Novel cavity cover opening mechanism and coating equipment

Abstract

The utility model discloses a novel cavity cover opening mechanism and coating equipment, and relates to the technical field of semiconductor vacuum equipment.The novel cavity cover opening mechanism comprises a mechanism body, an overturning arm, a driving part and a transmission assembly; the transmission assembly comprises a worm and a turbine. The worm is rotationally mounted on the mechanism main body; the turbine is rotationally mounted on the mechanism main body and is meshed with the worm; the driving piece is connected with the worm and used for driving the worm to rotate; one end of the overturning arm is connected with the turbine, and the overturning arm synchronously overturns when the turbine rotates. According to the design, opening and closing operation is simpler, and safety is higher; the structure is compact, installation space is saved, maintenance is convenient, and the structure is suitable for cavity covers.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor vacuum equipment, in particular to a novel cavity cover opening mechanism and a coating equipment. BACKGROUND

[0002] Vacuum equipment is widely used in the semiconductor industry, such as vacuum coating equipment; the flip cover mechanism is one of the components in the vacuum equipment, which is used to control the opening and closing of the cavity cover.

[0003] As shown in Figure 1 and Figure 2 , the existing cavity cover opening method is mainly the air spring opening method: specifically, the air spring (4) is fixed on the mounting block on the cavity assembly butt flange at one end, and is fixed on the mounting block (3) on the cavity cover (1) at the other end, and is symmetrically installed relative to the two sides of the cavity. When the cavity cover (1) needs to be opened, the staff opens the elbow door buckle (2), under the action of the air spring (4), the cavity cover (1) starts to flip open with the hinge (7) as the fulcrum, the limit bolt (6) on the cavity cover (1) is separated from the limit switch button (5), and the opening signal of the cavity cover (1) is sent through the conduction of the sensor. When the cavity cover (1) needs to be closed, the staff disassembles the spring pin on the hinge (7), under the action of the air spring (4), the cavity cover (1) starts to close. However, the above-mentioned cavity cover opening mechanism is mainly suitable for large-scale cavity cover, and the opening and closing steps are complicated.

[0004] Therefore, it is urgent to develop a scheme suitable for small cavity cover and simple opening and closing steps. CONTENT OF THE INVENTION

[0005] Therefore, the purpose of the present application is to provide a novel cavity cover opening mechanism suitable for small cavity cover and simple opening and closing steps.

[0006] The present application also provides a coating equipment with simple opening and closing steps of the cavity cover.

[0007] In order to achieve the above technical purpose, the present application provides a novel cavity cover opening mechanism, which comprises a mechanism main body, a flip arm, a driving member and a transmission assembly;

[0008] The transmission assembly comprises a worm and a turbine;

[0009] The worm is rotatably installed on the mechanism main body;

[0010] The turbine is rotatably installed on the mechanism main body and is engaged with the worm;

[0011] The driving member is connected with the worm for driving the worm to rotate;

[0012] One end of the turnover arm is connected with the turbine, and the turnover arm is turned synchronously when the turbine is turned.

[0013] Further, the transmission assembly further comprises a first gear and a second gear.

[0014] The first gear is coaxially fixed on one side of the turbine and synchronously turned with the turbine.

[0015] The second gear is rotatably installed on the mechanism body and engaged with the first gear.

[0016] The second gear is fixedly connected with one end of the turnover arm for driving the turnover arm to turn over.

[0017] Further, the diameter of the first gear is smaller than the diameter of the turbine.

[0018] The diameter of the second gear is larger than the diameter of the turbine.

[0019] Further, the central axis of the worm is vertically arranged.

[0020] The central axis of the worm is horizontally arranged so that the connected turnover arm turns over in the vertical direction.

[0021] Further, the mechanism body is provided with a mounting cavity.

[0022] The worm and the turbine are rotatably installed in the mounting cavity.

[0023] One end of the worm extends out of the mounting cavity and is connected with the driving member.

[0024] Further, the turnover arm is two and symmetrically arranged relative to the mechanism body.

[0025] A connecting rod is fixed between the other ends of the two turnover arms.

[0026] Further, a connecting seat is installed on the other end of the turnover arm.

[0027] Further, the driving member is a manual driving part.

[0028] The driving member is a hand wheel.

[0029] Further, a handle is arranged on the hand wheel.

[0030] The application also discloses a coating equipment comprising a cavity, a cover arranged on the cavity, and the novel cavity cover opening mechanism.

[0031] The novel cavity cover opening mechanism is installed on the cavity, and the other end of the turnover arm thereof is connected with the cover for controlling the cover to open or close.

[0032] From the above technical solutions can be seen, the new cavity cover opening mechanism designed by the application has the following beneficial effects:

[0033] 1. The turning control of the turning arm is realized by adopting the turbine worm linkage, the structure has good reliability, the opening and closing control precision is high, the locking function of the turbine worm can be used to make the opening and closing operation simpler and safer.

[0034] 2. The cavity cover opening time and labor can be saved by adjusting the turbine worm parameters, and the use flexibility is better.

[0035] 3. The structure is compact, the installation space is saved, the maintenance is convenient, and the cavity cover is suitable for use. BRIEF DESCRIPTION OF DRAWINGS

[0036] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0037] Figure 1 It is a first structure schematic diagram of the gas spring opening mode provided in the application.

[0038] Figure 2 It is a second structure schematic diagram of the gas spring opening mode provided in the application.

[0039] Figure 3 It is a perspective view of the new cavity cover opening mechanism provided in the application after cutting part of the mechanism body.

[0040] Figure 4 It is a sectional view of the new cavity cover opening mechanism provided in the application connected with the cover body.

[0041] Figure 5 It is a sectional view of the coating equipment provided in the application.

[0042] Figures 3-5 In the figure: 1, mechanism body; 2, turning arm; 21, connecting rod; 31, worm; 32, turbine; 33, first gear; 34, second gear; 35, bearing; 36, first rotating shaft; 37, second rotating shaft; 4, driving part; 41, handle; 5, connecting seat; 6, cover body; 7, cavity. DETAILED DESCRIPTION

[0043] The technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative work fall within the scope of the present application.

[0044] In the description of the embodiments of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the purpose of facilitating the description of the embodiments of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the embodiments of the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance.

[0045] In the description of the embodiments of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood in a broad sense, for example, it can be fixedly connected, or it can be replaceably connected, or it can be integrally connected, it can be mechanically connected, or it can be electrically connected, it can be directly connected, or it can be indirectly connected through an intermediate medium, it can be the communication inside two elements. For those of ordinary skill in the art, the specific meaning of the above terms in the embodiments of the present application can be understood according to the specific circumstances.

[0046] The embodiments of the present application disclose a new cavity cover opening mechanism and a coating equipment.

[0047] Please refer to Figure 3 An embodiment of a new cavity cover opening mechanism provided in the embodiments of the present application includes:

[0048] The mechanism body 1, the turnover arm 2, the driving member 4 and the transmission assembly.

[0049] The transmission assembly includes a worm 31 and a turbine 32.

[0050] The worm 31 is rotatably installed on the mechanism body 1, the turbine 32 is rotatably installed on the mechanism body 1, and is engaged with the worm 31.

[0051] The driving member 4 is connected with the worm 31, and is used to drive the worm 31 to rotate.

[0052] The turnover arm 2 can be an arm plate structure, one end of which is connected with the turbine 32, and is synchronous with the turbine 32 to turn when the turbine 32 rotates.

[0053] The novel cavity cover opening mechanism designed in the application has the following beneficial effects:

[0054] 1. The turning control of the turning arm 2 is realized by the linkage of the turbine 32 and the worm 31, the structure has good reliability, the opening and closing control precision is high, the locking function of the turbine 32 and the worm 31 can be used to make the opening and closing operation simpler and safer (when the cover body 6 is opened and the driving member 4 is not running, the cover body 6 will not be closed automatically under the self-locking function of the turbine 32 and the worm 31, ensuring safety).

[0055] 2. By adjusting the parameters of the turbine 32 and the worm 31, the cavity cover opening can be time-saving and labor-saving, and the flexibility is better.

[0056] 3. The structure is compact, the installation space is saved, the maintenance is convenient, and it is suitable for the use of cavity covers (cover body 6).

[0057] The above is embodiment one of a novel cavity cover opening mechanism provided by the application, and the following is embodiment two of a novel cavity cover opening mechanism provided by the application, please refer to Figures 3 to 4 .

[0058] Based on the scheme of the above embodiment one:

[0059] Further, the transmission assembly further comprises a first gear 33 and a second gear 34; the first gear 33 is coaxially fixed on one side of the turbine 32 and rotates synchronously with the turbine 32.

[0060] The second gear 34 is rotatably installed on the mechanism body 1 and is in mesh with the first gear 33; the second gear 34 is fixedly connected with one end of the turning arm 2 and is used to drive the turning arm 2 to turn.

[0061] By reasonably adjusting the tooth number ratio of the first gear 33 and the second gear 34, the turning speed of the turning arm 2 can be accurately controlled. The gear transmission itself has the characteristics of stable and reliable transmission, and the first gear 33 and the second gear 34 are in precise mesh with each other, which can uniformly and continuously transmit the power of the turbine 32 to the turning arm 2. Compared with some transmission modes relying on belts and chains, the gear transmission is not prone to slipping and jumping, which ensures the stability of the speed of the turning arm 2 during turning and avoids the situation of fast and slow.

[0062] Further, the diameter of the first gear 33 is smaller than the diameter of the turbine 32 (the first gear 33 is a pinion gear), and the diameter of the second gear 34 is larger than the diameter of the turbine 32 (the second gear 34 is a gear).

[0063] The cooperation of the pinion and the gear wheel can realize low-speed high-torque output, so that the overturning arm 2 can drive the cover body 6 with greater weight. The second gear wheel 34 with a larger diameter can make the rotation speed of the overturning arm 2 significantly lower than that of the turbine 32, realizing the conversion from the relatively high-speed rotation of the turbine 32 to the low-speed and accurate rotation of the overturning arm 2.

[0064] Further, the central axis of the worm 31 is vertically arranged, and the central axis of the worm 31 is horizontally arranged, so that the connected overturning arm 2 is overturned in the vertical direction, realizing the opening and closing control of the cover body 6 in the pitch state. When closing, a downward force can be applied to the cover body 6, so that the cover body 6 is better pressed on the cavity 7, and the closing effect is better.

[0065] Further, the mechanism body 1 is provided with a mounting cavity, and the worm 31 and the turbine 32 are rotatably mounted in the mounting cavity. One end of the worm 31 extends out of the mounting cavity and is connected to the driving member 4.

[0066] In this application, the worm 31 and the first gear wheel 33 are rotatably mounted through the first rotating shaft 36, and the second gear wheel 34 is rotatably mounted through the second rotating shaft 37. The end of the second rotating shaft 37 extends out of the mounting cavity and is fixedly connected with the overturning arm 2. The worm 31 is rotatably mounted through two bearings 35.

[0067] The mechanism body 1 can be designed as a box structure, and the mounting cavity can protect the transmission assembly and prolong the service life.

[0068] Further, the overturning arm 2 is two and is symmetrically arranged relative to the mechanism body 1. The two overturning arms 2 are fixedly connected with a connecting rod 21 at the other ends.

[0069] The two symmetrically arranged overturning arms 2 can evenly distribute the weight of the cover body 6 to both sides, greatly reducing the local pressure and enhancing the carrying capacity and stability of the overturning arm 2, so that structural failure is less likely to occur during long-term use.

[0070] Further, the overturning arm 2 is provided with a connecting seat 5 at the other end. Taking the design of the connecting rod 21 as an example, the connecting seat 5 is fixed on the connecting rod 21. The design of the connecting seat 5 makes the connection between the overturning arm 2 and the cover body 6 more convenient.

[0071] Further, the driving member 4 is a manual driving part. The manual driving part has high design flexibility, high economy, high mechanical structure reliability and low failure rate.

[0072] Specifically, the driving member 4 can be a hand wheel.

[0073] Further, in order to operate more conveniently, a handle 41 is arranged on the hand wheel.

[0074] AsFigure 5 As shown, the application also discloses a coating equipment, comprising a cavity 7, a cover 6 arranged on the cavity 7, and a novel cavity cover opening mechanism.

[0075] The novel cavity cover opening mechanism is installed on the cavity 7, and the other end of the turning arm 2 is connected to the cover 6, for controlling the cover 6 to open or close.

[0076] The above describes in detail the novel cavity cover opening mechanism and the coating equipment provided by the application. For those skilled in the art, the specific implementation and application range can be changed according to the idea of the embodiment of the application. In summary, the content of the specification should not be understood as a limitation of the application.

Claims

1. A novel cavity cover opening mechanism, characterized in that, It includes the main body of the mechanism (1), the tilting arm (2), the drive component (4), and the transmission assembly; The transmission assembly includes a worm (31) and a turbine (32); The worm gear (31) is rotatably mounted on the main body (1) of the mechanism. The turbine (32) is rotatably mounted on the main body (1) of the mechanism and meshes with the worm (31); The driving component (4) is connected to the worm (31) and is used to drive the worm (31) to rotate; One end of the flipping arm (2) is connected to the turbine (32), and flips synchronously when the turbine (32) rotates.

2. The novel cavity cover opening mechanism according to claim 1, characterized in that, The transmission assembly also includes a first gear (33) and a second gear (34). The first gear (33) is coaxially fixed to one side of the turbine (32) and rotates synchronously with the turbine (32); The second gear (34) is rotatably mounted on the main body (1) of the mechanism and meshes with the first gear (33); The second gear (34) is fixedly connected to one end of the flipping arm (2) and is used to drive the flipping arm (2) to flip.

3. The novel cavity cover opening mechanism according to claim 2, characterized in that, The diameter of the first gear (33) is smaller than the diameter of the turbine (32); The diameter of the second gear (34) is larger than the diameter of the turbine (32).

4. The novel cavity cover opening mechanism according to claim 1, characterized in that, The central axis of the worm (31) is set vertically; The central axis of the worm (31) is set horizontally so that the connected flipping arm (2) can be flipped in the vertical direction.

5. The novel cavity cover opening mechanism according to claim 1, characterized in that, The main body (1) of the mechanism is provided with an installation cavity; The worm (31) and the turbine (32) are rotatably mounted in the mounting cavity; One end of the worm (31) extends out of the mounting cavity and is connected to the drive (4).

6. The novel cavity cover opening mechanism according to claim 1, characterized in that, There are two flipping arms (2), which are symmetrically arranged with respect to the main body (1); A connecting rod (21) is fixed between the other ends of the two flipping arms (2).

7. The novel cavity cover opening mechanism according to claim 1, characterized in that, The other end of the flipping arm (2) is equipped with a connecting seat (5).

8. The novel cavity cover opening mechanism according to claim 1, characterized in that, The driving component (4) is a manually driven component; The driving component (4) is a handwheel.

9. The novel cavity cover opening mechanism according to claim 8, characterized in that, The handwheel is provided with a handle (41).

10. A coating equipment, characterized in that, It includes a cavity (7), a cover (6) disposed on the cavity (7), and a novel cavity cover opening mechanism as described in any one of claims 1 to 9; The novel cavity cover opening mechanism is installed on the cavity (7), and its flip arm (2) is connected to the cover (6) at the other end, for controlling the opening or closing of the cover (6).

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