Plasma generator and magnetron sputtering coating machine

Abstract

The utility model discloses a plasma generator and a magnetron sputtering coating machine, the plasma generator comprises a shell with a plasma generating cavity and a gas supply assembly used for introducing gas into the plasma generating cavity, the plasma generating cavity is provided with a plurality of gas inlets, and the gas inlets are communicated with the gas supply assembly. The gas supply assembly is provided with a gas source used for introducing gas, each gas inlet is communicated with the gas source, and the plasma generator is provided with a regulating valve used for regulating the gas inflow corresponding to at least one gas inlet. The magnetron sputtering coating machine is provided with the plasma generator. The device has the advantages of capability of improving the uniformity and consistency of the energy density of the plasma, simple structure, low cost, easiness in implementation and application and the like.

Description

Technical Field

[0001] This utility model relates to the field of magnetron sputtering coating technology, specifically to a plasma generator and a magnetron sputtering coating machine. Background Technology

[0002] The plasma generator is a core component of magnetron sputtering coating equipment. A plasma generator that uses gas discharge to generate plasma mainly includes a housing with a plasma generation chamber, a discharge assembly installed within the plasma generation chamber, and a gas supply assembly for introducing gas into the generation chamber. During operation, a mixture of multiple gases (e.g., AR main gas mixed with one or more of oxygen, nitrogen, acetylene, and methane) is introduced into the plasma generation chamber through the gas supply assembly, and plasma is generated under the action of the discharge assembly. In existing technologies, the plasma generation chamber generally only has one gas inlet connected to the gas supply assembly to introduce the mixed gas into the plasma generation chamber. This results in a phenomenon where the atmosphere concentration of the mixed gas is high near the gas inlet and low further away, leading to poor uniformity of the atmosphere concentration within the plasma generation chamber. This causes differences in plasma energy density in different areas within the plasma generation chamber, thus affecting the coating uniformity, especially when the plasma generation chamber is large. To mitigate this problem, some approaches involve setting multiple air inlets in different regions of the plasma generating cavity to introduce the mixed gas. However, existing technologies directly connect multiple air inlets to the gas supply assembly, and the mixed gas supplied by the gas supply assembly is directly introduced into each air inlet. It is impossible to adjust the air intake of each air inlet. Although this can improve the uniformity of the atmosphere concentration of the mixed gas in the plasma generating cavity to some extent, the improvement is limited and it still cannot effectively solve the problem of the difference in plasma energy density in different regions of the plasma generating cavity. Utility Model Content

[0003] The technical problem to be solved by this utility model is to overcome the shortcomings of the existing technology and provide a plasma generator and magnetron sputtering coating machine that can improve the uniformity of plasma energy density, has a simple structure, low cost, and is easy to implement and apply.

[0004] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0005] A plasma generator includes a housing having a plasma generating chamber and a gas supply assembly for introducing gas into the plasma generating chamber. The plasma generating chamber has multiple gas inlets, and the gas supply assembly has a gas source for introducing gas. Each gas inlet is connected to the gas source, and the plasma generator has a regulating valve for adjusting the gas intake corresponding to at least one gas inlet.

[0006] As a further improvement to the above technical solution:

[0007] The plasma generating chamber is equipped with a gas distribution plate, and multiple air inlets are located on the gas distribution plate. Each air inlet is connected to a gas source through a gas guiding channel located on the gas distribution plate.

[0008] The air distribution plate is provided with multiple air guiding channels, and at least one air guiding channel is connected to two or more air inlets at the same time.

[0009] The regulating valve includes an adjusting screw, which is threadedly connected to the air distribution plate and can be adjusted by screwing to extend its length into the air guide channel connected to the corresponding air inlet.

[0010] Each air inlet is located on the housing, and each air inlet is connected to an air source through a pipeline.

[0011] The regulating valve is located on the pipeline connected to the corresponding air inlet.

[0012] The plasma generating cavity is a long, narrow cavity, with multiple air inlets arranged sequentially at intervals along the length of the cavity.

[0013] The elongated cavity is divided into multiple air distribution sections connected sequentially along its length. Each air distribution section has one or more air inlets, and each air distribution section is equipped with a regulating valve that simultaneously adjusts the air intake of all air inlets in that air distribution section.

[0014] A magnetron sputtering coating machine, wherein the magnetron sputtering coating machine is equipped with the aforementioned plasma generator.

[0015] Compared with the prior art, the advantages of this utility model are:

[0016] The plasma generator of this invention has multiple air inlets connected to a gas source in its plasma generation chamber. A regulating valve is provided for at least one air inlet. By adjusting the air intake at the corresponding air inlet, the concentration of the mixed gas entering the plasma generation chamber can be adjusted, thereby regulating the energy density of the plasma generated at that air inlet location. This ensures that the energy density of the plasma generated in different areas of the plasma generation chamber is consistent, resulting in uniform energy density throughout the entire plasma generation chamber and improving coating quality. This plasma generator has the advantages of simple structure, low cost, and ease of implementation and application. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the cross-sectional structure of a plasma generator.

[0018] Figure 2 This is a schematic diagram of the main structure of the air distribution plate.

[0019] Figure 3 for Figure 2 Enlarged structural diagram at point A in the middle.

[0020] Figure 4 for Figure 2 Enlarged structural diagram at point B.

[0021] Legend:

[0022] 1. Shell; 11. Plasma generating chamber; 12. Air inlet; 2. Air source; 3. Regulating valve; 4. Air distribution plate; 41. Air guide channel. Detailed Implementation

[0023] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0024] Example 1:

[0025] like Figure 1 and Figure 2 As shown, the plasma generator of this embodiment includes a housing 1 with a plasma generating chamber 11 and a gas supply assembly for introducing gas into the plasma generating chamber 11. The plasma generating chamber 11 has multiple air inlets 12, and the gas supply assembly has a gas source 2 for introducing gas. Each air inlet 12 is connected to the gas source 2. The plasma generator has a regulating valve 3 for adjusting the air intake volume corresponding to at least one air inlet 12. The plasma generating chamber 11 of this plasma generator has multiple air inlets 12 connected to the gas source 2, and a regulating valve 3 is provided for at least one air inlet 12. By adjusting the air intake volume of the corresponding air inlet 12 using the regulating valve 3, the concentration of the mixed gas introduced into the plasma generating chamber 11 through the air inlet 12 can be adjusted, thereby adjusting the energy density of the plasma generated in the region of the air inlet 12. This ensures that the energy density of the plasma generated in different regions of the plasma generating chamber 11 is consistent, and the energy density of the plasma generated throughout the entire plasma generating chamber 11 is uniform, which can improve the coating quality. This plasma generator has the advantages of simple structure, low cost, and ease of implementation and application.

[0026] In this embodiment, each air inlet 12 is equipped with a regulating valve 3 to adjust the air intake volume. In other embodiments, any number of other air inlets 12 may also be equipped with regulating valves 3.

[0027] In this embodiment, a gas distribution plate 4 is provided inside the plasma generating chamber 11, and multiple air inlets 12 are provided on the gas distribution plate 4. Each air inlet 12 is connected to the gas source 2 through a gas guiding channel 41 provided on the gas distribution plate 4. Specifically, each air inlet 12 is connected to the gas source 2 through a gas guiding channel 41. Since the air inlets 12 and the gas guiding channels 41 are all provided on the gas distribution plate 4, it is convenient to manufacture and assemble, can reduce costs, and has a simple and compact structure.

[0028] In this embodiment, as Figure 3 and Figure 4 As shown, the air distribution plate 4 is provided with multiple air guiding channels 41, and at least one air guiding channel 41 connects to two or more air inlets 12 simultaneously. This reduces the number and total length of air guiding channels 41 provided on the air distribution plate 4, simplifies processing, reduces costs, and minimizes the impact on the structural strength of the air distribution plate 4. Preferably, every two air inlets 12 are connected to the air source 2 through one air guiding channel 41.

[0029] In this embodiment, the regulating valve 3 includes an adjusting screw, which is threaded onto the air distribution plate 4 and can be adjusted by screwing to change the length of the adjusting screw extending into the air guide channel 41 connected to the corresponding air inlet 12. By adjusting the length of the adjusting screw extending into the air guide channel 41 connected to the corresponding air inlet 12, the flow area of ​​the air guide channel 41 can be changed, thereby adjusting the air intake volume. This type of regulating valve 3, based on the air distribution plate 4, has the advantages of simple and compact structure, low cost, and easy adjustment. In other embodiments, the regulating valve 3 can also be other existing valves capable of adjusting the air intake volume. The regulating valve 3 can also be positioned in other reasonable locations in the air path connecting the air inlet 12 and each air source. For example, the regulating valve 3 can be an adjusting screw, which is placed in the air path and also serves as a connecting joint. By replacing different adjusting screws, the air intake volume can be adjusted.

[0030] In this embodiment, the plasma generating cavity 11 is an elongated cavity, and multiple air inlets 12 are arranged sequentially at intervals along the length of the elongated cavity. This allows gas to enter the plasma generating cavity 11 at multiple locations along the length of the elongated cavity, which helps ensure uniform gas volume in each location area. In other embodiments, when the plasma generating cavity 11 is a cavity of other shapes, the multiple air inlets 12 can also be arranged in other positions and ways, specifically based on the principle of ensuring uniform gas volume in each location area of ​​the plasma generating cavity 11.

[0031] In another embodiment, preferably, the elongated cavity is divided into multiple gas distribution sections connected sequentially along its length. Each gas distribution section has one or more air inlets 12, and each gas distribution section is equipped with a regulating valve 3 that simultaneously adjusts the air intake of all air inlets 12 within that section. By regulating the air intake of all air inlets 12 in the entire gas distribution section through a single regulating valve 3, the energy density of the plasma generated at different locations within the elongated cavity is adjusted by regulating the concentration of the mixed gas within each gas distribution section range. This reduces the number of regulating valves 3, improves structural compactness, and lowers costs.

[0032] Example 2:

[0033] The plasma generator in this embodiment is basically the same as that in Embodiment 1, the main difference being that in this embodiment, each air inlet 12 is located on the housing 1, and each air inlet 12 is connected to the gas source 2 via a pipeline. That is, in this embodiment, each air inlet 12 is directly connected to the gas source 2 via a pipeline, which can be a conventional gas guide pipe. Furthermore, in this embodiment, the regulating valve 3 is located on the pipeline connected to the corresponding air inlet 12. This embodiment does not require the design and manufacture of a gas distribution plate 4; only commercially available gas guide pipes and regulating valves 3 are needed, making implementation and application simpler.

[0034] Example 3:

[0035] The magnetron sputtering coating machine of this embodiment is equipped with the plasma generator of Embodiment 1 or 2. Because it is equipped with the plasma generator of Embodiment 1 or 2, the magnetron sputtering coating machine of this embodiment also possesses the advantages of that plasma generator.

[0036] The above description is merely a preferred embodiment of this utility model, and the protection scope of this utility model is not limited to the above embodiments. For those skilled in the art, improvements and modifications obtained without departing from the technical concept of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A plasma generator comprising a housing (1) having a plasma generation chamber (11) and a gas supply assembly for admitting gas into the plasma generation chamber (11), characterised in that: The plasma generating cavity (11) is provided with a plurality of gas inlets (12), the gas supply assembly is provided with a gas source (2) for supplying gas, each gas inlet (12) is communicated with the gas source (2), and the plasma generator is provided with an adjusting valve (3) for adjusting the gas inlet amount corresponding to at least one gas inlet (12).

2. The plasma generator of claim 1, wherein: The plasma generating cavity (11) is provided with a plurality of gas inlets (12), the gas supply assembly is provided with a gas source (2) for supplying gas, each gas inlet (12) is communicated with the gas source (2), and the plasma generator is provided with an adjusting valve (3) for adjusting the gas inlet amount corresponding to at least one gas inlet (12).

3. The plasma generator of claim 2, wherein: The gas distribution plate (4) is provided with a plurality of gas guide channels (41), and at least one gas guide channel (41) simultaneously communicates with two or more gas inlets (12).

4. The plasma generator of claim 2, wherein: The adjusting valve (3) comprises an adjusting screw which is threadedly connected to the gas distribution plate (4) and can be screwed to adjust the length of the adjusting screw extending into the gas guide channel (41) connected with the corresponding gas inlet (12).

5. The plasma generator of claim 1, wherein: Each gas inlet (12) is arranged on the shell (1), and each gas inlet (12) is communicated with the gas source (2) through a pipeline.

6. The plasma generator of claim 5, wherein: The adjusting valve (3) is arranged on the pipeline connected with the corresponding gas inlet (12).

7. The plasma generator of any one of claims 1 to 6, wherein: The plasma generating cavity (11) is a long strip-shaped cavity, and the plurality of gas inlets (12) are arranged along the length direction of the long strip-shaped cavity.

8. The plasma generator of claim 7, wherein: The long strip-shaped cavity is divided into a plurality of gas distribution sections connected along the length direction, each gas distribution section is provided with one or more gas inlets (12), and each gas distribution section is provided with an adjusting valve (3) for simultaneously adjusting the gas inlet amount of all gas inlets (12) in the gas distribution section.

9. A magnetron sputter coater, characterized in that: The magnetron sputtering coating machine is provided with the plasma generator according to any one of claims 1 to 8.

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