Horizontal verification tool

Abstract

The utility model discloses a horizontal checking tool, which comprises a fixed support, a horizontal checking fixture and a horizontal checking fixture, the mounting bracket is detachably connected with the fixed support; the plurality of calibration instruments are fixed in the same horizontal plane on the mounting bracket at intervals, and are provided with measuring rods which extend towards the fixed support and can linearly displace; and the zeroing block is detachably connected with the fixed support, the zeroing block is provided with a scale space which is used for accommodating the measuring rod and has a fixed length, and the measuring rod of each calibration instrument can be positioned in the scale space when the zeroing block is in a detached state. According to the utility model, horizontal calibration can be carried out on the plane below the probe of the calibration instrument, the fixed support is arranged to support the mounting support, the zero setting block and the calibration instrument, precision reduction caused by random placement of the calibration instrument, the zero setting block and the mounting support is avoided, and the precision of the calibration instrument, the zero setting block and the mounting support is ensured.

Description

Technical Field

[0001] This utility model relates to the field of horizontal verification equipment technology, and specifically to a horizontal verification fixture for a wafer lifting mechanism. Background Technology

[0002] In the semiconductor manufacturing process, the process chamber is undoubtedly one of the most important chambers in epitaxial equipment. Within the process chamber, a wafer lifting mechanism moves the wafer up and down. During this process, the wafer lifting mechanism needs to maintain a relatively high level of horizontality to prevent collisions during wafer handling by the robotic arm.

[0003] Some existing horizontal calibration fixtures are not suitable for calibrating the level of wafer lifting mechanisms, and the existing horizontal calibration fixtures are placed arbitrarily, resulting in deformation and inaccuracy after long-term use; in addition, the zeroing device is prone to inaccuracy and loss. Utility Model Content

[0004] The purpose of this invention is to provide a horizontal calibration fixture. It aims to solve the problems existing in the current technology of horizontal calibration fixtures: they are not suitable for calibrating the level of wafer lifting mechanisms; the horizontal calibration fixtures can be placed arbitrarily or the zeroing device is prone to inaccuracy or loss; and after a period of use, the calibration accuracy of the horizontal calibration fixture continuously declines, thus affecting wafer processing and production.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution:

[0006] This utility model provides a horizontal calibration fixture, comprising:

[0007] Fixed support;

[0008] The mounting bracket is detachably connected to the fixed support;

[0009] Several calibration instruments are fixed at intervals on the same horizontal plane on the mounting bracket, and each instrument has a measuring rod capable of linear displacement extending toward the fixed support.

[0010] The zero-adjustment block is detachably connected to the fixed support. The zero-adjustment block has a scale space that accommodates a fixed length of the measuring rod. When the zero-adjustment block is detached, it allows the measuring rod of each calibration instrument to be located within the scale space for calibrating the zero point of the measuring rod.

[0011] Preferably, the mounting bracket includes:

[0012] Annular top plate;

[0013] Several support arms are located below the annular top plate and extend radially outward from the center point of the annular top plate, with the extended ends fixedly connected to the annular top plate.

[0014] Preferably, the support arm includes: a horizontal section and an inclined section connected to the horizontal section, the top of the inclined section is fixedly connected to the annular top plate, the bottom of the inclined section is connected to the outer end of the horizontal section, the inner ends of different horizontal sections are connected to each other, and the horizontal section is fixedly connected to the calibration instrument.

[0015] Preferably, it further includes: a plurality of fixing blocks, each fixing block being fixedly connected to the corresponding support arm, and each calibration instrument being fixedly connected to the support arm through the corresponding fixing block.

[0016] Preferably, the fixing block has a through hole at its center, the support arm has a through hole, and the measuring rod of the calibration instrument extends through the through hole and the through hole toward the fixing support.

[0017] Preferably, the fixing block has a first groove along its length, and the first groove communicates with the through hole.

[0018] Preferably, the sidewall of the fixing block has a first countersunk hole along the width direction, the first countersunk hole is connected to the first groove, and the end of the first countersunk hole is a threaded hole.

[0019] Preferably, the scale space of the zeroing block includes: a second countersunk hole and a second groove, the end of the second countersunk hole is connected to the second groove, the extension direction of the second countersunk hole is consistent with the extension direction of the measuring rod of the calibration instrument, and the extension direction of the second groove is perpendicular to the extension direction of the second countersunk hole; the second groove penetrates through two opposite sidewalls of the zeroing block.

[0020] Preferably, the bottom of the zeroing block has a fixing hole for connecting the fixed support.

[0021] Preferably, the fixed support is provided with a fixed column, and the fixed column is mechanically connected to the fixed hole.

[0022] Preferably, the fixed support further includes: a fixed base plate;

[0023] Several support rods are provided, one end of which is fixedly connected to the fixed base plate, and the other end of which is detachably connected to the mounting bracket. The support rods are spaced apart from each other.

[0024] Preferably, the top of the support rod is provided with a connecting stud that connects to the mounting bracket, the mounting bracket is provided with a connecting hole corresponding to the connecting stud, and the connecting stud passes through the connecting hole and is fixed by a nut at the through end.

[0025] Preferably, the calibration instrument is a digital display indicator.

[0026] Compared with the prior art, the present invention has the following beneficial effects:

[0027] This utility model provides a horizontal calibration fixture. By setting up a mounting bracket and a calibration instrument, the horizontal calibration fixture can perform horizontal calibration on the plane below the probe of the calibration instrument. By setting up a fixed bracket, the mounting bracket, zeroing block and calibration instrument are supported, avoiding the decrease in accuracy caused by the arbitrary placement of the calibration instrument, zeroing block and mounting bracket, and ensuring the accuracy of the calibration instrument, zeroing block and mounting bracket. Attached Figure Description

[0028] To more clearly illustrate the technical solution of this utility model, the drawings used in the description will be briefly introduced below. Obviously, the drawings in the following description are one embodiment of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort:

[0029] Figure 1 This is a schematic diagram of the structure of a horizontal verification fixture provided in an embodiment of the present invention;

[0030] Figure 2 A schematic diagram of the installation structure of a calibration instrument provided in an embodiment of this utility model;

[0031] Figure 3 A three-dimensional assembly drawing of the calibration instrument, fixing block, and mounting bracket provided in an embodiment of this utility model;

[0032] Figure 4 A three-dimensional structural diagram of a fixing block provided in an embodiment of the present utility model;

[0033] Figure 5 This is a schematic cross-sectional view of a fixing block provided in an embodiment of the present invention;

[0034] Figure 6 This is a schematic diagram of the mounting bracket structure provided in one embodiment of the present utility model;

[0035] Figure 7 A perspective view of the zero-adjustment block provided in an embodiment of this utility model;

[0036] Figure 8 This is a schematic cross-sectional view of the zero-adjustment block provided in an embodiment of the present invention;

[0037] Figure 9 This is a schematic diagram of the structure of a fixed support provided in an embodiment of the present invention;

[0038] Figure 10 This is a schematic diagram of the structure of an epitaxial device provided in an embodiment of the present invention.

[0039] Explanation of reference numerals in the attached drawings: 101-Mounting bracket, 102-Calibration instrument, 103-Fixing block, 104-Fixing support, 105-Zeroing block, 201-Through hole, 202-First groove, 203-Second countersunk hole, 204-Threaded hole, 301-Annular top plate, 302-Support arm, 3021-Horizontal section, 3022-Inclined section, 303-Connecting hole, 401-Upper surface of zeroing block, 402-First countersunk hole, 403-Second groove 404-Fixing hole, 501-Support rod, 502-Fixing column, 503-Connecting stud, 504-Nut, 100-Cavity, 120-Heating device, 131-Upper dome, 132-Lower dome, 151-Arm, 152-Shaft, 153-Pin, 161-Upper fixing part, 162-Lower fixing part, 170-Hollow shaft, 181-Inner liner, 182-Preheating ring, 190-Pin support arm, 191-Support platform, 200-Base. Detailed Implementation

[0040] The following is in conjunction with the appendix Figure 1-10 The following detailed description of the specific embodiments further illustrates the horizontal calibration fixture proposed by this utility model. The advantages and features of this utility model will become clearer from the following description. It should be noted that the accompanying drawings are in a very simplified form and use non-precise proportions, used only to facilitate and clearly illustrate the purpose of the embodiments of this utility model. Please refer to the accompanying drawings to make the purpose, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only used to complement the content disclosed in the specification, for those skilled in the art to understand and read, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and purposes achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0041] Given the problems of existing horizontal verification fixtures, such as being unsuitable for verifying the level of wafer lifting mechanisms, the haphazard placement of horizontal verification fixtures or the easy inaccuracy or loss of zeroing devices, the verification accuracy of horizontal verification fixtures continues to decline after a period of use, thus affecting wafer processing and production.

[0042] refer to Figure 1As shown, this embodiment provides a horizontal calibration fixture, including: a fixed support 104, a mounting bracket 101, several fixing blocks 103, several calibration instruments 102, and a zeroing block 105. The mounting bracket 101 is detachably connected to the fixed support 104. Several calibration instruments 102 are fixed at intervals on the same horizontal plane on the mounting bracket 101, and each has a measuring rod extending towards the fixed support 104 capable of linear displacement. Each calibration instrument 102 is fixedly connected to the mounting bracket 101. The zeroing block 105 is detachably connected to the fixed support 104. The zeroing block 105 has a scale space for accommodating a fixed length of the measuring rod. When the zeroing block 105 is detached, the measuring rod of each calibration instrument 102 is positioned within the scale space for calibrating the zero point of the measuring rod. Optionally, the calibration instrument 102 is a digital display indicator, which is fixedly connected to the mounting bracket 101 via a corresponding fixing block 103.

[0043] refer to Figure 6 As shown, in this embodiment, the mounting bracket 101 includes an annular top plate 301 and a plurality of support arms 302. The plurality of support arms 302 are located below the annular top plate 301 and extend radially outward from the center point of the annular top plate 301, with their extended ends fixedly connected to the annular top plate 301. A plurality of calibration instruments 102 are fixedly mounted on each of the support arms 302, i.e., one calibration instrument 102 is mounted on each support arm 302. Each support arm 302 includes a horizontal segment 3021 and an inclined segment 3022 connected to the horizontal segment 3021. The top of the inclined segment 3022 is fixedly connected to the annular top plate 301, and the bottom of the inclined segment 3022 is connected to the outer end of the horizontal segment 3021. The inner ends of different horizontal segments 3021 are interconnected, and all horizontal segments 3021 are located in the same horizontal plane. The horizontal section 3021 is fixedly connected to the calibration instrument 102 to ensure that each calibration instrument 102 is placed horizontally during calibration.

[0044] refer to Figure 2-3 The connection relationship between the fixing block 103 and the mounting bracket 101 is shown. Each fixing block 103 is fixedly connected to the corresponding support arm 302, and each calibration instrument 102 is fixedly connected to the support arm 302 through the corresponding fixing block 103. (Reference) Figure 4As shown, a through hole 201 is formed in the center of the fixing block 103, and a through hole is formed in the support arm 302. The through hole 201 and the through hole are correspondingly arranged. The measuring rod of the calibration instrument 102 extends to the fixing support 104 through the through hole 201 and the through hole. Optionally, the diameter of the through hole 201 and the through hole are the same. Preferably, the fixing block 103 is rectangular plate-shaped. A first groove 202 is formed in the length direction of the fixing block 103, and the first groove 202 communicates with the through hole 201. The first groove 202 is formed to adjust the diameter of the through hole 201 to fix the calibration instrument 102. Reference Figure 5 As shown, the sidewall of the fixing block 103 has a first countersunk hole 203 along its width direction. The first countersunk hole 203 communicates with the first groove 202, and the end of the first countersunk hole 203 is a threaded hole 204. A fastener matching the size of the threaded hole 204 is selected and screwed into the first countersunk hole 203. Tightening the fastener adjusts the diameter of the through hole 201 to fix the calibration instrument 102. The fixing block 103 is fixed to the upper surface of the horizontal section 3021 by means such as screws.

[0045] In this embodiment, preferably, refer to Figure 3 As shown, three support arms 302 are provided, and the included angle between the horizontal segments 3021 of adjacent support arms 302 is 120 degrees. Three calibration instruments 102 and three fixing blocks 103 are also provided. The measuring rod of each calibration instrument 102 extends downwards through the through hole 201 and the through hole. The bottoms of the measuring rods of the three calibration instruments 102 are located on the same plane for horizontal calibration of the plane to be measured. That is, the measuring rod of the calibration instrument 102 extends vertically.

[0046] In this embodiment, reference Figure 7-8As shown, the scale space of the zeroing block 105 includes: a second countersunk hole 402 and a second groove 403. The end of the second countersunk hole 402 communicates with the second groove 403. The extension direction of the second countersunk hole 402 is consistent with the extension direction of the measuring rod of the calibration instrument 102, that is, it extends vertically. The extension direction of the second groove 403 is perpendicular to the extension direction of the second countersunk hole 402, that is, it extends horizontally. The second groove 403 penetrates two opposite sidewalls of the zeroing block 105. A fixing hole 404 for connecting the fixing support 104 is provided at the bottom of the zeroing block 105. When using the zeroing block 105, remove it from the fixed support 104, align the second countersunk hole 402 with the measuring rod of one of the calibration instruments 102, place one end of the measuring rod on the upper surface 401 of the zeroing block, and install a spring inside the measuring rod. The other end of the measuring rod contacts the lower surface of the second groove 403. When in contact, the spring is compressed or stretched by a certain amount. Based on the distance between the lower surface of the second groove 403 and the upper surface 401 of the zeroing block, the calibration instrument 102 is zeroed. The remaining calibration instruments 102 are zeroed one by one according to the above zeroing method. This ensures that several calibration instruments 102 have the same zero point, guaranteeing the accuracy of subsequent horizontal calibration of the calibration instruments 102. Optionally, the zeroing block 105 is a cuboid prism.

[0047] In this embodiment, reference Figure 9 As shown, a fixing post 502 is provided on the fixing support 104, and the fixing post 502 is mechanically connected to the fixing hole 404. The fixing support 104 also includes a fixing base plate and a plurality of support rods 501. Optionally, the fixing base plate is a ring plate; the plurality of support rods 501 have one end fixedly connected to the fixing base plate and the other end detachably connected to the mounting bracket 101, and the plurality of support rods 501 are spaced apart. The top of the support rod 501 is provided with a connecting stud 503 connected to the mounting bracket 101, and the mounting bracket 101 is provided with a connecting hole 303 corresponding to the connecting stud 503. The connecting stud 503 passes through the connecting hole 303 and is fixed at the through end by a nut 504. Preferably, three support rods 501 are provided, and the three support rods 501 are arranged at 120-degree intervals along the center of the fixing base plate, and the three support rods 501 ensure the horizontality of the mounting bracket 101.

[0048] The above-mentioned horizontal verification fixture will be described in detail below with specific embodiments applied in semiconductor equipment:

[0049] This article takes its application in epitaxial devices as an example, and refers to... Figure 10As shown, the epitaxial device includes a heating device 120, a chamber 100, and a base 200. The heating device 120 is used to heat the wafer during the process. The base 200 is disposed within the chamber and is used to support the wafer to be processed. The chamber 100 includes an upper dome 131, a lower dome 132, sidewalls, an inner liner 181, a preheating ring 182, an upper fixing member 161, and a lower fixing member 162. The sidewalls, upper fixing member 161, and lower fixing member 162 are all generally annular. The upper dome 131 is a convex circular shape, and the lower dome 132 is funnel-shaped. Both the upper dome 131 and the lower dome 132 are made of transparent quartz. The upper dome 131 is fixed above the sidewall by the upper fixing member 161, and the lower dome 132 is fixed below the sidewall by the lower fixing member 162. The inner liner 181 is disposed on the inner surface of the sidewall. The preheating ring 182 is disposed on the inner surface of the liner 181 and surrounds the base 200. The base 200 is supported by a rotating support member and is horizontally disposed within the chamber 100. The rotating support member is used to drive the base 200 to rotate and move up and down.

[0050] The rotating support includes a base support and a pin support. The base support rotates around the axis, thereby driving the base to rotate during the epitaxial process. The base support includes at least one arm 151 and a shaft 152. The arm 151 is connected to the shaft 152. Specifically, one end of the arm 151 is connected to the upper end of the shaft 152, and the other end of the arm 151 is provided with a support column. The base support is connected to the bottom surface of the base through the support column. The arm 151 is provided with a pin hole for placing a pin 153. The pin 153 can move up and down relative to the pin hole, thereby supporting the vertical separation of the wafer and the base. The pin support includes at least one pin support arm 190 and a hollow shaft 170. The pin support arm 190 is connected to the hollow shaft 170. Specifically, one end of the pin support arm 190 is connected to the upper end of the hollow shaft 170, and the other end of the pin support arm 190 is provided with a support platform 191. When the pin 153 moves downward, it can fall onto the support platform 191.

[0051] When performing a leveling check on the wafer lifting mechanism, the upper fixing part 161, the upper dome 131, the upper part of the heating device, the base, and the base support are removed. Using the aforementioned leveling check fixture, the leveling check of the wafer lifting mechanism in the epitaxial equipment is performed, specifically including:

[0052] The annular top plate 301 is placed on the inner liner 181. The position of the calibration instruments 102 is designed to correspond to the support platform 191, such that when the annular top plate 301 is placed on the inner liner 181, the support platform 191 is directly below the probe of each calibration instrument 102. When the probes of the three calibration instruments 102 come into contact with the support platform 191, each instrument measures a value. By comparing the values ​​measured by the three calibration instruments 102, the level of the support platform 191 is checked, thereby verifying the level of the rotating support component.

[0053] In summary, this utility model provides a horizontal calibration fixture. By setting up a mounting bracket and a calibration instrument, the horizontal calibration fixture can perform horizontal calibration on the plane below the probe of the calibration instrument. By setting up a fixed bracket, the mounting bracket, zeroing block, and calibration instrument are supported, avoiding the decrease in accuracy caused by the arbitrary placement of the calibration instrument, zeroing block, and mounting bracket, and ensuring the accuracy of the calibration instrument, zeroing block, and mounting bracket.

[0054] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0055] In the description of this utility model, it should be understood that the terms "center," "height," "thickness," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0056] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0057] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0058] In addition, the functional modules in the various embodiments of this article can be integrated together to form an independent part, or each module can exist independently, or two or more modules can be integrated to form an independent part.

[0059] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A horizontal verification fixture, characterized in that, include: Fixed support; The mounting bracket is detachably connected to the fixed support; Several calibration instruments are fixed at intervals on the same horizontal plane on the mounting bracket, and each instrument has a measuring rod capable of linear displacement extending toward the fixed support. The zero-adjustment block is detachably connected to the fixed support. The zero-adjustment block has a scale space that accommodates a fixed length of the measuring rod. When the zero-adjustment block is detached, it allows the measuring rod of each calibration instrument to be located within the scale space for calibrating the zero point of the measuring rod.

2. The horizontal verification fixture as described in claim 1, characterized in that, The mounting bracket includes: Annular top plate; Several support arms are located below the annular top plate and extend radially outward from the center point of the annular top plate, with the extended ends fixedly connected to the annular top plate.

3. The horizontal verification fixture as described in claim 2, characterized in that, The support arm includes a horizontal section and an inclined section connected to the horizontal section. The top of the inclined section is fixedly connected to the annular top plate, and the bottom of the inclined section is connected to the outer end of the horizontal section. The inner ends of different horizontal sections are connected to each other, and the horizontal section is fixedly connected to the calibration instrument.

4. The horizontal verification fixture as described in claim 2, characterized in that, Also includes: Several fixing blocks are fixedly connected to the corresponding support arm, and each calibration instrument is fixedly connected to the support arm through the corresponding fixing block.

5. The horizontal verification fixture as described in claim 4, characterized in that, The fixed block has a through hole at its center, the support arm has a through hole, and the measuring rod of the calibration instrument extends through the through hole and the through hole toward the fixed support.

6. The horizontal verification fixture as described in claim 5, characterized in that, The fixing block has a first groove along its length, and the first groove communicates with the through hole.

7. The horizontal verification fixture as described in claim 6, characterized in that, The sidewall of the fixing block has a first countersunk hole along the width direction. The first countersunk hole communicates with the first groove, and the end of the first countersunk hole is a threaded hole.

8. The horizontal verification fixture as described in claim 1, characterized in that, The scale space of the zeroing block includes: a second countersunk hole and a second groove. The end of the second countersunk hole is connected to the second groove. The extension direction of the second countersunk hole is consistent with the extension direction of the measuring rod of the calibration instrument. The extension direction of the second groove is perpendicular to the extension direction of the second countersunk hole. The second groove penetrates two opposite sidewalls of the zeroing block.

9. The horizontal verification fixture as described in claim 1, characterized in that, The bottom of the zeroing block has a fixing hole for connecting the fixed support.

10. The horizontal verification fixture as described in claim 9, characterized in that, The fixed support is provided with a fixed column, and the fixed column is mechanically connected to the fixed hole.

11. The horizontal verification fixture as described in claim 1, characterized in that, The fixed support also includes: a fixed base plate; Several support rods are provided, one end of which is fixedly connected to the fixed base plate, and the other end of which is detachably connected to the mounting bracket. The support rods are spaced apart from each other.

12. The horizontal verification fixture as described in claim 11, characterized in that, The top of the support rod is provided with a connecting stud that connects to the mounting bracket. The mounting bracket is provided with a connecting hole corresponding to the connecting stud. The connecting stud passes through the connecting hole and is fixed at the through end by a nut.

13. The horizontal verification fixture as described in claim 1, characterized in that, The calibration instrument is a digital display indicator.

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