Single crystal furnace

Abstract

The utility model discloses a single crystal furnace which comprises a furnace body, a furnace cover, an auxiliary chamber arranged above the furnace cover and a spin valve device arranged between the furnace cover and the auxiliary chamber, the furnace cover is provided with a first through hole for a silicon single crystal rod to pass through, the spin valve device is arranged at the first through hole, the furnace cover is further provided with a second through hole, an observation window is arranged at the second through hole, and the observation window is arranged on the furnace cover. The observation window comprises an observation window main body and two glass assemblies, the observation window main body is mounted at one end of the furnace cover and forms a single window communicated with the second through hole, two mutually independent viewports are formed at one end, far away from the furnace cover, of the observation window main body, the two viewports are communicated with the window, and each glass assembly covers each viewport in a sealing manner; and the two viewports are symmetrically arranged at intervals along the length direction of the window. The observation window of the single crystal furnace adopts a double-viewport and window structure, so that the pressure of the glass assembly is reduced, the problems of damage to the glass assembly and the like are avoided, and the requirement of drawing a large-diameter single crystal silicon rod can be met.

Description

TECHNICAL FIELD

[0001] The present application relates to a single crystal furnace, in particular to a single crystal furnace for drawing a large-diameter single crystal silicon rod. BACKGROUND

[0002] At present, the existing single crystal furnace can draw a single crystal silicon rod with a diameter of 14 inches at most, and cannot meet the demand of drawing a single crystal silicon rod with a larger diameter, such as a single crystal silicon rod with a diameter of 16 inches or more. If a large-diameter silicon rod is drawn, the size of the furnace cover observation window, the sub-chamber and other devices of the single crystal furnace need to be increased, for example, the furnace cover observation window needs to cover the edge of the single crystal silicon rod to facilitate the observation of the diameter of the single crystal silicon rod. However, after the size of the observation window of the furnace cover of the existing single crystal furnace is increased, there are problems such as easy damage of the window glass, poor cooling effect of the observation window, low safety, stability and reliability, and the like, and it cannot meet the demand of drawing a large-diameter single crystal silicon rod. CONTENT OF THE UTILITY MODEL

[0003] The purpose of the present application is to provide a single crystal furnace for drawing a large-diameter single crystal silicon rod, which has high safety, stability and reliability, and can meet the demand of drawing a large-diameter single crystal silicon rod.

[0004] In order to solve at least one of the above technical problems, the technical scheme of the present application is as follows:

[0005] According to the single crystal furnace provided by the embodiment of the present application, the furnace body, the furnace cover, the sub-chamber arranged above the furnace cover, and the rotary valve device arranged between the furnace cover and the sub-chamber are provided, a first through hole for the single crystal silicon rod to pass through is arranged on the furnace cover, the rotary valve device is installed at the first through hole, a second through hole is further arranged on the furnace cover, an observation window is arranged at the second through hole, the observation window comprises an observation window main body and two glass assemblies, one end of the observation window main body is installed on the furnace cover and forms a single window which communicates with the second through hole, the other end of the observation window main body away from the furnace cover forms two viewports which are independent of each other, the two viewports both communicate with the window, and each glass assembly covers each viewport respectively, the two viewports are arranged along the length direction of the window and are spaced and symmetrical.

[0006] In a possible implementation of the above embodiment, the observation window main body comprises a connecting portion, a glass mounting flange and a cover plate which are connected in sequence from the side close to the furnace cover to the side away from the furnace cover, a single window penetrating through the thickness direction of the connecting portion is arranged on the connecting portion, two first viewports penetrating through the thickness direction of the glass mounting flange are arranged on the glass mounting flange, two second viewports penetrating through the thickness direction of the cover plate are arranged on the cover plate, the two first viewports correspond to the two second viewports respectively, and the first viewport and the second viewport corresponding to each other together form a viewport in the thickness direction.

[0007] In a possible implementation of the above embodiment, each glass assembly comprises an inner layer glass and an outer layer glass which are arranged in parallel and spaced apart from each other.

[0008] In a possible implementation of the above embodiment, the glass mounting flange is provided with a first groove around each of the first viewports, respectively, for mounting the inner layer of glass; and the cover plate is provided with a second groove around each of the second viewports, respectively, for mounting the outer layer of glass.

[0009] In a possible implementation of the above embodiment, the glass mounting flange is provided with a first cooling channel surrounding the two first viewports, and a first inlet and a first outlet in communication with the first cooling channel.

[0010] In a possible implementation of the above embodiment, the glass mounting flange is further provided with a pressurizing port in communication with the first cooling channel; and the pressurizing port is located between the two first viewports.

[0011] In a possible implementation of the above embodiment, the first inlet and the first outlet are located at the same end of the glass mounting flange in the length direction, and the first cooling channel is provided with a first partition plate extending along the length direction of the glass mounting flange and located between the two first viewports.

[0012] In a possible implementation of the above embodiment, the connecting portion is provided with a second cooling channel surrounding the window, and a second inlet and a second outlet in communication with the second cooling channel; the second inlet is located at one end of the connecting portion in the length direction, and the second outlet is located at the other end of the connecting portion in the length direction.

[0013] In a possible implementation of the above embodiment, the connecting portion is provided with a plug-in portion at one end close to the furnace cover for cooperating with the second through hole on the furnace cover.

[0014] In a possible implementation of the above embodiment, the top of the sub-chamber is provided with a transition flange, and the transition flange is provided with a third through hole corresponding to the inner cavity of the sub-chamber.

[0015] In a possible implementation of the above embodiment, the transition flange is provided with a third cooling channel surrounding the third through hole, and a third inlet and a third outlet in communication with the third cooling channel.

[0016] In a possible implementation of the above embodiment, the rotary valve device comprises: a valve body, the valve body is provided with a cavity, the cavity is in communication with the inner cavity of the sub-chamber and the first through hole on the furnace cover; a valve plate, the valve plate is arranged in the cavity; and a driving device, the driving device is used to drive the valve plate to lift and rotate to connect or separate the inner cavity of the sub-chamber and the first through hole on the furnace cover.

[0017] In a possible implementation of the above embodiment, the valve body is provided with a plurality of reinforcing ribs extending in the horizontal direction.

[0018] In a possible implementation of the above-described embodiment, an argon gas inlet ring is arranged between the rotary valve device and the furnace cover, and a plurality of horizontal blowing holes and a plurality of downward blowing holes are arranged on the argon gas inlet ring.

[0019] The above technical solutions of the present application have at least one of the following beneficial effects:

[0020] According to the single crystal furnace of the present application, a second through hole is further arranged on the furnace cover, and an observation window is arranged at the second through hole. The observation window comprises an observation window body and two glass assemblies. One end of the observation window body is mounted on the furnace cover and forms a single viewing window in communication with the second through hole. Two viewing ports are formed at the end of the observation window body away from the furnace cover, and the two viewing ports are independent of each other and in communication with the viewing window. Each glass assembly covers each viewing port. The two viewing ports are spaced apart and symmetrically arranged along the length direction of the viewing window. The diameter of the single crystal silicon rod in the single crystal furnace is observed through the two viewing ports and the viewing window. Thus, the observation window of the single crystal furnace of the present application adopts the structure of double viewing ports and a viewing window, which not only reduces the area of the glass assembly and the pressure of the glass assembly, avoids the problem of glass assembly damage, but also ensures complete observation of the diameter of the single crystal silicon rod in the single crystal furnace, has low safety, stability and reliability, has long service life, and can meet the demand for drawing large-diameter single crystal silicon rods.

[0021] In addition, in the technical solutions of the present application, any unexplained part can be realized by using conventional means in the art. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the specific embodiments or the prior art description. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creating laborious work.

[0023] Figure 1 FIG. 1 is a partial structural schematic view of a single crystal furnace according to an embodiment of the present application;

[0024] Figure 2 FIG. 2 is a structural schematic view of an observation window according to an embodiment of the present application;

[0025] Figure 3 FIG. 3 is a structural schematic view of a partial cross-section of an observation window according to an embodiment of the present application;

[0026] Figure 4 FIG. 4 is a cross-sectional view of a glass mounting flange according to an embodiment of the present application;

[0027] Figure 5 FIG. 5 is a cross-sectional view of a connecting portion according to an embodiment of the present application;

[0028] Figure 6 A sectional view of a transition flange according to an embodiment of the present application;

[0029] Figure 7 A structural schematic view of a rotary valve device according to an embodiment of the present application;

[0030] Figure 8 A structural schematic view of a rotary valve device according to an embodiment of the present application;

[0031] Figure 9 A sectional view of a rotary valve device according to an embodiment of the present application; Figure 8 A partial enlarged view of A in FIG. 7;

[0032] Figure 10 A sectional view of a rotary valve device according to an embodiment of the present application; Figure 8 A partial enlarged view of B in FIG. 7;

[0033] Figure 11 A sectional view of a driving device according to an embodiment of the present application;

[0034] Figure 12 A structural schematic view of a rotary valve device according to an embodiment of the present application;

[0035] Figure 13 A structural schematic view of an argon gas inlet ring according to an embodiment of the present application;

[0036] Figure 14 A sectional view of an argon gas inlet ring according to an embodiment of the present application.

[0037] Explanation of reference numerals in the drawings:

[0038] Observation window 100; observation window body 110; view window 101; view port 102; connecting portion 111; second cooling passage 1111; second inlet 1112; second outlet 1113; plug-in portion 1114; glass mounting flange 112; first view port 1121; first cooling passage 1122; first inlet 1123; first outlet 1124; pressurizing port 1125; first partition 1126; cover plate 113; second view port 1131; second groove body 1132; sealing ring 114; glass assembly 120; inner layer glass 121; outer layer glass 122;

[0039] Furnace cover 200;

[0040] Sub-chamber 300; transition flange 310; third through hole 311; third cooling passage 312; third inlet 313; third outlet 314; second partition 315;

[0041] Rotary valve device 400; valve body 410; cavity 411; valve plate 420; driving device 430; lifting shaft 431; first driving member 432; second driving member 433; linear bearing 434; upper flange ring 440; fifth cooling channel 441; second through hole 442; fourth outlet 443; lower flange ring 450; fourth cooling channel 451; fourth inlet 452; first through hole 453; rear cover 460; limiting member 461; vacuum air hole 470; reinforcing rib 480;

[0042] Argon gas inlet ring 500; transverse blowing hole 510; lower blowing hole 520; first annular blowing channel 530; second annular blowing channel 540; flow divider 550; gas inlet hole 560. DETAILED DESCRIPTION

[0043] In order to make the purposes, technical solutions and advantages of the present application clearer, the present application is further described in detail below with reference to the drawings and embodiments. It should be understood that the specific embodiments described herein are part of the embodiments of the present application, rather than all the embodiments. The specific embodiments are used to explain the present application, and are not used to limit the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of protection of the present application.

[0044] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "front", "rear", "vertical", "horizontal", "inner", "outer", "two ends", "two sides", "bottom", "top" and the like indicate the orientation or positional relationship shown in the drawings, and are only used for the purpose of describing the present application and simplifying the description, and do not indicate or imply that the elements referred to must have a particular orientation or be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "superior", "inferior", "primary", "secondary" and the like are only for descriptive purposes and can be simply used to distinguish different components more clearly, and cannot be understood as indicating or implying relative importance.

[0045] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0046] REFERENCE Figures 1-14As shown, the single crystal furnace provided by the embodiment of the present application can include a furnace body (not shown), a furnace cover 200, a sub-chamber 300 arranged above the furnace cover 200, and a rotary valve device 400 arranged between the furnace cover 200 and the sub-chamber 300.

[0047] The furnace cover 200 is provided with a first through hole (not shown) for the single crystal silicon rod to pass through, and the rotary valve device 400 is installed at the first through hole. The furnace cover 200 is also provided with a second through hole (not shown) penetrating the thickness of the furnace cover 200, and an observation window 100 is arranged at the second through hole. The observation window 100 is used to observe the diameter of the single crystal silicon rod in the single crystal furnace. The observation window can include an observation window body 110 and two glass components 120. One end of the observation window body 110 is installed on the furnace cover 200 and is formed with a single viewing window 101 communicating with the second through hole. The other end of the observation window body 110 is formed with two viewing ports 102 independent of each other, both of which communicate with the viewing window 101. Each glass component 120 covers each viewing port 102 respectively. The two viewing ports 102 are arranged symmetrically along the length direction of the viewing window 101.

[0048] The rotary valve device 400 is used to isolate the furnace cover 200 and the sub-chamber 300. The sub-chamber 300 can be pressed on the rotary valve device 400 by gravity. The sub-chamber 300 can be locked or unlocked with the pin shaft on the rotary valve device 400 by rotation. The observation window body 110, the glass components 120, the viewing ports 102 and the viewing window 101 can adopt a waist-shaped hole or other suitable shapes. The observation window body 110 can be welded on the furnace cover 200 of the single crystal furnace. Each glass component 120 and its corresponding viewing port 102 can be connected by adhesive sealing or the like. In addition, the single crystal furnace also includes a crucible, a water-cooled screen, a heating device, a pulling crystal device and other mechanisms. These mechanisms can adopt the corresponding mechanisms in the single crystal furnace in the prior art, which will not be described here.

[0049] During the crystal pulling process, the operator observes the diameter of the single crystal silicon rod in the single crystal furnace through the two viewing ports 102 and the viewing window 101 of the observation window 100. It should be noted that the operator's line of sight through the two viewing ports 102 and the viewing window 101 should cover the edge of the single crystal silicon rod. When preparing a large-size single crystal silicon rod of 16 inches or more, the diameter of the single crystal silicon rod increases accordingly, and the diameter of the furnace body of the corresponding single crystal furnace also increases. The size of the original observation window on the furnace cover is limited, and the operator cannot observe the edge of the single crystal silicon rod in the single crystal furnace through the observation window on the existing furnace cover. If the size of the observation window is simply increased, the window glass will be easily damaged, the cooling effect of the observation window will be poor, and the safety, stability and reliability will be low.

[0050] Therefore, the single crystal furnace provided by the application has the advantages that the observation window 100 adopts the structure of the double viewports 102 and the view window 101, the area of the glass assembly 120 is reduced, the pressure of the glass assembly 120 is reduced, the problem of damage of the glass assembly 120 is avoided, the diameter of the single crystal silicon rod in the single crystal furnace can be completely observed, the safety, stability and reliability are low, the service life is long, and the demand for drawing a large-diameter single crystal silicon rod can be met.

[0051] In some embodiments, referring to Figures 2-5 As shown in the figure, the observation window body 110 includes a connecting portion 111, a glass mounting flange 112 and a cover plate 113 connected in sequence from close to the furnace cover 200 to away from the furnace cover 200, a single view window 101 penetrating along the thickness direction of the connecting portion 111 is arranged on the connecting portion 111, two first viewports 1121 penetrating along the thickness direction of the glass mounting flange 112 are arranged on the glass mounting flange 112, two second viewports 1131 penetrating along the thickness direction of the cover plate 113 are arranged on the cover plate 113, the two first viewports 1121 correspond to the two second viewports 1131, and the first viewports 1121 and the second viewports 1131 corresponding to each other together form the viewports 102 in the thickness direction. Therefore, the processing, manufacturing, assembly, disassembly, maintenance and other operations are more convenient and fast, the structure is more stable, and it is more safe and reliable.

[0052] In some embodiments, referring to Figure 3 As shown in the figure, the glass assembly 120 has a double-layer structure, and each glass assembly 120 includes an inner layer glass 121 and an outer layer glass 122 arranged in parallel and spaced apart. The inner layer glass 121 can be arranged on the glass mounting flange 112, and the outer layer glass 122 can be arranged on the cover plate 113. Therefore, the glass assembly 120 adopts a double-layer glass structure, has higher structural strength, higher safety and reliability, and a longer service life.

[0053] Further, the glass mounting flange 112 is provided with a first groove (not shown) around each first viewport 1121, which cooperates with each inner layer glass 121, for mounting the inner layer glass 121; and the cover plate 113 is provided with a second groove 1132 around each second viewport 1131, which cooperates with each outer layer glass 122, for mounting the outer layer glass 122. Therefore, the structure is more compact and stable, the connection is more compact, the sealing performance is better, the volume is reduced, and the operation is more convenient.

[0054] Further, a gap is left between the inner layer glass 121 and the corresponding outer layer glass 122. Therefore, the inner layer glass 121 and the outer layer glass 122 form an isolation layer, which is safer and more reliable.

[0055] Further, the inner layer glass 121 can be made of quartz glass, and the surface of the outer layer glass 122 can be provided with a metal plating layer. The outer layer glass 122 can be provided with a metal plating layer only on the outer surface, or can be provided with a metal plating layer on both the inner surface and the outer surface. The outer layer glass 122 can also be made of quartz glass, and a metal plating layer can be provided on the surface of the quartz glass. In this way, the structural strength is higher, the safety and reliability are higher, and the service life is longer. Those skilled in the art can understand that the inner layer glass 121 and the outer layer glass 122 can be made of other suitable glasses in the prior art.

[0056] In some embodiments, referring to Figure 4 As shown in the figure, the glass mounting flange 112 is provided with a first cooling channel 1122 surrounding the two first viewports 1121, and a first inlet 1123 and a first outlet 1124 in communication with the first cooling channel 1122. The first inlet 1123 is used for circulating cooling fluid into the first cooling channel 1122, and the first outlet 1124 is used for circulating cooling fluid out of the first cooling channel 1122. The first cooling channel 1122 can be annular, and the circulating cooling fluid can be cooling water or other cooling fluid.

[0057] During the crystal pulling process, taking cooling water as an example, referring to Figure 4 As shown in the figure, the cooling water supply device injects cooling water from the first inlet 1123 into the first cooling channel 1122. After the cooling water circulates around the first cooling channel 1122 once, the cooling water flows out from the first outlet 1124, thereby cooling the glass mounting flange 112. This prevents the temperature of the observation window 100 from exceeding the standard, which can damage the equipment and delay the service life of the equipment.

[0058] In some embodiments, a cooling fluid stagnation dead zone (such as a dead water zone) can be formed in the first cooling channel 1122, which can cause the temperature to exceed the standard and the cooling effect to be poor. Therefore, referring to Figure 4 As shown in the figure, the glass mounting flange 112 is further provided with a pressurizing port 1125 in communication with the first cooling channel 1122. The pressurizing port 1125 can be one, two, or more. The number and arrangement of the pressurizing port 1125 can be determined according to the length and shape of the first cooling channel 1122, and the like. For example, the pressurizing port 1125 is located at a position in the first cooling channel 1122 where a stagnation dead zone is likely to be formed. After the cooling water is introduced into the first cooling channel 1122, the cooling water is introduced into the corresponding area through the pressurizing port 1125 to forcibly flush the area, thereby avoiding the formation of a dead water zone in the first cooling channel 1122, ensuring the circulation of the cooling fluid in the first cooling channel 1122, and improving the cooling effect, stability, and reliability, and prolonging the service life of the equipment.

[0059] Further, the pressurizing port 1125 is located between the two first view ports 1121. In this way, the forced flushing in the first cooling channel 1122 is facilitated, and the formation of a cooling fluid stagnation dead zone in the first cooling channel 1122 is avoided, so that the temperature of the first cooling channel 1122 does not exceed the standard, and the circulation of the cooling fluid in the first cooling channel 1122 is ensured, and the cooling is more sufficient, and the cooling effect is better.

[0060] Further, the first inlet port 1123 and the first outlet port 1124 are located at the same end of the length direction of the glass mounting flange 112, and the first cooling channel 1122 is provided with a first partition plate 1126 extending along the length direction of the glass mounting flange 112 and located between the first inlet port 1123 and the first outlet port 1124, and the first partition plate 1126 divides the first cooling channel 1122. In this way, the circulating cooling fluid is more fully filled in the entire first cooling channel 1122, and the cooling effect is better.

[0061] In some embodiments, referring to Figure 5 As shown, the connecting portion 111 can be provided with a second cooling channel 1111 surrounding the window 101, and a second inlet port 1112 and a second outlet port 1113 communicating with the second cooling channel 1111, the second inlet port 1112 being used for circulating cooling fluid to flow into the second cooling channel 1111, and the second outlet port 1113 being used for circulating cooling fluid in the second cooling channel 1111 to flow out. The second cooling channel 1111 can be annular, and the circulating cooling fluid can be cooling water or other cooling fluid.

[0062] That is, the connecting portion 111 can be cooled and cooled by the second cooling channel 1111, and the glass mounting flange 112 can be cooled and cooled by the first cooling channel 1122, so that the cooling is more comprehensive, and the cooling effect is better.

[0063] Further, the second inlet port 1112 is provided at one end of the length direction of the connecting portion 111, and the second outlet port 1113 is provided at the other end of the length direction of the connecting portion 111. In this way, the circulating cooling fluid is more fully filled in the entire second cooling channel 1111, and the cooling effect is better. In addition, the second cooling channel 1111 can also be provided with the structure of the pressurizing port 1125, which will not be described here.

[0064] In some embodiments, referring to Figure 3 As shown, the connecting portion 111 is provided with a plug-in portion 1114 at one end close to the furnace cover 200 for cooperating with a second through hole on the furnace cover 200. In this way, the connection between the connecting portion 111 and the furnace cover 200 is more close, and the structure is more stable.

[0065] In some embodiments, referring to Figure 1 , 6As shown, the top of the sub-chamber 300 is provided with a transition flange 310, and the transition flange 310 is provided with a third through hole 311 corresponding to the inner cavity of the sub-chamber 300, and the third through hole 311 is used for the lifting rod of the crystal pulling device to pass through. Thus, by providing the transition flange 310, it is convenient to connect with the corresponding crystal pulling device.

[0066] In some embodiments, referring to Figure 6 As shown, the transition flange 310 is provided with a third cooling channel 312 surrounding the third through hole 311, and a third inlet 313 and a third outlet 314 in communication with the third cooling channel 312, the third inlet 313 is used for circulating cooling fluid to flow into the third cooling channel 312, and the third outlet 314 is used for circulating cooling fluid in the third cooling channel 312 to flow out. Among them, the circulating cooling fluid can adopt cooling water, or other cooling fluid. Thus, the transition flange 310 is cooled by the third cooling channel 312 to prevent the temperature of the transition flange 310 from being too high, which is more safe and reliable.

[0067] Further, the third cooling channel 312 is provided with a second partition plate 315 extending along the radial direction of the transition flange 310, the second partition plate 315 divides the third cooling channel 312, and the second partition plate 315 is close to the third inlet 313 and the third outlet 314 and located between the third inlet 313 and the third outlet 314. Thus, it is ensured that the circulating cooling fluid more fully fills the entire third cooling channel 312, the cooling is more uniform, and the cooling effect is better. In addition, the third cooling channel 312 can also be provided with the structure of the above-mentioned pressurizing port 1125, which will not be described here.

[0068] In some embodiments, referring to Figures 7-8 As shown, the rotary valve device 400 includes a valve body 410, a valve plate 420, and a driving device 430. Among them, the valve body 410 is provided with a cavity 411, the cavity 411 is in communication with the inner cavity of the sub-chamber 300 and the first through hole on the furnace cover 200, the valve plate 420 is arranged in the cavity 411, and the driving device 430 is used to drive the valve plate 420 to ascend and rotate to connect or separate the inner cavity of the sub-chamber 300 and the first through hole of the furnace cover 200. Thus, by isolating the furnace cover 200 from the sub-chamber 300 through the rotary valve device 400, a relatively closed and stable environment is provided for the growth of single crystals, and the lifting of single crystal silicon rods and the like is also facilitated.

[0069] In some embodiments, referring to Figures 7-8 As shown, the top of the valve body 410 is provided with an upper flange ring 440 for connecting with the sub-chamber 300, and the upper flange ring 440 surrounds the top opening of the cavity 411. The bottom of the valve body 410 is provided with a lower flange ring 450 for connecting with the furnace cover 200, and the lower flange ring 450 surrounds the bottom opening of the cavity 411. Thus, the operation is more convenient, and the structure is more stable.

[0070] In some embodiments, reference Figures 8-10 As shown, the upper flange ring 440 is provided with a fifth cooling channel 441 surrounding the first opening, and a second port 442 and a fourth outlet 443 communicating with the fifth cooling channel 441. The side wall of the lower flange ring 450 is provided with a fourth cooling channel 451 surrounding the top opening of the cavity 411, and a fourth inlet 452 and a first port 453 communicating with the fourth cooling channel 451. The side wall of the cavity 411 corresponding to the upper flange ring 440 and the lower flange ring 450 is provided with a sixth cooling channel (not shown). The first port 453 and the second port 442 are respectively connected to the sixth cooling channel. The fourth inlet 452 is used for circulating cooling fluid to flow into the fourth cooling channel 451, and the fourth outlet 443 is used for circulating cooling fluid to flow out of the fifth cooling channel 441.

[0071] In other words, the cooling fluid supply device injects cooling fluid from the fourth inlet 452 of the lower flange ring 450 into the fourth cooling channel 451. After circulating around the fourth cooling channel 451, the cooling fluid enters the sixth cooling channel through the first port 453. Then, in the sixth cooling channel, the cooling fluid flows upward layer by layer and enters the fifth cooling channel 441 of the upper flange ring 440 through the second port 442. Finally, after circulating around the fifth cooling channel 441, the cooling fluid flows out through the fourth outlet 443, thereby cooling the rotary valve device 400. As a result, the cooling is more uniform and the cooling effect is better.

[0072] In some embodiments, reference Figure 11 As shown, the drive device 430 includes a lifting shaft 431, a first drive member 432, and a second drive member 433. The lifting shaft 431 is vertically aligned and connected to the valve plate 420. The first drive member 432 drives the lifting shaft 431 and the valve plate 420 to move up and down together, and the second drive member 433 drives the lifting shaft 431 and the valve plate 420 to rotate together. The first drive member 432 and the second drive member 433 can be driven by cylinders or other similar drive components. This ensures better lifting and rotation of the valve plate 420.

[0073] Furthermore, the valve body 410 is also equipped with a linear bearing 434 that cooperates with the lifting shaft 431. This prevents the valve plate 420 from being too large, which could cause the lifting shaft 431 to jam, and ensures that the lifting shaft 431 moves more smoothly.

[0074] In some embodiments, reference Figure 12As shown, the valve body 410 is provided with a rear cover 460 corresponding to the valve plate 420, the rear cover 460 can be rotatably opened, and the rear cover 460 is provided with a limiting piece 461 for limiting the opening angle thereof. Wherein, the valve body 410 and the rear cover 460 can be hinged through a rotating shaft, and the rear cover 460 can be further locked through a locking handle or the like locking piece after being closed. Thus, by opening the rear cover 460, maintenance and the like can be facilitated, and by limiting the maximum opening angle of the rear cover 460 through the limiting piece 461, the rear cover 460 is prevented from being opened too large, the operation is more convenient, and the safety and reliability are higher.

[0075] In some embodiments, with reference to Figures 7-8 As shown, the valve body 410 is provided with a vacuum air hole 470 for communicating with the cavity 411. Thus, the cavity 411 can be conveniently vacuumized.

[0076] In some embodiments, with reference to Figure 12 As shown, the valve body 410 is provided with a reinforcing rib 480. Wherein, the reinforcing rib 480 can be a plurality of reinforcing ribs extending in the horizontal direction. Thus, when the rotary valve device 400 receives a vertical force, the deformation of the flange and other components can be effectively prevented, and the structure is more stable.

[0077] In some embodiments, with reference to Figure 1 、 13 As shown in FIGS. 1-14, the rotary valve device 400 and the furnace cover 200 are provided with an argon gas inlet ring 500. Wherein, the argon gas inlet ring 500 and the rotary valve device 400 and the furnace cover 200 can be connected through screws or the like fasteners respectively. Thus, by setting the argon gas inlet ring 500, blowing at the throat of the furnace cover 200 can effectively inhibit the floating of the liquid surface volatile in the single crystal furnace, reduce the influence of the liquid surface volatile, increase the cleanliness of the liquid surface and above, and improve the probability of crystal growth.

[0078] In some embodiments, with reference to Figures 13-14As shown, the argon gas inlet ring 500 is provided with a plurality of lateral blowing holes 510 and a plurality of lower blowing holes 520. The plurality of lateral blowing holes 510 are uniformly distributed on the inner wall of the central hole of the argon gas inlet ring 500 along the circumferential direction of the argon gas inlet ring 500, and extend along the radial direction of the argon gas inlet ring 500 and communicate with the central hole of the argon gas inlet ring 500. The plurality of lower blowing holes 520 are uniformly distributed on the lower end surface of the argon gas inlet ring 500 along the circumferential direction of the argon gas inlet ring 500, and the openings of the plurality of lower blowing holes 520 face downward and are close to the central hole of the argon gas inlet ring 500. The inner wall of the side wall of the argon gas inlet ring 500 is provided with a first annular blowing passage 530 and a second annular blowing passage 540, which are coaxial with the argon gas inlet ring 500. The first annular blowing passage 530 is used to communicate with each lateral blowing hole 510, and the second annular blowing passage 540 is used to communicate with each lower blowing hole 520. Thus, through the plurality of lateral blowing holes 510 and the plurality of lower blowing holes 520, a horizontal and vertical air curtain can be formed at the throat of the furnace cover 200, which can better inhibit the floating of the liquid surface volatiles in the single crystal furnace, reduce the influence of the liquid surface volatiles, increase the cleanliness of the liquid surface and the upper part thereof, and improve the probability of crystal pulling and crystal formation.

[0079] Further, with reference to Figure 14 As shown, the first annular blowing passage 530 includes two concentric annular passages, and the outer annular passage communicates with the inner annular passage through a plurality of uniform flow holes uniformly distributed along the circumferential direction. Each lateral blowing hole 510 communicates with the inner annular passage. The argon gas inlet ring 500 is provided with a flow divider 550 and two gas inlet holes 560 communicating with the outer annular passage. The two gas inlet holes 560 are symmetrically arranged along the radial direction of the argon gas inlet ring 500, and the flow divider 550 communicates with the two gas inlet holes 560, respectively. Thus, a more low-speed, uniform and stable lateral airflow can be provided, and the blowing effect is better. In addition, the second annular blowing passage 540 can be arranged by referring to the first annular blowing passage 530, which will not be described in detail here.

[0080] Based on the above embodiments of the present application, the technical features of one embodiment can be beneficially combined with one or more other embodiments without explicit denial or conflict.

[0081] The above description is only some embodiments of the present application, which is only used to illustrate the technical solutions of the present application, and is not limited thereto. It should be understood that for those skilled in the art, without departing from the inventive concept of the present application, the above description can be improved or replaced, and all these improvements and replacements shall fall within the protection scope of the appended claims of the present application. In this case, all details can be replaced by equivalent elements, and the materials, shapes and sizes can be arbitrary.

Claims

1. A single crystal furnace, characterized in that, The utility model relates to a single crystal silicon rod pulling-up furnace, including: furnace body, furnace cover, vice chamber arranged above the furnace cover and rotary valve device arranged between the furnace cover and the vice chamber, the first through hole for single crystal silicon rod passing through is arranged on the furnace cover, the rotary valve device is installed at the first through hole, the second through hole is also arranged on the furnace cover, the observation window is provided at the second through hole, the observation window includes observation window main part and two glass components, one end of the observation window main part is installed on the furnace cover and is formed with single window which communicates with the second through hole, the other end of the observation window main part away from the furnace cover is formed with two viewports which are independent of each other, and the two viewports all communicate with the window, and each glass component covers each viewport respectively, the two viewports are spaced apart and symmetrically arranged along the length direction of the window.

2. The single crystal furnace of claim 1, wherein The observation window main part includes connecting portion, glass mounting flange and cover plate which are connected in sequence from near the furnace cover to away from the furnace cover, a single window is arranged on the connecting portion and penetrates through the thickness direction of the connecting portion, two first viewports are arranged on the glass mounting flange and penetrate through the thickness direction of the glass mounting flange, two second viewports are arranged on the cover plate and penetrate through the thickness direction of the cover plate, the two first viewports correspond to the two second viewports, and the first viewports and the second viewports corresponding to each other jointly constitute the viewports in the thickness direction.

3. The single crystal furnace of claim 2, wherein Each glass component includes inner layer glass and outer layer glass which are arranged in parallel and spaced apart from each other; the glass mounting flange is provided with first groove bodies which are matched with each inner layer glass respectively around each first viewport for mounting the inner layer glass; the cover plate is provided with second groove bodies which are matched with each outer layer glass respectively around each second viewport for mounting the outer layer glass.

4. The single crystal furnace of claim 3, wherein A first cooling channel surrounding the two first viewports, a first inlet and a first outlet communicating with the first cooling channel are arranged in the glass mounting flange; a pressurizing port communicating with the first cooling channel is further arranged on the glass mounting flange; the pressurizing port is located between the two first viewports.

5. The single crystal furnace of claim 4, wherein The first inlet and the first outlet are located at the same end in the length direction of the glass mounting flange, a first partition plate is arranged in the first cooling channel, the first partition plate extends along the length direction of the glass mounting flange and is located between the two first viewports.

6. The single crystal furnace of claim 3, wherein A second cooling channel surrounding the window, a second inlet and a second outlet communicating with the second cooling channel are arranged in the connecting portion; the second inlet is arranged at one end in the length direction of the connecting portion, and the second outlet is arranged at the other end in the length direction of the connecting portion.

7. The single crystal furnace of claim 2, wherein An insertion part for matching the second through hole on the furnace cover is arranged at one end of the connecting portion close to the furnace cover.

8. The single crystal furnace of any one of claims 1-7, wherein, A transition flange is arranged on the top of the vice chamber, and a third through hole corresponding to the inner cavity of the vice chamber is arranged on the transition flange; a third cooling channel surrounding the third through hole, a third inlet and a third outlet communicating with the third cooling channel are arranged in the transition flange.

9. The single crystal furnace of any one of claims 1-7, wherein, The rotary valve device includes: A valve body is provided with a cavity therein, which is communicated with the inner cavity of the sub-chamber and the first through hole on the furnace cover; A valve plate is arranged in the cavity; A driving device is used to drive the valve plate to lift and rotate so as to communicate or isolate the inner cavity of the sub-chamber and the first through hole of the furnace cover; Wherein, a plurality of reinforcing ribs extending in the horizontal direction are arranged on the valve body.

10. The single crystal furnace of any one of claims 1-7, wherein, An argon gas inlet ring is arranged between the rotary valve device and the furnace cover, and a plurality of transverse blowing holes and a plurality of downward blowing holes are arranged on the argon gas inlet ring.

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