Furnace body of vertical furnace

Abstract

The utility model discloses a vertical furnace body, aims to provide a vertical furnace body capable of effectively ensuring temperature uniformity in the furnace body, and adopts the technical scheme that the vertical furnace body comprises a furnace body, the furnace body comprises a shell, the inner wall of the shell is wrapped with a middle heat preservation layer, the outer wall of the shell is wrapped with a water-cooling housing, and the water-cooling housing is arranged in the middle heat preservation layer. An inner layer cotton strip is further arranged on the inner wall of the middle heat preservation layer, a spiral base is further arranged at the bottom of the furnace body, a plurality of insulator fixing seats are distributed on the spiral base in the circumferential direction, insulator clamping blocks are distributed on the insulator fixing seats, electric heating wires distributed in the circumferential direction are clamped into the insulator clamping blocks, and the spiral base presses the inner layer cotton strip.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of vertical furnace, concretely relates to a vertical furnace body. BACKGROUND

[0002] Semiconductor vertical furnace body plays an important role in semiconductor manufacturing, especially in high-temperature processing such as oxidation, diffusion, annealing and chemical vapor deposition (CVD). These processes not only improve the performance of silicon wafers, but also directly affect the quality and performance stability of semiconductor devices. Higher precision temperature control is a direction of development of semiconductor vertical furnace body technology. The temperature uniformity of the furnace process has a greater impact on the process. The temperature uniformity of most domestic vertical furnaces can only reach a temperature control precision of <±1℃. It is relatively difficult to achieve a temperature control precision of <±0.5℃.

[0003] At present, a vertical furnace and a furnace body temperature control method of the vertical furnace are disclosed in Chinese patent CN113310309A, which includes a furnace body, a temperature control assembly arranged around the furnace body, an air supply pipeline, a temperature collection device, and a control device. The temperature control assembly and the furnace body have an annular air duct. The temperature control assembly is in communication with the air supply pipeline. The air supply pipeline is used to deliver cooling gas to the annular air duct. An adjusting valve is arranged on the air supply pipeline. The temperature collection device is used to obtain the actual temperature of the furnace body. The control device is used to control the opening of the adjusting valve according to the difference between the actual temperature of the furnace body and the target temperature, so as to achieve temperature control of the furnace body according to the preset temperature variation rate.

[0004] This vertical furnace and furnace body temperature control method can automatically adjust the opening of the adjusting valve in real time according to the actual temperature through the control device, so as to reduce the difference between the actual temperature of the furnace body and the target temperature, achieve automatic control of the furnace body temperature, and improve the control efficiency and precision of the furnace body temperature. However, the temperature uniformity of the vertical furnace often cannot meet the requirements, which has a greater impact on the wafer. To solve the temperature control precision, it is necessary to solve the uniformity of the temperature in the furnace body. SUMMARY

[0005] The utility model relates to a vertical furnace furnace body, which has the advantages of improving temperature control precision and increasing temperature uniformity in the furnace body.

[0006] The above technical purpose of the utility model is achieved by the following technical scheme:

[0007] A vertical furnace body, comprising a furnace body, the furnace body comprises an outer shell, the inner wall of the outer shell is wrapped with a middle insulation layer, the outer wall of the outer shell is wrapped with a water-cooled shell, the inner wall of the middle insulation layer is further provided with an inner layer of cotton, both ends of the furnace body are further provided with a spiral base, a plurality of insulator fixing seats are circumferentially distributed on the spiral base, insulator clamping blocks are arranged on the insulator fixing seats, circularly distributed electric heating wires are clamped in the insulator clamping blocks, and the spiral base supports the inner layer of cotton.

[0008] By adopting the above technical scheme, the spiral base can effectively cooperate with the spiral heating wire, so that the whole furnace body can ensure the uniform arrangement of the electric heating wire on each horizontal plane through the adjustment of the number of insulators, thereby ensuring the relatively stable temperature of the whole furnace body and reducing the temperature difference inside the furnace body.

[0009] Further provided is that a water-cooled pipe is further arranged between the outer shell and the water-cooled shell.

[0010] By adopting the above technical scheme, the water-cooled pipe can effectively and quickly cool the inside.

[0011] Further provided is that a top ceramic compression ring is further arranged on the spiral base, a top cotton compression is further arranged on the top ceramic compression ring, and a top cover plate is further arranged on the top cotton compression.

[0012] By adopting the above technical scheme, the temperature inside the furnace body can be effectively ensured.

[0013] Further provided is that a water-cooled flange is further arranged at the bottom of the furnace body and is in communication with the water-cooled pipe.

[0014] By adopting the above technical scheme, the water-cooled flange can effectively supply cooling water to the water-cooled pipe.

[0015] Further provided is that a connecting flange is further arranged outside the water-cooled flange.

[0016] By adopting the above technical scheme, the connecting flange can be effectively connected with other equipment.

[0017] Further provided is that the inner layer of cotton is a long strip and is embedded side by side on the inner wall of the middle insulation layer.

[0018] By adopting the above technical scheme, the inner layer of insulation cotton is more convenient to insert, and because the strip is relatively narrow, it will not be warped during the insertion process, thereby affecting the insulation effect.

[0019] In conclusion, the whole furnace body has the following beneficial effects: from the uniformity of wire winding and the uniformity of heat preservation, the wire winding (thick wire) of the traditional high-temperature vertical furnace is mostly spirally upward, and the base is made into a rotating upward surface to cooperate, and the ceramic bottom surface used for supporting the furnace wire is also made into an inclination to cooperate, from the uniformity of heat preservation, the periphery of the insulator is still coated according to the previous coating, and the long heat preservation cotton bar is filled in between the two rows of insulators (perpendicular to the outer layer of cotton), so that the temperature uniformity of the furnace body is improved to a good level, and the temperature control precision is less than ±0.5℃. BRIEF DESCRIPTION OF DRAWINGS

[0020] The utility model is further described below in combination with the drawings.

[0021] Figure 1 It is the whole structure schematic diagram of vertical furnace furnace body;

[0022] Figure 2 It is the internal structure schematic diagram of vertical furnace furnace body.

[0023] In the drawing, 1, furnace body;2, outer shell;3, middle heat preservation layer;4, water cooling cover shell;5, inner layer cotton bar;6, spiral base;7, insulator fixing seat;8, insulator clamping block;9, electric heating wire;10, water cooling pipe;11, top ceramic pressing ring;12, top cotton pressing;13, top cover plate;14, water cooling flange;15, connecting flange. DETAILED DESCRIPTION

[0024] The specific embodiment of the utility model is further described below in combination with the drawings.

[0025] The technical scheme adopted by the utility model is:

[0026] A vertical furnace furnace body, as shown in Figure 1 and Figure 2 , comprising a furnace body 1, the furnace body 1 includes an outer shell 2, the inner wall of the outer shell 2 is wrapped with a middle heat preservation layer 3, the outer wall of the outer shell 2 is wrapped with a water cooling cover shell 4, a water cooling pipe 10 is further arranged between the outer shell 2 and the water cooling cover shell 4, the inner wall of the middle heat preservation layer 3 is further provided with an inner layer cotton bar 5, the inner layer cotton bar 5 is long strip and is embedded on the inner wall of the middle heat preservation layer 3 side by side, the both ends of the furnace body 1 are further provided with a spiral base 6, the base of the furnace body 1 is further provided with a water cooling flange 14 in communication with the water cooling pipe 10, the outer side of the water cooling flange 14 is further provided with a connecting flange 15, and the spiral base 6 is circumferentially distributed with a plurality of insulator fixing seats 7, the insulator fixing seats 7 are further arranged with insulator clamping blocks 8, and the insulator clamping blocks 8 are further clamped with circumferentially distributed electric heating wires 9, and the spiral base 6 supports the inner layer cotton bar 5. The spiral base 6 is further provided with a top ceramic pressing ring 11, the top ceramic pressing ring 11 is further provided with a top cotton pressing 12, and the top cotton pressing 12 is further provided with a top cover plate 13.

[0027] Its main working principle is as follows: the furnace wire is separately into each column insulator clamping block 8, because the spiral base 6, the bottom surface is plane, the upper surface is spiral surface, the bottom insulator fixing base 7 is attached with the support of furnace body 1, sequentially falls into the bottom insulator clamping block 8, the surface of the bottom insulator clamping block 8 is flat, the arrangement of the furnace wire is relatively uniform, all the insulator clamping block 8 is clamped with C-shaped groove, can move up and down, the gap between two adjacent insulator clamping block 8 is larger than the furnace wire, ensures that the furnace wire can have certain deformation, and is overall fixed in the insulator clamping block 8.

[0028] The above is the preferred embodiment of the present application, and is not intended to limit the present application in any form. Any simple modification, equivalent change and modification made according to the technical essence of the present application to the above embodiments are within the scope of the technical scheme of the present application.

Claims

1. A vertical furnace body, comprising a furnace body (1), characterized in that: The furnace body (1) includes an outer shell (2), the inner wall of the outer shell (2) is wrapped with a middle insulation layer (3), the outer wall of the outer shell (2) is wrapped with a water-cooled cover (4), the inner wall of the middle insulation layer (3) is also provided with an inner cotton strip (5), the furnace body (1) is also provided with a spiral base (6) at both ends, a number of insulator fixing seats (7) are distributed circumferentially on the spiral base (6), insulator clamps (8) are arranged on the insulator fixing seats (7), and circumferentially distributed electric heating wires (9) are inserted into the insulator clamps (8), and the spiral base (6) supports the inner cotton strip (5).

2. The vertical furnace body according to claim 1, characterized in that: A water-cooling pipe (10) is also provided between the outer shell (2) and the water-cooled cover (4).

3. A vertical furnace body according to claim 2, characterized in that: The spiral base (6) is also provided with a top ceramic pressure ring (11), the top ceramic pressure ring (11) is also provided with a top pressure cotton (12), and the top pressure cotton (12) is also provided with a top cover plate (13).

4. A vertical furnace body according to claim 3, characterized in that: The bottom of the furnace body (1) is also provided with a water-cooled flange (14) that is connected to the water-cooled pipe (10).

5. A vertical furnace body according to claim 4, characterized in that: A connecting flange (15) is also provided on the outside of the water-cooled flange (14).

6. A vertical furnace body according to claim 5, characterized in that: The inner cotton strip (5) is long and side by side embedded in the inner wall of the middle insulation layer (3).

Images