Objective table for semiconductor detector

Abstract

The utility model relates to an objective table for a semiconductor detector, and relates to the technical field of detection object carrying, the objective table comprises a table body and a first moving frame, the table body is slidably arranged on the first moving frame, the first moving frame is provided with a first moving motor, the first moving frame is rotatably provided with a first moving screw rod, and the first moving screw rod is provided with a second moving motor. The first moving frame is slidably provided with a first moving block, the first moving block is connected with the table body, the first moving lead screw penetrates through the first moving block and is in threaded connection with the first moving block, and a rotating shaft of the first moving motor is connected with the first moving lead screw. The application has the effect of improving the use convenience.

Description

Technical Field

[0001] This utility model relates to the field of detection carrier technology, and in particular to a carrier stage for a semiconductor detector. Background Technology

[0002] Currently, X-ray imaging technology has become an indispensable part of quality inspection of electronic components, especially semiconductor chips, to examine their internal structures. With the rapid development and technological advancements in the microelectronics industry, the requirements for inspection equipment are becoming increasingly stringent. These requirements not only demand higher resolution and sensitivity but also greater automation to adapt to the pace of large-scale production. Against this backdrop, the design optimization of the stage used for inspecting objects, as a crucial component of X-ray imaging systems, is particularly important.

[0003] In existing X-ray semiconductor detectors, the stage is usually slidably mounted on the detector. Users manually pull the stage to move it away from the detection position, and then push the stage back to the detection position after changing the object to be detected. The detector then positions the stage and the object at the detection position and performs the detection. However, during use, manually pushing the stage is time-consuming and laborious, especially since the stage itself has a certain weight and may hold heavy objects. Utility Model Content

[0004] To improve ease of use, this application provides a stage for a semiconductor testing instrument.

[0005] The semiconductor detector stage provided in this application adopts the following technical solution:

[0006] A stage for a semiconductor testing instrument includes a stage body and a first movable frame. The stage body is slidably mounted on the first movable frame. The first movable frame is equipped with a first movable motor. A first movable screw is rotatably mounted on the first movable frame. A first movable block is slidably mounted on the first movable frame. The first movable block is connected to the stage body. The first movable screw passes through the first movable block and is threadedly connected to the first movable block. The shaft of the first movable motor is connected to the first movable screw.

[0007] By adopting the above technical solution, the first moving motor is started to drive the first moving screw to rotate, thereby driving the stage to move on the first moving frame through the first moving block. By controlling the number of rotations of the first moving motor, the position of the stage is controlled, thus accurately stopping the stage at the detection position, thereby improving the accuracy of detection positioning and enhancing the authenticity of the detection. At the same time, by controlling the first moving motor to drive the stage to move, the labor intensity is reduced, and the user does not need to manually push or pull the stage to move, thus improving the convenience of use.

[0008] Preferably, the first movable block is provided with an assembly block, and the assembly block is provided with assembly bolts, which assemble the assembly block to the platform.

[0009] By adopting the above technical solution, the assembly bolts are used to assemble the assembly blocks onto the platform, making it convenient to disassemble the platform for replacement or maintenance.

[0010] Preferably, the system also includes a second movable frame, wherein the first movable frame is slidably mounted on the second movable frame, the second movable frame is equipped with a second movable motor, the second movable frame is rotatably mounted with a second movable screw, the second movable motor is connected to the second movable screw, the second movable frame is slidably mounted with a second movable block, the second movable block is connected to the first movable frame, and the second movable screw passes through the second movable block and is threadedly connected to the second movable block.

[0011] By adopting the above technical solution and setting up components such as a second movable frame that moves in another direction, the range of movement of the platform is increased, thereby improving the ease of operation of the movable platform and increasing the distance between the staff and the testing instruments, thus reducing safety risks.

[0012] Preferably, the second movable frame is provided with a second mounting rod, the first movable frame is provided with a second mounting block, the second mounting block is provided with a second mounting groove, and the second mounting rod is inserted into the second mounting groove and can slide within the second mounting groove.

[0013] By adopting the above technical solution, the second mounting rod is inserted into the second mounting slot and slides within the second mounting slot, thereby realizing the movable connection between the first movable frame and the second movable frame and improving the stability of the movable connection.

[0014] Preferably, the first movable frame is provided with a first mounting rod, the platform is provided with a first mounting block, the first mounting block is provided with a first mounting groove, and the first mounting rod is inserted into the first mounting groove and can slide within the first mounting groove.

[0015] By adopting the above technical solution, the first mounting slot on the first mounting block is fitted onto the first mounting rod, thereby realizing the movable connection between the platform and the first movable frame, improving the stability of the movable connection, and thus improving the stability of the platform movement.

[0016] Preferably, the platform is provided with a placement box.

[0017] By adopting the above technical solution, the object to be tested is placed in the placement box, thereby locating the position of the object to be tested, improving the accuracy of the detection and positioning, and thus improving the authenticity of the detection structure.

[0018] Preferably, the placement box is rotatably mounted on the platform, the platform is equipped with a rotating motor, the platform is provided with a rotating groove, and a first rotating gear and a second rotating gear are rotatably mounted in the rotating groove. The first rotating gear is connected to the rotating shaft of the rotating motor, and the second rotating gear is connected to the placement box.

[0019] By adopting the above technical solution, the rotating motor is started to drive the first rotating gear to rotate, and the second rotating gear drives the placement box to rotate, thereby causing the object being detected in the placement box to rotate, thus cooperating with multi-angle shooting detection and improving the convenience of use.

[0020] Preferably, the platform is provided with a rotating block, the rotating block is provided with an auxiliary groove communicating with the rotating groove, the rotating motor is provided on the rotating block, the first rotating gear is rotatably disposed in the auxiliary groove and inserted into the rotating groove, a plurality of auxiliary gears are rotatably disposed in the rotating groove, the auxiliary gears mesh in sequence, the auxiliary gear at one end meshes with the first rotating gear, and the auxiliary gear at the other end meshes with the second rotating gear.

[0021] By adopting the above technical solution, the rotating block and the auxiliary gear for transmission allow the rotating motor to be placed outside the stage body, thereby reducing the possibility that the rotating motor will affect the detection of objects on the stage body, and also reducing the possibility that the rotating motor will affect the movement of the stage body, thus improving the convenience of use.

[0022] In summary, this application includes at least one of the following beneficial technical effects:

[0023] 1. By setting up a platform, a first moving frame, a first moving motor, a first moving screw, and a first moving block, the first moving motor is started to drive the first moving screw to rotate, thereby driving the platform to move along the first moving frame with the help of the first moving block. This eliminates the need for manual pushing, reduces labor intensity, and improves ease of use.

[0024] 2. By setting up a second moving frame, a second moving motor, a second first lead screw, and a second moving block, the second moving motor is started to drive the second moving lead screw to rotate, and the first moving frame is driven to slide on the second moving frame by means of the second moving block, thereby increasing the movement range of the platform and improving its applicability;

[0025] 3. By setting up a placement box, a rotating motor, a first rotating gear, and a second rotating gear, starting the rotating motor drives the first rotating gear to rotate, which in turn drives the placement box to rotate through the second rotating gear, thereby causing the object to be detected inside the placement box to rotate. This facilitates multi-angle shooting and detection, improving the ease of use. Attached Figure Description

[0026] Figure 1This is an overall schematic diagram of a stage for a semiconductor detector provided in an embodiment of this application.

[0027] Figure 2 It is a cross-sectional view used to illustrate the connection relationship between the first and second moving frames.

[0028] Figure 3 It is a cross-sectional view used to illustrate the connection between the first moving frame and the platform.

[0029] Figure 4 It is a cross-sectional view used to show the internal structure of the platform.

[0030] Explanation of reference numerals in the attached drawings: 1. Platform; 11. Rotating groove; 12. First mounting block; 121. First mounting groove; 13. Rotating block; 131. Auxiliary groove; 14. Assembly groove; 15. Placement box; 2. First moving frame; 21. First mounting rod; 22. First moving motor; 23. First moving screw; 24. First moving block; 241. Assembly block; 242. Assembly bolt; 25. Second mounting block; 251. Second mounting groove; 3. Second moving frame; 31. Second mounting rod; 32. Second moving motor; 33. Second moving screw; 34. Second moving block; 4. Rotating motor; 41. First rotating gear; 42. Second rotating gear; 43. Auxiliary gear. Detailed Implementation

[0031] The following is in conjunction with the appendix Figure 1-4 This application will be described in further detail.

[0032] This application discloses a stage for a semiconductor detector. (Refer to...) Figures 1 to 4The system includes a platform 1, a first movable frame 2, and a second movable frame 3. The first movable frame 2 is fixedly equipped with several second mounting blocks 25. The second movable frame 3 is fixedly equipped with second mounting rods 31. A second mounting groove 251 is provided through the side wall of the second mounting hole, and the second mounting rod 31 is adapted to pass through the second mounting groove 251 and can slide within it. The first mounting frame is equipped with the first mounting rod 21. Several first mounting blocks 12 are fixedly equipped on the side wall of the platform 1. A first mounting groove 121 is provided through the side wall of the first mounting block 12, and the first mounting rod 21 is adapted to pass through the first mounting groove 121 and can slide within it. The first movable frame 2 and the second movable frame 3 are vertically arranged. The screw threads are not shown in the figure. The second movable frame 3 is fixedly equipped with a second movable motor 32. The second movable frame 3 is rotatably equipped with a second movable screw 33 connected to the shaft of the second movable motor 32. A second movable block 34, threaded through the second movable screw 33, is slidably arranged on the side wall of the second movable frame 3. The second movable block 34 is fixedly connected to the first movable frame 2. A first moving motor 22 is fixedly mounted on the side wall of the first moving frame 2. A first moving screw 23, which is fixedly connected to the rotating shaft of the first moving motor 22, is rotatably mounted on the side wall of the first moving frame 2. A first moving block 24, threaded through the first moving screw 23, is slidably mounted on the side wall of the first moving frame 2. An assembly block 241 is detachably mounted on the first moving block 24 by bolts. An assembly bolt 242 is mounted on the assembly block 241. An assembly groove 14 is provided on the top wall of the platform 1. The assembly block 241 is fitted into the assembly groove 14 and assembled with the platform 1 by the assembly bolt 242. A second moving frame 3 is fixedly mounted on the testing instrument. The first moving motor 22 and the first moving screw 23, the second moving motor 32 and the second moving screw 33 form a moving structure. The platform is moved by motor drive, reducing labor intensity and improving ease of use.

[0033] For ease of use, please refer to Figure 1 and Figure 4A placement box 15 with a top opening is rotatably mounted on the center of the surface of the platform 1 via a rotating shaft. In another embodiment, the placement box 15 is detachably connected to the rotating shaft by bolts. A rotating groove 11 communicating with the side wall is provided inside the platform 1. A second rotating gear 42 and several auxiliary gears 43 are rotatably mounted in the rotating groove 11. The auxiliary gears 43 are arranged neatly and mesh sequentially, with one section of the auxiliary gear 43 meshing with the second rotating gear 42. A rotating block 13 is fixedly mounted on the side wall of the platform 1. A rotating motor 4 is fixedly mounted on the top wall of the rotating block 13. An auxiliary groove 131 communicating with the rotating groove 11 is provided on the side wall of the rotating block 13 near the platform 1. A first rotating gear 41, coaxially fixedly connected to the rotating shaft of the rotating motor 4, is rotatably mounted in the auxiliary groove 131. The first rotating gear 41 is inserted into the rotating groove 11 and meshes with the auxiliary gears 43 away from the second rotating gear 42. Starting the rotating motor 4 drives the placement box 15 to rotate through the meshing of the gears, thereby facilitating multi-angle X-ray detection.

[0034] The implementation principle of a semiconductor testing instrument stage according to an embodiment of this application is as follows: starting the second moving motor 32 drives the first moving frame 2 to move through the second moving lead screw 33 and the second moving block 34, and starting the first moving motor 22 drives the stage body 1 to move through the first moving lead screw 23 and the first moving block 24, thus completing the movement of the stage. It does not require the staff to manually push the stage to move, reducing labor intensity and improving the convenience of use.

[0035] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A stage for a semiconductor detector, characterized in that: The device includes a platform (1) and a first movable frame (2). The platform (1) is slidably mounted on the first movable frame (2). The first movable frame (2) is equipped with a first movable motor (22). A first movable screw (23) is rotatably mounted on the first movable frame (2). A first movable block (24) is slidably mounted on the first movable frame (2). The first movable block (24) is connected to the platform (1). The first movable screw (23) passes through the first movable block (24) and is threadedly connected to the first movable block (24). The shaft of the first movable motor (22) is connected to the first movable screw (23).

2. The stage for a semiconductor detector according to claim 1, characterized in that: The first movable block (24) is provided with an assembly block (241), the assembly block (241) is provided with an assembly bolt (242), and the assembly bolt (242) assembles the assembly block (241) with the platform (1).

3. The stage for a semiconductor detector according to claim 1, characterized in that: It also includes a second movable frame (3), the first movable frame (2) is slidably mounted on the second movable frame (3), the second movable frame (3) is provided with a second movable motor (32), the second movable frame (3) is rotatably mounted with a second movable screw (33), the second movable motor (32) is connected to the second movable screw (33), the second movable frame (3) is slidably mounted with a second movable block (34), the second movable block (34) is connected to the first movable frame (2), the second movable screw (33) passes through the second movable block (34) and is threadedly connected to the second movable block (34).

4. The stage for a semiconductor detector according to claim 3, characterized in that: The second movable frame (3) is provided with a second mounting rod (31), the first movable frame (2) is provided with a second mounting block (25), the second mounting block (25) is provided with a second mounting groove (251), the second mounting rod (31) is inserted into the second mounting groove (251) and can slide in the second mounting groove (251).

5. A stage for a semiconductor detector according to claim 1, characterized in that: The first movable frame (2) is provided with a first mounting rod (21), the platform (1) is provided with a first mounting block (12), the first mounting block (12) is provided with a first mounting groove (121), the first mounting rod (21) is inserted into the first mounting groove (121) and can slide in the first mounting groove (121).

6. The stage for a semiconductor detector according to claim 1, characterized in that: The platform (1) is provided with a placement box (15).

7. A stage for a semiconductor detector according to claim 6, characterized in that: The placement box (15) is rotatably mounted on the platform (1). The platform (1) is equipped with a rotating motor (4). The platform (1) is provided with a rotating groove (11). A first rotating gear (41) and a second rotating gear (42) are rotatably mounted in the rotating groove (11). The first rotating gear (41) is connected to the rotating shaft of the rotating motor (4), and the second rotating gear (42) is connected to the placement box (15).

8. A stage for a semiconductor detector according to claim 7, characterized in that: The platform (1) is provided with a rotating block (13), the rotating block (13) is provided with an auxiliary groove (131) communicating with the rotating groove (11), the rotating motor (4) is provided on the rotating block (13), the first rotating gear (41) is rotatably disposed in the auxiliary groove (131) and inserted into the rotating groove (11), a plurality of auxiliary gears (43) are rotatably disposed in the rotating groove (11), the auxiliary gears (43) mesh in sequence, the auxiliary gear (43) located at one end meshes with the first rotating gear (41), and the auxiliary gear (43) located at the other end meshes with the second rotating gear (42).

Images