Vacuum coating equipment with continuous feeding function

Abstract

The utility model provides continuous feeding vacuum coating equipment which comprises a coating chamber, a sample library chamber and a feeding and discharging device, and the coating chamber is hermetically communicated with the sample library chamber; a plurality of samples are stored in the sample library chamber, and the loading and unloading device is used for transferring the samples in the sample library chamber into the coating chamber for coating, and transferring the coated samples into the sample library chamber for storage. According to the utility model, a plurality of samples are stored in the sample library chamber, the to-be-coated samples in the sample library chamber are transferred to the coating chamber for coating by using the loading and unloading device, the coated samples are transferred to the sample library chamber for temporary storage, and then the to-be-coated samples in the sample library chamber are continuously transferred to the coating chamber for coating. Continuous feeding of the vacuum coating equipment can be achieved, the box door does not need to be opened in the feeding and discharging process, the vacuum environment in the coating cavity cannot be damaged, the continuous coating efficiency can be greatly improved, and energy consumption needed by multiple times of vacuumizing is reduced.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating technology field especially relates to a continuous feeding's vacuum coating equipment. BACKGROUND

[0002] Vacuum coating technology is the method that evaporates or sputters metal, alloy or compound in vacuum, makes it solidify and deposit on the object (called substrate, wafer or base) that is coated and is called vacuum coating.

[0003] The existing vacuum coating equipment does not have the function of continuous feeding, that is, after each coating piece completes a coating process, the coating chamber needs to be depressurized, and then the box door is opened to transfer the coating piece to the next process station. When the box door is opened for feeding each time, the vacuum environment of the coating chamber is destroyed, and a lot of time is spent on vacuumizing the coating chamber after the next coating piece is put into the coating chamber. On the one hand, it reduces the efficiency of continuous vacuum coating, and on the other hand, it causes a lot of energy consumption due to multiple vacuumization of the coating chamber. SUMMARY

[0004] The utility model provides a continuous feeding's vacuum coating equipment, solved the vacuum coating equipment in the prior art due to not having the function of continuous feeding, the vacuum environment of coating chamber is destroyed when opening the box door for feeding each time, lead to continuous vacuum coating efficiency is low, the energy consumption of multiple vacuumization is big and so on problem.

[0005] The technical scheme of the utility model is as follows:

[0006] The utility model provides a continuous feeding's vacuum coating equipment, including coating chamber, sample library chamber and loading and unloading device, the coating chamber is sealed with sample library chamber intercommunication, the sample library chamber is stored with a plurality of samples, the loading and unloading device is used for moving the sample in sample library chamber into coating chamber and carries out coating, and the sample after coating is moved into sample library chamber and is stored.

[0007] The utility model stores multiple samples in the sample library chamber, and uses the loading and unloading device to transfer the samples to be coated in the sample library chamber to the coating chamber for coating, and then transfers the coated samples to the sample library chamber for temporary storage, and then continues to transfer the samples to be coated in the sample library chamber to the coating chamber for coating. The continuous feeding of the vacuum coating equipment can be realized, and the box door does not need to be opened during the loading and unloading process, which will not destroy the vacuum environment inside the coating chamber, which can greatly improve the continuous coating efficiency and reduce the energy consumption required for multiple vacuumization.

[0008] Specifically, the sample library chamber is provided with a sample rack, and the sample rack is provided with multiple layers of plates, the plates are used to place sample trays, and the sample trays contain samples.

[0009] Specifically, the feeding and discharging device comprises a lifting mechanism, a sample moving mechanism and a grabbing mechanism. The lifting mechanism is connected with the sample rack and used to drive the sample rack to lift. The sample moving mechanism is located on one side of the sample rack and used to move in or out of the sample tray on the target layer plate of the sample rack. The grabbing mechanism is located in the coating chamber and used to grab the sample tray moved out of the target layer plate of the sample rack, move the sample tray to a designated position in the coating chamber to coat the sample, and put the sample tray back to the original position after coating. Through cooperation of the lifting mechanism, the sample moving mechanism and the grabbing mechanism, the sample tray on the target layer plate of the sample rack can be transferred to the coating chamber to coat the sample, and the sample tray can be transferred to the sample rack in the sample storage chamber after coating, so that the full-automatic feeding and discharging process of the vacuum coating equipment is realized.

[0010] Further, the lifting mechanism comprises a driving component and a telescopic rod. The driving component is used to drive the telescopic rod to extend or retract. The top end of the telescopic rod is connected with the bottom end of the sample rack. A plurality of first guide shafts are installed between the sample rack and the driving component. A first linear bearing is slidably sleeved on the first guide shaft, and the first linear bearing is connected with the telescopic rod. The driving component drives the telescopic rod to extend or retract, and the first guide shaft and the first linear bearing drive the sample rack to lift, so that the height of the layer plate corresponding to the sample to be coated corresponds to the inlet height of the coating chamber, and the sample moving mechanism cooperates with the grabbing mechanism to transfer the sample tray on the layer plate to the coating chamber.

[0011] Further, a plurality of vertical second guide shafts are arranged in the sample storage chamber. A second linear bearing is slidably sleeved on the second guide shaft, and the second linear bearing is fixedly connected with the sample rack. The second guide shaft and the second linear bearing are arranged to constrain and guide the lifting path of the sample rack.

[0012] Specifically, the sample moving mechanism comprises a sample moving rod and a linear module. The linear module is used to drive the sample moving rod to displace in the horizontal direction towards or away from the sample tray. The end of the sample moving rod is detachably connected with the sample tray through a connecting assembly. The linear module drives the sample moving rod to displace, so that the sample tray on the target layer plate of the sample rack can be pushed out or pulled back.

[0013] Further, the connecting assembly comprises a non-circular connecting block and a connecting seat, the connecting block is fixed at the end of the sample moving rod, the connecting seat is provided with a limiting hole for the connecting block to pass through, the internal profile of the limiting hole is matched with the external profile of the connecting block, the end of each layer of the sample holder away from the connecting block is provided with a stop block; the first end of the sample moving rod is provided with a rotary motor, the rotary motor is used to drive the sample moving rod to rotate along the axial direction, the rotary motor is fixedly installed on the linear module; when the sample to be coated on the sample holder needs to be transferred to the coating chamber, the rotary motor can be driven to rotate the sample moving rod by a certain angle, so that the connecting block at the end of the sample moving rod cannot pass through the limiting hole on the connecting seat, then the rotary motor and the sample moving rod are driven to move towards the sample tray by the linear module, and the sample tray is pushed out of the sample holder by the connecting block at the end of the sample moving rod; when the sample tray after coating needs to be transferred to the sample holder, the rotary motor and the sample moving rod are driven to move towards the sample tray by the linear module, until the connecting block at the end of the sample moving rod passes through the limiting hole on the connecting seat, then the sample moving rod is driven to rotate by a certain angle by the rotary motor, so that the connecting block cannot pass through the limiting hole, and the rotary motor and the sample moving rod can be driven to move away from the coating chamber by the linear module, so that the sample tray after coating is pulled back to the sample holder.

[0014] Specifically, the grabbing mechanism comprises a lifting assembly and a grabbing head, the telescopic shaft of the lifting assembly is connected with the grabbing head at the end, and the lifting assembly is used to drive the grabbing head to lift to grab the sample tray carrying the sample.

[0015] Further, the grabbing head comprises a first clamping plate and a second clamping plate, the first clamping plate is fixedly installed at the end of the lifting assembly, and the second clamping plate is connected with the first clamping plate through a connecting column; the top surface of the sample tray is provided with a supporting plate, the supporting plate and the sample tray are connected through a plurality of supporting columns, the distance between the supporting plate and the sample tray is greater than the thickness of the second clamping plate, and the distance between the first clamping plate and the second clamping plate is matched with the thickness of the supporting plate; a missing slot is formed on the side of the supporting plate away from the sample moving mechanism and corresponding to the position of the connecting column, the missing slot is formed along the displacement direction of the sample tray, the inner diameter of the missing slot is matched with the outer diameter of the connecting column, and the opening end of the missing slot is in a horn shape. When the sample moving rod pushes out the sample tray on the sample holder, with the displacement of the sample tray, the connecting column will gradually be clamped into the missing slot outside the supporting plate until the sample tray completely separates from the sample holder and enters the coating chamber, and the first clamping plate and the second clamping plate at the upper and lower ends of the connecting column will be clamped on the upper and lower surfaces of the supporting plate to limit and constrain the supporting plate; the opening end of the missing slot is in a horn shape to facilitate the guiding of the connecting column into the missing slot.

[0016] Furthermore, tapered positioning holes are provided on both sides of the end of the notch, and an installation groove is provided on the bottom surface of the second clamping plate corresponding to the two positioning holes. A positioning block is vertically slidably embedded in the installation groove, and a compression spring is provided between the positioning block and the installation groove. The bottom outer side of the positioning block is provided with a rounded corner structure. By providing positioning holes on both sides of the end of the notch and providing two corresponding retractable positioning blocks on the bottom surface of the second clamping plate, it is convenient for the positioning blocks to be inserted into the positioning holes, which can prevent the sample tray from shifting on the gripping head. By designing the positioning blocks as tapered and providing a rounded corner structure on the bottom outer side of the positioning blocks, it is convenient for the positioning blocks to be inserted into / out of the positioning holes. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of a continuous feeding vacuum coating equipment according to the present invention;

[0019] Figure 2 This is a schematic diagram of the connection structure between the lifting mechanism, the sample transfer mechanism, and the sample storage chamber in an embodiment of this utility model;

[0020] Figure 3 This is a schematic diagram of the sample holder structure in an embodiment of the present invention;

[0021] Figure 4 This is a schematic diagram of the connection structure between the sample transfer rod and the sample tray in an embodiment of this utility model;

[0022] Figure 5 This is a schematic diagram of the installation structure of the sample tray and pallet in an embodiment of this utility model;

[0023] Figure 6 This is a schematic diagram of the gripping head in an embodiment of the present invention;

[0024] In the figure: 1, plating chamber; 2, sample library chamber; 3, sample holder; 4, layer plate; 5, sample tray; 6, lifting mechanism; 7, sample moving mechanism; 8, grabbing mechanism; 9, driving part; 10, telescopic rod; 11, first guide shaft; 12, first linear bearing; 13, second guide shaft; 14, second linear bearing; 15, sample moving rod; 16, linear module; 17, connecting block; 18, connecting seat; 19, limiting hole; 20, stop block; 21, rotary motor; 22, lifting assembly; 23, telescopic shaft; 24, first clamping plate; 25, second clamping plate; 26, connecting column; 27, supporting plate; 28, supporting column; 29, missing slot; 30, positioning hole; 31, positioning block. DETAILED DESCRIPTION

[0025] The technical scheme of the utility model will be described clearly and completely below in conjunction with the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0026] Referring to Figures 1 to 6 , the utility model embodiment provides a kind of continuous vacuum plating equipment of feeding, including plating chamber 1, sample library chamber 2 and feeding and discharging device, plating chamber 1 is sealed with sample library chamber 2 communication;Several samples are stored in the sample library chamber 2, and the feeding and discharging device is used to move the sample in sample library chamber 2 into plating chamber 1 and is plated, and the sample after plating is moved into sample library chamber 2 and is stored.

[0027] The utility model stores multiple samples in sample library chamber 2, and uses feeding and discharging device to transfer the sample to be plated in sample library chamber 2 to plating chamber 1 and is plated, and the sample after plating is transferred to sample library chamber 2 and is temporarily stored, then continue to transfer the sample to be plated in sample library chamber 2 to plating chamber 1 and is plated, which can realize the continuous feeding of vacuum plating equipment, and the box door does not need to be opened during feeding and discharging, without damaging the vacuum environment inside plating chamber 1, which can greatly improve the continuous plating efficiency, and reduce the energy consumption required by multiple vacuumization.

[0028] Specifically, as Figure 2 , 3 shown, sample library chamber 2 is provided with sample holder 3, and sample holder 3 is provided with multiple layers of layer plates 4 (6 layers in the embodiment, and the number of layers can be adjusted flexibly according to actual conditions), and layer plates 4 are used to rest sample trays 5, and sample trays 5 contain samples.

[0029] Specifically, as Figure 1 , 2As shown, the feeding and discharging device comprises a lifting mechanism 6, a sample moving mechanism 7 and a grabbing mechanism 8. The lifting mechanism 6 is connected with the sample rack 3 and used to drive the sample rack 3 to lift. The sample moving mechanism 7 is located at one side of the sample rack 3 and used to move in or out of the sample tray 5 on the target layer plate 4 of the sample rack 3. The grabbing mechanism 8 is located in the coating chamber 1 and used to grab the sample tray 5 moved out of the target layer plate 4 of the sample rack 3, move the sample tray 5 to a designated position in the coating chamber 1 to coat the sample, and put the sample tray 5 back to the original position after coating. Through the cooperation of the lifting mechanism 6, the sample moving mechanism 7 and the grabbing mechanism 8, the sample tray 5 on the target layer plate 4 of the sample rack 3 can be transferred to the coating chamber 1 to coat the sample, and the sample tray 5 can be transferred to the sample rack 3 in the sample storage chamber 2 after coating, so as to realize the full-automatic feeding and discharging process of the vacuum coating equipment.

[0030] Further, as shown in Figure 2 The lifting mechanism 6 comprises a driving part 9 and a telescopic rod 10. The driving part 9 is used to drive the telescopic rod 10 to extend or retract. The top end of the telescopic rod 10 is connected with the bottom end of the sample rack 3. A plurality of first guide shafts 11 are installed between the sample rack 3 and the driving part 9. A first linear bearing 12 is slidably sleeved on the first guide shaft 11, and the first linear bearing 12 is connected with the telescopic rod 10. The driving part 9 drives the telescopic rod 10 to extend or retract, and the first guide shaft 11 and the first linear bearing 12 drive the sample rack 3 to lift, so that the height of the layer plate 4 corresponding to the sample to be coated corresponds to the height of the inlet of the coating chamber 1, which facilitates the cooperation of the sample moving mechanism 7 and the grabbing mechanism 8 to transfer the sample tray 5 on the layer plate 4 to the coating chamber 1.

[0031] In the implementation process, the lifting mechanism 6 is located below the sample storage chamber 2. A linear bearing is installed at the position where the top end of the telescopic rod 10 penetrates the bottom surface of the sample storage chamber 2. A bellows is sleeved outside the telescopic rod 10. The top end of the bellows is sealingly connected with the linear bearing, and the bottom end of the bellows is sealingly connected with the driving part 9. The purpose of this design is to avoid the influence of pressure relief on the vacuum environment at the position where the bottom surface of the sample storage chamber 2 penetrates the telescopic rod 10 without affecting the extension and retraction of the telescopic rod 10.

[0032] In the implementation process, the driving part 9 can adopt a hydraulic oil cylinder, an air cylinder or a linear motor.

[0033] Further, as shown in Figure 2 , 3 The sample storage chamber 2 is provided with four vertical second guide shafts 13. A second linear bearing 14 is slidably sleeved on the second guide shaft 13, and the second linear bearing 14 is fixedly connected with the sample rack 3. The second guide shaft 13 and the second linear bearing 14 are provided to constrain and guide the lifting path of the sample rack 3.

[0034] Specifically, as shown in Figure 2 The sample moving mechanism 7 includes a sample moving rod 15 and a linear module 16 for driving the sample moving rod 15 to move in the horizontal direction towards or away from the sample tray 5, and the end of the sample moving rod 15 is detachably connected to the sample tray 5 through a connecting assembly. By driving the sample moving rod 15 to move through the linear module 16, the sample tray 5 on the target layer plate 4 on the sample holder 3 can be ejected or pulled back.

[0035] In the implementation process, the linear module 16 can use a linear motor, a hydraulic cylinder or a pneumatic cylinder as a driving source, and a worm gear transmission assembly is used to drive the sample moving rod 15 to move.

[0036] Further, as shown in Figure 4 The connecting assembly includes a non-circular connecting block 17 and a connecting seat 18. The connecting block 17 is fixed at the end of the sample moving rod 15, and the connecting seat 18 is provided with a limiting hole 19 through which the connecting block 17 passes. The internal profile of the limiting hole 19 matches the external profile of the connecting block 17. A rotary motor 21 is installed at the first end of the sample moving rod 15, and the rotary motor 21 is used to drive the sample moving rod 15 to rotate along the axial direction. The rotary motor 21 is fixedly installed on the linear module 16. When the sample to be coated on the sample holder 3 needs to be transferred to the coating chamber 1, the rotary motor 21 can be used to drive the sample moving rod 15 to rotate by a certain angle, so that the connecting block 17 at the end of the sample moving rod 15 cannot pass through the limiting hole 19 on the connecting seat 18. Then, the linear module 16 is used to drive the rotary motor 21 and the sample moving rod 15 to move towards the sample tray 5, and the sample tray 5 is ejected from the sample holder 3 through the connecting block 17 at the end of the sample moving rod 15. When the coated sample tray 5 needs to be transferred to the sample holder 3, the linear module 16 is used to drive the rotary motor 21 and the sample moving rod 15 to move towards the sample tray 5 until the connecting block 17 at the end of the sample moving rod 15 passes through the limiting hole 19 on the connecting seat 18. Then, the rotary motor 21 is used to drive the sample moving rod 15 to rotate by a certain angle, so that the connecting block 17 cannot pass through the limiting hole 19. Then, the linear module 16 is used to drive the rotary motor 21 and the sample moving rod 15 to move away from the coating chamber 1, and the coated sample tray 5 is pulled back to the sample holder 3.

[0037] In the implementation process, as shown in Figure 3As shown, the sample rack 3 is provided with a stop block 20 at the end of each layer of the layer plate 4 away from the connecting block 17, and the side of the sample library chamber 2 is provided with a box door, which facilitates opening the box door to take out the sample tray 5 loaded with the plated sample, and puts the sample tray 5 loaded with the sample to be plated on the sample rack 3 in the sample library chamber 2. When the sample tray 5 is put in, it is necessary to ensure that the connecting seat 18 on the sample tray 5 is located at the end close to the sample moving rod 15. In order to prevent the connecting seat 18 from being located at the end away from the sample moving rod 15 after the sample tray 5 is put in, the stop block 20 is arranged at the end of each layer of the layer plate 4 away from the connecting block 17, which can prevent the sample tray 5 from being put in reversely, resulting in that the connecting block 17 at the end of the sample moving rod 15 cannot cooperate with the connecting seat 18 on the sample tray 5.

[0038] In the specific implementation process, the sample moving rod 15 is provided with a sliding sleeve at the position where it penetrates the side wall of the sample library chamber 2, the sliding sleeve allows the sample moving rod 15 to slide and rotate, and the sample moving rod 15 is externally sleeved with a bellows, one end of the bellows is sealingly connected with the sliding sleeve, and the other end of the bellows is sealingly connected with the rotary motor 21. The bellows is arranged to avoid pressure relief at the position where the sample library chamber 2 penetrates the sample moving rod 15, without affecting the displacement of the sample moving rod 15.

[0039] In the specific implementation process, the top surface of each layer of the layer plate 4 is provided with a sliding groove, which is used to constrain and guide the displacement direction of the sample tray 5.

[0040] Specifically, the grabbing mechanism 8 includes a lifting assembly 22 and a grabbing head, the end of the telescopic shaft 23 of the lifting assembly 22 is connected with the grabbing head, and the lifting assembly 22 is used to drive the grabbing head to lift to grab the sample tray 5 loaded with the sample.

[0041] In the specific implementation process, the lifting assembly 22 can adopt a hydraulic oil cylinder, an air cylinder or a linear motor.

[0042] Further, as Figure 5 、 6As shown, the grabbing head comprises a first clamping plate 24 and a second clamping plate 25, the first clamping plate 24 is fixedly installed at the end of the lifting assembly 22, and the second clamping plate 25 is connected with the first clamping plate 24 through a connecting column 26; the top surface of the sample tray 5 is provided with a supporting plate 27, the supporting plate 27 and the sample tray 5 are connected through a plurality of supporting columns 28, the distance between the supporting plate 27 and the sample tray 5 is greater than the thickness of the second clamping plate 25 (convenient for the first clamping plate 24 to be clamped into the gap between the supporting plate 27 and the sample tray 5), and the distance between the first clamping plate 24 and the second clamping plate 25 is matched with the thickness of the supporting plate 27; the side of the supporting plate 27 away from the sample moving mechanism 7 is provided with a missing groove 29 corresponding to the position of the connecting column 26, the missing groove 29 is provided along the displacement direction of the sample tray 5, the inner diameter of the missing groove 29 is matched with the outer diameter of the connecting column 26, and the opening end of the missing groove 29 is trumpet-shaped. When the sample moving rod 15 pushes out the sample tray 5 on the sample rack 3, with the displacement of the sample tray 5, the connecting column 26 will gradually be clamped into the missing groove 29 outside the supporting plate 27 until the sample tray 5 is completely separated from the sample rack 3 and enters the coating chamber 1, and the first clamping plate 24 and the second clamping plate 25 at the upper and lower ends of the connecting column 26 will be clamped on the upper and lower surfaces of the supporting plate 27 to limit and constrain the supporting plate 27; the opening end of the missing groove 29 is trumpet-shaped to facilitate the guiding of the connecting column 26 into the missing groove 29.

[0043] Further, as shown in Figure 5 、 6 the ends of the missing groove 29 are provided with tapered positioning holes 30, the bottom surface of the second clamping plate 25 is provided with mounting grooves corresponding to the two positioning holes 30, the mounting grooves are vertically slidably embedded with positioning blocks 31 (the positioning blocks 31 can be completely retracted into the mounting grooves), compression springs (not shown in the figure) are arranged between the positioning blocks 31 and the mounting grooves, and the bottom outer side of the positioning blocks 31 is provided with a rounded corner structure; by arranging the positioning holes 30 at the ends of the missing groove 29 and arranging the two corresponding retractable positioning blocks 31 on the bottom surface of the second clamping plate 25, the positioning blocks 31 can be clamped into the positioning holes 30, which can avoid displacement of the sample tray 5 on the grabbing head; by designing the positioning blocks 31 to be tapered and arranging the rounded corner structure on the bottom outer side of the positioning blocks 31, the positioning blocks 31 can be clamped in / out of the positioning holes 30.

[0044] The working process of the vacuum coating equipment of the embodiment is as follows:

[0045] Firstly, open the door of the sample library chamber 2, load the six sample trays 5 loaded with samples to be coated on the six layers of the sample rack 3 in turn, close the door, and perform vacuumization on the sample library chamber 2 and the coating chamber 1;

[0046] After the vacuum is completed, the control cabinet automatically controls the lifting mechanism 6 to drive the sample holder 3 to rise to a certain height, so that the height of the sample tray 5 on the first layer of the layer plate 4 is aligned with the height of the sample moving rod 15, and then the rotating motor 21 is controlled to drive the sample moving rod 15 to rotate 90° (at this time, the connecting block 17 at the end of the sample moving rod 15 cannot pass through the limiting hole 19 on the connecting seat 18), the linear module 16 is controlled to drive the sample moving rod 15 to displace towards the direction close to the sample tray 5, and when the connecting block 17 at the end of the sample moving rod 15 abuts against the connecting seat 18 on the sample tray 5, the sample moving rod 15 is continuously driven to displace to eject the sample tray 5 from the sample holder 3, and with the displacement of the sample tray 5, the connecting column 26 in the coating chamber 1 will be clamped into the missing slot 29 outside the supporting plate 27, and until the positioning hole 30 on the bottom surface of the second clamping plate 25 is clamped into the positioning hole 30 on both sides of the missing slot 29, that is, the connection between the grabbing head and the sample tray 5 is completed, and at this time, the sample tray 5 has been completely ejected from the sample holder 3 and is in the coating chamber 1;

[0047] The linear module 16 is controlled to drive the sample moving rod 15 to retract into the sample library chamber 2, and the rotating motor 21 is controlled to drive the sample moving rod 15 to reversely rotate 90° (at this time, the connecting block 17 at the end of the sample moving rod 15 can pass through the limiting hole 19 on the connecting seat 18); then the lifting assembly 22 is controlled to drive the grabbing head and the sample tray 5 to descend to a designated coating height position, and the sample on the sample tray 5 is coated by the coating machine in the coating chamber 1;

[0048] After the coating is completed, the lifting assembly 22 is controlled to drive the grabbing head to rise to the initial position; then the linear module 16 is controlled to drive the sample moving rod 15 to extend into the coating chamber 1, and after the connecting block 17 at the end of the sample moving rod 15 passes through the limiting hole 19 on the connecting seat 18 on the sample tray 5, the rotating motor 21 is controlled to rotate 90° (at this time, the connecting block 17 at the end of the sample moving rod 15 cannot pass through the limiting hole 19 on the connecting seat 18), and then the linear module 16 is controlled to drive the sample moving rod 15 to retract into the sample library chamber 2, and the connecting block 17 at the end of the sample moving rod 15 will pull the sample tray 5 back to the first layer of the layer plate 4 of the sample holder 3; the rotating motor 21 is controlled to drive the sample moving rod 15 to reversely rotate 90° (at this time, the connecting block 17 at the end of the sample moving rod 15 can pass through the limiting hole 19 on the connecting seat 18), and finally the linear module 16 is controlled to drive the sample moving rod 15 to continue to retract, so that the connecting block 17 at the end of the sample moving rod 15 exits the limiting hole 19 on the connecting seat 18, and thus the coating process of the sample on the first layer of the layer plate 4 of the sample holder 3 is completed;

[0049] Then, the lifting mechanism 6 is controlled to drive the sample holder 3 to rise to a certain height, so that the height of the sample tray 5 on the second layer of the layer plate 4 is aligned with the height of the sample moving rod 15, and the above steps are continued to be executed to complete the coating of the sample on the second layer of the layer plate 4 of the sample holder 3;

[0050] By analogy, after the coating process of the sample on the 36 layers of the sample holder 36 is completed, the coating chamber 1 and the sample storage chamber 2 are depressurized, the box door of the sample storage chamber 2 is opened, all the sample trays 5 loaded with the coated samples on the sample holder 3 are taken out, and the sample trays 5 loaded with the samples to be coated are sequentially loaded into the sample holder 3, and the coating of the next group of samples is continued.

[0051] The above merely describes the preferred embodiments of the present application and is not intended to limit the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A continuous feeding vacuum coating apparatus, characterized in that, The coating chamber (1), the sample library chamber (2) and the feeding and discharging device are sealed in communication, the sample library chamber (2) stores a plurality of samples, and the feeding and discharging device is used for moving the samples in the sample library chamber (2) into the coating chamber (1) for coating and moving the coated samples into the sample library chamber (2) for storage.

2. The continuous loading vacuum coating apparatus according to claim 1, wherein The sample library chamber (2) is provided with a sample rack (3), and a plurality of layers of layer plates (4) are arranged on the sample rack (3) and used for placing sample trays (5).

3. The continuous loading vacuum coating apparatus according to claim 2, wherein The feeding and discharging device comprises a lifting mechanism (6), a sample moving mechanism (7) and a grabbing mechanism (8), the lifting mechanism (6) is connected with the sample rack (3) and used for driving the sample rack (3) to lift, the sample moving mechanism (7) is arranged on one side of the sample rack (3) and used for moving in or out of the sample tray (5) on the target layer plate (4) of the sample rack (3), and the grabbing mechanism (8) is arranged in the coating chamber (1) and used for grabbing the sample tray (5) moved out of the target layer plate (4) of the sample rack (3), moving the sample tray (5) to a designated position in the coating chamber (1) to coat the sample, and placing the sample tray (5) back to the original position after coating.

4. The continuous loading vacuum coating apparatus according to claim 3, wherein The lifting mechanism (6) comprises a driving component (9) and a telescopic rod (10), the driving component (9) is used for driving the telescopic rod (10) to extend or retract, the top end of the telescopic rod (10) is connected with the bottom end of the sample rack (3), a plurality of first guide shafts (11) are arranged between the sample rack (3) and the driving component (9), a first linear bearing (12) is slidably sleeved on the first guide shaft (11), and the first linear bearing (12) is connected with the telescopic rod (10).

5. The continuous loading vacuum coating apparatus according to claim 4, wherein A plurality of vertical second guide shafts (13) are arranged in the sample library chamber (2), a second linear bearing (14) is slidably sleeved on the second guide shaft (13), and the second linear bearing (14) is fixedly connected with the sample rack (3).

6. The continuous loading vacuum coating apparatus of claim 3, wherein The sample moving mechanism (7) comprises a sample moving rod (15) and a linear module (16), the linear module (16) is used for driving the sample moving rod (15) to move in the horizontal direction towards or away from the sample tray (5), and the tail end of the sample moving rod (15) is detachably connected with the sample tray (5) through a connecting assembly.

7. The continuous loading vacuum coating apparatus of claim 6, wherein The connecting assembly comprises a non-circular connecting block (17) and a connecting seat (18), the connecting block (17) is fixed at the tail end of the sample moving rod (15), the connecting seat (18) is provided with a limiting hole (19) through which the connecting block (17) passes, the internal contour of the limiting hole (19) is matched with the external contour of the connecting block (17), and a stop block (20) is arranged on each layer plate (4) of the sample rack (3) away from the end of the connecting block (17), a rotary motor (21) is arranged at the head end of the sample moving rod (15), the rotary motor (21) is used for driving the sample moving rod (15) to rotate in the axial direction, and the rotary motor (21) is fixedly arranged on the linear module (16).

8. The continuous loading vacuum coating apparatus of claim 3, wherein The grabbing mechanism (8) comprises a lifting assembly (22) and a grabbing head, the telescopic shaft (23) of the lifting assembly (22) is connected with the grabbing head at the end, and the lifting assembly (22) is used for driving the grabbing head to lift to grab the sample tray (5) loaded with samples.

9. The continuous loading vacuum coating apparatus of claim 8, wherein, The grabbing head comprises a first clamping plate (24) and a second clamping plate (25), the first clamping plate (24) is fixedly installed at the end of the lifting assembly (22), and the second clamping plate (25) is connected with the first clamping plate (24) through a connecting column (26); the top surface of the sample tray (5) is provided with a supporting plate (27), the supporting plate (27) and the sample tray (5) are connected through a plurality of supporting columns (28), the distance between the supporting plate (27) and the sample tray (5) is greater than the thickness of the second clamping plate (25), the distance between the first clamping plate (24) and the second clamping plate (25) is matched with the thickness of the supporting plate (27); the side of the supporting plate (27) away from the sample moving mechanism (7) is provided with a missing slot (29) corresponding to the position of the connecting column (26), the missing slot (29) is opened along the displacement direction of the sample tray (5), the inner diameter of the missing slot (29) is matched with the outer diameter of the connecting column (26), and the opening end of the missing slot (29) is trumpet-shaped.

10. The continuous loading vacuum coating apparatus of claim 9, wherein, The two sides of the end of the missing slot (29) are provided with tapered positioning holes (30), the bottom surface of the second clamping plate (25) is provided with a mounting groove corresponding to the positions of the two positioning holes (30), a positioning block (31) is vertically and slidably embedded in the mounting groove, a compression spring is arranged between the positioning block (31) and the mounting groove, and the bottom outer side of the positioning block (31) is provided with a rounded corner structure.

Images