Mask plate box turnover mechanism

Abstract

The utility model relates to a mask plate box turnover mechanism, which comprises a rotating motor, the rotating connecting plate is connected with the rotating end of the rotating motor; the bottom of the overturning frame is hinged to one side edge of the rotary connecting plate in the length direction; the extension seat is fixedly hinged to the other side edge of the rotary connecting plate in the length direction; the two ends of the air cylinder are hinged to the extending base and the bottom of the overturning frame correspondingly; the first linear module is fixed at the bottom of the overturning frame; the lifting frame is of an L-shaped structure and is movably connected with the first linear module; firstly, an overturning frame is overturned to a vertical state through an air cylinder, a mask plate box is pushed to a lifting frame, the lifting frame is driven to rise to a certain height through a first linear module, the mask plate box is separated from the ground, then the air cylinder shrinks, the mask plate box is overturned to a horizontal state along with the overturning frame, and horizontal rotation of a rotating connecting plate is achieved through a rotating motor. And the mask plate box is rotated to a required position, so that the packaged mask plate box is automatically overturned and rotated.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, and in particular to a mask cassette flipping mechanism. Background Technology

[0002] Masks are extremely important components, and their high precision makes them expensive to manufacture. Masks are often stored in mask boxes for transportation. However, during the disassembly of packaged masks, flipping, rotating and unpacking operations are required. Conventional unpacking is often done manually, which carries uncertain risks and may damage the mask.

[0003] In summary, how to automate the flipping and rotating of the encapsulated mask box has become an urgent problem for researchers in this field. Utility Model Content

[0004] The technical problem to be solved by this utility model is: how to realize the automated flipping, rotating and unpacking operations of a completed mask box;

[0005] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0006] This utility model relates to a mask box flipping mechanism. The mask box has a hollow rectangular structure with positioning protrusions on both sides, comprising: a rotating motor fixed to the ground; a rotating connecting plate connected to the rotating end of the rotating motor; a flipping frame hinged at its bottom to one side of the rotating connecting plate along its length; an extension seat hinged to the other side of the rotating connecting plate along its length; a cylinder hinged at both ends to the extension seat and the bottom of the flipping frame, respectively; a first linear module fixed to the bottom of the flipping frame; and an L-shaped lifting frame movably connected to the first linear module. When the cylinder drives the flipping frame to rotate to a vertical position, the mask box is supported on the lifting frame, and the first linear module drives the mask box to rise.

[0007] In this solution, the flipping frame is first flipped to a vertical position using a cylinder. The operator then pushes the packaged mask box onto the lifting frame. The first linear module drives the lifting frame to rise to a certain height, lifting the mask box off the ground. Subsequently, the cylinder retracts, flipping the mask box along with the flipping frame to a horizontal position. The rotating motor then rotates the connecting plate horizontally, rotating the mask box to the required position. This facilitates subsequent disassembly processes, line scanning inspection processes, and storage equipment, achieving automated flipping and rotation of the packaged mask box.

[0008] Since the mask box rotates with the flipping frame, in order to ensure that the vertical position of the mask box is aligned during the flipping process, this utility model further includes: a second linear module, which is fixed to the bottom of the flipping frame; an L-shaped limiting claw, which is connected to the movable end of the second linear module; when the flipping frame rotates to a vertical position and the mask box is supported on the lifting frame, the limiting claw abuts against the top of the mask box under the action of the second linear module;

[0009] When the mask box is placed on the vertical flip frame, the first linear module drives the frame to rise and fall, while the second linear module drives the limiting claw to rise and fall. The limiting claw is always in contact with the top of the mask box. With the cooperation of the first and second linear modules, the mask box is adjusted and fixed relative to the flip frame, thus preventing the mask box from falling during the flipping process.

[0010] To achieve centering adjustment of the mask plate relative to the left and right positions of the flip frame, this utility model further includes: lateral positioning components are provided on both the left and right sides of the flip frame; the lateral positioning components include: a third linear module, which is disposed at the bottom of both sides of the flip frame, and the moving end of the module moves parallel to the length direction of the flip frame; a lateral connecting plate, the bottom of which passes through the flip frame and connects to the moving end of the third linear module; and a lateral positioning plate, which is disposed on the lateral connecting plate and is adapted to abut against the side of the mask plate box under the action of the third linear module.

[0011] When the mask box is placed on the vertical flip frame lifting frame, the two left and right third linear modules work to abut the lateral positioning plates against the two sides of the mask box respectively, and adjust the left and right positions of the mask box relative to the flip frame for centering adjustment; the cooperation of the above-mentioned lateral positioning components with the lifting frame and the limiting claws makes the concentricity of the mask box concentric with the center of the flip frame, ensuring that the mask box flips stably with the flip plate.

[0012] To ensure that the mask box has a certain downward pressure during the flipping process, and to press the mask box onto the flipping plate, this utility model also includes: a lifting cylinder, the fixed end of which is connected to the side connecting plate, and the movable end of which is connected to a pressing plate, the bottom of which abuts against the positioning protrusion.

[0013] When the lateral positioning plate abuts against the two sides of the mask box, the lifting cylinder drives the pressing plate to descend and abut against the positioning protrusion on the side of the mask box. The lifting cylinder provides a certain downward pressure to press and position the mask box on the flip plate, ensuring that the mask box flips more stably with the flip plate.

[0014] In order to ensure that the mask box can be finely adjusted relative to the flip plate when the clamping plate is pressed against the mask box, this utility model adopts a rotating pulley on the clamping plate, and the bottom of the pulley is adapted to abut against the positioning protrusion.

[0015] In this design, the pulleys on the clamping plate abut against the positioning protrusions, allowing the mask box to be adjusted in height relative to the flip plate, causing the pulleys to rotate passively.

[0016] To ensure that the flipping frame is in a horizontal position, this utility model adopts a buffer seat on the top surface of the rotating connecting plate; the buffer seat is provided with a buffer block that abuts against the flipping frame;

[0017] In this design, when the flip frame rotates to a horizontal position, it abuts against the buffer block. The buffer block prevents rigid collisions between the flip frame and the rotating connecting plate. In addition, the buffer block acts as a limit to ensure that the flip frame remains in a horizontal position.

[0018] The beneficial effects of this utility model are as follows: This utility model is a mask box flipping mechanism. First, the flipping frame is flipped to a vertical position by a cylinder. The operator pushes the packaged mask box onto the lifting frame. The lifting frame is raised to a certain height by the first linear module, lifting the mask box off the ground. Then, the cylinder retracts, flipping the mask box with the flipping frame to a horizontal position. The horizontal rotation of the rotating connecting plate is achieved by the rotating motor, rotating the mask box to the required position. This facilitates subsequent disassembly processes, line scanning inspection processes, and warehousing equipment, realizing the automated flipping and rotation of the packaged mask box. Attached Figure Description

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0020] Figure 1 This is a schematic diagram of the structure of the flip frame of this utility model in a horizontal state;

[0021] Figure 2 This is a structural schematic diagram of the flip frame of this utility model in a horizontal state from another perspective;

[0022] Figure 3 This is a schematic diagram of the structure of the present invention, omitting the mask box;

[0023] Figure 4 This is a structural schematic diagram of the present invention with some parts omitted;

[0024] In the diagram: 1-Mask box, 2-Rotating motor, 3-Rotating connecting plate, 4-Flipping frame, 5-Extension seat, 6-Cylinder, 7-First linear module, 8-Lifting frame, 9-Second linear module, 10-Limiting claw, 11-Positioning protrusion, 12-Third linear module, 13-Side connecting plate, 14-Side positioning plate, 15-Lifting cylinder, 16-Pressure plate, 17-Pulley, 18-Buffer seat. Detailed Implementation

[0025] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention, and therefore only show the components relevant to the present invention.

[0026] like Figure 1-4 As shown, this utility model is a mask box flipping mechanism. The mask box 1 has a hollow rectangular structure with positioning protrusions 11 on both sides, and includes: a rotating motor 2, which is fixed to the ground; a rotating connecting plate 3, which is connected to the rotating end of the rotating motor 2; a flipping frame 4, the bottom of which is hinged to one side of the rotating connecting plate 3 along its length; an extension seat 5, which is fixed to the other side of the rotating connecting plate 3 along its length; a cylinder 6, the two ends of which are respectively hinged to the extension seat 5 and the bottom of the flipping frame 4; a first linear module 7, which is fixed to the bottom of the flipping frame; and an L-shaped lifting frame 8, which is movably connected to the first linear module 7. When the cylinder 6 drives the flipping frame 4 to rotate to a vertical state, the mask box 1 is supported on the lifting frame 8, and the first linear module 7 drives the mask box 1 to rise.

[0027] In this solution, the cylinder 6 first flips the flipping frame 4 to a vertical position. The operator pushes the packaged mask box 1 onto the lifting frame 8. The first linear module 7 drives the lifting frame to rise to a certain height, lifting the mask box 1 off the ground. Then, the cylinder 6 retracts, flipping the mask box 1 with the flipping frame 4 to a horizontal position. The rotating motor 2 rotates the connecting plate 3 horizontally, rotating the mask box 1 to the required position. This facilitates subsequent disassembly processes, line scanning inspection processes, and storage equipment, achieving automated flipping and rotation of the packaged mask box 1.

[0028] like Figure 1-4 As shown, since the mask box rotates with the flipping frame, in order to ensure that the vertical position of the mask box is aligned during the flipping process, this utility model further includes: a second linear module 9, which is fixed to the bottom of the flipping frame 4; an L-shaped limiting claw 10, which is connected to the movable end of the second linear module 9; when the flipping frame 4 rotates to a vertical position and the mask box 1 is supported on the lifting frame 8, the limiting claw 10 abuts against the top of the mask box 1 under the action of the second linear module 9;

[0029] When the mask box 1 is placed on the vertical flip frame 4 lifting frame 8, the first linear module 7 drives the lifting frame 8 to rise and fall, while the second linear module 9 drives the limiting claw 10 to rise and fall. The limiting claw 10 is always in contact with the top of the mask box 1. With the cooperation of the first linear module 7 and the second linear module 9, the mask box 1 is adjusted and fixed to the vertical center relative to the flip frame 4, thus preventing the mask box 1 from falling during the flipping process.

[0030] like Figure 1-4 As shown, in order to achieve centering adjustment of the mask plate relative to the left and right positions of the flip frame, this utility model further includes: lateral positioning components are provided on both the left and right sides of the flip frame 4; the lateral positioning components include: a third linear module 12, which is disposed at the bottom of both sides of the flip frame 4, and the moving end of which moves parallel to the length direction of the flip frame 4; a lateral connecting plate 13, the bottom of which passes through the flip frame 4 and is connected to the moving end of the third linear module 12; and a lateral positioning plate 14, which is disposed on the lateral connecting plate 13 and is adapted to abut against the side of the mask plate box 1 under the action of the third linear module 12.

[0031] When the mask box 1 is placed on the vertical flip frame 4 lifting frame 8, the two left and right third linear modules 12 work to abut the lateral positioning plates 14 against the two sides of the mask box 1 respectively, and adjust the left and right positions of the mask box 1 relative to the flip frame 4 for centering adjustment; the cooperation of the above-mentioned lateral positioning components with the lifting frame 8 and the limiting claw 10 makes the concentricity of the mask box 1 concentric with the center of the flip frame 4, ensuring that the mask box 1 flips stably with the flip plate 4.

[0032] like Figure 1-4 As shown, in order to ensure that the mask box has a certain downward pressure during the process of following the flipping plate, the mask box is pressed onto the flipping plate. The present invention also includes: a lifting cylinder 15, the fixed end of which is connected to the side connecting plate 13, and the movable end of which is connected to a pressing plate 16, the bottom of which abuts against the positioning protrusion 11.

[0033] When the lateral positioning plate 14 abuts against the two sides of the mask box 1, the lifting cylinder 15 drives the pressing plate 16 to descend and abut against the positioning protrusion 11 on the side of the mask box 1. The lifting cylinder 15 provides a certain downward pressure to press and position the mask box 1 on the flip plate 4, ensuring that the mask box 1 flips more stably with the flip plate 4.

[0034] like Figure 3-4 As shown, in order to ensure that the mask box can be finely adjusted relative to the flip plate when the pressing plate is pressed against the mask box, the present invention adopts a rotating pulley 17 on the pressing plate 16, and the bottom of the pulley 17 is adapted to abut against the positioning protrusion 11.

[0035] In this design, the pulleys on the clamping plate abut against the positioning protrusions, allowing the mask box to be adjusted in height relative to the flip plate, causing the pulleys to rotate passively.

[0036] like Figure 2-3 As shown, in order to ensure that the flipping frame is in a horizontal state, the present invention adopts a buffer seat 18 on the top surface of the rotating connecting plate 3; the buffer seat 18 is provided with a buffer block that abuts against the flipping frame 4;

[0037] In this scheme, when the flip frame 4 rotates to the horizontal state, the flip frame 4 abuts against the buffer block. The buffer block avoids the rigid collision between the flip frame 4 and the rotating connecting plate 3. In addition, the buffer block plays a limiting role, ensuring that the flip frame 4 can be in a horizontal state.

[0038] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A photomask box flipping mechanism, wherein the photomask box has a hollow rectangular structure with positioning protrusions on both sides, characterized in that, include: Rotate the motor, which is fixed to the ground; A rotating connecting plate, which is connected to the rotating end of the rotating motor; The bottom of the flip frame is hinged to one side of the rotating connecting plate along its length. An extension seat is fixed to the other side of the rotating connecting plate along its length and hinged together. The cylinder has its two ends hinged to the extension seat and the bottom of the flip frame, respectively. The first linear module is fixed to the bottom of the flip frame; The L-shaped lifting frame is movably connected to the first linear module; When the cylinder drives the flipping frame to rotate to a vertical position, it supports the mask box on the lifting frame, and the first linear module drives the mask box to rise.

2. The mask box flipping mechanism according to claim 1, characterized in that, Also includes: The second linear module is fixed at the bottom of the flip frame; The L-shaped limiting claw is connected to the movable end of the second linear module; When the flip frame rotates to a vertical position and the mask box is supported on the lifting frame, the limiting claw abuts against the top of the mask box under the action of the second linear module.

3. The mask box flipping mechanism according to claim 1, characterized in that, Also includes: Lateral positioning components are provided on both the left and right sides of the flip frame; The lateral positioning component includes: The third linear module is located at the bottom of both sides of the flip frame, and the direction of movement of its movable end is parallel to the length direction of the flip frame; A side connecting plate, the bottom of which passes through the flip frame and connects to the movable end of the third linear module; A lateral positioning plate is disposed on the lateral connecting plate and is adapted to abut against the side of the mask box under the action of the third linear module.

4. A mask box flipping mechanism according to claim 3, characterized in that, Also includes: The lifting cylinder has a fixed end at its bottom connected to the side connecting plate, and a pressing plate connected to its movable end at its top. The bottom of the pressing plate abuts against the positioning protrusion.

5. A mask box flipping mechanism according to claim 4, characterized in that, The clamping plate is provided with a rotating pulley, the bottom of which is adapted to abut against the positioning protrusion.

6. A mask box flipping mechanism according to claim 1, characterized in that, A buffer seat is provided on the top surface of the rotating connecting plate; The buffer seat is provided with a buffer block that abuts against the flip frame.

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