Preceding-stage pipeline cleaning device shared by multiple machine table process modules and thin film deposition equipment of preceding-stage pipeline cleaning device

Abstract

The utility model discloses a preceding-stage pipeline cleaning device shared by multiple machine table process modules. The preceding-stage pipeline cleaning device comprises a preceding-stage pipeline cleaning module and at least two machine table process modules connected with the preceding-stage pipeline cleaning module. The preceding-stage pipeline cleaning module comprises a gas box, a plasma generation unit communicated with the gas box and at least two gas valves connected to the output end of the plasma generation unit, and the gas valves control one path of cleaning gas supplied to the machine table process module respectively. The utility model further discloses thin film deposition equipment which adopts one preceding-stage pipeline cleaning module to provide cleaning processes for the process modules of at least two sets of machine tables simultaneously or step by step, so that not only is the utilization rate of the preceding-stage pipeline cleaning module improved, but also the structure is simple, the occupied space of the equipment is reduced, and the machine tables are convenient to maintain; and the manufacturing cost of the device is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to thin film deposition equipment technical field especially, relates to a kind of multi-machine platform process module shared foreline cleaning device and its thin film deposition equipment. BACKGROUND

[0002] In some application fields of CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) processes, the reaction chamber can generate a large number of particles, powders or other non-gaseous by-products. These non-gaseous by-products can enter the Foreline assembly through the gas suction ring and be left in the Foreline assembly, especially in the various valve bodies. Excessive residual non-gaseous by-products left in the TV valve (butterfly valve) can cause many problems for the TV butterfly, and can even cause the TV valve to be stuck and unable to control the pressure.

[0003] In the prior art, to solve the problem of butterfly valve blockage caused by particles in the reaction chamber, a plasma pipeline cleaning device is generally used to periodically clean the foreline in the process module of the machine platform, so as to avoid the problem of pipeline and butterfly valve blockage. However, the existing foreline cleaning generally uses a set of cleaning device specially designed for one process machine platform, and the cleaning process only needs to be performed periodically, which can cause high equipment cost and large space occupation. UTILITY MODEL CONTENT

[0004] The utility model aims at overcoming the defects of the prior art, and provides a multi-machine platform process module shared foreline cleaning device and a thin film deposition equipment to solve the technical problems of complex, high cost and large space occupation of the existing foreline cleaning system.

[0005] To achieve the above-mentioned purpose, the utility model adopts the following technical solutions:

[0006] In the first aspect, the embodiments of the utility model provide a multi-machine platform process module shared foreline cleaning device, which comprises a foreline cleaning module and at least two machine platform process modules connected to the foreline cleaning module.

[0007] The foreline cleaning module comprises a gas tank, a plasma generating unit communicated with the gas tank, and at least two gas valves connected to the output end of the plasma generating unit.

[0008] The gas tank is used to provide a gas source for the plasma generating unit.

[0009] The plasma generating unit is used to ionize the gas source provided by the gas tank to generate plasma.

[0010] The gas valve is used for controlling the plasma generated by the plasma generating unit to be delivered to the machine process module, so as to clean the machine process module.

[0011] The first pipeline is provided with a vacuum gauge for detecting the gas pressure inside the first pipeline.

[0012] The second pipeline is provided between the plasma generating unit and the gas valve.

[0013] The diameter of the second pipeline is greater than that of the first pipeline.

[0014] The diameter of the first pipeline is 1 / 4 inch.

[0015] The gas valve is a pneumatic valve.

[0016] The plasma generating unit is further connected with a cooling water circuit for cooling the plasma generating unit.

[0017] The machine process module comprises a transmission pipeline, a control valve and a butterfly valve connected to the transmission pipeline.

[0018] The process chamber is further connected with a vacuum pump through a pipeline.

[0019] In the second aspect, the embodiments of the utility model provide a thin film deposition equipment, the thin film deposition equipment includes the multi-machine process module shared foreline cleaning device of any one described above.

[0020] The multi-machine process module shared foreline cleaning device and the thin film deposition equipment have the advantages that one foreline cleaning module is used to provide cleaning processes for the process modules of at least two groups of machines simultaneously or step by step, the use rate of the foreline cleaning module is improved, the structure is simple, the occupied space of the equipment is reduced, the machine maintenance is facilitated, and the manufacturing cost of the device is reduced.

[0021] The above description is only a summary of the technical scheme of the utility model, in order to more clearly understand the technical means of the utility model, the content of the specification can be implemented, and in order to make the above and other purposes, characteristics and advantages of the utility model more obvious and easy to understand, the following preferred embodiments are described in detail as follows. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1The functional unit block diagram of the front-stage pipeline cleaning device shared by the multiple-machine-table process module of the embodiment of the utility model.

[0023] Figure 2 The functional unit block diagram of the machine table process module part of the front-stage pipeline cleaning device shared by the multiple-machine-table process module of the embodiment of the utility model.

[0024] Marked with the following figures:

[0025] Fore line, machine table process module PM1 (PM2, PM3), plasma generating unit FL_RPS, gas tank GB, gas valve PM1_AV (PM2_AV, PM3_AV), process chamber CHB (CHA), control valve FRPS_AV_B (FRPS_AV_A), butterfly valve TV_B (TV_A), vacuum pump PUMP. Specific implementation

[0026] In order to make the purpose, technical scheme and advantages of the utility model clearer and more apparent, the utility model will be further described in detail below in combination with the drawings and specific implementation.

[0027] The technical scheme in the embodiment of the utility model will be described clearly and completely below in combination with the drawings in the embodiment of the utility model. Obviously, the described embodiment is only a part of the embodiment of the utility model, not all the embodiments. Based on the embodiment in the utility model, all other embodiments obtained by the person skilled in the art without creative labor belong to the protection scope of the utility model.

[0028] In the description of the utility model, it is understood that the orientation or position relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like is the orientation or position relationship described based on the drawings, and is only for the convenience of describing the utility model and simplifying the description, and cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model.

[0029] In addition, the terms "first" and "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include one or more features. In the description of the utility model, the meaning of "multiple" is two or more than two, unless otherwise specifically limited.

[0030] In the utility model, unless another definite provision and limitation, the terms "mount", "link", "connect", "fix" and so on should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integral molding, can be mechanical connection, also can be electrical connection, can be direct connection, also can be indirectly connected through intermediate medium, can be the communication of two elements or the interaction of two elements. For the person skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0031] In the utility model, unless another definite provision and limitation, the terms "mount", "link", "connect", "fix" and so on should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integral molding, can be mechanical connection, also can be electrical connection, can be direct connection, also can be indirectly connected through intermediate medium, can be the communication of two elements or the interaction of two elements. For the person skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0032] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In the present specification, the illustrative description of the above terms should not be understood as necessarily referring to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0033] In some application fields of CVD (chemical vapor deposition) and ALD (atomic layer deposition) processes, the reaction chamber generates a large amount of particles, powder or other non-gaseous by-products, which enter the Fore line assembly through the exhaust ring and are left in the Fore line assembly, especially in the various valve bodies. Excessive residual non-gaseous by-products left in the TV valve (butterfly valve) can cause many problems for the TV valve, and can even cause the TV valve to be stuck and unable to control the pressure. In the prior art, in order to solve the problem of butterfly valve blockage caused by particles in the reaction chamber, a plasma pipeline cleaning device is generally used to periodically clean the Fore line in the process module of the machine, so as to avoid the problem of pipeline and butterfly valve blockage. However, the existing Fore line cleaning generally uses a set of cleaning device specially matched for one process machine, and the cleaning process only needs to be performed periodically, so it will cause the defects of high equipment cost and large space occupation. In order to solve the above problems, the embodiment discloses a multi-machine process module shared Fore line cleaning device.

[0034] Please refer to Figures 1 to 2 In this embodiment, the multi-machine process module shared Fore line cleaning device disclosed by the embodiment includes a Fore line cleaning module and at least two machine process modules PM1 connected with the Fore line cleaning module. In this embodiment, three sets of machine process modules share one set of Fore line cleaning module, and the three sets of machine process modules are PM1, PM2 and PM3. Each of the machine process modules PM1, PM2 and PM3 includes a set of Fore line for conveying process gas, that is Figure 1 corresponding Fore line in the middle.

[0035] Compared with the design of one set of machine process module corresponding to one set of Fore line cleaning module in the prior art, the multi-machine process module shared Fore line cleaning device of the embodiment adopts one set of Fore line cleaning module shared by multiple sets of machine process modules, which not only simplifies the structure of the device and reduces the size of the occupied space, but also facilitates maintenance and reduces the manufacturing and maintenance costs of the equipment.

[0036] Please refer to Figure 1 The Fore line cleaning module includes a gas tank GB, a plasma generating unit FL_RPS in communication with the gas tank GB, and at least two gas valves PM1_AV and PM2_AV connected to the output end of the plasma generating unit FL_RPS.

[0037] The gas tank GB is used to provide a gas source for the plasma generating unit FL_RPS, which is usually a cleaning gas such as nitrogen trifluoride;

[0038] The plasma generating unit FL_RPS is used to ionize the gas source provided by the gas box GB to generate plasma cleaning gas;

[0039] The gas valves PM1_AV and PM2_AV are used to control the plasma generated by the plasma generating unit FL_RPS to be delivered to the machine process modules PM1 and / or PM2, so as to clean the machine process modules PM1 and / or PM2.

[0040] In this embodiment, the machine process modules are provided with three groups, and accordingly, the output pipeline of the plasma generating unit FL_RPS is divided into three branches, and the three branch pipelines respectively provide cleaning gas to one of the machine process modules PM1, PM2 and PM3. Correspondingly, the three branch pipelines are respectively provided with a gas valve PM1_AV, PM2_AV and PM3_AV.

[0041] Of course, it can be understood that in other embodiments, two groups, four groups or more groups of machine process modules can also share a set of front-stage pipeline cleaning module, at this time, only the corresponding number of branch pipelines and corresponding gas valves need to be added to the output pipeline of the plasma generating unit FL_RPS.

[0042] Specifically, the gas box GB and the plasma generating unit FL_RPS are in communication through a first pipeline, and a vacuum gauge for detecting the internal gas pressure of the first pipeline is arranged on the first pipeline. The vacuum gauge is used to monitor the gas pressure in the first pipeline, and if gas leakage occurs, an alarm is triggered immediately.

[0043] Among them, the plasma generating unit FL_RPS and the gas valves PM1_AV, PM2_AV and PM3_AV are in communication through a second pipeline.

[0044] The diameter of the second pipeline is greater than that of the first pipeline. The diameter of the first pipeline is 1 / 4 inch pipe. The first pipeline is used to transport plasma gas, and the small diameter can maintain a moderate internal pressure and prevent gas backflow.

[0045] The diameter of the second pipeline is larger, which is used to transport ionized plasma gas. The larger diameter can reduce the recombination of plasma and increase the cleaning or etching effect of plasma (the cleaning pipeline can be shared during thin film deposition).

[0046] In this embodiment, the gas valves PM1_AV, PM2_AV and PM3_AV are pneumatic valves.

[0047] The plasma generation unit FL_RPS is also connected to a cooling water circuit (not shown in the figure), which is used to cool the plasma generation unit FL_RPS. The plasma generation unit FL_RPS is used to ionize gas to generate plasma, which is used for etching or cleaning the pre-stage piping. Due to the high energy and temperature of plasma, a cooling water circuit is added to reduce the temperature of components such as the sealing rings inside the plasma generation unit FL_RPS, thus extending its service life. The cooling water circuit can be a separate cooling water pipe on the same line as the gas circuit, or it can be a pipe shared with the gas circuit. The cooling water circuit can be broadly understood as a cooling module or unit that can cool the plasma generation unit FL_RPS.

[0048] Please refer to it again. Figure 2 , Figure 2 This is a functional block diagram of one set of machine tool process modules. Taking machine tool process module PM1 as an example, machine tool process module PM1 includes: transmission pipeline ( Figure 2 The solid line portion within the dashed box (referring to the control valve FRPS_AV_B (FRPS_AV_A) and butterfly valve TV_B (TV_A) are connected to the transmission pipeline. The butterfly valve TV_B (TV_A) is located at the rear end of the transmission pipeline, specifically behind the control valve FRPS_AV_B (FRPS_AV_A) according to the flow direction of the cleaning gas. The transmission pipeline downstream of the butterfly valve TV_B (TV_A) is also connected to the process chamber CHB (CHA). The inlet end of the transmission pipeline is connected to the output end of the pre-stage pipeline cleaning module. The butterfly valve TV_B (TV_A) is precisely the location prone to blockage by particulate matter during processing. The pre-stage pipeline cleaning module is mainly used to clean this section of the butterfly valve TV_B (TV_A) to prevent blockage.

[0049] The process chamber CHB (CHA) is also connected to a vacuum pump via piping. The main function of the vacuum pump is to maintain the vacuum environment of the process chamber CHB (CHA). Multiple vacuum gauges are also installed on the transmission pipeline to detect the internal gas pressure in different sections of the pipeline.

[0050] Please refer to it again. Figure 1 and Figure 2 The following is a brief description of the working process of the multi-machine process module shared front-end pipeline cleaning device in this embodiment:

[0051] When it is required to simultaneously perform the front stage management cleaning on one or more of the machine process modules PM1, PM2 and PM3, for example, when only the machine process module PM1 needs to be cleaned, after the gas box GB and the plasma generating unit FL_RPS are started, the gas valve PM1_AV on the second pipeline in communication with the machine process module PM1 is opened, and the other gas valves PM2_AV and PM3_AV remain in the closed state, at this time, only the front stage pipeline of the machine process module PM1 is cleaned.

[0052] If it is required to simultaneously clean the front stage pipelines of the machine process modules PM1 and PM3, the gas valves PM1_AV and PM3_AV are controlled to be opened, at this time, the front stage pipelines of the machine process modules PM1 and PM3 are simultaneously cleaned.

[0053] In the above manner, according to the actual requirement, the corresponding gas valve is selected to be opened or closed, so as to control the machine process module in communication therewith to perform the front stage pipeline cleaning.

[0054] In a second aspect, the embodiments of the utility model provide a thin film deposition equipment, the thin film deposition equipment includes the multi-machine process module shared front stage pipeline cleaning device of any one of the above.

[0055] The multi-machine process module shared front stage pipeline cleaning device and the thin film deposition equipment thereof have the advantages that one front stage pipeline cleaning module is used to simultaneously or step by step provide the cleaning process for the process modules of at least two groups of machines, the use rate of the front stage pipeline cleaning module is improved, the structure is simple, the occupied space of the equipment is reduced, the machine maintenance is facilitated, and the manufacturing cost of the device is reduced.

[0056] The above only further illustrates the technical content of the utility model by the embodiments, so that the reader is easier to understand, but does not represent that the embodiments of the utility model are limited to this, any technical extension or re-creation made according to the utility model is protected by the utility model. The protection scope of the utility model is subject to the patent claims.

Claims

1. A multi-machine process module shared front-end pipeline cleaning device, characterized in that, The application relates to a front-stage pipeline cleaning module and at least two machine process modules connected with the front-stage pipeline cleaning module. The front-stage pipeline cleaning module comprises a gas tank, a plasma generating unit communicated with the gas tank, and at least two gas valves connected with the output end of the plasma generating unit. The gas tank is used for providing a gas source for the plasma generating unit. The plasma generating unit is used for ionizing the gas source provided by the gas tank to generate plasma. The gas valves are used for controlling the plasma generated by the plasma generating unit to be delivered to the machine process modules to clean the front-stage pipelines of the machine process modules. A first pipeline is arranged between the gas tank and the plasma generating unit, and a vacuum gauge for detecting the internal gas pressure of the first pipeline is arranged on the first pipeline.

2. The multi-machine process module shared front-end pipeline cleaning device according to claim 1, characterized in that, A second pipeline is arranged between the plasma generating unit and the machine process modules.

3. The multi-machine process module shared front-end pipeline cleaning device according to claim 2, characterized in that, The diameter of the second pipeline is larger than that of the first pipeline.

4. The multi-machine process module shared front-end pipeline cleaning device according to claim 3, characterized in that, The diameter of the first pipeline is 1 / 4 inch.

5. The common precleaner for multi-chamber process module according to claim 4, wherein, The gas valves are pneumatic valves.

6. The apparatus of claim 1, wherein the plurality of process modules are arranged in a plurality of process tool groups, and the plurality of process tool groups are arranged in a plurality of process tool rows. The plasma generating unit is further connected with a cooling water circuit which is used for cooling the plasma generating unit.

7. The common utility line purging apparatus of multi-chamber process module according to any one of claims 1 to 6, wherein, The machine process module comprises a transmission pipeline, a control valve and a butterfly valve connected with the transmission pipeline, the butterfly valve is close to the rear end of the transmission pipeline, the transmission pipeline behind the butterfly valve is further connected with a process chamber, and the gas inlet end of the transmission pipeline is connected with the output end of the front-stage pipeline cleaning module.

8. The common utility line purging apparatus for multi-chamber processing modules of claim 7, wherein, The process chamber is further connected with a vacuum pump through a pipeline.

9. The multi-machine process module shared front-end pipeline cleaning device according to claim 8, characterized in that, The thin film deposition equipment comprises the multi-machine process module shared front-stage pipeline cleaning device as claimed in any one of claims 1 to 9.

10. A thin film deposition apparatus, characterized by, ​

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