Evaporation device and coating equipment

Abstract

The utility model discloses an evaporation device and coating equipment, wherein the coating equipment comprises the evaporation device, and the evaporation device comprises an evaporation assembly, a film passing channel and a guide assembly. The evaporation assembly comprises an evaporation pond which is used for bearing and evaporating a film material. And the film passing channel is arranged at the top of the evaporation assembly. The guide assembly comprises a first guide plate set and a second guide plate set, the first end of the first guide plate set and the first end of the second guide plate set are rotationally connected to the two opposite sides, parallel to the film inlet direction, of the evaporation pond respectively, and the second end of the first guide plate set and the second end of the second guide plate set extend in the direction close to the film passing channel. According to the evaporation device and the coating equipment disclosed by the utility model, the problem that the use cost of an evaporation device in the prior art is too high is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a coating technology field, specifically, relate to an evaporation device and coating equipment. BACKGROUND

[0002] Vacuum coating refers to under the condition of vacuum, through to the coating material (abbreviation film material) heating evaporation makes it gasification, makes the particle after gasification fly to the surface of the substrate to be plated and condenses into the film process method. The existing problem is that a large number of film materials will escape to the area outside the substrate when evaporating, and deposit and adhere on the side wall of the evaporation device, not only causing the waste of film material, but also the film material deposited and adhered on the outer wall needs to be cleaned after processing, increasing the cost of the evaporation device. SUMMARY

[0003] The main purpose of the utility model is to provide an evaporation device and coating equipment to at least solve the problem of high use cost of the evaporation device in the prior art.

[0004] According to one aspect of the utility model, an evaporation device is provided, comprising:

[0005] An evaporation assembly, the evaporation assembly comprises an evaporation pool, and the evaporation pool is used for carrying and evaporating film material;

[0006] A film passing channel, the film passing channel is arranged at the top of the evaporation assembly;

[0007] A guide assembly, the guide assembly comprises a first guide plate group and a second guide plate group, the first ends of the first guide plate group and the second guide plate group are rotatably connected on the opposite sides of the evaporation pool parallel to the film feeding direction respectively, and the second ends of the first guide plate group and the second guide plate group extend along the direction close to the film passing channel.

[0008] Further, the first guide plate group comprises a plurality of first guide plates, and the plurality of first guide plates are connected on the first side of the evaporation pool parallel to the film feeding direction in sequence along the film feeding direction;

[0009] The second guide plate group comprises a plurality of second guide plates, and the plurality of second guide plates are connected on the second side of the evaporation pool parallel to the film feeding direction opposite to the first side in sequence along the film feeding direction.

[0010] Further, the first guide plate comprises a first hinge and a first plate body, the first hinge is connected between the first plate body and the evaporation pool, and the first plate body extends along the direction close to the film passing channel;

[0011] The second guide plate comprises a second hinge and a second plate body, the second hinge is connected between the second plate body and the evaporation pool, and the second plate body extends in a direction close to the membrane passing channel.

[0012] Further, the first plate body comprises a first heating baffle; and / or,

[0013] The second plate body comprises a second heating baffle.

[0014] Further, the guide assembly further comprises:

[0015] A first driving member, which is connected with the first guide plate group and used for driving the first guide plate group to rotate;

[0016] A second driving member, which is connected with the second guide plate group and used for driving the second guide plate group to rotate.

[0017] Further, the first driving member and / or the second driving member at least comprises at least one of a hydraulic cylinder, an air cylinder and an electric push rod.

[0018] Further, the minimum distance L1 between the first guide plate group and the second guide plate group satisfies the relationship: 250mm≤L1≤2500mm.

[0019] Further, the shortest distance L2 between the first guide plate group and the membrane passing channel satisfies the relationship: 1cm≤L2≤10cm; and / or,

[0020] The shortest distance L3 between the second guide plate group and the membrane passing channel satisfies the relationship: 1cm≤L3≤10cm.

[0021] Further, the evaporation assembly at least comprises one of an evaporation boat and a crucible.

[0022] In another aspect, the utility model also provides a kind of coating equipment, and the coating equipment includes above-mentioned evaporation device.

[0023] Compared with the prior art, the first guide plate set and the second guide plate set are rotatably connected to the opposite sides of the evaporation pool parallel to the film feeding direction, the first guide plate set and the second guide plate set form a guide channel with the evaporation pool and the film passing channel, the guide channel defines the upward path of the film material gas, so that the film material gas cannot escape to the non-coating area of the evaporation device in other directions when moving, the utilization rate of the film material is improved, the use cost of the evaporation device is greatly reduced, and the coating efficiency of the evaporation device is improved. In addition, the first guide plate set and the second guide plate set are rotatable, that is, the rotation angle of the first guide plate set and the second guide plate set can be adjusted, so that the width of the guide channel is adjusted to adapt to different width types of the film. BRIEF DESCRIPTION OF DRAWINGS

[0024] The drawings described herein are used to provide further understanding of the present application, and form a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application, and do not constitute an improper limitation on the present application. In the drawings:

[0025] Figure 1 A structure schematic view of the evaporation device disclosed in the present application;

[0026] Figure 2 A structure schematic view of the first guide plate or the second guide plate disclosed in the present application;

[0027] Figure 3 A structure schematic view of the evaporation assembly disclosed in the present application.

[0028] Among them, the above drawings include the following reference signs:

[0029] 10, evaporation assembly; 21, first guide plate set; 22, second guide plate set; 23, first driving member; 24, second driving member; 30, film passing channel; 40, guide channel; 50, vacuum chamber; 101, evaporation pool; 211, first plate body; 212, first hinge; 221, second plate body; 222, second hinge. DETAILED DESCRIPTION

[0030] It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict. The present application will be described in detail below with reference to the drawings and in combination with the embodiments.

[0031] It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present disclosure. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and / or "comprising," when used in this specification, specify the presence of stated features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or groups thereof.

[0032] The relative arrangement of parts and steps, numerical expressions, and numerical values set forth in the examples are not intended to limit the scope of the present disclosure, unless otherwise specifically stated. At the same time, it should be understood that the sizes of the various portions shown in the drawings are not drawn to actual scale for the sake of convenience in description. Techniques, methods, and devices known to those of ordinary skill in the relevant art can not be discussed in detail, but should be considered as part of the authorized description, if appropriate. In all examples shown and discussed herein, any specific values should be interpreted as merely exemplary, and not as limiting. Thus, other examples of example embodiments can have different values. It should be noted that like reference numerals and letters represent like items in the following drawings, and thus, once an item is defined in one drawing, it need not be discussed further in subsequent drawings.

[0033] Referring to Figures 1 to 3 As shown, according to the embodiments of the present disclosure, an evaporation device is provided, which comprises an evaporation assembly 10, a membrane passing channel 30, and a guide assembly.

[0034] The evaporation assembly 10 comprises an evaporation pool 101 for carrying and evaporating membrane material. The membrane passing channel 30 is arranged at the top of the evaporation assembly 10. The guide assembly comprises a first guide plate set 21 and a second guide plate set 22, the first ends of the first guide plate set 21 and the second guide plate set 22 are rotatably connected to the opposite sides of the evaporation pool 101 parallel to the membrane feeding direction, and the second ends of the first guide plate set 21 and the second guide plate set 22 both extend in the direction close to the membrane passing channel 30.

[0035] Specifically, in the present embodiment, the workpiece to be plated is usually a thin film, which enters the evaporation area of the evaporation device through the membrane passing channel 30. When evaporation plating is performed, the membrane material is first placed in the evaporation pool 101, the evaporation pool 101 is heated, the membrane material is changed into membrane material gas, then the membrane material gas rises and adheres to the thin film to be plated through the guide channel 40 formed between the first guide plate set 21 and the second guide plate set 22 and the evaporation pool 101.

[0036] Compared with the prior art, in the embodiment, the first guide plate set 21 and the second guide plate set 22 are respectively connected to opposite sides of the evaporation pool 101 parallel to the film feeding direction, and the first guide plate set 21 and the second guide plate set 22 form a guide channel 40 with the evaporation pool 101 and the film passing channel 30. The guide channel 40 defines an upward path of the film material gas, so that the film material gas does not escape to the non-coating area of the evaporation device in other directions when moving, thereby improving the utilization rate of the film material, greatly reducing the use cost of the evaporation device, and improving the coating efficiency of the evaporation device. In addition, the first guide plate set 21 and the second guide plate set 22 are rotatable, that is, the rotation angle of the first guide plate set 21 and the second guide plate set 22 can be adjusted, so as to adjust the width of the guide channel 40 to adapt to different width types of the film.

[0037] In the embodiment, the film passing channel 30 usually has a certain length, in order to avoid the film material gas escaping to the non-coating area of the evaporation device along the film feeding direction. Therefore, in the embodiment, the first guide plate set 21 and the second guide plate set 22 extend along the film feeding direction. In addition, considering that if the length of the first guide plate set 21 and the second guide plate set 22 is too long, on the one hand, it will cause the problem of high manufacturing cost, and on the other hand, it will make it more difficult to install the first guide plate set 21 and the second guide plate set on the evaporation pool 101. Therefore, in the embodiment, the first guide plate set 21 includes a plurality of first guide plates, and the plurality of first guide plates are connected in sequence along the film feeding direction on the first side of the evaporation pool 101 parallel to the film feeding direction. The second guide plate set 22 includes a plurality of second guide plates, and the plurality of second guide plates are connected in sequence along the film feeding direction on the second side of the evaporation pool 101 opposite to the first side parallel to the film feeding direction.

[0038] Specifically, the adjacent two first guide plates and the adjacent two second guide plates can be connected by screws or by welding. In some embodiments, one of the adjacent two first guide plates is provided with a clamping groove, the other is provided with a clamping protrusion, and a connecting hole is formed in the first guide plate provided with the clamping groove, the connecting hole being in communication with the clamping groove, and a fixing hole adapted to the connecting hole is formed in the clamping protrusion. During assembly, first, the adjacent two first guide plates are connected through the structure of the clamping protrusion and the clamping groove, and then the bolt is inserted into the fixing hole and the connecting hole to further reinforce the two first guide plates. Similarly, the adjacent two second guide plates are also connected through the above structure.

[0039] Further, the first guide plate comprises a first hinge 212 and a first plate body 211, the first hinge 212 is connected between the first plate body 211 and the evaporation pool 101, and the first plate body 211 extends in a direction close to the membrane passing channel 30. The second guide plate comprises a second hinge 222 and a second plate body 221, the second hinge 222 is connected between the second plate body 221 and the evaporation pool 101, and the second plate body 221 extends in a direction close to the membrane passing channel 30.

[0040] Specifically, the first plate body 211 rotates relative to the first hinge 212 under the action of an external force, so that the second end of the first plate body 211 can be rotated to one side close to the membrane passing channel 30. Similarly, the second plate body 221 rotates relative to the second hinge 222 under the action of an external force, so that the second end of the second plate body 221 can be rotated to one side close to the membrane passing channel 30, so as to form a guide channel 40 between the first plate body 211 and the second plate body 221.

[0041] Further, the first plate body 211 comprises a first heating baffle.

[0042] Specifically, the first heating baffle in the embodiment has a heating function. This means that when the membrane material gas is attached to the first heating baffle, it will be heated by the first heating baffle, thereby detaching from the first heating baffle and continuing to rise, and then being attached to the to-be-coated film through the guide channel 40. In addition, in some cases, for example, when the membrane material contains a certain amount of moisture, when the membrane material is heated and melted in the evaporation pool 101, due to the presence of moisture, the melted membrane material droplets are splashed out of the evaporation pool 101 under the action of moisture. Part of the splashed membrane material droplets are blocked by the first heating baffle and attached to the first heating baffle, and then the membrane material droplets are heated again by the first heating baffle to become membrane material gas, which is then attached to the to-be-coated film, thereby improving the utilization rate of the membrane material. Alternatively, the second plate body 221 comprises a second heating baffle. In a preferred embodiment, the first plate body 211 and the second plate body 221 are tungsten heating plates.

[0043] Further, the guide assembly further comprises a first driving member 23 and a second driving member 24. The first driving member 23 is connected with the first guide plate set 21 and is used to drive the first guide plate set 21 to rotate. The second driving member 24 is connected with the second guide plate set 22 and is used to drive the second guide plate set 22 to rotate.

[0044] In the embodiment, the first driving member 23 is used to adjust the rotation angle of the first guide plate set 21, and the second driving member 24 is used to adjust the rotation angle of the second guide plate set 22, so as to adjust the width of the guide channel 40. Specifically, when the thin film of different width types is coated, the width of the guide channel 40 needs to be adjusted to adapt to the width of the thin film to be coated, so that the coating on the thin film is uniform. In addition, the first driving member 23 and the second driving member 24 can be controlled by an electric control module, that is, the first driving member 23 and the second driving member 24 can more accurately control the rotation angle of the first guide plate set 21 and the second guide plate set 22.

[0045] Further, the first driving member 23 and / or the second driving member 24 includes at least one of a hydraulic cylinder, a pneumatic cylinder and an electric push rod.

[0046] It should be noted that the "first driving member 23 and / or the second driving member 24 includes at least one of a hydraulic cylinder, a pneumatic cylinder and an electric push rod" means that "the first driving member 23 includes at least one of a hydraulic cylinder, a pneumatic cylinder and an electric push rod, the second driving member 24 includes at least one of a hydraulic cylinder, a pneumatic cylinder and an electric push rod, and the first driving member 23 and the second driving member 24 both include at least one of a hydraulic cylinder, a pneumatic cylinder and an electric push rod".

[0047] In a preferred embodiment, the first driving member 23 and the second driving member 24 are both selected as electric push rods. Specifically, since the coating area of the evaporation device is the vacuum chamber 50, the hydraulic cylinder and the pneumatic cylinder will be affected by the low pressure of the vacuum. At the same time, the temperature in the vacuum chamber 50 is usually high, which causes the liquid in the hydraulic cylinder and the gas in the pneumatic cylinder to be affected by the temperature, so that the hydraulic cylinder and the pneumatic cylinder cannot be accurately controlled. The electric push rod is controlled by electricity and is less affected by low pressure and high temperature.

[0048] As shown in the accompanying drawings, Figure 1 The minimum distance L1 between the first guide plate set 21 and the second guide plate set 22 satisfies the relationship: 250mm≤L1≤2500mm.

[0049] Specifically, by adjusting the rotation angle of the first guide plate group 21 and the second guide plate group 22, the minimum distance L1 of the guide channel 40 between the first guide plate group 21 and the second guide plate group 22 can vary between 250mm and 2500mm to accommodate different widths of the films to be coated. That is, when the film width is large, the width of the guide channel 40 should be large to ensure uniform coating on the film. When the film width is small, the width of the guide channel 40 should be reduced to prevent excessive film gas from escaping from the coating area. The value of L1 can be 250mm, 500mm, 750mm, 1000mm, 1250mm, 1500mm, 1750mm, 2000mm, 2250mm, and 2500mm. In addition, when L1 is less than 250mm, the minimum width of the guide channel 40 is too small, which may lead to uneven coating on the film. When L1 is greater than 2500mm, the minimum width of the guide channel 40 is too large, which may cause the film material gas to escape from the coating area.

[0050] As attached Figure 1 As shown, the shortest distance L2 between the first guide plate group 21 and the membrane channel 30 satisfies the relationship: 1cm≤L2≤10cm.

[0051] When L2 satisfies the above relationship, there is a certain distance between the first guide plate group 21 and the film-passing channel 30. The heat emitted by the first guide plate group 21 will not affect the film and cause film damage. At the same time, the film material gas will hardly escape from the gap between the first guide plate group 21 and the film-passing channel 30 into the non-coating area of ​​the evaporation device, thereby improving the coating efficiency and film material utilization rate of the evaporation device. However, when L1 is less than 1cm, since the first guide plate group 21 in this embodiment is composed of multiple first heating baffles, if the first heating baffles are too close to the film, they will burn the film and cause film damage. When L1 is greater than 10cm, the distance between the first guide plate group 21 and the film-passing channel 30 is too large, and the film material gas can escape from the gap between the first guide plate group 21 and the film-passing channel 30 into the non-coating area of ​​the evaporation device, resulting in film material waste and excessively high maintenance costs for the evaporation device. Similarly, the shortest distance L3 between the second guide plate group 22 and the membrane channel 30 satisfies the relationship: 1cm≤L3≤10cm. The values ​​of L2 and L3 can be 1cm, 2cm, 3cm, 4cm, 5cm, 6cm, 7cm, 8cm, 9cm and 10cm.

[0052] It should be noted that the appendix Figure 1L1, L2 and L3 are only the marked positions when the first guide plate set 21 and the second guide plate set 22 are rotated to the specific positions in the figure, and the marked positions of L1, L2 and L3 are different with the different positions of the first guide plate set 21 and the second guide plate set 22.

[0053] In order to reduce the manufacturing cost of the evaporation device, the evaporation assembly 10 in the embodiment at least includes one of the evaporation boat and the crucible, that is, the evaporation assembly 10 can directly select the evaporation boat or the crucible matched with the thin film to be plated, and a specific evaporation structure does not need to be manufactured in the evaporation device. In a preferred embodiment, the evaporation assembly 10 is a tungsten evaporation boat, so as to improve the service life of the evaporation assembly 10.

[0054] In another aspect, the utility model also provides a coating equipment, the coating equipment includes the evaporation device in the above-mentioned embodiment, therefore, the coating equipment includes all the technical effects of the evaporation device in the above-mentioned embodiment. Since the technical effects of the evaporation device have been described in detail in the foregoing, they will not be described here.

[0055] For the convenience of description, spatial relative terms such as "above", "upper", "on", "top", etc. can be used herein to describe the spatial positional relationship of one device or feature with other devices or features as shown in the drawings. It should be understood that the spatial relative terms are intended to include different orientations in use or operation in addition to the orientation of the device described in the drawings. For example, if the device in the drawing is inverted, the device described as "above" or "on" other devices or structures will be positioned "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below" orientations. The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein are interpreted accordingly.

[0056] In addition, it should be noted that the use of the words "first", "second", etc. to define parts only facilitates the differentiation of the corresponding parts, and the above words have no special meaning unless otherwise stated, and therefore cannot be understood as limiting the scope of protection of the utility model.

[0057] The above is only the preferred embodiment of the utility model, and is not used to limit the utility model. For those skilled in the art, the utility model can have various changes and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. An evaporation apparatus, characterized in that, include: An evaporation assembly (10) includes an evaporation tank (101) for holding and evaporating the film material; A membrane passage (30) is disposed on top of the evaporation assembly (10); The guiding assembly includes a first guide plate group (21) and a second guide plate group (22). The first ends of the first guide plate group (21) and the second guide plate group (22) are rotatably connected to opposite sides of the evaporation tank (101) parallel to the membrane inlet direction. The second ends of the first guide plate group (21) and the second guide plate group (22) both extend in a direction close to the membrane passage (30).

2. The evaporation apparatus according to claim 1, characterized in that, The first guide plate group (21) includes multiple first guide plates, which are sequentially connected to the first side of the evaporation tank (101) parallel to the film inlet direction along the film inlet direction; The second guide plate group (22) includes multiple second guide plates, which are sequentially connected to the second side of the evaporation tank (101) that is parallel to the film inlet direction and opposite to the first side.

3. The evaporation apparatus according to claim 2, characterized in that, The first guide plate includes a first hinge (212) and a first plate body (211), the first hinge (212) connecting the first plate body (211) and the evaporation tank (101), and the first plate body (211) extending in a direction close to the membrane channel (30); The second guide plate includes a second hinge (222) and a second plate body (221), the second hinge (222) connecting the second plate body (221) to the evaporation tank (101), and the second plate body (221) extending in a direction close to the membrane channel (30).

4. The evaporation apparatus according to claim 3, characterized in that, The first plate (211) includes a first heating baffle; and / or, The second plate (221) includes a second heating baffle.

5. The evaporation apparatus according to claim 1, characterized in that, The guiding component also includes: The first driving member (23) is connected to the first guide plate group (21) and is used to drive the first guide plate group (21) to rotate. The second driving member (24) is connected to the second guide plate group (22) and is used to drive the second guide plate group (22) to rotate.

6. The evaporation apparatus according to claim 5, characterized in that, The first drive member (23) and / or the second drive member (24) include at least one of the following three types: hydraulic cylinder, pneumatic cylinder and electric actuator.

7. The evaporation apparatus according to any one of claims 1 to 6, characterized in that, The minimum distance L1 between the first guide plate group (21) and the second guide plate group (22) satisfies the following relationship: 250mm≤L1≤2500mm.

8. The evaporation apparatus according to any one of claims 1 to 6, characterized in that, The shortest distance L2 between the first guide plate assembly (21) and the transmembrane channel (30) satisfies the following relationship: 1cm≤L2≤10cm; and / or, The shortest distance L3 between the second guide plate group (22) and the membrane channel (30) satisfies the following relationship: 1cm≤L3≤10cm.

9. The evaporation apparatus according to any one of claims 1 to 6, characterized in that, The evaporation assembly (10) includes at least one of two types: an evaporation boat and a crucible.

10. A coating apparatus, characterized in that, The coating equipment includes the evaporation device according to any one of claims 1 to 9.

Images