Product transfer device

Abstract

The utility model provides a product transfer device, which comprises a jacking mechanism, a lifting mechanism, a lifting mechanism and a lifting mechanism, wherein the jacking mechanism is used for jacking a material sheet which is conveyed to a clamping station by a runner to a first height, and the jacking mechanism is positioned below the runner; the clamping jaw comprises at least one pair of jaw parts and a driving unit; the jaw parts are used for clamping the two opposite sides of the material sheet; the driving unit is used for driving the jaw parts to execute clamping or releasing actions; and the moving mechanism is used for moving the clamping jaw to a second height right above the material sheet located at the clamping station and moving the clamping jaw to enable the supporting edge to just support the material sheet in the clamping action process of the jaw part. According to the utility model, the problem that the vacuum chuck is difficult to carry out effective adsorption or the adsorption effect is poor is solved, and the ever-increasing process requirements are met.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of semiconductor processing, especially relates to a product transfer device. BACKGROUND

[0002] In the field of semiconductor processing, when the wafer (usually refers to the substrate of silicon wafer or other semiconductor material) is conveyed to the corresponding station by the flow channel, it needs to be transferred to the downstream mechanism. However, the existing product transfer mode mainly relies on the vacuum chuck to adsorb the upper surface of the wafer, which has certain limitations. First, with the development of semiconductor technology, the area available for adsorption on the wafer gradually decreases, making it difficult for the vacuum chuck to effectively adsorb. Second, for the wafer with large warping, the adsorption effect of the vacuum chuck is not good, which cannot guarantee the stable transfer of the wafer.

[0003] Therefore, the existing product transfer device cannot meet the growing process demand. SUMMARY

[0004] Therefore, in view of the above technical problems, a product transfer device is provided.

[0005] To solve the above technical problems, the utility model adopts the following technical scheme:

[0006] A product transfer device, characterized in that it comprises:

[0007] A lifting mechanism for lifting the wafer conveyed by the flow channel to the clamping station to a first height, the lifting mechanism being located below the flow channel;

[0008] A clamping jaw, the clamping jaw comprising at least one pair of jaw parts for clamping on opposite sides of the wafer and a driving unit for driving the jaw parts to perform clamping or releasing actions, the jaw parts comprising a plurality of clamping fingers, the plurality of clamping fingers being arranged in parallel and spaced apart along the target clamping edge of the wafer, the lower end of the clamping finger having a lower surface of the clamping finger for supporting the target clamping edge, the driving unit being connected with the jaw parts;

[0009] A moving mechanism for moving the clamping jaw to a second height located directly above the wafer in the clamping station, and moving the clamping jaw during the clamping action of the jaw parts so that the lower edge of the clamping finger just supports the wafer, the moving mechanism being connected with the clamping jaw, and the second height being higher than the first height.

[0010] The utility model is not like the prior art that relies on the vacuum chuck to adsorb the wafer, but first lifts the wafer, then clamps the wafer by the clamping jaw and transfers it, solving the problem of difficult effective adsorption or poor adsorption effect of the vacuum chuck, and meeting the growing process demand. BRIEF DESCRIPTION OF DRAWINGS

[0011] Figure 1 It is a three-dimensional structure schematic view of the utility model;

[0012] Figure 2 It is a three-dimensional structure schematic view of the utility model's jacking mechanism;

[0013] Figure 3 It is a three-dimensional structure schematic view of the utility model's clamping jaw and moving mechanism. DETAILED DESCRIPTION

[0014] The embodiments of the utility model will be described below in conjunction with the drawings in the specification. It should be noted that the embodiments involved in the specification are not exhaustive, and do not represent the only embodiment of the utility model. The following examples are only for the purpose of clearly explaining the utility model content of the utility model patent, and are not a limitation on the embodiments thereof. For ordinary skilled persons in the art, different forms of changes and modifications can be made on the basis of the embodiment description, and any changes or modifications within the technical concept and utility model content of the utility model are within the protection scope of the utility model.

[0015] As shown in the figure, Figure 1 The embodiment provides a product transfer device, which comprises a jacking mechanism 1100, a clamping jaw 1200 and a moving mechanism 1300.

[0016] The jacking mechanism 1100 is located below the flow channel 2 and is used to lift the material sheet transported by the flow channel 2 to the first height of the clamping station.

[0017] In the embodiment, as shown in the figure, Figure 2 The jacking mechanism 1100 is composed of two jacking cylinders 1110, which are arranged on a lifting platform 1120 that can be lifted under the drive of a lifting motor 1130.

[0018] Among them, the flow channel 2 has a jacking hole for the two jacking cylinders 1110 to pass through up and down.

[0019] As shown in the figure, Figure 3 The clamping jaw 1200 comprises a plate body 1210, two pairs of jaw parts 1220 and a driving unit 1230.

[0020] The plate body 1210 is horizontally arranged, and the four corners and the left and right sides are respectively provided with limit fingers 1210.

[0021] The two pairs of claw portions 1220 are arranged in front and back and left and right, respectively, for clamping the material sheet on the front, back, left and right sides. Each claw portion 1220 includes two clamping fingers 1221, which are formed by extending downward from both ends of the crossbeam 1222 and are arranged in parallel and spaced apart along the target clamping edge of the material sheet. Taking the two clamping fingers 1221 of the left claw portion 1220 as an example, the corresponding target clamping edge is the left edge of the material sheet.

[0022] The lower end of each clamping finger 1221 has a supporting edge 1221a for supporting the lower surface of the target clamping edge.

[0023] It can be understood that the number of claw portions 1220 can also be omitted to one pair.

[0024] The driving unit 1230 is used to drive the claw portion 1220 to perform clamping or releasing action, which is composed of four translation cylinders 1231, which are fixed on the upper surface of the plate body 1210 and connected with the crossbeams 1222 of the corresponding claw portions 1220, respectively.

[0025] The moving mechanism 1300 includes a lifting module 1310 for lifting the clamping jaw 1200, a horizontal moving module 1320 for horizontally moving the clamping jaw 1200, and a rotating module 1330 for rotating the clamping jaw 1200 by 180 degrees.

[0026] The lifting module 1310 and the horizontal moving module 1320 both adopt electric cylinders.

[0027] The horizontal moving module 1320 is arranged on the lifting module 1310, and a connecting frame 1340 is arranged thereon. The rotating module 1330 adopts a rotating cylinder, which is fixed on the connecting frame 1340, and the clamping jaw 1200 is connected with the rotating module 1330.

[0028] The working process of the product transfer device of the embodiment is as follows:

[0029] 1. The flow channel 2 delivers the carrier 3 carrying the material sheet to the clamping station. At this time, the clamping jaw 1200 is located at the initial position, i.e. directly above the material sheet in the clamping station.

[0030] 2. Under the driving of the moving mechanism 1300, the clamping jaw 1200 is lowered to the second height. At this time, the claw portions 1220 are in the open releasing state.

[0031] 3. The jacking mechanism 1100 acts to lift the material sheet out of the carrier 3 and to the first height, which is smaller than the second height. In this process, the limiting fingers 1210 on the plate body 1210 limit the periphery of the material sheet to avoid the position of the material sheet from being deviated.

[0032] 4. While the moving mechanism 1300 drives the gripper 1200 to rise, the gripper 1220 performs a closing action, so that the gripping finger 1221 holds the material piece, and the material piece is just supported by the supporting edge 1221a of the gripping finger 1221.

[0033] 5. After the gripper 1200 holds the material sheet, the moving mechanism 1300 drives the gripper 1200 to move the material sheet to the discharge position.

[0034] In order to adapt to the downstream mechanism, the rotating module 1330 can rotate the gripper 1200 horizontally, so that the material sheet can be rotated horizontally by 180 degrees. Of course, for scenarios where the downstream mechanism does not require the material sheet to be rotated horizontally by 180 degrees, the rotating module 1330 can also be omitted.

[0035] As can be seen from the above, the product transfer device provided in this application embodiment does not rely on vacuum suction cups to adsorb the material sheet as in the prior art. Instead, it first lifts the material sheet and then uses grippers to hold the material sheet for transfer, which solves the problem that vacuum suction cups are difficult to adsorb effectively or have poor adsorption effect, and meets the growing process requirements.

[0036] Obviously, those skilled in the art should recognize that the above embodiments are only used to illustrate the present utility model and are not intended to limit the present utility model. Any changes or modifications to the above embodiments within the essential spirit of the present utility model will fall within the scope of the claims of the present utility model.

Claims

1. A product transfer device, characterized in that, include: A lifting mechanism for lifting a sheet material that will be conveyed to the clamping station by the flow channel to a first height, the lifting mechanism being located below the flow channel; The gripper includes at least one pair of gripper portions for gripping the opposite sides of the material sheet and a drive unit for driving the gripper portions to perform gripping or releasing actions. The gripper portions include a plurality of gripping fingers arranged parallel to and spaced apart along the target gripping edge of the material sheet. The lower end of each gripping finger has a support edge for supporting the lower surface of the target gripping edge. The drive unit is connected to the gripper portions. A moving mechanism for moving the gripper to a second height directly above the material sheet at the clamping station, and for moving the gripper during the clamping action so that the support edge precisely supports the material sheet, the moving mechanism being connected to the gripper, the second height being higher than the first height.

2. The product transfer device according to claim 1, characterized in that, The lifting mechanism includes two lifting cylinders.

3. The product transfer device according to claim 1, characterized in that, The gripper also includes a horizontally arranged plate. There are two pairs of grippers, arranged in front, back, left, and right respectively. Each gripper has two gripping fingers, which are formed by the two ends of a crossbeam extending downwards. The drive unit consists of four translation cylinders, all of which are fixed to the upper surface of the plate and connected to the crossbeam of the corresponding gripper.

4. A product transfer device according to claim 3, characterized in that, The plate is surrounded by multiple limiting fingers that limit the material sheet during the lifting process when the gripper is at the second height.

5. A product transfer device according to claim 4, characterized in that, The moving mechanism includes a lifting module for driving the gripper to rise and fall and a horizontal moving module for driving the gripper to move horizontally. The horizontal moving module is mounted on the lifting module, and the gripper is mounted on the horizontal moving module via a connecting frame.

6. A product transfer device according to claim 5, characterized in that, The moving mechanism also includes a rotating module for driving the gripper to rotate horizontally by 180 degrees. The rotating module is fixed on the connecting frame, and the gripper is connected to the rotating module.

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