Tubular roasting furnace for quartz impurity removal

Abstract

The utility model discloses a tubular roasting furnace for quartz impurity removal, which is used for a quartz purification roasting process and comprises a U-shaped quartz reaction tube main body and a sealing cover, an ultrasonic heating device penetrating through the quartz reaction tube main body is arranged at the bottom of the U-shaped structure of the quartz reaction tube main body; the outer wall of the quartz reaction tube main body is provided with a microwave heating device for radiating into the tube, and is correspondingly provided with a microwave isolating layer for enveloping the outer wall of the quartz reaction tube main body to prevent the microwave from leaking; and the ore stirring mechanism is used for driving ores processed in the quartz reaction tube main body to be stirred. Through the action of composite microwaves and ultrasonic waves, the superconductive composite pressurization effect is achieved, the microwave and ultrasonic wave combination efficiency is higher, the treatment effect on the inclusion is better, safety and environmental protection are achieved, the reaction time is shortened, energy consumption is remarkably reduced, the impurity removal effect is improved, the water quenching process of the treated ore inclusion can be basically opened, and the follow-up treatment cleanliness is higher.

Description

Technical Field

[0001] This utility model relates to a device for quartz purification process, and more particularly to a tubular roasting furnace for removing impurities from quartz. Background Technology

[0002] High-purity quartz, due to its unique molecular chain structure, crystal lattice shape, and lattice variation patterns, possesses excellent chemical stability, extremely low volumetric expansion coefficient, extremely high temperature resistance, high insulation and withstand voltage, low and stable ultrasonic delay performance, mechanical properties superior to ordinary glass, and excellent transmission properties to ultraviolet, visible, and near-infrared light. According to international convention, only quartz with a SiO2 purity greater than 99.95% can be called high-purity quartz; some even consider quartz with a SiO2 purity greater than 99.995% to be high-purity quartz.

[0003] In the semiconductor field, high-purity quartz sand is one of the key strategic raw materials for chip manufacturing. Chip manufacturing mainly involves silicon wafer manufacturing, wafer fabrication, and chip manufacturing. The high-purity quartz materials used in each process include quartz crucibles used in silicon wafer manufacturing to pull single-crystal silicon rods; quartz glass diffusion tubes and related quartz glass equipment such as quartz flanges, quartz glass furnace tubes, and quartz boats used in wafer fabrication; and photomasks used in photolithography, etching, and thin-film deposition in chip manufacturing. Different quartz products have different requirements for the purity, inclusion content, and particle size of high-purity quartz sand, with the most stringent requirements for high-purity quartz crucibles used in pulling single-crystal silicon.

[0004] In recent years, my country's photovoltaic and semiconductor industries have developed rapidly, resulting in a huge consumption of high-purity quartz. As an indispensable raw material for strategic high-tech industries, high-purity quartz is currently hampered by both high-quality and stable quartz supply and complex purification processes. Therefore, improving quartz purification processes and overcoming the limitations of high-purity quartz raw material ore is a pressing technical problem that needs to be solved in my country and globally. Utility Model Content

[0005] The main technical problem to be solved by this utility model is to provide a tubular roasting furnace for quartz purification, which can significantly reduce energy consumption and improve the purification effect and efficiency in quartz purification process.

[0006] To solve the above-mentioned technical problems, this utility model provides a tubular roasting furnace for quartz impurity removal, which includes a U-shaped quartz reaction tube body and a sealing cover for sealing the opening of the quartz reaction tube body; an ultrasonic heating device penetrating the body is provided at the bottom of the U-shaped structure of the quartz reaction tube body; a microwave heating device radiating into the tube is provided on the outer wall of the quartz reaction tube body, and a microwave isolation layer is also provided to envelop the outer wall of the quartz reaction tube body to prevent the aforementioned microwave leakage; it also includes an ore turning mechanism for driving the ore being processed inside the quartz reaction tube body to turn over.

[0007] In one embodiment, the ultrasonic heating device includes an ultrasonic main unit and an ultrasonic transducer head. The ultrasonic main unit is disposed outside the quartz reaction tube body, and the ultrasonic transducer head penetrates the bottom center of the U-shaped structure of the quartz reaction tube body and is disposed on the central axis of the inner cavity of the quartz reaction tube body.

[0008] Preferably, the inner wall of the quartz reaction tube body (furnace inner wall) is made of high-purity zirconium quartz.

[0009] Preferably, the ultrasonic transducer head is made of zirconium. Alternatively, a layer of high-purity quartz / high-purity zirconium quartz is coated on top of a PZT lead zirconate titanate piezoelectric ceramic material.

[0010] In one embodiment, the microwave heating device includes a microwave frequency converter, a frequency converter magnetron, and a waveguide cavity. The waveguide cavity is close to the outer wall of the quartz reaction tube body to guide microwaves into the inner cavity of the quartz reaction tube body.

[0011] In one embodiment, the outer wall of the quartz reaction tube body has a cylindrical profile, and the microwave isolation layer is a metal shield with a cylindrical inner cavity. Both the metal shield and the waveguide cavity maintain a distance of 3-20 mm from the outer wall of the quartz reaction tube body. This ensures that the quartz reaction tube body will not collide with the metal shield and the waveguide cavity when rotating, while simultaneously ensuring effective microwave transmission and reducing microwave leakage. In practice, the microwave isolation layer can be made of either a metal shield or ferrite material, both of which can effectively isolate microwave leakage.

[0012] Alternatively, the microwave isolation layer can be made into a coating or metal composite structure on the outer wall of the quartz reaction tube body, and the waveguide cavity can penetrate the microwave isolation layer and be adsorbed onto the outer wall of the quartz reaction tube body.

[0013] Preferably, the distance between the waveguide cavity and the outer wall of the quartz reaction tube body is 5 mm.

[0014] In one embodiment, the quartz reaction tube body is arranged horizontally (horizontal), and the ore turning mechanism includes a rotary drive motor, a transmission mechanism, and a quartz reaction tube body rotation support mechanism. The rotary drive motor drives the quartz reaction tube body to rotate (uniformly rotate) along the central axis of the tube body through the transmission mechanism, thereby realizing the turning of the ore.

[0015] In one embodiment, if the quartz reaction tube is horizontal, the rotating support mechanism can be an extended support member located on the outer side of the U-shaped bottom of the quartz reaction tube body, limited by a loop-type limiting mechanism, with rollers added to the outer wall of the open side of the quartz reaction tube body at the other end for support. Alternatively, a metal isolation cover can be directly set as a support member with multiple sets of lifting rollers inside to support and limit the quartz reaction tube body.

[0016] Of course, if the quartz reaction tube is vertical or other types, similar structures can be used and appropriate adjustments can be made.

[0017] In one embodiment, the transverse structure of the waveguide cavity can be square.

[0018] In one embodiment, a telescopic rod opening device is provided between the quartz reaction tube body and the sealing cap to drive the sealing cap to open or close the opening of the quartz reaction tube body. A flexible graphite sealing ring is also provided on the contact surface between the quartz reaction tube body and the sealing cap.

[0019] In one embodiment, a pressure regulating mechanism, a feeding mechanism, and a sensor unit are also provided. The inner cavity of the quartz reaction tube body is connected to the pressure regulating mechanism and the feeding mechanism through pipes with valves. The inner cavity of the quartz reaction tube body is also connected to the sensor unit through a pipe. The sensor unit is equipped with a safety valve, a pressure gauge, and a pressure sensor, etc.

[0020] In one embodiment, a PLC is also provided for monitoring and control. The PLC also controls the microwave heating device, ultrasonic heating device, and ore turning mechanism to work synchronously.

[0021] During implementation, the PLC can monitor temperature, pressure, speed control and monitoring, temperature detection and control (by controlling microwave power), control of the opening mechanism, and control of the air pressure regulating mechanism to adjust the pressure inside the quartz reaction tube as needed.

[0022] In one embodiment, the device further includes an equipment support, an inclined device disposed at the lower part of the equipment support, and an equipment base. All components of the tubular roasting furnace for quartz impurity removal are disposed on the equipment support. The inclined device rotates and drives one end of the equipment support to detach from the equipment base, thereby causing the quartz reaction tube body to tilt and pour out the ore inside the tube.

[0023] To address the aforementioned technical problems, this utility model provides a tubular roasting furnace for quartz impurity removal, comprising a U-shaped quartz reaction tube body and a sealing cap for sealing the opening of the quartz reaction tube body; an ultrasonic heating device penetrating the body is disposed at the bottom of the U-shaped structure of the quartz reaction tube body; a microwave heating device radiating into the tube is disposed on the outer wall of the quartz reaction tube body, and a microwave isolation layer is correspondingly disposed to envelop the outer wall of the quartz reaction tube body to prevent the aforementioned microwave leakage; it also includes an ore turning mechanism for driving the ore being processed inside the quartz reaction tube body to turn over. Through the combined action of microwaves and ultrasound, it possesses a superconducting composite pressurization effect (the pressure inside the sealed cavity increases after heating), resulting in higher microwave and ultrasonic combination efficiency, better treatment effect on inclusions, safety, and environmental friendliness. It significantly reduces energy consumption by reducing reaction time and improves impurity removal effect. The water quenching process can essentially open the processed ore inclusions, leading to higher purity in subsequent processing. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of one embodiment of the present utility model;

[0025] Figure 2 for Figure 1 The illustrated embodiment is a schematic diagram of the principle of pouring ore during the water quenching process. Detailed Implementation

[0026] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.

[0027] Existing technologies typically use heating elements or microwaves, but the results are not ideal. Some technologies add an ultrasonic treatment step, but overall, this is time-consuming and labor-intensive, and the improvement in effect is not significant.

[0028] Please refer to Figure 1 The diagram shown is a structural schematic of an embodiment of a tubular ultrasonic calcining furnace for removing impurities from quartz according to this utility model.

[0029] This invention provides a tubular roasting furnace for quartz impurity removal, comprising a horizontally placed U-shaped quartz reaction tube body 1 and a sealing cap 2 for closing the opening of the quartz reaction tube body 1. The quartz reaction tube body 1 and the sealing cap 2 are opened or closed by a telescopic rod opening device 3 (a cylinder telescopic rod with an extension body connected to a positioning gripper arm for connecting the sealing cap 2), enabling the processing or pouring out heated ore for water quenching. A flexible graphite sealing ring 14 is also provided on the contact surface between the quartz reaction tube body 1 and the sealing cap 2. The graphite sealing ring 14 is not prone to aging, is resistant to high temperatures, and has good sealing performance. An ultrasonic heating device 4, penetrating the bottom of the U-shaped structure of the quartz reaction tube body 1, is installed. A microwave heating device 5, radiating into the tube, is installed on the outer wall of the quartz reaction tube body 1. A microwave isolation layer, which encloses the outer wall of the quartz reaction tube body to prevent microwave leakage, is also provided. The system also includes an ore-turning mechanism for agitating the ore being processed inside the quartz reaction tube body 1. By sealing the quartz reaction tube body 1, pressure can be applied. The combined effect of the ultrasonic heating device 4 and the microwave heating device 5 results in a shorter heating time and promotes the opening of fine inclusions, leading to better subsequent water quenching and impurity removal.

[0030] When this patent is implemented, the main body 1 of the quartz reaction tube is cylindrical. Of course, it is also feasible to change it to a non-cylindrical shape or other shapes in application, based on the principle of this patent, but the technical effect will be worse.

[0031] Reference Figure 1 As shown, in practice, the opening device 3 can also be replaced by a hinge structure. Because of the high temperature and the need for rapid opening during quenching, tools or an automatic opening device are required to open the sealing cap 2. The seal between the quartz reaction tube body 1 and the sealing cap 2 should ideally use a double flange structure to facilitate sealing and extend service life.

[0032] A variable frequency magnetron 5b (for temperature control via frequency conversion) is installed at the lower part of the quartz reaction tube body 1. The variable frequency magnetron 5b guides microwaves into the inner cavity of the quartz reaction tube body 1 through a waveguide cavity 5a close to the outer wall of the quartz reaction tube body 1. A microwave isolation layer is also provided to surround the outer wall of the quartz reaction tube body 1. The microwave isolation layer can be made of metal shield 6 or ferrite material, which can effectively isolate microwave leakage. In practice, the transverse structure of the waveguide cavity 5a can be square; the distance between the waveguide cavity 5a and the metal shield 6 and the quartz reaction tube body 1 is maintained at about 3-20 mm.

[0033] During implementation, the preferred distance between the waveguide cavity 5a and the quartz reaction tube body 1 is maintained at about 5 mm.

[0034] like Figure 1As shown, an ultrasonic heating device 4 penetrating the body is installed at the inner bottom of the U-shaped structure of the quartz reaction tube body 1. The ultrasonic main unit 4a of the ultrasonic heating device 4 is located at the outer bottom of the quartz reaction tube body 1, and the ultrasonic transducer head 4b is located in the middle of the inner cavity of the quartz reaction tube body, on the central axis of the U-shaped structure of the quartz reaction tube body 1. As shown in the figure, the advantage of setting it on the central axis is that when the ore turning mechanism drives the quartz reaction tube body 1 to rotate, the ultrasonic transducer head 4b is always in the center position, reducing friction and collision with the ore.

[0035] like Figure 1 , Figure 2 As shown, in practice, the device also includes a tilting device 13 for pouring the quartz from the quartz reaction tube body 1 after calcination. The aforementioned quartz reaction tube body 1 and accessories are all mounted on the tilting device 13 via the equipment bracket 11. One rotating joint of the tilting device 13 is fixed to the equipment bracket 11, and the other rotating joint is connected and fixed to the equipment base 12.

[0036] like Figure 1 As shown, the quartz reaction tube body 1 is equipped with a rotary drive mechanism, which drives the quartz reaction tube body 1 to rotate at a constant speed during use via a rotary drive motor 10. In implementation, if the quartz reaction tube body 1 is horizontal, a main shaft can be installed to support the tail of the quartz reaction tube body 1, and rollers can be added to the opening of the quartz reaction tube body for support. Alternatively, the microwave isolation layer / metal isolation cover 6 can be used as a support shell, supporting the quartz reaction tube body 1 through a support mechanism, allowing it to rotate within it. It should be noted that since the quartz reaction tube body 1 adopts a rotating structure, the telescopic rod opening device 3 connecting the sealing cover 2 has a directly movable connection between its positioning gripper arm and the sealing cover 2. That is, the telescopic rod opening device 3 only limits the sealing cover 2 to a tight seal between the sealing cover 2 and the quartz reaction tube body 1, but does not affect the rotation of the sealing cover 2.

[0037] like Figure 1 As shown, multiple pipes connecting to the inner cavity of the quartz reaction tube are installed outside the main body of the quartz reaction tube. The first pipe, equipped with a valve, connects to a pressure regulating mechanism 8, which allows air to be injected into or the pressure inside the quartz reaction tube to be adjusted. The second pipe, also equipped with a valve, connects the inner cavity of the quartz reaction tube to a feeding mechanism 9, used to feed powder or granules into the inner cavity of the quartz reaction tube. The third pipe, without a valve, connects the inner cavity of the quartz reaction tube to a sensor unit 7. The sensor unit 7 is equipped with a safety valve (for automatic pressure relief when pressure is too high), a pressure gauge, and a pressure sensor. In practice, the sensor unit 7 may also be equipped with a temperature sensor, etc.

[0038] During implementation, a PLC is also installed to act as the central control unit. The PLC controls the microwave heating device 5, the ultrasonic heating device 4, and the ore turning mechanism to work synchronously. The PLC also monitors and controls temperature, pressure, and rotation speed, detects and controls temperature (by controlling microwave power), controls the telescopic rod opening device 3 (opening mechanism), and controls the air pressure regulating mechanism to adjust the pressure inside the quartz reaction tube as needed.

[0039] During implementation, the inner wall of the quartz reaction tube body 1 furnace can be made of high-purity quartz material, preferably high-purity zircon quartz material (with stronger strength), and the outside can be made of the same material, or other heat insulation materials can be used in a composite structure.

[0040] The sealing cover 2 is made of the same material as the inner wall of the reaction tube furnace. Alternatively, the inner wall can be made of the same material as the inner wall of the reaction tube furnace, and the outer wall can be made of metal and / or other materials or a composite of insulation materials.

[0041] In implementation, the ultrasonic transducer 4b uses a zirconium transducer, or a layer of high-purity quartz / high-purity zirconium quartz is coated onto a PZT lead zirconate titanate piezoelectric ceramic base. Direct use of PZT lead zirconate titanate piezoelectric ceramic is susceptible to damage from high temperature and pressure, and may generate contaminants. Coating it with a layer of high-purity quartz or high-purity zirconium quartz solves this problem. The zirconium transducer enables automatic ultrasonic frequency tracking.

[0042] like Figure 1 , 2A preferred embodiment of a tubular roasting furnace for quartz purification is shown, comprising a support frame 11. A cylindrical metal shield 6, designed to prevent microwave leakage, is fixedly mounted on the support frame 11. A U-shaped cylindrical quartz reaction tube body 1 is loosely fitted inside the metal shield 6. The quartz reaction tube body 1 is made of high-purity zirconium quartz. The left central tail of the quartz reaction tube body 1 extends inward and is limited (allowing only axial rotation). A support mechanism is provided between the right side and the metal shield 6 to ensure that the quartz reaction tube body 1 can rotate axially within the metal shield 6. The quartz reaction tube body 1 is horizontally positioned with an open right side. A closable sealing cap 2 is provided at the opening. The inner wall of the sealed cavity formed by the sealing cap 2 and the quartz reaction tube body 1 is made of high-purity zirconium quartz, thus ensuring that the container does not undergo physical changes during high-temperature processing in the tubular roasting furnace. A telescopic rod opening device 3 is also provided on the equipment support 11, which drives the sealing cover 2 to open or close the opening of the quartz reaction tube body 1 when it is working. Furthermore, a flexible graphite sealing ring 14 is provided on the contact surface between the quartz reaction tube body 1 and the sealing cover to further ensure the reliability of the seal between them. An ultrasonic heating device 4 is provided at the bottom of the U-shaped structure on the left side of the quartz reaction tube body 1, penetrating its body. The ultrasonic heating device 4 includes an ultrasonic main unit 4a located on the outside of the left side of the quartz reaction tube body 1, and an ultrasonic transducer head 4b located on the central axis inside the quartz reaction tube body 1. The ultrasonic main unit 4a and the ultrasonic transducer head 4b are connected through the tube wall. The ultrasonic transducer head 4b is located on the central axis to ensure that the position of the ultrasonic transducer head 4b remains unchanged and only rotates when the quartz reaction tube body 1 rotates. The ultrasonic transducer head 4b is made of zirconium. A waveguide cavity 5a penetrating the metal isolation cover 6 is provided at the lower part of the quartz reaction tube body 1. The waveguide cavity 5a, combined with the frequency conversion magnetron 5b and the frequency conversion power supply 5c, constitutes a microwave heating device 5. The waveguide cavity 5a introduces microwaves into the inner cavity of the quartz reaction tube body 1 for heating, and the metal isolation cover 6 reflects the microwaves to prevent them from leaking to the outside. The waveguide cavity 5a maintains a 5mm gap with the outer wall of the quartz reaction tube body 1 to avoid collision during rotation. The part extending from the center tail of the left side of the quartz reaction tube body 1 to the outside of the metal isolation cover 6 is connected to a rotary drive motor 10 via a pulley. The motor drives the quartz reaction tube body 1 and the sealing cover 2 to rotate at a uniform speed, thereby driving the ore inside the quartz reaction tube body 1 to keep it continuously agitated during ore processing. Multiple pipes are also provided on the left side of the quartz reaction tube body 1, which are connected to the air pressure regulating mechanism 8, the feeding mechanism 9, and the sensor unit 7. The relevant pipes rotate together with the quartz reaction tube body 1 when it rotates, or a pipe mechanism supporting the corresponding rotation can be provided, or the structure of the quartz reaction tube body 1 can be improved (a fixed loop area can be set at the bottom of the left side), or the relevant pipes can be set at the sealing cover 2 on the right side. The sensor unit 7 is equipped with a safety valve, a pressure gauge, a pressure sensor, and a temperature sensor.It also includes a PLC for overall control and monitoring. The PLC controls the microwave heating device 5 and the ultrasonic heating device 4, adjusting their power, temperature, and air pressure, and drives the rotary drive motor 10 to synchronize the operation of the quartz reaction tube body 1 ore turning mechanism. A base 12 is located directly below the equipment support 11. A rotating tilting device 13 is located on the lower right side of the equipment support 11. The rotating tilting device 13 is connected to both the base 12 and the equipment support 11. Rotation of the tilting device 13 drives one end of the equipment support 11 to detach from the base 12. Figure 2 The entire device is tilted, and the sealing cover 2 is opened, allowing the quartz ore in the main body 1 of the quartz reaction tube to tilt and pour out.

[0043] In one embodiment, a tubular roasting furnace for quartz purification is used, wherein the quartz reaction tube body 1 has an inner cavity volume of 100L. Microwave and ultrasonic heating combined can reach a maximum temperature of 800-1000 degrees Celsius, and the temperature can be adjusted via power input. The quartz reaction tube body 1 rotates during roasting at a speed of 0-10 rpm, with the quartz ore rotating inside the equipment under gravity. The pressure regulating mechanism 8 can adjust the pressure up to 3 MPa (the quartz reaction tube body 1, sealing cap 2, and sealing ring 14 can withstand this pressure). The microwave heating device 5 is powered by 380V±10V, with a power of 50KW, a frequency of 2450+50Hz, and microwave leakage of <5mW / cm. The rotary drive motor 10 is a high-precision stepper motor controlled by a PLC. The ultrasonic heating device 4 has a power output of 8000W and a nominal frequency of 20kHz.

[0044] When using the equipment, place the ore into the equipment at room temperature, manually depressurize or open the vacuum valve or the air pressure regulating mechanism 8 to restore normal pressure, and pour the material out into water for water quenching when the temperature is high.

[0045] This patented application offers superior performance and energy efficiency. Based on traditional processes, it employs simultaneous microwave and ultrasonic heating and pressurization during the roasting stage of quartz ore, effectively improving processing efficiency. The superposition of microwave and ultrasonic waves allows for effective penetration of fine inclusions, enabling them to fully open during subsequent water quenching. Compared to traditional processes, this invention achieves more thorough impurity removal / classification, significantly reduces reaction time and energy consumption, streamlines processes, increases efficiency, is low-carbon and environmentally friendly, and facilitates subsequent processing.

Claims

1. A tubular roasting furnace for removing impurities from quartz, characterized in that, It includes a U-shaped quartz reaction tube body (1) and a sealing cap (2) for sealing the opening of the quartz reaction tube body; an ultrasonic heating device (4) is provided at the bottom of the U-shaped structure of the quartz reaction tube body (1) and penetrates the body; a microwave heating device (5) is provided on the outer wall of the quartz reaction tube body (1) to radiate into the tube, and a microwave isolation layer is also provided to enclose the outer wall of the quartz reaction tube body to prevent microwave leakage; it also includes an ore turning mechanism for driving the processed ore inside the quartz reaction tube body (1) to turn.

2. The tubular roasting furnace for quartz impurity removal as described in claim 1, characterized in that, The ultrasonic heating device (4) includes an ultrasonic main unit (4a) and an ultrasonic transducer head (4b). The ultrasonic main unit (4a) is located outside the quartz reaction tube body, and the ultrasonic transducer head (4b) penetrates the bottom center of the U-shaped structure of the quartz reaction tube body (1) and is located on the central axis of the inner cavity of the quartz reaction tube body (1).

3. The tubular roasting furnace for quartz impurity removal as described in claim 2, characterized in that, The inner wall of the quartz reaction tube body (1) is made of high-purity zirconium quartz material; the ultrasonic transducer (4b) is made of zirconium material or is covered with a layer of high-purity quartz / high-purity zirconium quartz on the basis of PZT lead zirconate titanate piezoelectric ceramic material.

4. The tubular roasting furnace for quartz impurity removal as described in claim 1, 2, or 3, characterized in that, The microwave heating device (5) includes a microwave frequency converter (5c), a frequency converter magnetron (5b), and a waveguide cavity (5a). The waveguide cavity (5a) is close to the outer wall of the quartz reaction tube body (1) to introduce microwaves into the inner cavity of the quartz reaction tube body (1).

5. The tubular roasting furnace for quartz impurity removal as described in claim 4, characterized in that, The outer wall of the quartz reaction tube body (1) has a cylindrical profile, and the microwave isolation layer is a metal isolation cover (6) with a cylindrical inner cavity. The metal isolation cover (6) and the waveguide cavity (5a) are both 3-20 mm apart from the outer wall of the quartz reaction tube body (1).

6. The tubular roasting furnace for quartz impurity removal as described in claim 1, 2, or 3, characterized in that, The quartz reaction tube body (1) is arranged horizontally. The ore turning mechanism includes a rotary drive motor (10), a transmission mechanism and a rotary support mechanism for the quartz reaction tube body (1). The rotary drive motor (10) drives the quartz reaction tube body (1) to rotate along the central axis of the tube body through the transmission mechanism, thereby realizing the turning of the ore.

7. The tubular roasting furnace for quartz impurity removal as described in claim 1, 2, or 3, characterized in that, The quartz reaction tube body (1) and the sealing cap (2) are connected by a telescopic rod opening device (3) to drive the sealing cap (2) to open or close the opening of the quartz reaction tube body (1). A flexible graphite sealing ring (14) is also provided on the contact surface between the quartz reaction tube body (1) and the sealing cap.

8. The tubular roasting furnace for quartz impurity removal as described in claim 1, 2, or 3, characterized in that, It is also equipped with a pressure regulating mechanism (8), a feeding mechanism (9) and a sensor unit (7). The inner cavity of the quartz reaction tube body (1) is connected to the pressure regulating mechanism (8) and the feeding mechanism (9) through pipes with valves. The inner cavity of the quartz reaction tube body (1) is also connected to the sensor unit (7) through pipes. The sensor unit (7) is equipped with a safety valve, a pressure gauge and a pressure sensor.

9. The tubular roasting furnace for quartz impurity removal as described in claim 8, characterized in that, It is also equipped with a PLC for monitoring and control. The PLC also controls the microwave heating device (5), the ultrasonic heating device (4) and the ore turning mechanism to work synchronously.

10. The tubular roasting furnace for quartz impurity removal as described in claim 1, 2, or 3, characterized in that, It also includes an equipment support (11), an inclined device (13) set at the lower part of the equipment support (11), and an equipment base (12). All components of the tubular roasting furnace used for quartz impurity removal are set on the equipment support (11). The inclined device (13) drives one end of the equipment support (11) to detach from the equipment base (12), thereby causing the quartz reaction tube body (1) to tilt and pour out the ore inside the tube.

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