Tungsten copper alloy heater for sapphire crystal growth

Abstract

The utility model discloses a tungsten-copper alloy heater for sapphire crystal growth, and relates to the technical field of sapphire crystal growth equipment. The heating device comprises a mounting seat, a supporting frame is fixedly connected to the bottom of the mounting seat, a heating rod is arranged at the bottom of the mounting seat, a tungsten-copper alloy electrode is arranged at the top of the mounting seat, a clamping device is arranged at the top of the mounting seat, the clamping device comprises a sliding groove, the sliding groove is formed in the top of the mounting seat, and the tungsten-copper alloy electrode is arranged in the sliding groove. The inner wall of the sliding groove is fixedly connected with a mounting block. The birdcage heater made of the tungsten copper alloy is not prone to deformation, meanwhile, a good temperature gradient and a uniform and stable temperature field are provided for sapphire crystal growth, stable crystal growth is achieved, meanwhile, the service life of the heater is prolonged, equipment damage caused by improper operation can be reduced, and the service life of the heater is prolonged. And the maintenance cost caused by frequent misoperation is reduced.

Description

TECHNICAL FIELD

[0001] The utility model belongs to sapphire crystal growth equipment technical field, especially relate to a kind of tungsten copper alloy heater for sapphire crystal growth. BACKGROUND

[0002] Bubble sapphire crystal growth single crystal furnace generally adopts birdcage-shaped tungsten rod heater, each tungsten rod and copper electrode is separately connected, and multiple metal rods connect high-temperature zone and low-temperature zone, the temperature in the furnace needs to be maintained at about 2000 DEG C during sapphire crystal growth process, and the copper electrode hole of copper electrode is deformed under high temperature after the use of birdcage heater in multiple furnaces, so that the birdcage heater is deformed, short circuit occurs when heater is deformed and crucible is contacted, and uniform and stable sapphire thermal field cannot be provided, so that crystal yield is reduced.

[0003] According to a kind of sapphire crystal growth furnace with three heaters (publication number: CN103469295B), upper heater and middle heater are installed on the electrode of the upper part and the middle part of the furnace cylinder of sapphire crystal growth furnace, and lower heater is installed on the electrode of furnace bottom plate of sapphire crystal growth furnace, but the above-mentioned device is difficult to realize good temperature gradient, uniform and stable temperature field for sapphire crystal growth by the cooperation of upper heater, middle heater and lower heater and other components, and the stable growth of crystal is difficult to realize, and needs to be improved. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of tungsten copper alloy heater for sapphire crystal growth, birdcage heater made of tungsten copper alloy is not easy to deform, simultaneously good temperature gradient, uniform and stable temperature field are provided for sapphire crystal growth, the stable growth of crystal is realized, and the service life of heater is also extended, equipment damage caused by improper operation can be reduced, maintenance cost caused by improper frequent operation is reduced, and the existing problems are solved.

[0005] To solve the above technical problems, the utility model is realized by the following technical schemes:

[0006] The utility model is a kind of tungsten copper alloy heater for sapphire crystal growth, including mounting seat, the bottom of mounting seat is fixedly connected with support frame, the bottom of mounting seat is provided with heating rod, the top of mounting seat is provided with tungsten copper alloy electrode, the top of mounting seat is provided with clamping device.

[0007] Further, the clamping device includes a sliding slot, the sliding slot is opened in the top of mounting seat, the inner wall of the sliding slot is fixedly connected with mounting block, the bottom of tungsten copper alloy electrode is fixedly connected with fixed block, and the bottom of fixed block is fixedly connected with positioning block.

[0008] Further, the bottom of the mounting seat is fixedly connected with a supporting plate, the side of the supporting plate is penetrated through with a clamping bolt, one end of the clamping bolt is fixedly connected with a fixing rod, the circumferential surface of the fixing rod is sleeved with a clamping ring, and the end, away from the clamping bolt, of the fixing rod is fixedly connected with a protective pad.

[0009] Further, the number of the mounting blocks is two, and the mounting blocks are mutually symmetrical along the vertical middle axis of the mounting seat.

[0010] Further, the number of the fixing blocks is two, and the fixing blocks are mutually symmetrical along the vertical middle axis of the mounting seat.

[0011] Further, the number of the positioning blocks is two, and the positioning blocks are mutually symmetrical along the vertical middle axis of the mounting seat.

[0012] The utility model has the following beneficial effects:

[0013] 1. The birdcage heater made of tungsten-copper alloy is not easy to deform, and provides a good temperature gradient and a uniform and stable temperature field for the growth of sapphire crystals, realizes stable growth of the crystals, prolongs the service life of the heater, reduces damage of the equipment caused by improper operation, and reduces the maintenance cost caused by frequent improper operation.

[0014] Of course, any product implementing the utility model does not necessarily need to achieve all the advantages mentioned above. DRAWINGS

[0015] In order to more clearly illustrate the technical scheme of the embodiments of the utility model, the following will briefly introduce the drawings needed to be used in the embodiment description. Obviously, the drawings in the following description are only some embodiments of the utility model, and other drawings can be obtained by those skilled in the art without creative labor.

[0016] Figure 1 It is a three-dimensional appearance structure schematic view of the utility model;

[0017] Figure 2 It is a three-dimensional half cut structure schematic view of the sliding chute of the utility model;

[0018] Figure 3 It is a three-dimensional enlarged structure schematic view of the mounting block of the utility model;

[0019] Figure 4 It is a three-dimensional side view structure schematic view of the heating rod of the utility model;

[0020] Figure 5The three-dimensional enlarged structure schematic view of the clamping bolt.

[0021] In the drawings, the component list represented by each reference numeral is as follows:

[0022] 101, mounting seat; 102, support frame; 103, heating rod; 104, tungsten copper alloy electrode; 105, sliding groove; 106, mounting block; 107, fixed block; 108, positioning block; 109, support plate; 110, clamping bolt; 111, clamping ring; 112, fixed rod; 113, protective pad. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0024] Please refer to Figures 1-5 The utility model discloses a tungsten copper alloy heater for sapphire crystal growth, including mounting seat 101, the bottom fixed connection of mounting seat 101 has support frame 102, the bottom of mounting seat 101 is provided with heating rod 103, the top of mounting seat 101 is provided with tungsten copper alloy electrode 104, the top of mounting seat 101 is provided with clamping device.

[0025] The clamping device includes sliding groove 105, and the sliding groove 105 is formed in the top of the mounting seat 101. The inner wall of the sliding groove 105 is fixedly connected with the mounting block 106. The bottom of the tungsten copper alloy electrode 104 is fixedly connected with the fixed block 107. The bottom of the fixed block 107 is fixedly connected with the positioning block 108.

[0026] The bottom of the mounting seat 101 is fixedly connected with the support plate 109. The clamping bolt 110 penetrates through the side surface of the support plate 109. One end of the clamping bolt 110 is fixedly connected with the fixed rod 112. The circumferential surface of the fixed rod 112 is sleeved with the clamping ring 111. The end, away from the clamping bolt 111, of the fixed rod 112 is fixedly connected with the protective pad 113.

[0027] The number of the mounting block 106 is two, and the mounting block 106 is symmetrical to each other along the vertical central axis of the mounting seat 101.

[0028] The number of the fixed block 107 is two, and the fixed block 107 is symmetrical to each other along the vertical central axis of the mounting seat 101.

[0029] The number of the positioning block 108 is two, and the positioning block 108 is symmetrical to each other along the vertical central axis of the mounting seat 101.

[0030] One specific application of the embodiment is that the tungsten-copper alloy electrode 104 is placed on the top of the chute 105, the tungsten-copper alloy electrode 104 is rotated to drive the fixed block 107 to rotate, the fixed block 107 is driven to rotate to drive the positioning block 108 to rotate, when the positioning block 108 is rotated to the bottom of the mounting block 106, the tungsten-copper alloy electrode 104 can be fixed, which is convenient to disassemble, simple to operate, each tungsten-copper alloy electrode 104 is connected with each tungsten-copper alloy electrode 104, the plurality of metal rods are connected with the high-temperature area and the low-temperature area, meanwhile, sufficient safety insulation distance is required around, the heater assembly heating rod 103 is in the shape of a thin rod, the diameter is 4-6mm, the heater assembly is provided with two tungsten-copper alloy electrodes 104 on the upper part of the heater, the two tungsten-copper alloy electrodes 104 do not directly contact each other, the heater assembly is heated, and the heater assembly is densely distributed on the side of the heater, the number is 30-50, the heating rod is made of tungsten, high-density distribution ensures that the heat field is uniform, and precise control is realized, and the electric heating conversion efficiency is higher under the condition of the same working voltage; when the heater works, the inside is provided with a crucible surrounded by the heating rod 103, the distance from the crucible to the heating rod is 10-30mm, the mounting seat 101 and the support frame 102 are fixed by the clamping bolt 110, when it is needed to be disassembled, the clamping ring 111 is pulled upward, the clamping bolt 110 is pulled out, the clamping bolt 110 is separated from the side of the supporting plate 109, and then the disassembly is completed.

[0031] In the description of the present specification, the description of the terms "one embodiment", "example", "specific example" and the like means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0032] The preferred embodiments of the above disclosed application are only used to help explain the application. The preferred embodiments do not describe all the details, nor limit the application to the specific embodiments described. Obviously, according to the content of the specification, many modifications and changes can be made. The embodiments are selected and described in the specification in order to better explain the principles and practical applications of the application, so that the persons skilled in the art can well understand and utilize the application. The application is limited by the claims and the entire scope and equivalents thereof.

Claims

1. A tungsten-copper alloy heater for sapphire crystal growth comprising a mounting base (101), characterized in that: The bottom of the mounting seat (101) is fixedly connected with a support frame (102), the bottom of the mounting seat (101) is provided with a heating rod (103), the top of the mounting seat (101) is provided with a tungsten-copper alloy electrode (104), and the top of the mounting seat (101) is provided with a clamping device; the clamping device comprises a sliding groove (105) which is opened in the top of the mounting seat (101), the inner wall of the sliding groove (105) is fixedly connected with a mounting block (106), the bottom of the tungsten-copper alloy electrode (104) is fixedly connected with a fixed block (107), and the bottom of the fixed block (107) is fixedly connected with a positioning block (108).

2. The tungsten-copper alloy heater for sapphire crystal growth according to claim 1, wherein The bottom of the mounting seat (101) is fixedly connected with a support plate (109), the side surface of the support plate (109) penetrates through a clamping bolt (110), one end of the clamping bolt (110) is fixedly connected with a fixed rod (112), the circumferential surface of the fixed rod (112) is sleeved with a clamping ring (111), and the end, away from the clamping bolt (110), of the fixed rod (112) is fixedly connected with a protective pad (113).

3. The tungsten-copper alloy heater for sapphire crystal growth according to claim 2, wherein The number of the mounting blocks (106) is two, and they are mutually symmetrical along the vertical central axis of the mounting seat (101).

4. The tungsten-copper alloy heater for sapphire crystal growth according to claim 3, wherein The number of the fixed blocks (107) is two, and they are mutually symmetrical along the vertical central axis of the mounting seat (101).

5. The tungsten-copper alloy heater for sapphire crystal growth according to claim 4, wherein The number of the positioning blocks (108) is two, and they are mutually symmetrical along the vertical central axis of the mounting seat (101).

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