Cooling device for semiconductor part processing

By combining vibration and rinsing design, the problem of water droplet residue in semiconductor component cooling devices is solved, achieving efficient cleaning and simplified operation, and improving drying efficiency.

CN223726729UActive Publication Date: 2025-12-26SUZHOU GAIQI INTELLIGENT TECH CO LTD
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Patent Information

Application Number
CN202520236381.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-02-14
Publication Date
2025-12-26
Estimated Expiration
2035-02-14

AI Technical Summary

Technical Problem

Existing semiconductor component cooling devices leave water droplets after cleaning, which affects drying efficiency and increases the workload and intensity of workers, resulting in limited cleaning effectiveness.

Method used

The design incorporates a vibration mounting assembly, a mobile cleaning assembly, a drive assembly, a water pump, and a water supply hose to combine vibration and rinsing, thereby improving the cleaning effect and accelerating the shedding of water droplets through vibration.

Benefits of technology

It improves the cleaning effect, simplifies the water droplet removal process, and enhances drying efficiency and ease of use.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model discloses a cooling device for semiconductor part processing, which belongs to the technical field of semiconductor part processing, and comprises a main body module and a vibration cleaning module, the main body module comprises a cleaning water tank, two sides of the cleaning water tank are fixedly connected with hollow groove plates, the bottom of the cleaning water tank is fixedly connected with two supporting legs, and the supporting legs are fixedly connected with the vibration cleaning module. A water draining valve is installed at the bottom of the cleaning water tank, a draining net cage is arranged in the cleaning water tank, and through the arrangement of a vibration installation assembly, a movable cleaning assembly, a driving assembly, a water pump, a pushing assembly and a water supply hose, the device can achieve cooperation of vibration and flushing during cleaning; the washing liquid can make more effective contact with all corners and gaps of the surface of the part, the overall cleaning effect is improved, meanwhile, after cleaning is completed, vibration can be conducted to accelerate falling of water drops, it is avoided that subsequent drying is affected by attachment of the water drops, and then the drying efficiency is improved.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor parts processing, more particularly to a cooling device for semiconductor parts processing. BACKGROUND

[0002] Semiconductor parts are made of semiconductor materials and play a specific function in electronic equipment, and are widely used in computers, communications, consumer electronics and many other fields. After the production of conductors, the semiconductor heated at high temperature needs to be annealed and cooled. Currently, a cooling device is usually used to cool the semiconductor parts.

[0003] According to the search, patent number CN220135788U discloses a semiconductor processing cooling device, which comprises a bottom plate, a rack fixedly connected to one side of the outer wall of the bottom plate, a worm gear meshing connected to the rack, a sliding frame rotatably connected to the outer wall of the worm gear, a fixed column with a sliding connection on the inner wall of the sliding frame, a support block fixedly connected to the upper surface of the sliding frame, a motor fixedly connected to one side of the outer wall of the support block, a worm fixedly connected to the output end of the motor, and a worm gear meshing connected to the outer wall of the worm. First, the cooperation between the fixed column, the rack, the worm gear, the sliding frame, the motor, the worm, the basket, the placing plate, the rod, the screen and the handle achieves the effect of facilitating the taking of the semiconductor, solves the problem of single structure of the traditional semiconductor cooling processing, and improves the working efficiency of the semiconductor cooling processing.

[0004] For the related technology in the above, the cooling device can clean the semiconductor parts, but the cleaning effect is limited by spraying only. After cleaning, water droplets are usually left on the semiconductor parts, which need to be handled by the staff, thereby increasing the working steps and intensity of the staff. If the water droplets are not handled, it will affect the subsequent drying efficiency. Therefore, a cooling device for semiconductor parts processing is proposed. UTILITY MODEL CONTENT

[0005] To solve the above problems, the utility model provides a cooling device for semiconductor parts processing, which adopts the following technical scheme:

[0006] The utility model provides a kind of cooling device for semiconductor parts processing, including main module and vibration cleaning module, the main module includes cleaning water tank, both sides of the cleaning water tank are fixedly connected with hollow groove plate, the bottom of the cleaning water tank is fixedly connected with two support feet, and the bottom of cleaning water tank is equipped with drain valve, the inside of the cleaning water tank is provided with draining net box, the vibration cleaning module includes lifting assembly between the inside of two hollow groove plates, two vibration installation components are provided on the lifting assembly, the draining net box is connected between two vibration installation components, the inside of the cleaning water tank is provided with mobile cleaning component, the rear end surface of the cleaning water tank is provided with drive component, the drive component is connected with mobile cleaning component, the both sides of the cleaning water tank are provided with push component, two the push component is respectively contacted with two vibration installation components, two the push component is connected with mobile cleaning component, water pump is installed on the bottom of the cleaning water tank inner wall, water supply hose is connected between the output end of the water pump and mobile cleaning component.

[0007] Further, the vibration installation component includes a center plate, two movable rods are movably connected inside the center plate, a fixed plate is fixedly connected between the top ends of the two movable rods, a jack block is fixedly connected between the bottom ends of the two movable rods, two link springs are fixedly connected between the bottom of the fixed plate and the top of the center plate, and the two link springs are respectively located outside the two movable rods.

[0008] Further, the vibration installation component further includes a clamping block movably clamped inside the fixed plate, the clamping block is fixedly connected with the draining net box, two clamping rods are movably connected inside the clamping block, a contraction spring is fixedly connected between adjacent ends of the two clamping rods, the opposite ends of the two clamping rods are extended into the inside of the fixed plate, a pull slot is formed in the top of the clamping block, a pull rod is fixedly connected to the top of each of the two clamping rods, and the two pull rods are extended to the outside of the clamping block through the pull slot.

[0009] Further, the mobile cleaning component includes a long slot formed in the rear end surface of the inner wall of the cleaning water tank, a long lead screw is rotatably connected inside the long slot, the two ends of the long lead screw are extended to the outside of the cleaning water tank, a mobile block is slidably connected inside the long slot, a transverse water pipe is connected to the mobile block, a plurality of spray heads are fixedly connected at equal distances on the outer surface of the transverse water pipe in a ring shape, the outer surface of the transverse water pipe is connected with one end of the water supply hose, and the two ends of the long lead screw are fixedly connected with large transmission rollers.

[0010] Further, the pushing assembly comprises a rotating shaft rotatably connected to one side of the cleaning water tank, one end of the rotating shaft is fixedly connected with a cam, the outer surface of the cam is in contact with the jacking block, the other end of the rotating shaft is fixedly connected with a small transmission roller, the outer surface of the small transmission roller is provided with a transmission belt, and the transmission belt is transmissionally connected between the outer surfaces of the small transmission roller and one of the large transmission rollers.

[0011] Further, the driving assembly comprises a second motor fixedly connected to the rear end face of the cleaning water tank, the output shafts of the second motor and the long lead screw are both fixedly connected with linkage rollers, and the outer surfaces of the two linkage rollers are transmissionally connected with a first linkage belt.

[0012] Further, the lifting assembly comprises two lifting screws rotatably connected between the top and bottom of the inner walls of the two hollow groove plates, the outer surfaces of the two lifting screws are both threadedly connected with lifting blocks, the outer surfaces of the two lifting blocks are both fixedly connected with link rods, the link rods are fixedly connected with the center plate, the upper portions of the outer surfaces of the two lifting screws are both fixedly connected with link rollers, the outer surfaces of the two link rollers are transmissionally connected with a second linkage belt, the top of one of the hollow groove plates is fixedly provided with a first motor, and the output shaft of the first motor is fixedly connected with the top end of one of the lifting screws.

[0013] To sum up, the utility model has the following beneficial technical effects:

[0014] (1) the utility model discloses a vibration installation component, removes the cleaning assembly, the setting of driving assembly, water pump, pushing assembly and water supply hose makes the device can realize the cooperation of vibration and flushing when cleaning, when the semiconductor parts are vibrated, the flushing liquid can more effectively contact each corner and gap on the part surface, improves the overall cleaning effect, and after cleaning, the vibration can accelerate the falling of water droplets, avoids the influence of the adhesion of water droplets on subsequent drying, and further improves the drying efficiency.

[0015] (2) the utility model discloses the setting of the clamping rod, the contraction spring and the pull rod makes the installation and dismounting operation of the draining net cage relatively simple, and the staff is convenient to operate, improves the convenience when the device is used. ACCURACY OF DRAWINGS

[0016] Figure 1 It is the overall structure schematic diagram of the utility model;

[0017] Figure 2 It is the structure schematic diagram of the lifting assembly of the utility model;

[0018] Figure 3 It is the structure schematic diagram of the driving assembly of the utility model;

[0019] Figure 4 It is a structural schematic view of the vibration installation assembly.

[0020] Explanation of reference numerals in the drawing:

[0021] 100, main body module; 110, cleaning water tank; 120, hollow groove plate; 130, draining net cage; 140, supporting leg;

[0022] 200, vibration cleaning module; 210, lifting assembly; 211, lifting screw rod; 212, lifting block; 213, second linkage belt; 214, first motor; 215, connecting rod; 220, vibration installation assembly; 221, center plate; 222, movable rod; 223, fixed plate; 224, connecting spring; 225, jacking block; 226, clamping block; 227, clamping rod; 228, pull rod; 229, contraction spring; 230, moving cleaning assembly; 231, long screw rod; 232, large transmission roller; 233, transverse water pipe; 234, spray head; 240, driving assembly; 241, second motor; 242, linkage roller; 243, first linkage belt; 250, water pump; 260, pushing assembly; 261, rotating shaft; 262, cam; 263, small transmission roller; 264, transmission belt; 270, water supply hose. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application; obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and all other embodiments obtained by those skilled in the art without creative labor on the basis of the embodiments in the present application belong to the scope of protection of the present application.

[0024] In the description of the present application, it should be pointed out that the terms "upper", "lower", "inner", "outer", "top / bottom end" and the like indicate the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0025] In the description of the utility model, it is necessary to explain, unless another explicit provision and limitation, term "installation", "set with", "sleeve set / with", "connection" and the like, should do broad sense understanding, for example "connection", can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through intermediate medium, can be two elements inside the communication.For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to specific circumstances.

[0026] The following combines the attached Figures 1-4 The utility model is further explained in detail.

[0027] Please refer to Figures 1-4 A kind of cooling device for semiconductor parts processing, including main module 100 and vibration cleaning module 200, main module 100 includes cleaning water tank 110, both sides of cleaning water tank 110 are fixedly connected with hollow groove plate 120, the bottom of cleaning water tank 110 is fixedly connected with two support feet 140, and the bottom of cleaning water tank 110 is equipped with drain valve, the inside of cleaning water tank 110 is provided with drainage net box 130, vibration cleaning module 200 includes lifting assembly 210 being arranged between the inside of two hollow groove plates 120, two vibration installation assemblies 220 are arranged on lifting assembly 210, drainage net box 130 is connected between two vibration installation assemblies 220, the inside of cleaning water tank 110 is provided with mobile cleaning assembly 230, the rear end surface of cleaning water tank 110 is provided with drive assembly 240, drive assembly 240 is connected with mobile cleaning assembly 230, both sides of cleaning water tank 110 are provided with push assembly 260, two push assemblies 260 are respectively contacted with two vibration installation assemblies 220, two push assemblies 260 are connected with mobile cleaning assembly 230, water pump 250 is installed in the bottom of the inner wall of cleaning water tank 110, water supply hose 270 is connected between the output end of water pump 250 and mobile cleaning assembly 230.

[0028] In use, the staff will install the semiconductor parts of the draining net box 130 between the two vibration installation assemblies 220, after connection, open the lifting assembly 210, send the draining net box 130 into the inside of the cleaning water tank 110 and below the moving cleaning assembly 230, open the water pump 250 and the driving assembly 240, the water pump 250 supplies water to the moving cleaning assembly 230 through the pushing assembly 260, the driving assembly 240 will drive the moving cleaning assembly 230 to move back and forth to clean the semiconductor parts inside the draining net box 130, the moving cleaning assembly 230 will simultaneously drive the two pushing assemblies 260, the two pushing assemblies 260 push the two vibration installation assemblies 220 to drive the draining net box 130 to vibrate, the flushing and vibration mode can improve the cleaning effect, after cleaning, close the water pump 250, keep the draining net box 130 vibrating for a period of time, so that the water droplets on the semiconductor parts inside the draining net box 130 are shaken off, facilitating subsequent drying, after completion, close the driving assembly 240, open the lifting assembly 210 to drive the draining net box 130 out of the cleaning water tank 110, and then the draining net box 130 is detached from the two vibration installation assemblies 220, and another draining net box 130 is replaced.

[0029] The vibration installation assembly 220 includes a center plate 221, two movable rods 222 movably connected inside the center plate 221, a fixed plate 223 fixedly connected between the top ends of the two movable rods 222, a top-up block 225 fixedly connected between the bottom ends of the two movable rods 222, two link springs 224 fixedly connected between the bottom of the fixed plate 223 and the top of the center plate 221, the two link springs 224 being located outside the two movable rods 222 respectively, the vibration installation assembly 220 further includes a clamping block 226 movably clamped inside the fixed plate 223, the clamping block 226 being fixedly connected with the draining net box 130, two clamping rods 227 movably connected inside the clamping block 226, a contraction spring 229 fixedly connected between adjacent ends of the two clamping rods 227, the opposite ends of the two clamping rods 227 extending into the inside of the fixed plate 223, a pull slot being formed in the top of the clamping block 226, two pull rods 228 fixedly connected to the top of the two clamping rods 227, the two pull rods 228 extending to the outside of the clamping block 226 through the pull slot.

[0030] The staff installs the semiconductor parts of the draining net box 130 between the two vibration installation assemblies 220, the staff holds the two pull rods 228 with the palms, the two clamping rods 227 are retracted into the inside of the clamping block 226, the contraction spring 229 is contracted at this time, the clamping block 226 is clamped into the fixed plate 223, the two pull rods 228 are released, the contraction spring 229 will push out the two clamping rods 227, so that the two clamping rods 227 are clamped into the clamping block 226, thereby connecting and fixing the draining net box 130 with the vibration installation assembly 220.

[0031] The mobile cleaning assembly 230 comprises a long slot formed in the rear end surface of the inner wall of the cleaning water tank 110, a long lead screw 231 is rotatably connected in the long slot, both ends of the long lead screw 231 extend to the outside of the cleaning water tank 110, a moving block is slidably connected in the long slot, the moving block is connected with a horizontal water pipe 233, a plurality of spray heads 234 are fixedly connected on the outer surface of the horizontal water pipe 233 at equal intervals in a ring shape, the outer surface of the horizontal water pipe 233 is connected with one end of the water supply hose 270, both ends of the long lead screw 231 are fixedly connected with large transmission rollers 232, the pushing assembly 260 comprises a rotating shaft 261 rotatably connected on one side of the cleaning water tank 110, one end of the rotating shaft 261 is fixedly connected with a cam 262, the outer surface of the cam 262 is in contact with the lifting block 225, the other end of the rotating shaft 261 is fixedly connected with a small transmission roller 263, the outer surface of the small transmission roller 263 is provided with a transmission belt 264, the transmission belt 264 is drivingly connected between the outer surfaces of one of the large transmission rollers 232 and the small transmission roller 263, the driving assembly 240 comprises a second motor 241 fixedly connected on the rear end surface of the cleaning water tank 110, the output shaft of the second motor 241 and the outer surface of the long lead screw 231 are fixedly connected with linkage rollers 242, the outer surfaces of the two linkage rollers 242 are drivingly connected with a first linkage belt 243.

[0032] The water pump 250 and the second motor 241 are turned on, the water pump 250 supplies water to the horizontal water pipe 233 through the pushing assembly 260, the water in the horizontal water pipe 233 will be sprayed out through the plurality of spray heads 234, the second motor 241 will drive the long lead screw 231 to reciprocatingly rotate forward and backward through the first linkage belt 243, the reciprocating rotation of the long lead screw 231 will drive the horizontal water pipe 233 and the spray heads 234 to reciprocatingly move left and right, the reciprocating movement of the spray heads 234 will flush the semiconductor parts in the draining net cage 130, the rotation of the long lead screw 231 will drive the large transmission rollers 232, the large transmission rollers 232 will drive the transmission belt 264, the transmission belt 264 will drive the rotating shaft 261 to rotate through the small transmission roller 263, the cam 262 will reciprocatingly lift, the lifting block 225 will drive the fixed plate block 223 and the draining net cage 130 to vibrate through the movable rod 222, the connecting spring 224 will assist the draining net cage 130 to reset, the flushing and vibration mode can improve the cleaning effect.

[0033] The lifting assembly 210 comprises two lifting screws 211 respectively rotationally connected between the top and bottom of the inner wall of the two hollow groove plates 120, the outer surfaces of the two lifting screws 211 are both threadedly connected with lifting blocks 212, the outer surfaces of the two lifting blocks 212 are both fixedly connected with a connecting rod 215, the connecting rod 215 is fixedly connected with the center plate 221, the upper portions of the outer surfaces of the two lifting screws 211 are both fixedly connected with a connecting roller, the outer surfaces of the two connecting rollers are drivingly connected with a second linkage belt 213, the top of one of the hollow groove plates 120 is fixedly installed with a first motor 214, and the output shaft of the first motor 214 is fixedly connected with the top end of one of the lifting screws 211.

[0034] When the first motor 214 is turned on, the first motor 214 will drive one of the lifting screws 211 to rotate, and the linkage of the second linkage belt 213 will drive the two lifting screws 211 to rotate and drive the lifting blocks 212 to descend, and the descending of the lifting blocks 212 will drive the draining net cage 130 to descend through the connecting rod 215, and the draining net cage 130 will enter the inside of the cleaning water tank 110 and be located below the horizontal water pipe 233.

[0035] The utility model discloses an embodiment's implementation principle is: in use, the staff installs the draining net cage 130 who installs semiconductor parts between two vibration installation components 220, and the staff palm holds two pull rods 228, and two clamping rods 227 are in to the inside of the clamping block 226, and the contraction spring 229 contracts at this time, and the clamping block 226 is clamped into the fixed plate block 223, and two pull rods 228 are loosened, and the contraction spring 229 will eject two clamping rods 227, so that two clamping rods 227 are clamped into the clamping block 226, thereby make the draining net cage 130 with vibration installation component 220 connect fixed, after connecting, open first motor 214, and first motor 214 will drive one of the lifting screw 211, and the linkage of second linkage belt 213 makes two lifting screws 211 rotate and drive lifting block 212 to descend, and lifting block 212 will descend through the linkage rod 215 and drive the draining net cage 130 to descend, and the draining net cage 130 will enter the inside of the cleaning water tank 110 and be located below the horizontal water pipe 233, and open water pump 250 and second motor 241, and water pump 250 supplies water to the horizontal water pipe 233 through the push assembly 260, and the water in the horizontal water pipe 233 will be sprayed through a plurality of sprayers 234, and second motor 241 will drive long silk rod 231 to reciprocate positive and negative rotation through first linkage belt 243, and long silk rod 231 reciprocating positive and negative rotation will drive horizontal water pipe 233 and sprayer 234 to reciprocate left and right movement, and sprayer 234 reciprocates and moves to wash the semiconductor parts in the draining net cage 130, and long silk rod 231 rotates will pass through big transmission roller 232, and big transmission roller 232 drives transmission belt 264, and transmission belt 264 will drive rotating shaft 261 to rotate through small transmission roller 263, and cam 262 will reciprocate and lift, and lifting block 225 drives fixed plate block 223 and draining net cage 130 to vibrate through movable rod 222, and the linkage spring 224 assists the draining net cage 130 to reset, and the mode of washing and vibration can improve the effect of cleaning, and after cleaning, close water pump 250, and make the draining net cage 130 vibrate for a certain time, so that the water droplets on the semiconductor parts in the draining net cage 130 are shaken down, which is convenient for subsequent drying, and after completion, close second motor 241, and open first motor 214 and drive the draining net cage 130 to move out of the cleaning water tank 110, and subsequently press two pull rods 228 to approach each other to contact the connection of clamping block 226 and fixed plate block 223, thereby the draining net cage 130 is detached from two vibration installation components 220, and another draining net cage 130 is replaced to continue the cleaning step.

[0036] The above are all preferred embodiments of the utility model, and do not limit the protection scope of the utility model, so: all equivalent changes made according to the structure, shape and principle of the utility model should be covered in the protection scope of the utility model.

Claims

1. A cooling device for semiconductor parts processing, comprising a main body module (100) and a vibration cleaning module (200), characterized in that: The main module (100) includes a cleaning water tank (110), both sides of the cleaning water tank (110) are fixedly connected with hollow groove plates (120), the bottom of the cleaning water tank (110) is fixedly connected with two supporting feet (140), and a drain valve is installed at the bottom of the cleaning water tank (110), and the inside of the cleaning water tank (110) is provided with a draining net box (130); The vibration cleaning module (200) includes a lifting assembly (210) arranged between the interiors of the two hollow groove plates (120), two vibration mounting assemblies (220) are arranged on the lifting assembly (210), the draining net box (130) is connected between the two vibration mounting assemblies (220), the inside of the cleaning water tank (110) is provided with a moving cleaning assembly (230), the rear end face of the cleaning water tank (110) is provided with a driving assembly (240), the driving assembly (240) is connected with the moving cleaning assembly (230), both sides of the cleaning water tank (110) are provided with pushing assemblies (260), the two pushing assemblies (260) are respectively in contact with the two vibration mounting assemblies (220), the two pushing assemblies (260) are connected with the moving cleaning assembly (230), and the bottom of the inner wall of the cleaning water tank (110) is provided with a water pump (250).

2. The cooling device for semiconductor parts processing according to claim 1, characterized in that: The vibration mounting assembly (220) includes a center plate (221), two movable rods (222) are movably connected in the center plate (221), a fixed plate block (223) is fixedly connected between the top ends of the two movable rods (222), a jacking block (225) is fixedly connected between the bottom ends of the two movable rods (222), two connecting springs (224) are fixedly connected between the bottom of the fixed plate block (223) and the top of the center plate (221), and the two connecting springs (224) are located outside the two movable rods (222) respectively.

3. The cooling device for semiconductor parts processing according to claim 2, characterized in that: The vibration mounting assembly (220) further includes a clamping block (226) clamped in the fixed plate block (223), the clamping block (226) is fixedly connected with the draining net box (130), two clamping rods (227) are movably connected in the clamping block (226), a contraction spring (229) is fixedly connected between the adjacent ends of the two clamping rods (227), the opposite ends of the two clamping rods (227) extend into the fixed plate block (223) respectively, a pulling groove is formed in the top of the clamping block (226), a pulling rod (228) is fixedly connected to the top of each clamping rod (227), and the two pulling rods (228) extend to the outside of the clamping block (226) through the pulling groove.

4. The cooling device for semiconductor parts processing according to claim 3, characterized in that: The mobile cleaning assembly (230) comprises a long slot formed in the rear end surface of the inner wall of the cleaning water tank (110), a long lead screw (231) is rotatably connected in the long slot, both ends of the long lead screw (231) extend to the outside of the cleaning water tank (110), a moving block is slidably connected in the long slot, a transverse water pipe (233) is connected to the moving block, a plurality of spray heads (234) are fixedly connected at equal distances on the outer surface of the transverse water pipe (233) in a ring shape, the outer surface of the transverse water pipe (233) is connected with one end of the water supply hose (270), and both ends of the long lead screw (231) are fixedly connected with large transmission rollers (232).

5. The cooling device for semiconductor parts processing according to claim 4, characterized in that: The pushing assembly (260) comprises a rotating shaft (261) rotatably connected on one side of the cleaning water tank (110), one end of the rotating shaft (261) is fixedly connected with a cam (262), the outer surface of the cam (262) is in contact with the jacking block (225), the other end of the rotating shaft (261) is fixedly connected with a small transmission roller (263), the outer surface of the small transmission roller (263) is provided with a transmission belt (264), and the transmission belt (264) is transmissionally connected between the outer surfaces of one of the large transmission rollers (232) and the small transmission roller (263).

6. The cooling device for semiconductor parts processing according to claim 5, characterized in that: The driving assembly (240) comprises a second motor (241) fixedly connected to the rear end surface of the cleaning water tank (110), the output shaft of the second motor (241) and the outer surface of the long lead screw (231) are fixedly connected with linkage rollers (242), and the outer surfaces of the two linkage rollers (242) are transmissionally connected with a first linkage belt (243).

7. The cooling device for semiconductor parts processing according to claim 6, characterized in that: The lifting assembly (210) comprises two lifting screws (211) rotatably connected between the top and bottom of the inner wall of the two hollow groove plates (120), the outer surfaces of the two lifting screws (211) are threadedly connected with lifting blocks (212), the outer surfaces of the two lifting blocks (212) are fixedly connected with link rods (215), the link rods (215) are fixedly connected with the center plate (221), the upper portions of the outer surfaces of the two lifting screws (211) are fixedly connected with link rollers, the outer surfaces of the two link rollers are transmissionally connected with a second linkage belt (213), and the top of one of the hollow groove plates (120) is fixedly installed with a first motor (214), and the output shaft of the first motor (214) is fixedly connected with the top end of one of the lifting screws (211).

Citation Information

Patent Citations

  • Semiconductor processing cooling device

    CN220135788U