.

[0007] In some embodiments of the present application, the adsorption seat includes a first jig plate and a second jig plate. The second jig plate is arranged on the first jig plate. A gas storage cavity is arranged between the second jig plate and the first jig plate. The second jig plate has an adsorption surface. The gas storage cavity is in communication with the plurality of first adsorption holes. The first jig plate is provided with an air passage. One end of the air passage is in communication with the gas storage cavity, and the other end of the air passage is used to communicate with the adsorption device.

[0008] When the adsorption device is working, the gas in the gas storage cavity is drawn away through the air passage, so that the plurality of first adsorption holes connected with the gas storage cavity generate negative pressure, thereby providing a larger and more concentrated adsorption force to the to-be-processed area of the to-be-processed workpiece. The plurality of first adsorption holes are connected with the gas storage cavity, and the gas storage cavity is connected with the adsorption device through the air passage; thus, each first adsorption hole does not need to be connected with the adsorption device. A plurality of gas storage cavities can be arranged, each of which is connected with the plurality of first adsorption holes; or one gas storage cavity can be arranged, and all the first adsorption holes are connected with the gas storage cavity. The air passage can also be arranged in plurality; it can be understood that, the more the air passages are arranged and the more uniform the distribution is, the more uniform the adsorption force generated by the first adsorption area is.

[0009] In some embodiments of the present application, the adsorption jig further comprises a first sealing member. The first sealing member is arranged between the first jig plate and the second jig plate. The first sealing member surrounds the gas storage cavity to seal the gas storage cavity. The arrangement of the first sealing member can improve the sealing performance of the gas storage cavity, thereby improving the adsorption stability of the first adsorption holes to the to-be-processed area.

[0010] In some embodiments of the present application, the adsorption seat is provided with an avoiding passage. The avoiding passage penetrates through the first jig plate and the second jig plate, and the avoiding passage passes through the first adsorption area. The avoiding passage is used for discharging gas flow.

[0011] Some high-precision processing equipment generates gas flow when working, such as plasma processing, which generates a large amount of excess plasma jet gas flow. The avoiding passage penetrating through the first jig plate and the second jig plate is arranged on the adsorption seat, so that the excess gas flow is discharged through the avoiding passage, which is beneficial to prevent the excess gas flow from generating a counterforce to the to-be-processed area of the to-be-processed workpiece, thereby reducing the possibility of deformation of the to-be-processed area caused by the excess gas flow.

[0012] In some embodiments of the present application, the adsorption jig further comprises a second sealing member and a third sealing member. The adsorption surface is provided with a second sealing groove surrounding the first adsorption area, and the second sealing member is arranged in the second sealing groove. The avoiding passage forms an exhaust inlet on the adsorption surface. The adsorption surface is provided with a third sealing groove surrounding the exhaust inlet, and the third sealing member is arranged in the third sealing groove.

[0013] The second sealing member and the third sealing member form a sealed space between the to-be-processed area and the first adsorption area, thereby further improving the adsorption stability of the first adsorption holes to the to-be-processed area.

[0014] In some embodiments of the present application, the gas storage cavity surrounds the bypass channel. The adsorption fixture further comprises a fourth sealing member. The fourth sealing member is arranged between the first fixture plate and the second fixture plate and surrounds the bypass channel and the gas storage cavity. The bypass channel is used to exhaust excess gas flow. The fourth sealing member is arranged between the bypass channel and the gas storage cavity, thereby further improving the sealing performance of the gas storage cavity.

[0015] In some embodiments of the present application, the diameter of the first adsorption hole is smaller than the diameter of the second adsorption hole.

[0016] In this way, a certain area of the first adsorption area can be distributed with more first adsorption holes, thereby further improving the adsorption force of the first adsorption area.

[0017] In some embodiments of the present application, the diameter of the first adsorption hole is less than or equal to 1 mm and greater than or equal to 0.5 mm, and the distance between two adjacent first adsorption holes is less than or equal to 1 mm and greater than or equal to 0.5 mm. It can be understood that if the diameter of the first adsorption hole is too small, it may cause blockage, and if the diameter is too large, it will result in a smaller adsorption force, which is difficult to ensure that the first adsorption area can provide an adsorption force meeting the requirements of high-precision machining process. At the same time, if the distance between adjacent first adsorption holes is too large, the distribution density of multiple first adsorption holes in the first adsorption area will be low, and if the distance is too small, it may cause local stress concentration, resulting in deformation or damage of the workpiece to be machined.

[0018] In some embodiments of the present application, the adsorption fixture further comprises a sensor. The adsorption seat is provided with a sensing groove, and the sensor is arranged in the sensing groove. The sensor is used to sense the workpiece to be machined within a preset distance.

[0019] In this way, when the sensor senses that there is a workpiece to be machined within a preset distance, the start and stop of the external adsorption device can be controlled. Alternatively, the workpiece to be machined has a foolproof structure on the surface that is attached to the adsorption surface, such as a protrusion on the surface of the workpiece to be machined in the direction of the adsorption surface. The protrusion can be arranged in the sensing groove. When the sensor senses the protrusion, it indicates that the workpiece to be machined is not placed upside down.

[0020] In some embodiments of the present application, the adsorption fixture further comprises a first limiting component and a second limiting component. The first limiting component and the second limiting component are both arranged on the adsorption surface. The first limiting component is configured to limit the position of the workpiece to be machined in a first direction. The second limiting component is configured to limit the position of the workpiece to be machined in a second direction. The first direction and the second direction intersect, and the first direction and the second direction are both parallel to the adsorption surface.

[0021] Through the first limiting component and the second limiting component, the workpiece to be machined can be positioned on the adsorption surface before the adsorption device works, and the machining area can be located in the first adsorption area.

[0022] The embodiment of the present application provides an adsorption platform. The adsorption platform comprises a support assembly and an adsorption jig. The support assembly comprises a base and an adjusting mechanism arranged on the base. The adjusting mechanism comprises a support plate and a rotating support. The support plate is fixed to the base. The rotating support comprises a first connecting part and a second connecting part. The first connecting part is connected with the adsorption jig. The second connecting part is rotatably connected to the support plate.

[0023] The adsorption jig is mounted on the rotating support of the support assembly, and the second connecting part of the rotating support is rotatably connected to the support plate. In this way, when a workpiece to be processed is adsorbed on the adsorption jig, the levelness of the side of the workpiece to be processed towards the processing equipment can meet the process requirement by adjusting the relative position of the second connecting part and the support plate. BRIEF DESCRIPTION OF DRAWINGS

[0024] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some of the embodiments of the present application, and therefore should not be considered as limiting the scope.

[0025] Figure 1 The structural schematic diagram of the adsorption jig provided by an embodiment of the present application is shown in the figure.

[0026] Figure 2 The structural schematic diagram of the adsorption jig provided by an embodiment of the present application is shown in the figure. Figure 1 The partial sectional view in the direction of A-A in the figure.

[0027] Figure 3 The structural schematic diagram of the first jig plate in the embodiment is shown in the figure.

[0028] Figure 4 The structural schematic diagram of the adsorption platform provided by an embodiment of the present application is shown in the figure.

[0029] Explanation of main element symbols:

[0030] 100, suction tool; 1, suction seat; 101, suction surface; 102, gas storage cavity; 103, avoiding channel; 104, induction groove; 1011, first suction area; 1012, second suction area; 1011a, first suction hole; 1012a, second suction hole; 11, first tool plate; 111, air passage; 12, second tool plate; 211, first sealing member; 212, first sealing groove; 22, second sealing member; 23, third sealing groove; 24, fourth sealing groove; 3, sensor; 41, first limiting assembly; 411, first limiting column; 412, first adjusting block; 42, second limiting assembly; 421, second limiting column; 422, second adjusting block; 200, suction platform; 5, support assembly; 51, base; 52, adjusting mechanism; 521, support plate; 5211, positioning portion; 522, rotating support; 5222, second connecting portion; 5222a, rotating groove; 523, rotating shaft; X, first direction; Y, second direction. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present application will be described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments of the present application.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

[0033] Wherein, the definition of "first direction", "second direction" is to facilitate the description of the relative position relationship of the related structure, and not to indicate that the "first direction", "second direction" needs to rely on the related structure involved in the above definition.

[0034] In addition, the terms "first", "second", "third", "fourth", etc. are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0035] It should be noted that when an element is referred to as being "fixed" to another element, it can be directly on the other element or there can be an intervening element. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or there can be an intervening element. When an element is referred to as being "provided on" another element, it can be directly provided on the other element or there can be an intervening element.

[0036] The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0037] Embodiments of the present application provide an adsorption jig. The adsorption jig comprises an adsorption seat. The adsorption seat has an adsorption surface. The adsorption surface comprises a first adsorption area and a second adsorption area. The first adsorption area is used for adsorbing a to-be-processed region of a to-be-processed workpiece. The second adsorption area is used for adsorbing other regions of the to-be-processed workpiece except the to-be-processed region. The adsorption seat is provided with a plurality of first adsorption holes and a plurality of second adsorption holes. The plurality of first adsorption holes are located in the first adsorption area, and the plurality of second adsorption holes are located in the second adsorption area. The distribution density of the first adsorption holes per unit area is greater than that of the second adsorption holes.

[0038] The plurality of first adsorption holes and the plurality of second adsorption holes are arranged in different regions of the adsorption surface, and the distribution density of the first adsorption holes per unit area is greater than that of the second adsorption holes. In this way, the plurality of first adsorption holes are distributed more densely in the first adsorption area. Compared with the second adsorption area, the adsorption force of the first adsorption area is greater and more concentrated, which helps to reduce the gap between the to-be-processed region of the to-be-processed workpiece and the first adsorption area, reduce the flatness of the to-be-processed region, and make the to-be-processed region meet the process requirements of high-precision processing.

[0039] Some embodiments of the present application will be described in detail below with reference to the accompanying drawings. The following embodiments and features in the embodiments can be combined with each other without conflict.

[0040] Please refer to Figure 1 An embodiment of the present application provides an adsorption jig 100. The adsorption jig 100 comprises an adsorption seat 1. The adsorption seat 1 has an adsorption surface 101. The adsorption surface 101 comprises a first adsorption area 1011 and a second adsorption area 1012. The first adsorption area 1011 is used for adsorbing a to-be-processed region of a to-be-processed workpiece. The second adsorption area 1012 is used for adsorbing other regions of the to-be-processed workpiece except the to-be-processed region. The adsorption seat 1 is provided with a plurality of first adsorption holes 1011a and a plurality of second adsorption holes 1012a. The plurality of first adsorption holes 1011a are located in the first adsorption area 1011, and the plurality of second adsorption holes 1012a are located in the second adsorption area 1012. The distribution density of the first adsorption holes 1011a per unit area is greater than that of the second adsorption holes 1012a.

[0041] The plurality of first adsorption holes 1011a and the plurality of second adsorption holes 1012a are arranged in different regions of the adsorption surface 101, and the distribution density of the first adsorption holes 1011a per unit area is greater than that of the second adsorption holes 1012a. In this way, the plurality of first adsorption holes 1011a are distributed more densely in the first adsorption area 1011. Compared with the second adsorption area 1012, the adsorption force of the first adsorption area 1011 is greater and more concentrated, which helps to reduce the gap between the to-be-processed region of the to-be-processed workpiece and the first adsorption area 1011, reduce the flatness of the to-be-processed region, and make the to-be-processed region meet the process requirements of high-precision processing.

[0042] Please refer toFigures 1 to 3 In some embodiments, the adsorption seat 1 comprises a first jig plate 11 and a second jig plate 12. The second jig plate 12 is arranged on the first jig plate 11. A gas storage cavity 102 is arranged between the second jig plate 12 and the first jig plate 11. The second jig plate 12 has an adsorption surface 101. The gas storage cavity 102 is in communication with a plurality of first adsorption holes 1011a. The first jig plate 11 is provided with a ventilation passage 111. One end of the ventilation passage 111 is in communication with the gas storage cavity 102, and the other end of the ventilation passage 111 is used to communicate with the adsorption device.

[0043] When the adsorption device is working, the gas in the gas storage cavity 102 is removed through the ventilation passage 111, so that the plurality of first adsorption holes 1011a in communication with the gas storage cavity 102 generate negative pressure, thereby providing a larger and more concentrated adsorption force to the to-be-processed area of the workpiece to be processed. By communicating the plurality of first adsorption holes 1011a through the gas storage cavity 102, and then communicating the gas storage cavity 102 and the adsorption device through the ventilation passage 111, it is not necessary to communicate each first adsorption hole 1011a with the adsorption device. It can be that a plurality of gas storage cavities 102 are arranged, each of which is in communication with a plurality of first adsorption holes 1011a; or one gas storage cavity 102 can be arranged, and all the first adsorption holes 1011a are in communication with this gas storage cavity 102. The ventilation passage 111 can also be provided with one or more; it can be understood that the more the ventilation passages 111 are provided and the more uniform the distribution is, the more uniform the adsorption force generated by the first adsorption area 1011 will be.

[0044] In some embodiments, the adsorption jig 100 further comprises a first sealing member 211. The first sealing member 211 is arranged between the first jig plate 11 and the second jig plate 12. The first sealing member 211 surrounds the gas storage cavity 102 to seal the gas storage cavity 102. The arrangement of the first sealing member 211 can improve the sealing performance of the gas storage cavity 102, thereby improving the adsorption stability of the first adsorption holes 1011a to the to-be-processed area. As shown in Figure 2 and Figure 3 It can be that a first sealing groove 212 is arranged on the side of the first jig plate 11 facing the second jig plate 12, and the first sealing member 211 is located in the first sealing groove 212.

[0045] In some embodiments, the adsorption seat 1 is provided with an avoiding passage 103. The avoiding passage 103 penetrates through the first jig plate 11 and the second jig plate 12, and the avoiding passage 103 passes through the first adsorption area 1011. The avoiding passage 103 is used for discharging gas flow.

[0046] Some high-precision machining equipment generates airflow when working. The avoidance channel 103 is arranged through the first jig plate 11 and the second jig plate 12 on the adsorption seat 1, so that the excess airflow is discharged through the avoidance channel 103, which is beneficial to prevent the excess airflow from generating a reverse pushing force on the machining area of the workpiece to be machined, and reduces the possibility of deformation of the machining area caused by the excess airflow.

[0047] In some embodiments, the adsorption jig 100 further comprises a second sealing member 22 and a third sealing member (not shown in the figure). The adsorption surface 101 is provided with a second sealing groove surrounding the first adsorption area 1011, and the second sealing member 22 is arranged in the second sealing groove. The avoidance channel 103 is formed with an exhaust inlet on the adsorption surface 101. The adsorption surface 101 is provided with a third sealing groove 23 surrounding the exhaust inlet, and the third sealing member is arranged in the third sealing groove 23.

[0048] Through the second sealing member 22 and the third sealing member, a sealed space is formed between the machining area and the first adsorption area 1011, further improving the adsorption stability of the first adsorption holes 1011a to the machining area.

[0049] In some embodiments, the gas storage cavity 102 surrounds the avoidance channel 103. The adsorption jig 100 further comprises a fourth sealing member (not shown in the figure). The fourth sealing member is arranged between the first jig plate 11 and the second jig plate 12 and surrounds the avoidance channel 103 and the gas storage cavity 102. The avoidance channel 103 is used to discharge excess airflow, and the fourth sealing member is arranged between the avoidance channel 103 and the gas storage cavity 102, further improving the sealing performance of the gas storage cavity 102. As shown in the figure, the fourth sealing groove 24 is arranged on the side of the first jig plate 11 facing the second jig plate 12, the fourth sealing groove 24 surrounds the avoidance channel 103, and the fourth sealing member is arranged in the fourth sealing groove 24. Figure 3

[0050] In some embodiments, the first sealing member 211, the second sealing member 22, the third sealing member, and the fourth sealing member can all be in the form of a sealing ring or a sealing foam strip.

[0051] In some embodiments, the diameter of the first adsorption hole 1011a is smaller than that of the second adsorption hole 1012a.

[0052] In this way, a certain area of the first adsorption area 1011 can be distributed with more first adsorption holes 1011a, further improving the adsorption force of the first adsorption area 1011.

[0053] ​In some embodiments, the diameter of the first adsorption hole 1011a is less than or equal to 1 mm and greater than or equal to 0.5 mm, and the spacing between two adjacent first adsorption holes 1011a is less than or equal to 1 mm and greater than or equal to 0.5 mm. Understandably, if the diameter of the first adsorption hole 1011a is too small, it may cause blockage, and if the diameter is too large, it will result in a smaller adsorption force, which is difficult to ensure that the first adsorption area 1011 provides an adsorption force that meets the requirements of high-precision machining process. At the same time, if the spacing between adjacent first adsorption holes 1011a is too large, the distribution density of multiple first adsorption holes 1011a in the first adsorption area 1011 will be low, and if the spacing is too small, it may cause local stress concentration, resulting in deformation or damage of the workpiece to be machined.

[0054] In some embodiments, the adsorption jig 100 further comprises a sensor 3. The adsorption seat 1 is provided with a sensing groove 104, and the sensor 3 is arranged in the sensing groove 104. The sensor 3 is used to sense the workpiece to be machined within a predetermined distance.

[0055] In this way, when the sensor 3 senses that there is a workpiece to be machined within a predetermined distance, the start and stop of the external adsorption device can be controlled. Alternatively, the surface of the workpiece to be machined that is used to adhere to the adsorption surface 101 has some foolproof structure, such as a protrusion in the direction of the adsorption surface 101 outside the machining area, which can be arranged in the sensing groove 104. When the sensor 3 senses the protrusion, it means that the workpiece to be machined is not placed upside down.

[0056] In some embodiments, the adsorption jig 100 further comprises a first limiting component 41 and a second limiting component 42. The first limiting component 41 and the second limiting component 42 are both arranged on the adsorption surface 101. The first limiting component 41 is configured to limit the position of the workpiece to be machined in a first direction X. The second limiting component 42 is configured to limit the position of the workpiece to be machined in a second direction Y. The first direction X and the second direction Y intersect, and the first direction X and the second direction Y are respectively parallel to the adsorption surface 101.

[0057] Through the first limiting component 41 and the second limiting component 42, the workpiece to be machined can be positioned on the adsorption surface 101 before the adsorption device works, and the machining area is located in the first adsorption area 1011.

[0058] In some embodiments, the first limiting component 41 comprises a first limiting column 411 and a first adjusting block 412. The first limiting column 411 is connected to the adsorption surface 101. The first adjusting block 412 is arranged on the adsorption surface 101 and is configured to be movable along the first direction X. The second limiting component 42 comprises a second limiting column 421 and a second adjusting block 422. The second limiting column 421 is connected to the adsorption surface 101, and the second adjusting block 422 is arranged on the adsorption surface 101 and is configured to be movable along the second direction Y.

[0059] In this way, the position of the workpiece to be processed on the adsorption surface 101 can be adjusted according to the size of the workpiece to be processed, so that the workpiece to be processed is located in the first adsorption area 1011. The first adjusting block 412 and the second adjusting block 422 can be in the form of a pneumatic cylinder.

[0060] Please refer to Figure 4 An embodiment of the present application provides an adsorption platform 200. The adsorption platform 200 comprises a support assembly 5 and an adsorption jig 100. The support assembly 5 comprises a base 51 and an adjusting mechanism 52 arranged on the base 51. The adjusting mechanism 52 comprises a support plate 521 and a rotating support 522. The support plate 521 is fixed to the base 51. The rotating support 522 comprises a first connecting part and a second connecting part 5222. The first connecting part is connected with the adsorption jig 100. The second connecting part 5222 is rotatably connected to the support plate 521.

[0061] The adsorption jig 100 is installed on the rotating support 522 of the support assembly 5, and the second connecting part 5222 of the rotating support 522 is rotatably connected to the support plate 521. In this way, by adjusting the relative position of the second connecting part 5222 and the support plate 521, the level of the side of the workpiece to be processed facing the processing equipment when the workpiece to be processed is adsorbed on the adsorption jig 100 can meet the process requirements.

[0062] In some embodiments, the adjusting mechanism 52 further comprises a rotating shaft 523 and a fastener (not shown in the figure). The rotating shaft 523 penetrates the support plate 521 and the rotating support 522, so that the rotating support 522 is rotatable relative to the support plate 521. The support plate 521 is provided with a positioning part 5211, and the second connecting part 5222 is provided with a rotating groove 5222a. The fastener passes through the rotating groove 5222a and the positioning part 5211, so as to fix the rotating position of the rotating support 522 on the support plate 521.

[0063] In addition, those skilled in the art should understand that the above embodiments are only used to illustrate the present application, and are not used as a limitation to the present application. Any appropriate changes and modifications made to the above embodiments within the spirit and principles of the present application are within the scope of the present application.

Claims

1. An adsorption jig, characterized by, The application relates to an adsorption jig, which comprises: an adsorption seat having an adsorption surface, the adsorption surface comprising a first adsorption area for adsorbing a to-be-processed area of a to-be-processed workpiece and a second adsorption area for adsorbing other areas of the to-be-processed workpiece except the to-be-processed area, the adsorption seat being provided with a plurality of first adsorption holes located in the first adsorption area and a plurality of second adsorption holes located in the second adsorption area, and the distribution density of the first adsorption holes per unit area being greater than that of the second adsorption holes.

2. The adsorption jig of claim 1, wherein The adsorption seat comprises: a first jig plate, a second jig plate arranged on the first jig plate, a gas storage cavity being arranged between the second jig plate and the first jig plate, the second jig plate having the adsorption surface, and the gas storage cavity being in communication with the plurality of first adsorption holes; the first jig plate being provided with a gas passage, one end of the gas passage being in communication with the gas storage cavity, and the other end of the gas passage being used for being in communication with an adsorption device.

3. The adsorption fixture of claim 2, wherein The adsorption jig further comprises a first sealing member arranged between the first jig plate and the second jig plate, the first sealing member surrounding the gas storage cavity to seal the gas storage cavity.

4. The adsorption fixture of claim 2, wherein The adsorption seat is provided with an avoiding passage, the avoiding passage penetrating through the first jig plate and the second jig plate and passing through the first adsorption area, and the avoiding passage being used for discharging gas flow.

5. The adsorption fixture of claim 4, wherein The adsorption jig further comprises a second sealing member and a third sealing member; the adsorption surface being provided with a second sealing groove surrounding the first adsorption area, the second sealing member being arranged in the second sealing groove; the avoiding passage being formed with an exhaust inlet on the adsorption surface, the adsorption surface being provided with a third sealing groove surrounding the exhaust inlet, and the third sealing member being arranged in the third sealing groove.

6. The adsorption fixture of claim 4, wherein The gas storage cavity surrounds the avoiding passage, and the adsorption jig further comprises a fourth sealing member arranged between the first jig plate and the second jig plate and surrounding the avoiding passage and the gas storage cavity.

7. The adsorption fixture of claim 1, wherein The diameter of the first adsorption hole is smaller than that of the second adsorption hole; and / or the diameter of the first adsorption hole is less than or equal to 1 mm and greater than or equal to 0.5 mm; the distance between two adjacent first adsorption holes is less than or equal to 1 mm and greater than or equal to 0.5 mm.

8. The adsorption fixture of claim 1, wherein The adsorption jig further comprises a sensor, the adsorption seat being provided with a sensing groove, the sensor being arranged in the sensing groove, and the sensor being used for sensing whether the to-be-processed workpiece is within a preset distance.

9. The adsorption fixture of claim 1, wherein, The adsorption jig further comprises a first limiting component and a second limiting component, the first limiting component and the second limiting component both being arranged on the adsorption surface; the first limiting component being configured to limit the position of the to-be-processed workpiece in a first direction, and the second limiting component being configured to limit the position of the to-be-processed workpiece in a second direction; the first direction and the second direction intersecting and being parallel to the adsorption surface respectively.

10. An adsorption platform characterized by, The application further relates to a support assembly and the adsorption jig as claimed in any one of claims 1 to 9, the support assembly comprising a base and an adjusting mechanism arranged on the base; the adjusting mechanism comprising: A support plate is fixed to the base; A rotating support includes a first connecting portion connected with the adsorption jig and a second connecting portion rotatably connected to the support plate.