Magnetic control coating structure

Abstract

The utility model discloses a magnetic control film coating structure which comprises a box body, a lower storage box is arranged below the box body, an upper cavity is arranged above the box body, a box door is arranged at the front end of the upper cavity, a vacuum pump is fixedly installed at one end of the box body, an exhaust pipe is fixedly installed on one side of the vacuum pump, and an air outlet is formed in the other side of the box body. The device has the advantages that the L-shaped clamping frames are fixedly installed at the top ends of the fixed supporting frame and the sliding supporting frame, the spring is fixedly installed at one end of the extrusion column, the L-shaped clamping frames have high adaptability, the extrusion column is arranged on the L-shaped clamping frames, the extrusion column is arranged on the L-shaped clamping frames, and the extrusion column is arranged on the L-shaped clamping frames. The base material clamping device can clamp base materials with different shapes and sizes, so that the requirements of various coating processes are met, the base material to be coated is kept stable in the coating process, and the situation that the coating quality is reduced due to shaking or displacement of the base material is avoided.

Description

Technical Field

[0001] This utility model relates to the field of magnetic control technology, specifically a magnetic control coating structure. Background Technology

[0002] Magnetron sputtering, as a highly efficient physical vapor deposition method, has been widely used in microelectronics, optical thin films, decorative and protective coatings, and other fields. Its core lies in utilizing the sputtering effect, where high-energy ions bombard the target surface in a vacuum environment, causing target atoms to be sputtered out and deposited on the substrate to form the desired thin film. To improve sputtering efficiency and film quality, magnetron sputtering introduces a magnetic field. By controlling the trajectory of electrons through the magnetic field, the probability of collisions between electrons and gas molecules is increased, thereby improving the ionization rate and sputtering rate of the gas. The magnetic field can also regulate the distribution of sputtered particles, achieving precise control of film thickness and uniformity. The advantages of magnetron sputtering are its high sputtering efficiency, good film uniformity and adhesion, and low-temperature operation characteristics.

[0003] However, existing coating structures are unstable during the coating process, which may lead to problems such as fluctuations, misalignment, or uneven thickness in the coating, thus affecting the quality and performance of the coating and even requiring recoating. This will greatly increase production costs and time. Some chemical components are harmful to the human body and may volatilize or remain on the coating structure. Long-term contact with or inhalation of these substances may cause damage to the human skin, respiratory tract, and nervous system. Therefore, we propose a magnetron coating structure. Utility Model Content

[0004] The purpose of this invention is to provide a magnetron coating structure that is simple in structure and can stably clamp coated parts.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a magnetron sputtering structure, comprising a housing, a lower storage box at the bottom of the housing, an upper cavity at the top of the housing, a door at the front end of the upper cavity, a vacuum pump fixedly installed at one end of the housing, an extraction pipe fixedly installed on one side of the vacuum pump, a filter box in the middle of the extraction pipe, the extraction pipe connected to the upper cavity through a diffuser, the diffuser being located on the outer wall of the housing, a vent pipe also installed on the outer wall of the housing, one end of the vent pipe communicating with the upper cavity, and the other end communicating with an external pump, a sputtering structure fixedly installed at the top of the upper cavity, a magnetron sputtering structure fixedly installed at the bottom of the upper cavity below the sputtering structure, a fixed support frame fixedly installed on one side of the magnetron sputtering structure, and a sliding support frame movably installed on the other side of the magnetron sputtering structure.

[0006] As a further embodiment of this utility model: an L-shaped clamping frame is fixedly installed at the top of both the fixed support frame and the sliding support frame, and the L-shaped clamping frame is provided with an extrusion column for clamping the coated part.

[0007] As a further embodiment of this utility model: the L-shaped clamping frame has a circular groove inside, the extrusion column is movably installed in the circular groove, one end of the extrusion column is fixedly installed with a spring, the other end of the spring is fixedly connected to the L-shaped clamping frame, and the end of the extrusion column extending out of the L-shaped clamping frame is designed as a semi-circle.

[0008] As a further embodiment of this utility model: a push column is fixedly installed at one end of the sliding support frame, and multiple teeth are fixedly protruding at the bottom end of the push column. An AC motor is fixedly installed inside the upper cavity in close contact with the push column, and a gear is installed at the output end of the AC motor. The meshing teeth of the gear are meshed with the teeth.

[0009] As a further embodiment of this utility model: the sliding support frame is also fixedly installed with a guide column, and a guide groove is opened at the bottom end of the upper cavity, and the guide column is located in the guide groove and can slide along the guide groove.

[0010] As a further embodiment of this utility model: a first support plate is fixedly installed on both sides of the guide post.

[0011] As a further embodiment of this utility model: a filter plate is inserted inside the filter box, and a filter screen is fixedly installed inside the filter plate.

[0012] As a further embodiment of this utility model: the filter insert is fixedly connected to the filter box by two bolts.

[0013] As a further embodiment of this utility model: a second support plate is fixedly installed on both sides of the filter insert plate.

[0014] Compared with the prior art, the beneficial effects of this utility model by adopting the above technical solution are as follows:

[0015] 1. This utility model features an L-shaped clamping frame fixedly installed at the top of both the fixed support frame and the sliding support frame, and a spring fixedly installed at one end of the extrusion column. The L-shaped clamping frame has great adaptability and can clamp substrates of different shapes and sizes, thereby meeting the needs of various coating processes. It ensures that the substrate to be coated remains stable during the coating process, avoiding a decrease in coating quality due to substrate shaking or displacement, and avoiding problems such as uneven film thickness and increased surface roughness. This improves the overall coating quality, reduces the number of adjustments during the coating process, saves time, and increases production efficiency.

[0016] 2. This utility model effectively removes harmful chemical substances generated during the coating process, such as heavy metal ions and volatile organic compounds, by setting up an easily removable filter screen. If these substances remain in the coating layer, they will affect the quality and performance of the coating. The easily removable filter screen can trap these harmful substances inside the filter screen, preventing them from entering the atmosphere, water source or soil, thereby protecting the environment and the health of workers. It can also optimize the coating process, making it more stable and controllable, thereby improving coating efficiency and consistency.

[0017] Other advantages, objectives and features of this invention will be set forth in part in the description which follows, and in part will be apparent to those skilled in the art from the following examination or study, or may be taught from the practice of this invention. Attached Figure Description

[0018] Figure 1 This is a front view schematic diagram of the structure in the embodiment of this utility model.

[0019] Figure 2 This is a schematic cross-sectional view of the structure in an embodiment of this utility model.

[0020] Figure 3 This is a schematic diagram of the sliding support frame and AC motor in an embodiment of this utility model.

[0021] Figure 4 for Figure 3 Schematic diagram of structure A in the middle.

[0022] Figure 5 This is a schematic diagram of the filter insert in an embodiment of the present invention.

[0023] In the picture:

[0024] 11. Cabinet body; 12. Lower storage compartment; 13. Upper cavity; 14. Cabinet door; 15. Vacuum pump; 16. Vent pipe; 17. Extraction pipe; 18. Filter box; 19. Diffuser;

[0025] 21. Sputtering structure; 22. Magnetically controlled structure; 23. Fixed support frame; 24. Sliding support frame; 25. L-shaped clamping frame; 26. Push column; 27. Guide column; 28. First support plate; 29. ​​AC motor;

[0026] 31. Circular groove; 32. Extrusion column; 33. Spring; 34. Filter insert plate; 35. Filter screen; 36. Second support plate; 37. Bolt. Detailed Implementation

[0027] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that the description of these embodiments is for the purpose of helping to understand this utility model, but does not constitute a limitation on this utility model.

[0028] Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0029] Please see the appendix Figure 1 -Appendix Figure 5 This utility model discloses a magnetron sputtering coating structure, comprising a housing 11, a lower storage box 12 at the bottom of the housing 11, an upper cavity 13 at the top of the housing 11, a door 14 at the front end of the upper cavity 13, a vacuum pump 15 fixedly mounted at one end of the housing 11, an extraction pipe 17 fixedly mounted on one side of the vacuum pump 15, a filter box 18 disposed in the middle of the extraction pipe 17, and the extraction pipe 17 connected to the upper cavity 13 through a diffuser 19 located on the outer wall of the housing 11. A vent pipe 16 is also installed on the outer wall of the housing 11, one end of which is connected to the upper cavity 13, and the other end is connected to an external pump. A sputtering structure 21 is fixedly mounted at the top of the upper cavity 13, and a magnetron sputtering structure 22 is fixedly mounted at the bottom of the upper cavity 13 below the sputtering structure 21. A fixed support frame 23 is fixedly mounted on one side of the magnetron sputtering structure 22. On the other side of structure 22, a sliding support frame 24 is movably installed, which can clamp substrates of different shapes and sizes, thereby meeting the needs of various coating processes, ensuring that the substrate to be coated remains stable during the coating process, avoiding the degradation of coating quality caused by substrate shaking or displacement, and avoiding problems such as uneven film thickness and increased surface roughness. During operation, the part to be coated is placed above two L-shaped clamping frames 25. The AC motor 29 drives the push column 26 to push the two L-shaped clamping frames 25 closer together. The first support plate 28 provides a stable guiding effect, squeezing the part to be coated downwards. The squeezing column 32 is squeezed and retracts inwards. The semi-circular design of the squeezing column 32 adapts to uneven structures. Under the action of the spring 33, the part to be coated is squeezed and fixed. The chamber door 14 is closed, and the vacuum pump 15 extracts air to make the upper cavity 13 a vacuum environment. The magnetron control structure 22 controls the magnetic field, and the sputtering structure 21 performs sputtering to complete the coating.

[0030] Both the fixed support frame 23 and the sliding support frame 24 are fixedly mounted with L-shaped clamping frames 25 at their top ends. The L-shaped clamping frames 25 have high adaptability, capable of clamping substrates of different shapes and sizes, thus meeting the needs of various coating processes. This ensures the substrate to be coated remains stable during the coating process, avoiding a decrease in coating quality due to substrate shaking or displacement, and preventing problems such as uneven film thickness and increased surface roughness. The L-shaped clamping frames 25 are equipped with extrusion columns 32 for clamping the coated parts, and the interior of the L-shaped clamping frames 25 has a circular groove 31. An extrusion column 32 is movably installed in the groove 31. A spring 33 is fixedly installed at one end of the extrusion column 32, and the other end of the spring 33 is fixedly connected to the L-shaped clamping frame 25. The end of the extrusion column 32 extending out of the L-shaped clamping frame 25 has a semi-circular design. By setting the extrusion column 32, it can correspond to different grooves and clamp substrates of different shapes and sizes, thereby meeting the needs of various coating processes and ensuring that the substrate to be coated remains stable during the coating process. A push column 26 is fixedly installed at one end of the sliding support frame 24. The bottom end of the push column 26 has multiple fixed protrusions arranged in an array. An AC motor 29 is fixedly installed inside the upper cavity 13, close to the push column 26. A gear is installed at the output end of the AC motor 29, and the meshing teeth of the gear mesh with the teeth. A guide column 27 is also fixedly installed on the sliding support frame 24. A guide groove is opened at the bottom of the upper cavity 13, and the guide column 27 is located in the guide groove and can slide along the guide groove. First support plates 28 are fixedly installed on both sides of the guide column 27. A filter insert plate 34 is inserted inside the filter box 18, and a filter screen 35 is fixedly installed inside the filter insert plate 34. The filter screen 35 effectively removes harmful chemicals generated during the coating process, such as heavy metal ions and volatile organic compounds. The filter plate 34 is fixedly connected to the filter box 18 by two bolts 37. The easily removable filter plate 34 can trap these harmful substances in the filter screen 35, preventing them from entering the atmosphere, water source or soil, thereby protecting the environment and the health of workers. It can optimize the coating process, making it more stable and controllable, thereby improving coating efficiency and consistency. A second support plate 36 is fixedly installed on both sides of the filter plate 34.

[0031] Working principle:

[0032] First, during operation, the coated part is placed above the two L-shaped clamps 25. The AC motor 29 drives the push column 26 to push the two L-shaped clamps 25 closer together. The first support plate 28 provides a stable guide and squeezes the coated part downward. The extrusion column 32 is squeezed and retracts inward. The semi-circular design of the extrusion column 32 adapts to uneven structures. Under the force of the spring 33, the coated part is squeezed and fixed. The chamber door 14 is closed, and the vacuum pump 15 extracts air to make the upper cavity 13 a vacuum environment. The magnetron control structure 22 controls the magnetic field, and the sputtering structure 21 performs sputtering. After coating is completed, air is introduced through the vent pipe 16 and then extracted by the vacuum pump 15. During the process, the filter screen 35 in the filter box 18 effectively filters and reduces the retention of harmful chemicals. When the filter plate 34 needs to be replaced, the bolt 37 is removed and the filter plate 34 is pulled out to complete the replacement. At this point, the entire workflow is completed.

[0033] The terms "front," "back," "left," "right," "top," and "bottom" all refer to the figures in the accompanying drawings. Figure 1 Based on the perspective of the observer, the side of the device facing the observer is defined as the front, the left side of the observer is defined as the left, and so on.

[0034] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this utility model.

[0035] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments.

[0036] For those skilled in the art, various changes, modifications, substitutions, and alterations to these embodiments without departing from the principles and spirit of this utility model will still fall within the protection scope of this utility model.

Claims

1. A magnetron coating structure, comprising a box (11), a lower storage box (12) is arranged below the box (11), an upper cavity (13) is arranged above the box (11), and a box door (14) is arranged at the front end of the upper cavity (13), characterized in that: One end of the box (11) is fixedly installed with a vacuum pump (15), one side of the vacuum pump (15) is fixedly installed with an exhaust pipe (17), the middle of the exhaust pipe (17) is provided with a filter box (18), the exhaust pipe (17) is connected with the upper cavity (13) through a diffusion port (19), the diffusion port (19) is arranged on the outer wall of the box (11), the outer wall of the box (11) is also provided with a breather pipe (16), one end of the breather pipe (16) is communicated with the upper cavity (13), the other end is communicated with an external pump, the top end of the upper cavity (13) is fixedly installed with a sputtering structure (21), the bottom end of the upper cavity (13) is fixedly installed below the sputtering structure (21) with a magnetron structure (22), one side of the magnetron structure (22) is fixedly installed with a fixed support frame (23), the other side of the magnetron structure (22) is movably installed with a sliding support frame (24).

2. A magnetron sputtering coating structure according to claim 1, characterized in that: The top end of the fixed support frame (23) and the sliding support frame (24) is fixedly installed with an L-shaped clamping frame (25), the L-shaped clamping frame (25) is provided with an extrusion column (32) for clamping the plated film part.

3. A magnetron sputtering coating structure according to claim 2, wherein: The inside of the L-shaped clamping frame (25) is provided with a circular groove (31), the extrusion column (32) is movably installed in the circular groove (31), one end of the extrusion column (32) is fixedly installed with a spring (33), the other end of the spring (33) is fixedly connected with the L-shaped clamping frame (25), one end of the extrusion column (32) extending out of the L-shaped clamping frame (25) is designed as a semicircle.

4. The magnetron sputtering coating structure of claim 1, wherein: One end of the sliding support frame (24) is fixedly installed with a push column (26), a plurality of teeth are fixedly arranged on the bottom end of the push column (26), an alternating current motor (29) is fixedly installed on the position close to the push column (26) in the upper cavity (13), a gear is installed on the output end of the alternating current motor (29), the meshing teeth of the gear are meshed with the teeth.

5. A magnetron sputtering coating structure according to claim 4, wherein: The sliding support frame (24) is also fixedly installed with a guide column (27), a guide groove is formed in the bottom end of the upper cavity (13), the guide column (27) is located in the guide groove and can slide along the guide groove.

6. A magnetron sputtering coating structure according to claim 5, wherein: First support plates (28) are fixedly installed on both sides of the guide column (27).

7. A magnetron sputtering coating structure according to claim 1, wherein: A filter plug-in board (34) is inserted in the filter box (18), a filter screen (35) is fixedly installed in the filter plug-in board (34).

8. A magnetron sputtering coating structure according to claim 7, wherein: The filter plug-in board (34) is fixedly connected with the filter box (18) through two bolts (37).

9. A magnetron sputtering coating structure according to claim 7, wherein: Second support plates (36) are fixedly installed on both sides of the filter plug-in board (34).

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