Wafer protection member and cutting device

Abstract

The utility model relates to a wafer protection component and a cutting device, and the protection component comprises a box body which is used for containing a wafer, the wafer is used for being arranged above an opening, and the wafer is used for being fixed to the bottom of a suspension component; one end of the connecting rod is fixedly connected with the box body; the sliding component comprises a sliding rod and a fixing part used for detachably connecting the sliding rod to the hanging component, the sliding rod extends in the horizontal direction, and the other end of the connecting rod is slidably connected with the sliding rod in the horizontal direction. Therefore, the box body can conveniently move the wafer on the cutting device so as to cut and process the wafer, and meanwhile, the wafer can be well protected when being hung on the hanging component. According to the technical scheme of the utility model, the wafer is prevented from falling, degumming, damage and other unfavorable conditions when the wafer is subjected to sawing and unloading operation, so that the wafer damage is greatly reduced, the yield of the wafer is effectively improved, and the operation convenience and safety in the wafer processing process are ensured.

Description

Technical Field

[0001] This disclosure relates to the field of wafer moving and cutting technology, and more specifically, to a wafer protective component and a cutting apparatus. Background Technology

[0002] Silicon carbide (SiC) is a compound semiconductor material composed of carbon and silicon. SiC materials have characteristics such as a large band gap, high breakdown electric field, high thermal conductivity, high electron saturation velocity, and strong radiation resistance. However, due to the high hardness, brittleness, and good wear resistance of SiC crystals, the overall shape of silicon carbide ingots is relatively fragile after cutting. They are only supported by the resin support strip above, and cracks, fragments, delamination, and falling are prone to occur during the sawing and unloading process. After cutting, a series of operations such as cleaning and delamination are required, which carries certain risks. Whether done manually or by loading and unloading, slight shaking is unavoidable and can cause damage to the wafers. Utility Model Content

[0003] The purpose of this disclosure is to provide a protective component and a dicing apparatus for a wafer, so as to at least partially solve the technical problems existing in the related art.

[0004] To achieve the above objectives, a first aspect of this disclosure provides a protective member for a wafer, the wafer being suspended at the bottom of a suspension member of a dicing apparatus, the protective member comprising:

[0005] A housing with a top opening for holding a wafer, wherein the wafer is positioned above the opening and secured to the bottom of a suspension member; and

[0006] The connecting rod, one end of which is fixedly connected to the housing; and

[0007] A sliding component includes a slide rod and a fixing part for detachably connecting the slide rod to the suspension member, wherein the slide rod extends in a horizontal direction and the other end of the connecting rod is slidably connected to the slide rod in a horizontal direction.

[0008] Optionally, the fixing part includes fixing rods fixed to both ends of the slide rod, the slide rod and the two fixing rods are constructed together as a U-shaped rod structure with the opening facing the suspension member, and the two fixing rods are detachably connected to the suspension member.

[0009] Optionally, one end of the fixing rod is integrally formed with the sliding rod, and the other end is inserted into the suspension component.

[0010] Optionally, the link includes:

[0011] The first segment extends vertically and its top end is slidably connected to the slide rod; and

[0012] The second section is constructed as an inverted L-shaped rod with its opening facing the box body, and the two ends of the L-shaped rod are connected between the bottom end of the first section and the box body.

[0013] Optionally, a sliding sleeve is provided at the top of the first segment, and the sliding sleeve is slidably fitted onto the slide rod.

[0014] Optionally, the housing includes:

[0015] The bottom wall has a U-shaped cross-section with the opening facing upwards; and

[0016] The peripheral wall is arranged around the periphery of the bottom wall and extends vertically upward to form an accommodating space together with the bottom wall.

[0017] Optionally, the peripheral wall includes:

[0018] Two main walls, positioned opposite each other and spaced apart, are fixedly connected to the bottom wall; and

[0019] Two movable walls are erected opposite to and spaced apart between the two main walls, and the two movable walls are detachably connected to the two main walls and the bottom wall, respectively.

[0020] Optionally, the movable wall is magnetically engaged with the main wall and the bottom wall.

[0021] Optionally, there are two connecting rods, and two sets of sliding components are respectively provided for the two connecting rods. The two connecting rods correspond one-to-one with the two main walls, and each connecting rod is connected between its corresponding main wall and the sliding rod.

[0022] Optionally, the connecting rod, the main body wall, and the bottom wall are integrally formed.

[0023] According to a second aspect of this disclosure, a wafer cutting apparatus is provided, including a suspension member and a protective member as described above.

[0024] Through the above technical solution, the wafer is supported by a housing and slidably connected between the housing and the suspension component by a connecting rod and a sliding component. This allows the housing to easily move the wafer on the cutting device for cutting while ensuring good protection of the wafer when suspended by the suspension component. Furthermore, because the sliding rod and suspension component are detachably connected, the wafer can detach from the suspension component along with the housing. This prevents the wafer from falling, delaminating, or being damaged during the sawing and unloading operation, significantly reducing wafer damage, effectively improving wafer yield, and ensuring the convenience and safety of operation during wafer processing.

[0025] Other features and advantages of this disclosure will be described in detail in the following detailed description section. Attached Figure Description

[0026] The accompanying drawings are provided to further illustrate the present disclosure and form part of the specification. They are used together with the following detailed description to explain the present disclosure, but do not constitute a limitation thereof. In the drawings:

[0027] Figure 1 This is a partial structural schematic diagram of a cutting device provided in an exemplary embodiment of this disclosure;

[0028] Figure 2 This is a partial structural schematic diagram of a cutting device provided in another exemplary embodiment of this disclosure;

[0029] Figure 3 This is a schematic diagram of the overall structure of the protective component provided in an exemplary embodiment of this disclosure;

[0030] Figure 4 Cross-sectional view of a box provided by an exemplary embodiment of this disclosure.

[0031] Explanation of reference numerals in the attached figures

[0032] 1-Box body; 11-Bottom wall; 12-Surrounding wall; 121-Main body wall; 122-Movable wall; 2-Connecting rod; 21-First section; 22-Second section; 23-Sliding sleeve; 3-Sliding component; 31-Sliding rod; 32-Fixed rod; 4-Suspension component. Detailed Implementation

[0033] The specific embodiments of this disclosure will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit this disclosure.

[0034] In this disclosure, unless otherwise stated, directional terms such as "inner" and "outer" refer to the outline of the corresponding component itself; directional terms such as "upper," "lower," "top," "bottom," "horizontal," and "vertical" are defined based on the usage habits of the protective components provided in this disclosure. Specifically, refer to... Figure 1 In the diagrams shown, the direction indicated by the Z-arrow is top and apex, and vice versa; the X and Y directions refer to the horizontal direction, and the Z-direction refers to the vertical direction. Terms such as "first" and "second" used in this disclosure are for distinguishing one element from another and do not indicate sequence or importance. Furthermore, in the following description, when referring to the accompanying drawings, the same reference numerals in different drawings denote the same or similar elements.

[0035] Reference Figures 1-4This disclosure provides a protective component for a wafer. The wafer (not shown in the figure) can be suspended at the bottom of a suspension component 4 of a cutting apparatus. In the embodiments provided in this disclosure, the wafer can be detachably suspended on the bottom wall of the suspension component 4 by adhesive along the direction of gravity, so as to move with the suspension component 4 according to the cutting requirements. Figure 1 and Figure 2 As shown, the protective component may include a housing 1, a connecting rod 2, and a sliding component 3 connected in sequence. The housing 1 is used to hold wafers. Specifically, the top of the housing 1 may have an opening facing the suspension component 4 and spaced apart below the suspension component 4, allowing the wafer to be inserted into the housing 1 through the opening and positioned above the housing 1. The sliding component 3 may include a sliding rod 31 and a fixing part connected to each other. The sliding rod 31 extends horizontally. One end of the connecting rod 2 is fixedly connected to the housing 1, and the other end of the connecting rod 2 is slidably connected to the sliding rod 31 horizontally. This allows the housing 1 to slide the wafer horizontally when it detaches from the suspension component 4, enabling wafer cutting as needed. The fixing part can detachably connect the sliding rod 31 to the suspension component 4. This ensures the stability and safety of each component during operation, and allows the fixing part to be selectively connected to either the sliding rod 31 or the suspension component 4 depending on the specific application scenario, facilitating component inspection and maintenance.

[0036] Through the above technical solution, the housing 1 supports the wafer, and is slidably connected to the suspension member by the connecting rod 2 and the sliding component 3. This allows the housing 1 to easily move the wafer on the cutting device for cutting processing, while also ensuring good protection for the wafer when suspended by the suspension member 4. Furthermore, since the sliding rod 31 is detachably connected to the suspension member 4, the wafer can detach from the suspension member 4 along with the housing 1. This prevents the wafer from falling, delaminating, or being damaged during the sawing and unloading operation, greatly reducing wafer damage, effectively improving the wafer yield, and ensuring the convenience and safety of operation during wafer processing.

[0037] Reference Figure 1The fixing part may include two fixing rods 32. One end of each fixing rod 32 can be fixedly connected to both ends of the sliding rod 31, so that the sliding component 3 can be constructed as a U-shaped rod structure with its opening facing the suspension member 4. This facilitates the installation of the sliding component 3 on the fixing member 4, and at the same time, simplifies the construction of the sliding component and conforms to the principle of lightweight design. The other ends of the two fixing rods 32 can be detachably connected to the suspension member 4. This effectively distributes the load through the two fixing rods 32, improves the reliability and stability of the sliding component 3, and effectively reduces the deformation and shaking of the sliding component 3 during use, thereby improving the safety of the housing 1 when moving when loading wafers, and at the same time realizing the detachable connection between the sliding rod 31 and the fixing member 4. According to some embodiments provided in this disclosure, such as Figure 2 and Figure 3 As shown, the protective component may include two sliding parts 3, which can be symmetrically arranged on both sides of the suspension component 4 along the X direction, and the openings of the two sliding parts 3 can be connected to each other, so as to effectively enhance the connection strength between the sliding parts 3 and the suspension component 4, thereby greatly improving the overall stability and safety of the protective component and ensuring the protection effect on the wafer.

[0038] Reference Figure 1 One end of the fixing rod 32 can be integrally formed with the sliding rod 31. By directly integrally forming the fixing rod 32 with both ends of the sliding rod 31, the installation process of the fixing rod 32 and the sliding rod 31 is simpler and more reliable, reducing the need for additional connecting parts, lowering the assembly difficulty, and improving the structural strength of the sliding component 3. According to some embodiments provided in this disclosure, the other end of the fixing rod 32 can be inserted into the suspension member 4, thereby realizing a detachable connection between the sliding component 3 and the suspension member 4. This makes the installation of the sliding component 3 more flexible, and the sliding component 3 can be adjusted or disassembled at any time according to the wafer processing to adapt to different working requirements. For example, when the wafer needs to be removed from the suspension member 4, the sliding component 3 can be detached from the suspension member 4, so that the housing 1 and the suspension member 4 can be separated from each other, and the wafer can be completely removed from the suspension member 4.

[0039] Reference Figures 1-3 The connecting rod 2 may include a first segment 21 and a second segment 22. The first segment 21 may extend vertically and its top end may be slidably connected to the slide rod 31. The second segment 22 may be constructed as an inverted L-shaped rod with its opening facing the housing 1. The two ends of the L-shaped rod are connected between the bottom end of the first segment 21 and the housing 1. This design protects the chip from external scratches and also prevents interference between the rod and the chip, effectively preventing the chip from moving or being damaged during operation. This design improves the structure of the connecting rod 2 itself and effectively enhances the protective capability of the protective component for the chip.

[0040] Reference Figure 1 The top of the first segment 21 can be provided with a sliding sleeve 23, and the sliding sleeve 23 can be slidably fitted on the sliding rod 31. This not only effectively improves the connection strength between the first segment 21 and the sliding rod 31, but also enables the sliding connection between the connecting rod 2 and the sliding rod 31, thereby ensuring the smoothness of the sliding process of the connecting rod 2 driving the box 1, reducing the resistance during sliding, and improving the flexibility and ease of operation of the protective component.

[0041] Reference Figure 1 , Figure 3 as well as Figure 4 The housing 1 may include a bottom wall 11 and a peripheral wall 12. The bottom wall 11 has a U-shaped cross-section with the opening facing upwards. The U-shaped bottom wall 11 can effectively guide the wafer to slide to the lowest end of the bottom wall 11 when it is detached from the suspension member 4, reducing the movement path of the wafer within the housing 1 and ensuring that it falls smoothly into the bottom of the housing 1. The peripheral wall 12 can be arranged around the periphery of the bottom wall 11 and extend vertically upwards, so that it can form a semi-enclosed receiving space together with the bottom wall 11, ensuring the wafer's load-bearing capacity without interfering with the wafer. At the same time, the cooperation between the U-shaped bottom wall 11 and the peripheral wall 12 provides a safer receiving space for the wafer, keeping the wafer stable within the housing 1 and preventing displacement or flipping of the wafer during cutting or transportation. In addition, the U-shaped design allows the housing 1 to better adapt to wafers of different shapes and sizes. It should be noted that the U-shaped structure in this disclosure can also be adaptively adjusted according to wafers of different sizes and shapes to improve the adaptability of the housing 1 and thus meet various receiving needs.

[0042] Reference Figures 1-3 The peripheral wall 12 may include two main walls 121 and two movable walls 122. The two main walls 121 are arranged opposite to each other along the Y-axis and fixedly connected to the bottom wall 11 to form a relatively stable support structure. This allows the wafer to be slightly tilted and rest against the main walls 121 when placed in the housing 1, thereby improving the stability and safety of the wafer. The two movable walls 122 are arranged opposite to each other along the X-axis between the two main walls 121 and are detachably connected to both main walls 121 and the bottom wall 11, respectively. This gives the peripheral wall 12 greater flexibility and adjustability, allowing the movable walls 122 to be adjusted or replaced according to processing needs. For example, when the wafer needs to be removed from the housing 1, the movable walls 122 can be detached before the wafer is removed, thus preventing interference between the wafer and other components.

[0043] Reference Figures 1-3In the embodiments provided in this disclosure, the movable wall 122 can magnetically engage with the main wall 121 and the bottom wall 11, respectively. This magnetic engagement allows the movable wall 122 to open and close quickly and easily, ensuring precise alignment between the movable wall 122 and the main wall 121 and bottom wall 11 when closed. It also makes the opening and closing process of the movable wall 122 smoother, preventing contact or abrasion between the movable wall 122 and the wafer when it is moved out of or into the housing 1, thus greatly reducing the risk of wafer damage during operation. According to some embodiments provided in this disclosure, the main wall 121 and bottom wall 11 can be made of a metal with magnetic properties, and the movable wall 122 can be made of a strong magnet. This ensures that while the movable wall 122 can magnetically engage with the main wall 121 and bottom wall 11, the structural strength and rigidity of the movable wall 122, main wall 121, and bottom wall 11 are also guaranteed.

[0044] Reference Figure 2 and Figure 3 The number of connecting rods 2 can be two, and the sliding parts 3 can also be set in two sets corresponding to the two connecting rods 2 respectively. The two connecting rods 2 can be respectively set one-to-one with the two main body walls 121, and each connecting rod 2 can be connected between its corresponding main body wall 121 and the sliding rod 31 to effectively distribute the load and improve the stability of the protective component during use. The design of two connecting rods 2 and two sliding parts 3 can ensure the reliability of the connection between the housing 1 and the suspension component 4 and the uniformity of the force, thereby further improving the stability of the housing in supporting the wafer when it is suspended at the bottom of the suspension component 4. This effectively avoids damage to the wafer caused by large floating and sliding of the housing 1 due to unbalanced force during the sliding of the connecting rods 2.

[0045] Reference Figure 1 According to the embodiments provided in this disclosure, the connecting rod 2, the main body wall 121, and the bottom wall 11 can be constructed as a single piece, thereby effectively enhancing the overall strength and stability of the protective component, and greatly improving the load-bearing capacity and protective effect on the wafer. At the same time, the single-piece construction of the connecting rod 2, the main body wall 121, and the bottom wall 11 simplifies the assembly and production process of the components, reduces the use of connecting parts, and lowers production costs and assembly time.

[0046] According to a second aspect provided in this disclosure, a wafer dicing apparatus is also provided, which may include a suspension member 4 and a protective member provided in this disclosure. This dicing apparatus has all the beneficial effects of the protective member provided in this disclosure, which will not be elaborated further here.

[0047] The preferred embodiments of this disclosure have been described in detail above with reference to the accompanying drawings. However, this disclosure is not limited to the specific details of the above embodiments. Within the scope of the technical concept of this disclosure, various simple modifications can be made to the technical solutions of this disclosure, and these simple modifications all fall within the protection scope of this disclosure.

[0048] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, this disclosure will not describe the various possible combinations separately.

[0049] Furthermore, various different embodiments of this disclosure can be combined in any way, as long as they do not violate the spirit of this disclosure, they should also be regarded as the content disclosed in this disclosure.

Claims

1. A protective component for a wafer, characterized in that, include: A housing for holding a wafer and having an opening at the top, wherein the wafer is disposed above the opening and is fixed to the bottom of a suspension member; A connecting rod, one end of which is fixedly connected to the housing; and A sliding component includes a slide rod and a fixing part for detachably connecting the slide rod to the suspension member, wherein the slide rod extends in a horizontal direction and the other end of the connecting rod is slidably connected to the slide rod in a horizontal direction.

2. The protective component according to claim 1, characterized in that, The fixing part includes fixing rods fixed to both ends of the slide rod. The slide rod and the two fixing rods are constructed together as a U-shaped rod structure with the opening facing the suspension member, and the two fixing rods are detachably connected to the suspension member.

3. The protective component according to claim 2, characterized in that, One end of the fixing rod is integrally formed with the sliding rod, and the other end is inserted into the suspension component.

4. The protective component according to claim 1, characterized in that, The link includes: The first segment extends vertically and its top end is slidably connected to the slide rod; and The second section is constructed as an inverted L-shaped rod with its opening facing the inside of the box. The two ends of the L-shaped rod are connected between the bottom of the first section and the box.

5. The protective component according to claim 4, characterized in that, The top end of the first segment is provided with a sliding sleeve, which is slidably fitted onto the slide rod.

6. The protective component according to claim 1, characterized in that, The housing includes: The bottom wall has a U-shaped cross-section with the opening facing upwards; and The peripheral wall is arranged around the periphery of the bottom wall and extends vertically upward to form an accommodating space together with the bottom wall.

7. The protective component according to claim 6, characterized in that, The peripheral wall includes: Two main walls, positioned opposite each other and spaced apart, are fixedly connected to the bottom wall; and Two movable walls are erected opposite to and spaced apart between the two main walls, and the two movable walls are detachably connected to the two main walls and the bottom wall, respectively.

8. The protective component according to claim 7, characterized in that, The movable wall is magnetically attached to the main wall and the bottom wall.

9. The protective component according to claim 7, characterized in that, The number of connecting rods is two, and the sliding components are arranged in two sets corresponding to the two connecting rods respectively. The two connecting rods correspond one-to-one with the two main walls, and each connecting rod is connected between its corresponding main wall and the sliding rod.

10. The protective component according to claim 7, characterized in that, The connecting rod, the main body wall, and the bottom wall are integrally formed.

11. A wafer cutting apparatus, characterized in that, Includes suspension components and protective components according to any one of claims 1-10.

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