Supercritical carbon dioxide production equipment

Abstract

The utility model relates to supercritical carbon dioxide production equipment which comprises an equipment tank with a cylindrical structure, cooling boxes are mounted on the top surface of the equipment tank at intervals, and cooling liquid is filled in the cooling boxes and used for cooling carbon dioxide; a first fin is arranged at the bottom of the cooling box, a plurality of rectangular holes are formed in the bottom face of the cooling box, a semiconductor chilling plate is fixed in each rectangular hole, the cold end of each semiconductor chilling plate abuts against the second fin, and the hot end of each semiconductor chilling plate corresponds to the first fin. A first partition plate, two second partition plates and a third partition plate which are distributed at intervals are sequentially arranged in the equipment tank from top to bottom, an annular plate is arranged above the first partition plate, an oil discharging pipe is arranged at the position, close to the annular plate, of the side wall of the equipment tank in a penetrating mode, and two compression assemblies are arranged between the first partition plate and the second partition plates; a plurality of lifting assemblies are installed between the third partition plate and the second partition plate located below the third partition plate. A power assembly is installed below the third partition plate, and overall work is stable and reliable.

Description

TECHNICAL FIELD

[0001] The utility model relates to supercritical carbon dioxide production device technical field especially supercritical carbon dioxide production equipment. BACKGROUND

[0002] Supercritical fluid refers to any substance that does not have distinct liquid and gas phases when temperature and pressure are above its critical point, and supercritical processes using supercritical fluids can be used in the semiconductor industry to achieve various advantages. For example, supercritical processes can be used in substrate drying processes and cleaning processes, and during supercritical carbon dioxide manufacturing, small amounts of impurities contained in the carbon dioxide can condense or deposit, and the condensed or deposited impurities can cause the substrate to be contaminated, so a supercritical fluid manufacturing device for substrate processing is needed.

[0003] In the prior art, when supercritical carbon dioxide is produced and manufactured, impurities include water and oil and other gases, and these impurities can condense or deposit when the carbon dioxide undergoes phase change, and most supercritical carbon dioxide production equipment does not have the effect of further purifying the carbon dioxide, so when the raw material is not pure, solid particles can exist in the supercritical carbon dioxide. SUMMARY

[0004] The applicant provides a supercritical carbon dioxide production equipment with a reasonable structure to effectively ensure the purity of supercritical carbon dioxide and effectively avoid solid particles in supercritical carbon dioxide, thereby ensuring the smooth progress of substrate processing work.

[0005] The technical scheme adopted by the utility model is as follows:

[0006] A supercritical carbon dioxide production equipment includes a cylindrical device tank, a cooling box is installed on the top surface of the device tank at an interval, the cooling box is filled with a cooling liquid inside for cooling carbon dioxide;

[0007] A first fin is arranged at the bottom of the cooling box, a plurality of rectangular holes are arranged on the bottom surface of the cooling box, a semiconductor refrigeration sheet is fixed in each rectangular hole, the cold end of the semiconductor refrigeration sheet is in contact with a second fin, and the hot end of the semiconductor refrigeration sheet corresponds to the first fin;

[0008] A first baffle, two second baffles and a third baffle are arranged in the device tank from top to bottom at intervals, an annular plate is arranged above the first baffle, an oil discharge pipe is arranged through the side wall of the device tank near the annular plate, two compression assemblies are arranged between the first baffle and the second baffle, a plurality of lifting assemblies are arranged between the third baffle and the second baffle below; a power assembly is arranged below the third baffle;

[0009] The center shaft is arranged in the center of the equipment tank, penetrates the top surface of the equipment tank into the cooling box, and a first blade is arranged on the center shaft between the cooling box and the equipment tank.

[0010] The outer wall of the equipment tank is provided with a finished product discharge pipe.

[0011] As a further improvement of the above technical solution:

[0012] The cooling box is in a short cylindrical structure, and the outer diameter of the cooling box is smaller than the outer diameter of the equipment tank.

[0013] An annular seat is further arranged on the inner wall of the cooling box, a baffle is arranged in the annular seat, a drain pipe is arranged through the bottom of the annular seat and penetrates the outer wall of the cooling box, an input pipe is further connected to the annular seat and penetrates the outer wall of the cooling box, and a connecting pipe is further connected to the annular seat and penetrates the inner wall of the equipment tank, and the end of the connecting pipe is close to the center shaft.

[0014] A circulating mechanism is further arranged in the cooling box, and the structure of the circulating mechanism comprises a shell fixed on the inner wall of the bottom of the cooling box, a plurality of air inlet holes are arranged on the side wall of the shell, a rotating shaft is arranged on the inner wall of the shell, a plurality of second blades are fixed on the side wall of the rotating shaft, a communication seat is fixed on the bottom of the shell, a conveying pipe is connected to one end of the shell and the other end of the conveying pipe is connected to the communication seat.

[0015] A circular groove is further arranged on the top of the center shaft, a support rod is fixed in the circular groove, a hollow pipe is fixed to the support rod, a plurality of through holes are arranged on the side wall of the hollow pipe, the plurality of through holes are arranged in the communication seat, and the rotating shaft and the hollow pipe are fixed.

[0016] A separation assembly is arranged on the center shaft, the separation assembly is used for separating oil from carbon dioxide gas, and the structure of the separation assembly comprises a plurality of heat pipes, each heat pipe is fixed on the side wall of the center shaft and penetrates the inner wall of the circular groove, and a plurality of heat-conducting plates are arranged corresponding to the heat pipes.

[0017] The structure of the compression assembly comprises a sleeve fixed on the inner wall of the equipment tank, a piston is arranged in the sleeve in a sliding manner, a sleeve rod is fixed on the side wall of the piston, and a connecting seat is arranged on the end of the sleeve rod.

[0018] A one-way valve is further arranged on the side wall of the sleeve in a penetrating manner.

[0019] A first pipe body is further arranged, the first pipe body is connected to the one-way valve, the first pipe body penetrates the top of the first partition plate, and the end of the first pipe body is close to the center shaft.

[0020] The second one-way valve is arranged through the sleeve side wall;

[0021] The second pipe body is arranged through the bottom of the second partition plate above the first pipe body.

[0022] The compression assembly is further connected with a transmission assembly, and the transmission assembly comprises a plurality of fixing supports, each fixing support is fixed to the side wall of the hollow shaft, the outer ring of the plurality of fixing supports is simultaneously fixedly installed with an elliptical guide rail, and the elliptical guide rail is slidably installed with a connecting seat.

[0023] The lifting assembly comprises a protective cover, the protective cover is fixed to the bottom of the third partition plate, a hydraulic push rod is fixed in the protective cover, the telescopic end of the hydraulic push rod penetrates through the top of the third partition plate, and the telescopic end of the hydraulic push rod is fixed to the second partition plate below.

[0024] The power assembly comprises a support frame and a connecting disc, the support frame is fixed to the bottom of the equipment tank, and the support frame is fixed with an electric motor; the connecting disc is provided with two, one of the connecting discs is rotationally arranged on the inner wall of the bottom of the cooling box, and the other connecting disc is rotationally arranged on the outer wall of the bottom of the cooling box; a plurality of mounting holes are formed in the top of each connecting disc, a strong magnet is fixed in each mounting hole; one of the connecting discs is fixed to the central shaft, and the other connecting disc is fixed to the output shaft of the electric motor.

[0025] The central shaft is a hollow shaft.

[0026] The first stirring rod and the second stirring rod are arranged, the plurality of second stirring rods are arranged between the two second partition plates, the plurality of first stirring rods are fixed to the side wall of the central shaft, and the plurality of first stirring rods are arranged below the third partition plate; the first electromagnetic valve and the second electromagnetic valve are arranged, the first electromagnetic valve is arranged through the top of the second partition plate below, the second electromagnetic valve is arranged through the top of the third partition plate, and the finished product discharge pipe is arranged through the side wall of the equipment tank below the third partition plate.

[0027] The beneficial effects of the utility model are as follows:

[0028] The utility model discloses compact structure, reasonable, convenient operation passes through the cooling assembly, separation component, compression component, the partition of no. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 It is the structure schematic diagram of the utility model.

[0030] Figure 2 It is the front view of the utility model.

[0031] Figure 3 It is the cross section structure schematic diagram of the equipment jar of the utility model.

[0032] Figure 4 It is the full cross section view of the equipment jar of the utility model.

[0033] Figure 5 It is the installation schematic diagram of the sleeve of the utility model.

[0034] Figure 6 It is the installation schematic diagram of the center shaft of the utility model.

[0035] Figure 7 It is the installation schematic diagram of the one blade and one fin of the utility model.

[0036] Figure 8 It is the cross section structure schematic diagram of the cooling box of the utility model.

[0037] Figure 9 It is the installation schematic diagram of the semiconductor refrigeration sheet and the two fin of the utility model.

[0038] Figure 10 It is the structure schematic diagram of the shell of the utility model.

[0039] Figure 11 It is the explosion structure schematic diagram of the hollow pipe and the communication seat of the utility model.

[0040] Wherein: 1, equipment tank; 2, finished product discharge pipe; 3, oil drain pipe; 4, support frame; 5, cooling box; 6, input pipe; 7, connecting pipe; 8, motor; 9, drain pipe; 10, No. 1 blade; 11, center shaft; 12, No. 1 partition; 13, annular plate; 14, No. 2 partition; 15, No. 3 partition; 16, connecting disc; 17, strong magnet; 18, protective cover; 19, No. 1 stirring rod; 20, No. 2 stirring rod; 21, sleeve; 22, No. 1 pipe body; 23, hydraulic push rod; 24, No. 1 electromagnetic valve; 25, No. 2 electromagnetic valve; 26, fixed support; 27, oval guide rail; 28, connecting seat; 29, sleeve rod; 30, piston; 31, No. 1 check valve; 32, No. 2 check valve; 33, No. 2 pipe body; 34, heat-conducting plate; 35, heat pipe; 36, support rod; 37, hollow pipe; 38, through hole; 39, No. 1 fin; 40, annular seat; 41, shell; 42, air inlet hole; 43, conveying pipe; 44, baffle; 45, semiconductor refrigeration piece; 46, No. 2 fin; 47, communication seat; 48, rotating shaft; 49, No. 2 blade. DETAILED DESCRIPTION

[0041] The specific implementation of the present application will be described below in conjunction with the accompanying drawings.

[0042] As Figures 1-11 shown, the supercritical carbon dioxide production equipment of the embodiment comprises a cylindrical equipment tank 1, and a cooling box 5 is installed on the top surface of the equipment tank 1 at intervals, the cooling box 5 is filled with cooling liquid inside, and is used for cooling carbon dioxide.

[0043] The cooling box 5 is provided with No. 1 fins 39 at the bottom, a plurality of rectangular holes are formed in the bottom surface of the cooling box 5, a semiconductor refrigeration piece 45 is fixed in each rectangular hole, the cold end of the semiconductor refrigeration piece 45 abuts against a No. 2 fin 46, and the hot end of the semiconductor refrigeration piece 45 corresponds to the No. 1 fin 39.

[0044] The inside of the equipment tank 1 is sequentially provided with a No. 1 partition 12, two No. 2 partitions 14 and a No. 3 partition 15 which are distributed at intervals from top to bottom, the annular plate 13 is arranged above the No. 1 partition 12, the oil drain pipe 3 is arranged through the side wall of the equipment tank 1 close to the annular plate 13, two compression assemblies are arranged between the No. 1 partition 12 and the No. 2 partition 14, a plurality of lifting assemblies are arranged between the No. 3 partition 15 and the No. 2 partition 14 below, and a power assembly is arranged below the No. 3 partition 15.

[0045] A center shaft 11 is arranged at the center position of the equipment tank 1, the center shaft 11 penetrates the top surface of the equipment tank 1 and enters the cooling box 5, and a No. 1 blade 10 is arranged on the center shaft 11 between the cooling box 5 and the equipment tank 1.

[0046] The finished product discharge pipe 2 is arranged on the outer wall surface of the equipment tank 1.

[0047] The cooling box 5 is in a short cylindrical structure, and the outer diameter of the cooling box 5 is smaller than the outer diameter of the equipment tank 1.

[0048] An annular seat 40 is arranged on the inner wall of the cooling box 5, a baffle 44 is arranged in the annular seat 40 in a gap mode, a drain pipe 9 is arranged through the bottom of the outer wall of the cooling box 5, the annular seat 40 is also communicated with the input pipe 6, the input pipe 6 penetrates the outer wall of the cooling box 5, and the annular seat 40 is also communicated with the connecting pipe 7, the connecting pipe 7 penetrates the inner wall of the equipment tank 1, and the end of the connecting pipe 7 is close to the central shaft 11.

[0049] A circulating mechanism is further arranged in the cooling box 5, and the structure of the circulating mechanism is as follows: a shell 41 is fixed on the inner wall of the bottom of the cooling box 5, a plurality of air inlet holes 42 are arranged on the side wall of the shell 41, a rotating shaft 48 is arranged on the inner wall of the shell 41 in a rotating mode, a plurality of second blades 49 are fixed on the side wall of the rotating shaft 48, a communication seat 47 is fixed on the bottom of the shell 41, a conveying pipe 43 is communicated with the shell 41 at one end, and the other end of the conveying pipe 43 is communicated with the communication seat 47.

[0050] A circular groove is further arranged on the top of the central shaft 11, a support rod 36 is fixed in the circular groove, a hollow pipe 37 is fixed on the support rod 36, the end of the hollow pipe 37 is close to the inner wall of the bottom of the circular groove, a plurality of through holes 38 are arranged on the top of the side wall of the hollow pipe 37, the plurality of through holes 38 are all arranged in the communication seat 47, and the rotating shaft 48 is fixed on the hollow pipe 37.

[0051] The central shaft 11 is arranged with a separation assembly, the separation assembly is used for separating oil liquid in carbon dioxide gas, and the structure of the separation assembly is as follows: a plurality of heat pipes 35 are fixed on the side wall of the central shaft 11, and each heat pipe 35 penetrates the inner wall of the circular groove; a plurality of heat-conducting plates 34 are further arranged, and the heat-conducting plates 34 and the heat pipes 35 are one-to-one corresponding and fixed.

[0052] The structure of the compression assembly is as follows: a sleeve 21 is fixed on the inner wall of the equipment tank 1, a piston 30 is arranged in the sleeve 21 in a sliding mode, a sleeve rod 29 is fixed on the side wall of the piston 30, and a connecting seat 28 is arranged at the end of the sleeve rod 29.

[0053] A first one-way valve 31 is further arranged on the side wall of the sleeve 21 in a penetrating mode;

[0054] A first pipe body 22 is further arranged, the first pipe body 22 is communicated with the first one-way valve 31, the first pipe body 22 penetrates the top of the first partition plate 12, and the end of the first pipe body 22 is close to the central shaft 11.

[0055] A second one-way valve 32 is further arranged on the side wall of the sleeve 21 in a penetrating mode;

[0056] Also include the second pipe body 33, the second pipe body 33 and the second one-way valve 32 communication, the second pipe body 33 through the bottom of the second baffle plate 14 in the upper;

[0057] The compression assembly is also connected with a transmission assembly. The transmission assembly has the structure that includes a plurality of fixed supports 26, a single fixed support 26 is fixed on the side wall of the central shaft 11, an outer ring of the plurality of fixed supports 26 is simultaneously fixedly installed with an oval guide rail 27, and the oval guide rail 27 is slidably installed with a connecting seat 28.

[0058] The lifting assembly has the structure that includes a protective cover 18, the protective cover 18 is fixed on the bottom of the third baffle plate 15, the protective cover 18 is fixedly installed with a hydraulic push rod 23, the telescopic end of the hydraulic push rod 23 penetrates through the top of the third baffle plate 15, and the telescopic end of the hydraulic push rod 23 is fixed with the second baffle plate 14 below.

[0059] The power assembly has the structure that includes a support frame 4 and a connecting disc 16, the support frame 4 is fixed on the bottom of the equipment tank 1, the support frame 4 is fixedly installed with an electric motor 8, the connecting disc 16 is provided with two, one of the connecting discs 16 is rotationally arranged on the inner wall of the bottom of the cooling box 5, the other connecting disc 16 is rotationally arranged on the outer wall of the bottom of the cooling box 5, a plurality of mounting holes are formed in the top of each of the two connecting discs 16, a strong magnet 17 is fixed in each mounting hole, one of the connecting discs 16 is fixed with the central shaft 11, and the other connecting disc 16 is fixed with the output shaft of the electric motor 8.

[0060] The central shaft 11 is a hollow shaft.

[0061] Also include a first stirring rod 19 and a second stirring rod 20, a plurality of second stirring rods 20 are between the two second baffle plates 14, a plurality of first stirring rods 19 are fixed on the side wall of the central shaft 11, and the plurality of first stirring rods 19 are below the third baffle plate 15, a first electromagnetic valve 24 and a second electromagnetic valve 25 are also included, the first electromagnetic valve 24 penetrates through the top of the second baffle plate 14 below, the second electromagnetic valve 25 penetrates through the top of the third baffle plate 15, and the finished product discharge pipe 2 penetrates through the side wall of the equipment tank 1 below the third baffle plate 15.

[0062] In actual work process, the specific work flow is:

[0063] When in use, the switch of the motor 8 is turned on, the motor 8 works to drive one of the connecting plates 16 to rotate, through the strong magnet 17, the other connecting plate 16 rotates, and then the central shaft 11 rotates, through the support rod 36, the hollow pipe 37 rotates, and then the rotating shaft 48 and the second fin 49 rotate, so that the cooling liquid in the cooling box 5 can enter the shell 41 through the air inlet hole 42, and then enter the communication seat 47 through the second fin 49 in the rotating state and the conveying pipe 43, and then the cooling liquid enters the hollow pipe 37 through the through hole 38, and then enters the circular groove bottom, and then flows to the circular groove top to enter the cooling box 5 bottom, through the effect of the baffle 44, and then moves to the surface of the annular seat 40 after flowing through the second fin 46, and finally moves to the shell 41, forming the circulation of the cooling liquid.

[0064] The switch of the semiconductor refrigeration sheet 45 is turned on, and the semiconductor refrigeration sheet 45 works to keep the second fin 46 at a lower temperature, and the airflow is generated by the first fin 10 during the rotation of the central shaft 11, and the airflow carries away the heat of the first fin 39 when flowing through the first fin 39, so that the semiconductor refrigeration sheet 45 can work for a long time, and the cooling liquid can be maintained at a lower temperature for a long time.

[0065] The carbon dioxide is input through the input pipe 6, the carbon dioxide enters the annular seat 40 through the input pipe 6, and the condensed water generated after cooling is temporarily stored at the bottom of the annular seat 40, and during the non-working period, the condensed water in the annular seat 40 can be discharged through the valve on the drain pipe 9, and the carbon dioxide enters the equipment tank 1 through the connecting pipe 7 and is located above the first partition plate 12.

[0066] The heat pipe 35 and the heat conduction plate 34 are rotated by the central shaft 11 during rotation, the low-temperature cooling liquid flowing through the circular groove makes the heat conduction plate 34 maintain a lower temperature through the heat pipe 35, and then further cools the carbon dioxide gas, so as to ensure that the water in the carbon dioxide can be fully liquefied, and at the same time, the high-speed rotation of the heat conduction plate 34 can throw the oil in the carbon dioxide to the inner wall of the equipment tank 1, and through the blocking of the annular plate 13, the water and oil in the carbon dioxide are separated, and in the non-working state, the switch of the oil discharge pipe 3 is turned on, and the condensed water and oil above the first partition plate 12 are discharged.

[0067] During the rotation of the central shaft 11, the elliptical guide rail 27 is driven to rotate by the fixed support 26, the reciprocating movement of the sleeve rod 29 is realized by cooperating with the connecting seat 28, and the periodic rising and falling of the air pressure in the sleeve 21 is realized by cooperating with the piston 30. When the air pressure in the sleeve 21 rises, the carbon dioxide in the sleeve 21 enters the device tank 1 in the space between the two second baffles 14 through the second one-way valve 32 and the second pipe body 33. When the air pressure in the sleeve 21 falls, the clean carbon dioxide gas above the first baffle 12 enters the sleeve 21 through the first pipe body 22 and the first one-way valve 31, so as to realize the compression of carbon dioxide, so that the carbon dioxide between the two second baffles 14 in the device tank 1 is in a high-pressure state.

[0068] When the switch of the first electromagnetic valve 24 is turned on, the carbon dioxide gas pressure between the second baffle 14 and the third baffle 15 above is continuously increased. When the carbon dioxide in the space reaches the critical pressure, it begins to liquefy. Then, through the working of the hydraulic push rod 23, the lower second baffle 14 is driven to move downward. When the liquid carbon dioxide moves to the space between the two second baffles 14 through the first electromagnetic valve 24, it means that the space between the lower second baffle 14 and the third baffle 15 is pure liquid carbon dioxide. Then, the switch of the first electromagnetic valve 24 is turned off, and the switch of the second electromagnetic valve 25 is turned on, so that the pure carbon dioxide enters the device tank 1 in the space below the third baffle 15. The above operation is repeated many times until the carbon dioxide in the device tank 1 below the third baffle 15 reaches the critical pressure to form supercritical carbon dioxide.

[0069] During the working process, a cooling element and a heating element need to be installed in the device tank 1 to make the carbon dioxide reach the critical temperature. This technology belongs to the prior art and is not the main innovation point of the present application, and will not be described again.

[0070] During the rotation of the central shaft 11, the first stirring rod 19 and the second stirring rod 20 are driven to rotate, so that the carbon dioxide and the cooling element and the heating element are in contact, and the liquid carbon dioxide and the supercritical carbon dioxide are formed more quickly.

[0071] Finally, when supercritical carbon dioxide is needed, it can be output through the finished product discharge pipe 2.

[0072] The above description is an explanation of the present application, not a limitation of the present application. The scope of the present application is defined in the claims, and any modification within the scope of the present application can be made.

Claims

1. A supercritical carbon dioxide production apparatus, characterized by: The utility model provides a kind of equipment tank (1) including cylinder structure, the top surface of the equipment tank (1) is spaced apart distance and is equipped with cooling box (5), cooling box (5) is filled with cooling liquid inside, for cooling carbon dioxide; Cooling box (5) bottom is provided with No. fin (39), rectangular hole is opened in the bottom surface of cooling box (5), semiconductor refrigerating sheet (45) is fixed in single rectangular hole, and the cold end of semiconductor refrigerating sheet (45) and No. fin (46) are in contact, and the hot end of semiconductor refrigerating sheet (45) corresponds with No. fin (39); Equipment tank (1) is sequentially provided with spaced distribution No. baffle (12), two No. baffle (14) and No. baffle (15) from top to bottom, annular plate (13) is arranged above No. baffle (12), oil drain pipe (3) is arranged in equipment tank (1) side wall near annular plate (13) and is penetrated, two compression components are arranged between No. baffle (12) and No. baffle (14), and multiple lifting components are installed between No. baffle (15) and the No. baffle (14) below;Power component is installed below No. baffle (15); Center shaft (11) is installed in the center position of equipment tank (1), center shaft (11) penetrates the top surface of equipment tank (1) and enters cooling box (5), No. blade (10) is installed on center shaft (11) between cooling box (5) and equipment tank (1); Finished product discharge pipe (2) is arranged on the outer wall surface of equipment tank (1).

2. The supercritical carbon dioxide production apparatus of claim 1, wherein: Cooling box (5) is short cylinder structure, and the outer diameter of cooling box (5) is less than the outer diameter of equipment tank (1).

3. The supercritical carbon dioxide production apparatus of claim 1, wherein: Annular seat (40) is further arranged on the inner wall surface of cooling box (5), baffle (44) is installed in annular seat (40) with clearance, drain pipe (9) is penetrated and arranged on the bottom of annular seat (40), and drain pipe (9) penetrates the bottom outer wall of cooling box (5);Annular seat (40) is also communicated with input pipe (6), input pipe (6) penetrates the outer wall of cooling box (5), and annular seat (40) is also communicated with connecting pipe (7), connecting pipe (7) penetrates the inner wall of equipment tank (1), and the end of connecting pipe (7) is close to center shaft (11).

4. The supercritical carbon dioxide production apparatus of claim 1, wherein: Circulating mechanism is further arranged in cooling box (5), and the structure of circulating mechanism is as follows: including shell (41), the shell (41) is fixed on the inner wall of the bottom of cooling box (5), a plurality of air inlet holes (42) are formed in the side wall of shell (41);Rotating shaft (48) is rotatably arranged on the inner wall of shell (41), a plurality of No. blades (49) are fixed on the side wall of rotating shaft (48), communication seat (47) is fixed on the bottom of shell (41), one end of conveying pipe (43) is communicated with shell (41), and the other end of conveying pipe (43) is communicated with communication seat (47); Also include a circular groove, the circular groove is opened in the top of the center axis (11), the support rod (36) is fixed in the circular groove, the hollow tube (37) and the support rod (36) are fixed, and the end of the hollow tube (37) is close to the inner wall of the bottom of the circular groove, a plurality of through holes (38) are formed in the top of the side wall of the hollow tube (37), and the plurality of through holes (38) are in the communication seat (47), and the rotating shaft (48) and the hollow tube (37) are fixed.

5. The supercritical carbon dioxide production apparatus of claim 1, wherein: The center axis (11) is provided with a separation assembly for separating oil in carbon dioxide gas, and the structure of the separation assembly is: a plurality of heat pipes (35) are fixed on the side wall of the center axis (11), and each heat pipe (35) penetrates the inner wall of the circular groove; a plurality of heat conduction plates (34) are also included, and the heat conduction plates (34) and the heat pipes (35) are one-to-one corresponding and fixed.

6. The supercritical carbon dioxide production apparatus of claim 1, wherein: The structure of the compression assembly is: a sleeve (21) is fixed on the inner wall of the equipment tank (1), a piston (30) is slidably arranged in the sleeve (21), a sleeve rod (29) is fixed on the side wall of the piston (30), and a connecting seat (28) is arranged at the end of the sleeve rod (29); A first one-way valve (31) is also included, which is arranged through the side wall of the sleeve (21); A first pipe body (22) is also included, which is in communication with the first one-way valve (31), and the first pipe body (22) penetrates the top of the first partition plate (12) and is close to the center axis (11) at the end; A second one-way valve (32) is also included, which is arranged through the side wall of the sleeve (21); A second pipe body (33) is also included, which is in communication with the second one-way valve (32), and the second pipe body (33) penetrates the bottom of the second partition plate (14) above; The compression assembly is also connected with a transmission assembly, and the structure of the transmission assembly is: a plurality of fixed supports (26) are fixed on the side wall of the center axis (11), an oval guide rail (27) is fixedly installed on the outer circle of the plurality of fixed supports (26), and the connecting seat (28) is slidably installed on the oval guide rail (27).

7. The supercritical carbon dioxide production apparatus of claim 1, wherein: The structure of the lifting assembly is: a protective cover (18) is fixed on the bottom of the third partition plate (15), a hydraulic push rod (23) is fixed in the protective cover (18), the telescopic end of the hydraulic push rod (23) penetrates the top of the third partition plate (15), and the telescopic end of the hydraulic push rod (23) is fixed on the second partition plate (14) below.

8. The supercritical carbon dioxide production apparatus of claim 1, wherein: The power assembly is structured as follows: a support frame (4) is fixed at the bottom of the equipment tank (1), and an electric motor (8) is fixed on the support frame (4); two connecting plates (16) are provided, one of which is rotatably arranged on the inner wall of the bottom of the cooling box (5), and the other is rotatably arranged on the outer wall of the bottom of the cooling box (5); a plurality of mounting holes are formed in the top of each connecting plate (16), and a strong magnet (17) is fixed in each mounting hole; one connecting plate (16) is fixed with the central shaft (11), and the other connecting plate (16) is fixed with the output shaft of the electric motor (8).

9. The supercritical carbon dioxide production apparatus of claim 1, wherein: The central shaft (11) is a hollow shaft.

10. The supercritical carbon dioxide production apparatus of claim 1, wherein: Further comprising a first stirring rod (19) and a second stirring rod (20), a plurality of second stirring rods (20) are arranged between two second partitions (14), a plurality of first stirring rods (19) are fixed on the side wall of the central shaft (11), and a plurality of first stirring rods (19) are arranged below the third partition (15); further comprising a first electromagnetic valve (24) and a second electromagnetic valve (25), the first electromagnetic valve (24) is penetratingly arranged on the top of the lower second partition (14), and the second electromagnetic valve (25) is penetratingly arranged on the top of the third partition (15); the finished product discharge pipe (2) is penetratingly arranged on the side wall of the equipment tank (1) below the third partition (15).

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