Monocrystalline silicon rod production equipment

Abstract

The utility model relates to the technical field of silicon single crystal rod production, in particular to silicon single crystal rod production equipment. The silicon single crystal rod production equipment comprises a base, a forming module and a cooling module, the forming module comprises a forming shell, a heating bin, a crucible and a first driving mechanism, wherein the heating bin, the crucible and the first driving mechanism are located in the forming shell. The crucible is located in the heating bin. The forming shell is provided with an inert gas filling assembly and a vacuumizing assembly, the inert gas filling assembly is used for injecting inert gas into the forming shell, and the vacuumizing assembly is used for vacuumizing the forming shell. According to the utility model, through pre-cooling of inert gas, each performance of the single crystal silicon rod cannot be negatively influenced due to overlarge external temperature difference when the single crystal silicon rod is formally cooled, external impurities are prevented from entering the furnace body, the quality of the single crystal silicon rod is ensured, and the cooling module is matched with the inert gas filling assembly, so that the cooling efficiency is improved. The crystal defect caused by overlarge temperature gradient can be prevented, and the quality of the silicon single crystal rod is ensured.

Description

Technical Field

[0001] This utility model relates to the technical field of monocrystalline silicon rod production, and in particular to a monocrystalline silicon rod production equipment. Background Technology

[0002] In the manufacture of solar photovoltaic and semiconductor materials, the production of monocrystalline silicon rods is crucial. Silicon is the most common and widely used semiconductor material. When molten elemental silicon solidifies, silicon atoms arrange themselves into crystal nuclei in a diamond lattice. These nuclei grow into grains with the same crystal orientation, forming monocrystalline silicon. As a relatively reactive non-metallic element crystal, monocrystalline silicon is an important component of crystalline materials and is at the forefront of new material development. Its main uses are as a semiconductor material and for solar photovoltaic power generation and heating.

[0003] Chinese utility model patent CN219689927U, published after authorization, discloses a cooling device for the production of Czochralski single-crystal silicon rods. The device includes a crucible transmission device fixed on a base, a crucible rotation shaft above the transmission device, and a quartz crucible fixed above a carbon-carbon crucible containing a silicon solution. The device uses cold water pipes to cool the crystal surface, and the cold water pipes form a circulation structure with a water tank via an outlet pipe, ensuring that the water in the cold water pipes remains at a low temperature.

[0004] However, the aforementioned equipment has some technical drawbacks. Because the cooling water pipes directly cool the crystal surface, a large temperature difference occurs outside the single-crystal silicon rod. This temperature gradient may adversely affect the crystal structure of the single-crystal silicon rod, thus impacting its performance. Specifically, an excessively large temperature gradient may cause stress within the crystal, leading to defects such as dislocations and microcracks. These defects severely affect the electrical properties and mechanical strength of the single-crystal silicon rod, resulting in poor quality of the finished product. Utility Model Content

[0005] The purpose of this invention is to provide a single-crystal silicon rod production equipment to improve the quality of the finished single-crystal silicon rod.

[0006] To solve the above-mentioned technical problems, this utility model provides a single crystal silicon rod production equipment.

[0007] The monocrystalline silicon rod production equipment of this utility model includes a base, a forming module and a cooling module;

[0008] The base is connected to the molding module, and the cooling module is connected to the molding module;

[0009] The molding module includes a molding shell and a heating chamber, a crucible, and a first driving mechanism located in the molding shell. The crucible is located in the heating chamber, and the first driving mechanism is disposed in the base and used to drive the crucible to rotate. The heating chamber is used to heat the crucible so that the seed crystal forms a single crystal silicon rod.

[0010] The molded shell is provided with an inert gas filling component and a vacuuming component. The inert gas filling component is used to inject inert gas into the molded shell, and the vacuuming component is used to evacuate the molded shell.

[0011] The cooling module includes a cooling housing and a cooling component located within the cooling housing, the cooling component being used to cool a single-crystal silicon rod.

[0012] Furthermore, the molded housing is provided with a first through hole, and the inert gas filling assembly includes an air inlet valve, which is connected to the first through hole.

[0013] Furthermore, the molded housing is provided with a second through hole, and the vacuum assembly includes an exhaust valve, which is connected to the second through hole.

[0014] Furthermore, the bottom of the molded shell is provided with a base plate, the base plate is provided with a material through hole for the single crystal silicon rod to pass through, and the base plate is provided with a plurality of guide components arranged circumferentially to guide the single crystal silicon rod.

[0015] Furthermore, the guiding assembly includes a connecting rod and a guide roller. One end of the connecting rod is connected to the base plate, and the other end is connected to the guide roller. The guide roller is used to roll along the surface of the single crystal silicon rod.

[0016] Furthermore, the connecting rod is hinged to the base plate, and the guide assembly further includes a torsion spring for swinging the connecting rod toward the monocrystalline silicon rod.

[0017] Furthermore, the cooling module includes a cooling housing with a connecting through hole for communicating with the molded housing, and a sealing mechanism is provided at the bottom of the cooling housing for sealing or opening the connecting through hole.

[0018] Furthermore, the sealing mechanism includes a sealing plate and a second driving mechanism. The second driving mechanism includes a lead screw motor and a bidirectional lead screw driven by the lead screw motor. A slider is provided on the bidirectional lead screw, and the bidirectional lead screw drives the sealing plate to seal or open the connecting through hole through the slider.

[0019] Furthermore, the cooling module includes a cooling assembly, which includes a cooling jacket, a cooling pipe, and a cold source. A portion of the cooling pipe is located on the inner wall of the cooling jacket to cool the monocrystalline silicon rod. Both ends of the cooling pipe are connected to the cold source, which is used to cool the cooling medium in the cooling pipe.

[0020] Furthermore, a heat insulation screen is also provided inside the molding shell. The heat insulation screen is located above the crucible and is used to prevent heat from overflowing into the cooling module. The heat insulation screen is annular and covers the gap between the inner wall surface of the crucible and the molding shell in the horizontal direction.

[0021] Compared with the prior art, the present invention has at least the following beneficial effects:

[0022] During operation, the forming module, through the cooperation of the heating chamber and crucible, ensures that the seed crystal forms a single-crystal silicon rod at a controlled temperature. The first drive mechanism ensures that the crucible rotates uniformly, thereby guaranteeing the uniform growth of the single-crystal silicon rod. Before cooling the single-crystal silicon rod, an inert gas filling component on the forming shell is used to pre-cool the shell, lowering the temperature of the newly formed single-crystal silicon rod and preventing harmful substances such as oxygen and moisture from the air from entering the single-crystal silicon rod, thus ensuring its purity and quality. Afterwards, a vacuum component is used to remove the inert gas. This pre-cooling process prevents the single-crystal silicon rod from experiencing negative impacts on its properties due to excessive external temperature differences during the actual cooling process. It also reduces the number of furnace openings, preventing external impurities from entering the furnace and ensuring the quality of the single-crystal silicon rod. The cooling module, through its cooling components, rapidly cools the formed single-crystal silicon rod. Combined with the inert gas filling component, this prevents crystal defects caused by excessive temperature gradients, further ensuring the quality of the single-crystal silicon rod. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of a single-crystal silicon rod production equipment in one embodiment of the present invention;

[0024] Figure 2 for Figure 1 A schematic diagram of the molding module in a monocrystalline silicon rod production equipment.

[0025] Figure 3 for Figure 1 A schematic diagram of the cooling module in a monocrystalline silicon rod production equipment.

[0026] Figure 4 for Figure 1 A schematic diagram of the structure of the cooling module of the monocrystalline silicon rod production equipment from another perspective, showing the hidden part of the structure.

[0027] Figure label:

[0028] 1. Base;

[0029] 2. Molding module; 201. Drive motor; 202. Rotating shaft; 203. Support plate; 204. Heating chamber; 205. Heating wire; 206. Crucible; 207. Heat insulation screen; 208. Inert gas filling assembly; 209. Vacuuming assembly; 210. Molding shell;

[0030] 3. Cooling module; 301. Cooling housing; 302. Base plate; 303. Limiting block; 304. Slide rail; 305. Two-way lead screw; 306. Slider; 307. Sealing plate; 308. Lead screw motor; 309. Lifting line; 310. Cooling jacket; 311. Cooling section; 312. Liquid outlet section; 313. Liquid inlet section; 314. Cold source; 315. Seed crystal; 316. Fixed base; 317. Connecting rod; 318. Guide roller; 319. Rotating mechanism;

[0031] 4. Single crystal silicon rod. Detailed Implementation

[0032] The monocrystalline silicon rod production equipment of this utility model will now be described with reference to the schematic diagrams, which illustrate preferred embodiments of this utility model. It should be understood that those skilled in the art can modify the utility model described herein while still achieving its advantageous effects. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit the utility model.

[0033] The serial numbers assigned to components in this document, such as "first" and "second," are used only to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). In the description of this utility model, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0034] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0035] In this application, unless otherwise expressly specified and limited, the term "connection" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral part; it can be a direct connection or an indirect connection through an intermediate medium. Furthermore, the term "electrical connection" can be a direct electrical connection or an indirect electrical connection through an intermediate medium.

[0036] The present invention will be described more specifically by way of example in the following paragraphs with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description and claims. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0037] The following is in conjunction with the instruction manual appendix. Figure 1 To be continued Figure 4 This paper introduces the monocrystalline silicon rod production equipment of this utility model.

[0038] In one embodiment, such as Figure 1 , Figure 2 and Figure 4 As shown, the monocrystalline silicon rod production equipment includes a base 1, a forming module 2, and a cooling module 3.

[0039] The base 1 is connected to the molding module 2, and the cooling module 3 is connected to the molding module 2.

[0040] The molding module 2 includes a molding housing 210 and a heating chamber 204, a crucible 206 and a first driving mechanism located in the molding housing 210. The crucible 206 is located in the heating chamber 204. The first driving mechanism is disposed in the base 1 and is used to drive the crucible 206 to rotate. The heating chamber 204 is used to heat the crucible 206 so that the seed crystal 315 forms a single crystal silicon rod 4.

[0041] The molded housing 210 is provided with an inert gas filling component 208 and a vacuuming component 209. The inert gas filling component 208 is used to inject inert gas into the molded housing 210, and the vacuuming component 209 is used to evacuate the molded housing 210. The inert gas can be argon, nitrogen, or helium, or other inert gases that are not easily reacted with the single crystal silicon rod 4.

[0042] The cooling module 3 is used to cool the single-crystal silicon rod 4. Specifically, the cooling module 3 includes a cooling housing 301 and a cooling assembly located within the cooling housing 301.

[0043] During use, the forming module 2, through the cooperation of the heating chamber 204 and the crucible 206, ensures that the seed crystal 315 forms a single crystal silicon rod 4 at a controlled temperature. The first driving mechanism ensures that the crucible 206 rotates uniformly, thereby guaranteeing the uniform growth of the single crystal silicon rod 4. Before cooling the single crystal silicon rod 4, the inert gas filling component 208 on the forming shell 210 is used to fill the forming shell 210 with inert gas for pre-cooling, reducing the temperature of the newly formed single crystal silicon rod 4 and preventing harmful substances such as oxygen and moisture in the air from entering the single crystal silicon rod 4, thus ensuring the purity and quality of the single crystal silicon rod 4. Then, the inert gas is extracted using the vacuum component 209. Through pre-cooling, the single crystal silicon rod 4 will not be negatively affected by excessive external temperature differences during the formal cooling process. At the same time, the furnace opening is reduced to prevent external impurities from entering the furnace, ensuring the quality of the single crystal silicon rod 4. The cooling module 3 rapidly cools the formed monocrystalline silicon rod 4 through the cooling components. In conjunction with the inert gas filling component 208, it can prevent crystal defects caused by excessive temperature gradients, further ensuring the quality of the monocrystalline silicon rod 4.

[0044] Specifically, the first driving mechanism includes a bottom drive motor 201 and a rotating shaft 202. The bottom drive motor 201 is disposed inside the base 1. One end of the rotating shaft 202 is connected to the output shaft of the drive motor 201, and the other end is fixedly connected to the bottom of the crucible 206. A support plate 203 is fixedly installed on the bottom of the molding shell 210, thereby separating the inner cavity of the base 1 and the molding shell 210. A heating wire 205 is provided on the inner surface of the heating chamber 204 to heat the crucible 206.

[0045] Preferably, the inert gas filling component 208 is disposed above the crucible 206 to facilitate timely pre-cooling of the newly formed single crystal silicon rod 4.

[0046] Furthermore, in one embodiment, the molded housing 210 is provided with a first through hole, and the inert gas filling assembly 208 includes an air inlet valve that communicates with the first through hole.

[0047] Specifically, the first through hole is located above the crucible 206, allowing inert gas to directly enter the molding shell 210 through the inlet valve. The inlet valve can be a solenoid valve or a manual valve; precise injection of inert gas is achieved by controlling its opening and closing. In a preferred embodiment, the inlet valve can be connected to a control system, using sensors to monitor the gas concentration within the molding shell 210 and automatically adjusting the inlet flow rate to ensure a stable inert gas environment within the molding shell 210. This design ensures a stable inert gas environment within the molding shell 210, helping to protect the production process of the single-crystal silicon rod 4 from external environmental influences and improving the quality and production efficiency of the single-crystal silicon rod 4.

[0048] Furthermore, in one embodiment, the molded housing 210 is provided with a second through hole, and the vacuum assembly 209 includes an exhaust valve that communicates with the second through hole.

[0049] Specifically, the second through hole is provided to offer a channel. The vacuum assembly 209 also includes a vacuum pump, which is connected to the interior of the molding housing 210 via an exhaust valve. The exhaust valve can take various forms, such as a solenoid valve or a manual valve, to control the flow of gas. In a preferred embodiment, the exhaust valve can be connected to the vacuum pump, and the negative pressure of the vacuum pump will extract the gas from the molding housing 210, thereby maintaining a vacuum environment within the molding housing 210.

[0050] Furthermore, in one embodiment, the bottom of the molded housing 210 is provided with a base plate 302, the base plate 302 is provided with a material through hole for the single crystal silicon rod 4 to pass through, and the base plate 302 is provided with a plurality of guide components arranged circumferentially for guiding the single crystal silicon rod 4.

[0051] For example, three or four guide components can be set on the base plate 302 at uniform intervals along the circumference to ensure that the monocrystalline silicon rod 4 is stably centered.

[0052] Specifically, the guide assembly may include a connecting rod 317 and a guide roller 318. For ease of installation, a fixed seat 316 is provided on the base plate 302. One end of the connecting rod 317 is connected to the fixed seat 316, and the other end is connected to the guide roller 318. The guide roller 318 is used to roll along the surface of the single crystal silicon rod 4.

[0053] Specifically, the guiding assembly, through the structural design of the connecting rod 317 and the guide roller 318, effectively guides and supports the monocrystalline silicon rod 4, ensuring its stable passage through the material through-hole during production and preventing collisions due to skewness. This design, by having the guide roller 318 roll along the surface of the monocrystalline silicon rod 4, reduces frictional resistance and improves the accuracy and stability of guidance, thus solving the technical problems of guiding and supporting the monocrystalline silicon rod 4 during production.

[0054] The guide roller 318 can be made of a variety of materials, such as wear-resistant polymers or metals, to ensure that its guiding effect is not affected by wear during long-term use.

[0055] Furthermore, in one embodiment, in order to accommodate single-crystal silicon rods 4 of different diameters, the connecting rod 317 is hinged to the base plate 302.

[0056] Specifically, there are several ways to achieve the hinge connection between the connecting rod 317 and the base plate 302. For example, one end of the connecting rod 317 can be connected to the base plate 302 via a hinge, which allows the connecting rod 317 to rotate freely on the base plate 302.

[0057] Therefore, the hinged connection between the connecting rod 317 and the base plate 302 allows the connecting rod 317 to rotate freely on the base plate 302, thus better adapting to changes in the shape of the monocrystalline silicon rod 4 and providing a more flexible guiding effect. This design helps ensure stable guidance of the monocrystalline silicon rod 4 during the production process.

[0058] Furthermore, in one embodiment, to improve the guiding effect, the guiding assembly may also include a torsion spring for oscillating the link 317 toward the monocrystalline silicon rod 4.

[0059] Specifically, a torsion spring is sleeved on a hinge shaft on a fixed base 316, with its two ends fixed to a connecting rod 317 and a fixed base 316 on a base plate 302, respectively. The elastic force of the torsion spring causes the connecting rod 317 to swing towards the monocrystalline silicon rod 4 throughout the guiding process, thus providing sufficient guiding and supporting force to the monocrystalline silicon rod 4, ensuring the stability and accuracy of the monocrystalline silicon rod 4 as it enters the cooling module 3. It should be noted that, to protect the outer surface of the monocrystalline silicon rod 4, the stiffness coefficient of the torsion spring should not be too large to avoid damaging the outer surface of the monocrystalline silicon rod 4.

[0060] Furthermore, in one embodiment, the cooling housing 301 has a connection through hole for communicating with the molded housing 210, and a sealing mechanism is provided at the bottom of the cooling housing 301 for sealing or opening the connection through hole.

[0061] Specifically, such as Figure 3 As shown, the sealing mechanism may include a sealing plate 307 and a second driving mechanism. The second driving mechanism may include a lead screw motor 308 and a bidirectional lead screw 305 driven by the lead screw motor 308. Four limiting blocks 303 are provided on the lower surface of the base plate 302. Two slide rails 304 extending along the axis of the bidirectional lead screw are also provided on the lower surface of the base plate 302. There are two bidirectional lead screws and corresponding lead screw motors 308, and two sealing plates 307. Each bidirectional lead screw passes through two of the limiting blocks 303 and can rotate relative to the corresponding limiting blocks 303. Each bidirectional lead screw 305 is provided with two sliders 306. The sliders 306 on the same bidirectional lead screw can slide in the corresponding slide rail 304. Each sealing plate 307 is driven by two sliders 306. The bidirectional lead screw 305 drives the sealing plate 307 to seal or open the connecting through hole through the sliders 306. The sealing plate 307 can slide on the bidirectional lead screw 305 via the slider 306, thereby blocking or opening the connecting through hole.

[0062] Therefore, the cooling housing 301 is connected to the molding housing 210 through the connecting through hole. The sealing mechanism can block or open the connecting through hole, thereby controlling the gas flow and pressure in the molding housing 210, ensuring the environmental stability of the single crystal silicon rod 4 during the molding and cooling process, preventing heat in the molding housing 210 from entering the cooling housing 301, and preventing cold energy in the cooling housing 301 from entering the molding housing 210.

[0063] The sealing plate 307 can be made of metal, providing excellent sealing performance. The lead screw motor 308 in the second drive mechanism can be a stepper motor or a servo motor to ensure precise control of the bidirectional lead screw 305. The design of the bidirectional lead screw 305 allows the slider 306 to move bidirectionally along the lead screw, thereby opening and closing the sealing plate 307. The slider 306 can use a sliding bearing or a ball bearing to reduce friction and improve motion efficiency.

[0064] The shape of the sealing plate 307 can be customized according to the shape of the connecting through hole, such as round, square, or polygonal. The surface of the sealing plate 307 can be coated with a high-temperature resistant material to prevent deformation or damage in high-temperature environments.

[0065] Specifically, when it is necessary to block the connecting through hole, the lead screw motor 308 drives the bidirectional lead screw 305 to rotate, and the slider 306 moves along the lead screw, pushing the sealing plate 307 to the connecting through hole to achieve sealing. When it is necessary to open the connecting through hole, the lead screw motor 308 rotates in the opposite direction, the slider 306 moves in the opposite direction, and the sealing plate 307 moves accordingly to open the connecting through hole.

[0066] The sealing plate 307 is driven by a two-way lead screw 305 through a slider 306, which can precisely control the sealing and opening actions, ensuring that the connection through hole can be effectively sealed when needed to prevent heat or gas leakage, and can be quickly opened when needed to ensure the smooth progress of the cooling process.

[0067] Furthermore, in one embodiment, to further reduce heat loss, a heat insulation screen 207 is provided inside the molded housing 210. The heat insulation screen 207 is located above the crucible 206 and is used to prevent heat from escaping into the cooling housing 301. Specifically, the heat insulation screen 207 is made of a high-temperature resistant material to prevent deformation or damage in high-temperature environments.

[0068] Preferably, the heat insulation screen 207 is annular and covers the gap between the inner wall surfaces of the crucible 206 and the molded shell 210 in the horizontal direction. In this embodiment, the heat insulation screen 207 is an inverted frustum-shaped annular structure. In other embodiments, the heat insulation screen 207 may also be annular.

[0069] Furthermore, in one embodiment, the cooling assembly includes a cooling jacket 310, a cooling pipe, and a cold source 314. A portion of the cooling pipe is located on the inner wall of the cooling jacket 310 to cool the monocrystalline silicon rod 4. Both ends of the cooling pipe are connected to the cold source 314, which is used to cool the cooling medium in the cooling pipe.

[0070] Specifically, the cooling pipe includes an inlet section 313, a cooling section 311, and an outlet section 312. The cooling section 311 is located on the inner wall of the cooling jacket 310. The inlet section 313 introduces the cooling medium flowing out of the cold source 314 into the cooling section 311 to cool the monocrystalline silicon rod 4. The outlet section 312 introduces the heated cooling medium into the cold source 314 for further cooling. The inlet section 313 is located below the outlet section 312, so that the cooling medium can cool the part of the monocrystalline silicon rod 4 that has just entered from below, thereby removing more heat, further improving the cooling effect, and reducing the cooling time.

[0071] The design of the cooling jacket 310 ensures that the cooling pipes can fit tightly against the monocrystalline silicon rod 4, thereby improving cooling efficiency. The introduction of the cold source 314 ensures a continuous supply of cooling medium, allowing the cooling process to continue and avoiding poor cooling performance due to insufficient cooling medium. As a preferred embodiment, the cold source 314 can be liquid nitrogen or a cryogenic coolant to ensure that the temperature of the cooling medium is low enough. The cooling medium can be a coolant, thereby effectively reducing the temperature of the monocrystalline silicon rod 4.

[0072] To facilitate the movement and cooling of the single-crystal silicon rod 4, a winding mechanism is provided at the upper end of the cooling housing 301. A lifting wire 309 is fixed to the output end of the winding mechanism, and a seed crystal 315 is fixedly installed at one end of the lifting wire 309. The winding mechanism includes a motor and a winding coil. The motor drives the winding coil to wind the lifting wire 309, which in turn pulls the single-crystal silicon rod 4 into the cooling sleeve 310. A rotating mechanism 319 is also provided at the upper end of the cooling housing 301. This rotating mechanism 319 drives the entire winding mechanism to rotate via a gear transmission mechanism, thereby causing the lifting wire 309 to rotate the seed crystal 315 within the crucible 206.

[0073] The working process of the monocrystalline silicon rod 4 production equipment of this utility model will be described below using one embodiment as an example.

[0074] First, silicon material is placed in crucible 206. Drive motor 201 drives crucible 206 in heating chamber 204 to rotate via shaft 202. Heating wire 205 on the surface of heating chamber 204 heats and melts silicon material inside crucible 206. Support plate 203 insulates heat to ensure stable operation of drive motor 201, and heat shield 207 also insulates heat to reduce heat loss. When lifting wire 309 places seed crystal 315 in crucible 206 and rotates counterclockwise, single crystal silicon rod 4 is gradually formed. At this time, lifting wire 309 pulls part of the formed single crystal silicon rod 4 upward. Then, inert gas is injected into molding shell 210 by inert gas filling component 208. While pre-cooling the newly formed part of single crystal silicon rod 4, it prevents harmful substances such as oxygen and moisture in the air from entering single crystal silicon rod 4, thereby ensuring the purity and quality of single crystal silicon rod 4. After the entire single crystal silicon rod 4 is fully formed, inert gas is extracted using vacuum pump.

[0075] As the monocrystalline silicon rod 4 moves upward and gradually enters the cooling sleeve 310, the connecting rod 317 and guide roller 318 on the base plate 302 guide and limit the monocrystalline silicon rod 4, ensuring its stable upward movement while preventing scratches on its surface. When the monocrystalline silicon rod 4 is fully inside the cooling sleeve 310, the lead screw motor 308 drives the sealing plate 307 to seal the connecting through hole to prevent heat from entering the cooling sleeve 310. At the same time, cooling medium is injected into the cooling pipe to cool the monocrystalline silicon rod 4.

[0076] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A single-crystal silicon rod production equipment, characterized in that, Includes a base, molding module, and cooling module; The base is connected to the molding module, and the cooling module is connected to the molding module; The molding module includes a molding shell and a heating chamber, a crucible, and a first driving mechanism located in the molding shell. The crucible is located in the heating chamber, and the first driving mechanism is disposed in the base and used to drive the crucible to rotate. The heating chamber is used to heat the crucible so that the seed crystal forms a single crystal silicon rod. The molded shell is provided with an inert gas filling component and a vacuuming component. The inert gas filling component is used to inject inert gas into the molded shell, and the vacuuming component is used to evacuate the molded shell. The cooling module is used to cool the monocrystalline silicon rod.

2. The monocrystalline silicon rod production equipment according to claim 1, characterized in that, The molded housing is provided with a first through hole, and the inert gas filling assembly includes an air inlet valve, which is connected to the first through hole.

3. The single-crystal silicon rod production equipment according to claim 1, characterized in that, The molded housing is provided with a second through hole, and the vacuum assembly includes an exhaust valve, which is connected to the second through hole.

4. The monocrystalline silicon rod production equipment according to claim 1, characterized in that, The bottom of the molded shell is provided with a base plate, the base plate is provided with a material through hole for the monocrystalline silicon rod to pass through, and the base plate is provided with a plurality of guide components arranged circumferentially to guide the monocrystalline silicon rod.

5. The monocrystalline silicon rod production equipment according to claim 4, characterized in that, The guiding assembly includes a connecting rod and a guide roller. One end of the connecting rod is connected to the base plate, and the other end is connected to the guide roller. The guide roller is used to roll along the surface of the monocrystalline silicon rod.

6. The single-crystal silicon rod production equipment according to claim 5, characterized in that, The connecting rod is hinged to the base plate, and the guide assembly further includes a torsion spring for swinging the connecting rod toward the monocrystalline silicon rod.

7. The monocrystalline silicon rod production equipment according to claim 1, characterized in that, The cooling module includes a cooling housing with a connecting through hole for communicating with the molded housing. A sealing mechanism is provided at the bottom of the cooling housing for sealing or opening the connecting through hole.

8. The single-crystal silicon rod production equipment according to claim 7, characterized in that, The sealing mechanism includes a sealing plate and a second driving mechanism. The second driving mechanism includes a lead screw motor and a bidirectional lead screw driven by the lead screw motor. A slider is provided on the bidirectional lead screw, and the bidirectional lead screw drives the sealing plate to seal or open the connecting through hole through the slider.

9. The single-crystal silicon rod production equipment according to claim 1, characterized in that, The cooling module includes a cooling assembly, which includes a cooling jacket, a cooling pipe, and a cold source. A portion of the cooling pipe is located on the inner wall of the cooling jacket to cool the monocrystalline silicon rod. Both ends of the cooling pipe are connected to the cold source, which is used to cool the cooling medium in the cooling pipe.

10. The monocrystalline silicon rod production equipment according to claim 1, characterized in that, A heat insulation screen is also provided inside the molding shell. The heat insulation screen is located above the crucible and is used to prevent heat from overflowing into the cooling module. The heat insulation screen is annular and covers the gap between the inner wall of the crucible and the molding shell in the horizontal direction.

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