Auxiliary workpiece for mounting or dismounting shielding part of magnetron sputtering working cavity

Abstract

The utility model provides an auxiliary workpiece for mounting or dismounting a shielding part of a magnetron sputtering working cavity, which comprises a workpiece body, and a supporting part and a fixed clamping part are sequentially formed on the workpiece body; the fixed clamping part extends from the top end to the supporting part to form a limiting clamping groove; the supporting part laterally protrudes out of the fixed clamping part to form a top end face exposed out of the fixed clamping part and an abutting outer side face used for abutting against the working cavity. The top end face is an inclined supporting face, and the top end face gradually inclines towards the bottom from the joint of the top end face and the fixed clamping part to the intersection of the top end face and the abutting outer side face. According to the auxiliary workpiece for mounting and dismounting the ceramic piece, the outer cup and the peripheral boss of the tantalum ring can be supported and fixed, damage caused by friction between the ceramic piece and the tantalum ring in the dismounting process is prevented, and the ceramic piece is effectively protected; and screw fixation during mounting can be facilitated, the operation is simple, and the mounting and dismounting time is shortened.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor equipment auxiliary workpiece, especially to a kind of auxiliary workpiece of installation or dismounting the shielding component of magnetron sputtering working cavity. BACKGROUND

[0002] Physical vapor deposition is one of the most critical processes in semiconductor chip production process, its purpose is to deposit metal or metal compound in the form of thin film on silicon wafer or other substrate, and then through lithography and etching process cooperation, finally form the complex wiring structure in semiconductor chip.Magnetron sputtering machine is the key equipment for preparing thin film in physical vapor deposition process, tantalum cavity (Ta cavity) is a key component in magnetron sputtering machine, wherein the shielding component (Shield component) in tantalum cavity is used to protect the internal structure of chamber, reduce unnecessary deposition of sputtering particles and improve sputtering efficiency;Shielding component usually includes outer cup (Outer Cup), tantalum ring, ceramic piece (Rest Buttons), gasket and other structures.

[0003] In prior art, when dismounting the shielding component in magnetron sputtering machine, the gasket and ceramic piece need to be dismounted first, and then the outer cup and tantalum ring are dismounted, in this process, since the outer cup has no supporting tool, in the process of taking out the ceramic piece, the outer cup cannot be kept fixed, and friction with the ceramic piece is easy to occur, which causes damage to the ceramic piece, and affects the positioning and insulation performance of the ceramic piece;Therefore, an auxiliary workpiece for installing or dismounting the shielding component of magnetron sputtering working cavity is urgently needed to avoid damage to the ceramic piece during installation and dismounting. UTILITY MODEL CONTENT

[0004] In view of the above-mentioned shortcomings of prior art, the purpose of the utility model is to provide an auxiliary workpiece for installing or dismounting the shielding component of magnetron sputtering working cavity, to solve the problem of friction between the outer cup and the ceramic piece during dismounting due to lack of supporting tool in prior art, which causes damage to the ceramic piece, the auxiliary workpiece for installing or dismounting the shielding component of magnetron sputtering working cavity in the present application supports the outer cup, which can fix the outer cup during installation and dismounting, thereby avoiding damage to the ceramic piece caused by friction between the outer cup and the ceramic piece.

[0005] To achieve the above-mentioned purposes and other related purposes, the utility model is realized by the following technical solutions.

[0006] The utility model discloses a first aspect provides an auxiliary workpiece of installation or dismounting the shielding component of magnetron sputtering working cavity, the auxiliary workpiece includes workpiece body, and the workpiece body is formed with support 120 and fixed clamping portion 110 in proper order, and fixed clamping portion 110 forms the limit clamping groove 111 from the top end to the direction of support 120, and the support 120 is laterally protruding from fixed clamping portion to form with the top end surface 121 exposed in fixed clamping portion and the abutting outside surface 122 for abutting working cavity, the top end surface 121 is inclined support surface, and the top end surface 121 gradually inclines to the bottom from its junction with fixed clamping portion to the confluence with abutting outside surface 122.

[0007] In one embodiment, the limit clamping groove 111 is U-shaped.

[0008] In one embodiment, the support 120 and the fixed clamping portion 110 are integrally formed.

[0009] In one embodiment, the support 120 forms a lower bottom surface perpendicular to the abutting outside surface 122.

[0010] In one embodiment, the inclination angle of the top end surface 121 relative to the abutting outside surface 122 is 100-105°.

[0011] In one embodiment, the fixed clamping portion 110 forms an inner side surface 112 parallel to the abutting outside surface 122.

[0012] In one embodiment, the fixed clamping portion 110 is used to tightly clamp the outer peripheral boss 201a of the tantalum ring to limit the outer cup 202.

[0013] In one embodiment, the thickness c of the fixed clamping portion 110 is 8-12 mm.

[0014] In one embodiment, the width a of the limit clamping groove 111 in the fixed clamping portion 110 is 8-12 mm.

[0015] In one embodiment, the height b of the limit clamping groove 111 of the fixed clamping portion 110 is 15-35 mm.

[0016] In one embodiment, the length L of the support 120 is 40-50 mm.

[0017] In one embodiment, the width W of the support 120 is 35-45 mm.

[0018] In one embodiment, the height H of the support 120 is 50-150 mm.

[0019] In one embodiment, the support portion 120 is a quadrangular prism structure.

[0020] In one embodiment, the auxiliary workpiece is a rubber workpiece.

[0021] As described above, the utility model has the following beneficial effects:

[0022] When installing or dismounting the shielding component in the tantalum cavity of the magnetron sputtering machine, due to the lack of an auxiliary workpiece, the outer cup and the ceramic piece are not fixed during the installation and dismounting process, which causes friction between the outer cup and the ceramic piece or between the outer cup and the outer peripheral boss of the tantalum ring, resulting in damage to the ceramic piece; the auxiliary workpiece for installing or dismounting the shielding component of the magnetron sputtering working cavity can support and fix the outer cup, thereby avoiding damage to the ceramic piece caused by friction with the outer cup or the outer peripheral boss of the tantalum ring during the dismounting and installation process.

[0023] In addition, after the auxiliary workpiece for installing or dismounting the shielding component of the magnetron sputtering working cavity fixes the outer cup, it is convenient to screw and dismount the screws of the outer cup, thereby shortening the installation and dismounting time. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 A perspective structural schematic view of the auxiliary workpiece for installing and dismounting the ceramic piece of the utility model is shown.

[0025] Figure 2 A front view of the auxiliary workpiece for installing and dismounting the ceramic piece of the utility model is shown.

[0026] Figure 3 A left view of the auxiliary workpiece for installing and dismounting the ceramic piece of the utility model is shown.

[0027] Figure 4 A specific use scene schematic view of the auxiliary workpiece for installing and dismounting the ceramic piece of the utility model is shown.

[0028] Figure 5 A schematic view of the auxiliary workpiece for installing and dismounting the ceramic piece of the utility model in specific use is shown.

[0029] Figure 6 A transverse cross-sectional view of the outer cup and the ceramic piece after installation in the specific use scene of the auxiliary workpiece for installing and dismounting the ceramic piece of the utility model is shown.

[0030] The labels in the figure are: 100 - auxiliary workpiece, 110 - fixed clamping part, 111 - limiting clamping groove, 112 - inner side, 120 - supporting part, 121 - top end face, 122 - abutting outer side, 200 - tantalum cavity, 201 - tantalum ring, 201a - tantalum ring outer peripheral boss, 202 - outer cup, 203 - inner wall of tantalum cavity, 204 - ceramic piece, 205 - gasket, 206 - first screw, 207 - second screw, 208 - third screw. DETAILED DESCRIPTION

[0031] The embodiments of the present application will be described in detail by specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present application from the disclosed content of the specification.

[0032] Please refer to Figures 1 to 6 . It should be understood that the structures, proportions, sizes, etc. shown in the drawings attached to the specification are only used to cooperate with the disclosed content of the specification for those skilled in the art to understand and read, and are not used to limit the limiting conditions that the present application can be implemented, so they do not have technical substantive significance. Any modification of structure, change of proportion relationship or adjustment of size, without affecting the effects and purposes that the present application can produce, should still fall within the scope of the technical content disclosed by the present application. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" in the specification are only for the convenience of clear understanding of the description, and are not used to limit the scope of the present application, the change or adjustment of the relative relationship, without substantially changing the technical content, is also regarded as the scope of the present application.

[0033] The technical solutions in the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0034] The auxiliary workpiece provided in the following specific embodiments of the present application is suitable for TA cavity of Applied Materials (AMAT), and for different models of TA cavity, the size of the auxiliary workpiece can be modified to adapt to it.

[0035] As Figure 1 , Figure 5 and Figure 6As shown, the utility model provides a kind of auxiliary workpiece for installing or disassembling the shielding component of magnetron sputtering working cavity, the auxiliary workpiece includes workpiece body, and support portion 120 and fixed clamping portion 110 are formed in sequence on workpiece body;Fixed clamping portion 110 extends from top end to support portion 120 direction and forms limit clamping groove 111;The top end surface 121 exposed to fixed clamping portion and the abutting outside surface 122 for abutting working cavity are formed by the lateral protrusion of support portion 120 to fixed clamping portion;The top end surface 121 is inclined support surface, and the top end surface 121 gradually inclines to bottom from its junction with fixed clamping portion to the intersection with abutting outside surface 122.

[0036] The auxiliary workpiece of the utility model, when installing and disassembling the shielding component in tantalum cavity of magnetron sputtering machine equipment, the fixed clamping portion 110 of the auxiliary workpiece is clamped to the outer peripheral boss 201a of tantalum ring, and the top end surface 121 of support portion 120 supports outer cup 202, so that outer cup 202 is supported and fixed, to prevent the damage of ceramic piece 204 caused by the friction between outer cup 202 and ceramic piece 204 during installation and disassembly process;Avoid the reduction of positioning and insulation performance caused by the damage of ceramic piece 204;In addition, when installing and disassembling ceramic piece 204, the auxiliary workpiece is fixed by first fixing outer cup 202, which facilitates subsequent screw fixing and disassembly of outer cup 202, and shortens the installation and disassembly time.

[0037] In one embodiment as shown in Figure 1 and Figure 2 The limit clamping groove 111 is in U shape. The design of U-shaped structure not only can effectively prevent the support portion from slipping off, but also can make the stress distribution of the auxiliary workpiece uniform, reduce local stress concentration, improve overall stability, and have strong bending resistance and deformation resistance, and the structure is simple, convenient to install and disassemble.

[0038] In one embodiment as shown in Figure 1 、 Figure 2 and Figure 3 The support portion 120 and the fixed clamping portion 110 are integrally formed. This technical solution further avoids the loosening between the support portion 120 and the fixed clamping portion 110 caused by separate connection, thereby causing damage to the ceramic piece during installation and disassembly.

[0039] In one embodiment as shown in Figure 1 、 Figure 3 and Figure 5 The support portion 120 forms a lower bottom surface perpendicular to the abutting outside surface 122, which can make the support of the support portion 120 and the bottom of the working cavity more stable.

[0040] In one embodiment as shown inFigure 1 、 Figure 3 and Figure 5 In some embodiments, the top end surface 121 has an inclination angle of 100-105° relative to the lower bottom surface. The inclination angle of the top end surface 121 is adapted to the outer cup 202, and the inclination design of the top end surface 121 makes it more conformal to the trumpet-shaped outer cup 202, so that the force is evenly distributed and the outer cup 202 can be better supported.

[0041] In some embodiments, the inclination angle of the top end surface 121 relative to the abutting outer side surface 122 can be 100°, 101°, 102°, 103°, 104° or 105°.

[0042] In a more specific embodiment, the inclination angle of the top end surface 121 relative to the abutting outer side surface 122 is 104°.

[0043] In a specific embodiment as shown in Figure 1 、 Figure 3 and Figure 5 The fixed clamping portion 110 is formed with an inner side surface 112 parallel to the abutting outer side surface 122. In use, the abutting outer side surface 122 abuts the inner wall of the working cavity, and the fixed clamping portion inner side surface 112 parallel thereto abuts the outer cup 202 to the inner wall of the working cavity, ensuring that the outer cup 202 is fixed during installation or disassembly of the ceramic piece.

[0044] In a specific embodiment as shown in Figure 1 、 Figure 3 and Figure 5 The fixed clamping portion 110 is used to tightly clamp the tantalum ring outer peripheral boss 201a to limit the outer cup 202. In use, the fixed clamping portion 110 is clamped to the tantalum ring outer peripheral boss 201a exposed at the end of the outer cup 202, so that the outer cup 202 can tightly abut the working cavity to prevent movement during installation or disassembly.

[0045] In some embodiments, the fixed clamping portion is a plate structure, and the thickness c of the fixed clamping portion 110 is 8-12 mm. It can be 8 mm, 8.5 mm, 9 mm, 9.5 mm, 10 mm, 10.5 mm, 11 mm, 11.5 mm or 12 mm.

[0046] In a more specific embodiment, the thickness c of the fixed clamping portion 110 is 10 mm.

[0047] In a specific embodiment as shown in Figure 1 、 Figure 2 and Figure 5In the specific embodiment shown, the width a of the limiting and clamping groove (111) in the fixed clamping portion 110 is 8-12 mm. It can be 8 mm, 8.5 mm, 9 mm, 9.5 mm, 10 mm, 10.5 mm, 11 mm, 11.5 mm, or 12 mm.

[0048] In a more specific embodiment, the width a of the limiting and clamping groove 111 in the fixed clamping portion 110 is 10 mm.

[0049] In a specific embodiment as shown, Figure 2 In the specific embodiment shown, the height b of the limiting and clamping groove 111 in the fixed clamping portion 110 is 15-35 mm. This technical solution further ensures that the limiting and clamping groove 111 can completely bear the part of the outer peripheral circular boss 201a of the tantalum ring that is exposed at the end of the outer cup 202, preventing the bearing part from slipping off due to insufficient height, and preventing the inconvenience of installation and disassembly caused by excessive height.

[0050] In some specific embodiments, the height b of the limiting and clamping groove 111 in the fixed clamping portion 110 is 15 mm, 20 mm, 25 mm, 30 mm, or 35 mm.

[0051] In a specific embodiment as shown, Figure 1 and Figure 5 In the specific embodiment shown, the length L of the support portion 120 is 40-50 mm. This technical solution ensures that the length of the support portion 120 is greater than the width of the widest part of the outer cup 202, thereby providing stable support to the outer cup 202; however, the length of the support portion 120 should not be too long, as it would not be easy to fit the inner wall of the tantalum cavity.

[0052] In some specific embodiments, the length L of the support portion 120 is 40 mm, 41 mm, 42 mm, 43 mm, 44 mm, 45 mm, 46 mm, 47 mm, 48 mm, 49 mm, or 50 mm.

[0053] In a specific embodiment, the length L of the support portion 120 is 45 mm.

[0054] In a specific embodiment as shown, Figure 1 , Figure 4 and Figure 5 In the specific embodiment shown, the width W of the support portion 120 is 35-45 mm. This technical solution ensures that the width of the support portion 120 matches the distance from the outer periphery of the tantalum ring to the inner wall of the tantalum cavity, and under the supporting action of the auxiliary workpiece, the outer cup can be tightly attached to the inner wall of the tantalum cavity during installation and disassembly, thereby preventing movement and friction with the ceramic piece, causing damage to the ceramic piece.

[0055] In some specific embodiments, the width W of the support part 120 is 35 mm, 36 mm, 37 mm, 38 mm, 39 mm, 40 mm, 41 mm, 42 mm, 43 mm, 44 mm or 45 mm.

[0056] In one specific embodiment, the width W of the support part 120 is 40 mm.

[0057] In one specific embodiment as shown in Figure 1 and Figure 5 In one specific embodiment as shown in

[0058] In one specific embodiment as shown in Figure 1 and Figure 5 In one specific embodiment as shown in

[0059] In one specific embodiment as shown in Figure 1 , Figure 2 and Figure 3 In one specific embodiment as shown in

[0060] In some specific embodiments, the rubber workpiece is a hard rubber workpiece, and the material thereof can be nitrile rubber-based hard rubber, silicone rubber-based hard rubber or fluororubber-based hard rubber.

[0061] ​In the prior art, when disassembling the shielding components in the tantalum cavity of the magnetron sputtering machine device, since there is no special auxiliary workpiece, after the first screw 206, the second screw 207 and the third screw 208 on the outer wall of the tantalum cavity 200 are disassembled, the outer cup 202 will move between the inner wall 203 of the tantalum cavity and the tantalum ring 201, and the horn end will also swing up and down, which will cause the ceramic piece to be damaged and affect the insulation performance during the disassembly of the ceramic piece 204. In addition, when installing the shielding components in the tantalum cavity of the magnetron sputtering machine device, since there is no special auxiliary workpiece, during the screw fixing process of the outer cup 202, the outer cup 202 will move between the inner wall 203 of the tantalum cavity and the tantalum ring 201, and the horn end will also swing up and down, which will cause the installation of the screw to be time-consuming and laborious.

[0062] The auxiliary workpiece for installing or disassembling the shielding components of the magnetron sputtering working cavity disclosed by the utility model can prevent the tantalum ring outer peripheral boss 201a and the outer cup 202 from moving during the installation and disassembly of the shielding components, so that the shielding components can be quickly and safely disassembled.

[0063] As shown in the present application Figure 5 and Figure 6 When installing the shielding components, the use method of the auxiliary workpiece of the utility model is as follows:

[0064] First, the outer cup 202 is sleeved at the tantalum ring outer peripheral boss 201a, the installation of the outer cup 202 and the tantalum ring 201 is completed, and the installed outer cup 202 and tantalum ring 201 are placed in the appropriate position in the tantalum cavity 200, so that the outer cup 202 is attached to the inner wall 203 of the tantalum cavity;

[0065] Secondly, the limiting clamping groove (111) of the fixed clamping part 110 of the auxiliary workpiece 100 is clamped into the part of the tantalum ring outer peripheral boss 201a exposed to the outer cup, and the outer cup 202 is supported by the supporting part 120 of the auxiliary workpiece 100;

[0066] Then, the ceramic piece 204 is inserted into the tantalum ring outer peripheral boss 201a in the outer cup 202, and the gasket 205 is placed at the position where the outer cup 202 is close to the opening of the inner wall 203 of the tantalum cavity on the outer wall of the tantalum cavity;

[0067] Finally, the first screw 206 is inserted to fix the ceramic piece 204, and then the second screw 207 and the third screw 208 are inserted to fix the outer cup 202.

[0068] As shown in the present application Figure 5 and Figure 6As shown, when the shielding component is disassembled, the use method of the auxiliary workpiece of the utility model is as follows:

[0069] First, the limiting clamping groove (111) of the fixed clamping part 110 of the auxiliary workpiece 100 is clamped into the part of the outer cup exposed from the outer peripheral boss 201a of the tantalum ring, and the outer cup 202 is supported by the supporting part 120 of the auxiliary workpiece 100;

[0070] Secondly, the first screw 206, the second screw 207 and the third screw 208 are respectively disassembled, and the gasket 205 is removed;

[0071] Finally, the ceramic piece 204 is disassembled, and then the disassembly work of the outer cup 202 and the tantalum ring 201 is carried out.

[0072] Therefore, the auxiliary workpiece for installing or disassembling the shielding component of the magnetron sputtering working cavity can support and fix the outer peripheral boss 201a of the outer cup 202 and the tantalum ring, not only prevents the damage caused by the friction between the ceramic piece 204 and the two in the disassembly process, effectively protects the ceramic piece, but also can conveniently fix the screw of the outer cup 202 during installation, is simple to operate, and shortens the installation and disassembly time.

[0073] Therefore, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.

[0074] The above embodiment only exemplarily illustrates the principle and effect of the utility model, and is not used for limiting the utility model. Any person skilled in the art can modify or change the above embodiment without departing from the spirit and scope of the utility model. Therefore, all equivalent modifications or changes completed by those skilled in the art without departing from the spirit and technical thought disclosed by the utility model should be covered by the claims of the utility model.

Claims

1. An auxiliary workpiece for mounting or dismounting a shield member of a magnetron sputter process chamber, characterized in that The auxiliary workpiece comprises a workpiece body, a support part (120) and a fixed clamping part (110) are sequentially formed on the workpiece body; the fixed clamping part (110) extends from the top end to the support part (120) to form a limiting clamping groove (111); the support part (120) protrudes laterally from the fixed clamping part to form a top end surface (121) exposed to the fixed clamping part and an abutting outer side surface (122) for abutting the working cavity; the top end surface (121) is an inclined support surface, and the top end surface (121) gradually inclines to the bottom from the connection with the fixed clamping part to the intersection with the abutting outer side surface (122).

2. The auxiliary workpiece of claim 1, wherein, The limiting clamping groove (111) is in a U shape.

3. The auxiliary workpiece of claim 1, wherein, The support part (120) and the fixed clamping part (110) are integrally formed.

4. The auxiliary workpiece of claim 1, wherein, The support part (120) forms a lower bottom surface perpendicular to the abutting outer side surface (122); and / or, the inclination angle of the top end surface (121) relative to the abutting outer side surface (122) is 100-105°.

5. The auxiliary workpiece of claim 1, wherein, The fixed clamping part (110) forms an inner side surface (112) parallel to the abutting outer side surface (122).

6. The auxiliary workpiece of claim 1, wherein, The fixed clamping part (110) is used for tightly clamping with the outer peripheral boss (201a) of the tantalum ring to limit the outer cup (202).

7. The auxiliary workpiece of claim 6, wherein, The thickness (c) of the fixed clamping part (110) is 8-12 mm; and / or, the width (a) of the limiting clamping groove (111) in the fixed clamping part (110) is 8-12 mm; And / or, the height (b) of the limiting clamping groove in the fixed clamping part (110) is 15-35 mm.

8. The auxiliary workpiece of claim 1, wherein, The length (L) of the support part (120) is 40-50 mm; and / or, the width (W) of the support part (120) is 35-45 mm; and / or, the height (H) of the support part (120) is 50-150 mm.

9. The auxiliary workpiece of claim 1, wherein, The support part (120) is a quadrangular prism structure.

10. The auxiliary workpiece of claim 1, wherein, The auxiliary workpiece is a rubber part.

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