Transformer structure of remote plasma source equipment
By employing a combination of toroidal magnetic core components, soft magnets, and heat sinks in the transformer of remote plasma source equipment, the problems of poor heat dissipation, magnetic leakage, and fragility during transportation are solved, achieving more efficient equipment operation and safer transportation.
Patent Information
- Application Number
- CN202520324422.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-02-27
- Publication Date
- 2026-01-30
- Estimated Expiration
- 2035-02-27
AI Technical Summary
Existing remote plasma source equipment suffers from poor heat dissipation, magnetic leakage, and magnetic radiation problems under high power, high frequency, and high temperature conditions due to the transformer structure. Furthermore, the magnetic core components are fragile during transportation, resulting in poor equipment performance and transportation difficulties.
The magnetic core assembly adopts a ring structure consisting of two U-shaped magnetic core units, with a soft magnet and heat sink sandwiched between them. It is fixed with high-temperature tape and combined with aluminum film to increase the contact area and buffer effect, forming a closed magnetic circuit to reduce magnetic leakage and enhance heat dissipation and protection.
It improves the heat dissipation of the transformer, reduces leakage flux and magnetic radiation, enhances the stability and transportation safety of the equipment, and improves work efficiency and overall equipment performance.
Smart Images
Figure CN223857982U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to remote plasma source equipment technical field, concretely relates to a transformer structure of remote plasma source equipment. BACKGROUND
[0002] Remote plasma source equipment is mainly composed of plasma reaction cavity, transformer and radio frequency transmitter three parts, wherein the transformer is mainly composed of multiple U-shaped magnetic cores, and bears energy conversion and transmission effect. The transformer structure on the market at present includes a stack composed of three layers of magnetic core assemblies, and each layer of magnetic core assembly is composed of two U-shaped magnetic cores.
[0003] The magnetic core assembly of the transformer under the operation of the equipment is operated under the conditions of high power, high frequency and high temperature, and the heat dissipation, magnetic leakage and magnetic radiation of the magnetic core lead to poor performance of the whole equipment. At the same time, the high hardness and brittleness of the magnetic core also cause the difficulty of equipment transportation, and cracks and even breakage are prone to occur. It is concluded that the shortcomings of the current transformer magnetic core structure are as follows:
[0004] 1. After the adjacent magnetic core assemblies are stacked, there will be a certain gap between them, and the gap between the magnetic core assemblies is easy to cause magnetic leakage.
[0005] 2. The heat dissipation effect of the magnetic core assembly under the working state is poor.
[0006] 3. The magnetic core assembly is assembled together by three layers of magnetic core assemblies, and the high hardness and brittleness of the magnetic core are prone to cracks and breakage during transportation. INVENTION CONTENTS
[0007] In view of the above problems existing in the prior art, the utility model provides a transformer structure of remote plasma source equipment.
[0008] In order to solve the above technical problems, the utility model solves them through the following technical schemes:
[0009] A transformer structure of remote plasma source equipment, which comprises a first magnetic core assembly and a second magnetic core assembly stacked and placed, and the first magnetic core assembly and the first magnetic core assembly are both annular structures composed of two U-shaped magnetic core monomers.
[0010] When the first magnetic core assembly and the second magnetic core assembly are stacked and placed, a soft magnetic iron is clamped and arranged between the first magnetic core assembly and the second magnetic core assembly.
[0011] As a preferred, when the first magnetic core assembly and the second magnetic core assembly are stacked and placed, a heat sink is clamped and arranged between the first magnetic core assembly and the second magnetic core assembly.
[0012] As preferred, the number of the soft magnetic iron is multiple, and the soft magnetic iron is clamped between the heat dissipation sheet and the first magnetic core assembly and the second magnetic core assembly.
[0013] As preferred, an aluminum film is clamped between the heat dissipation sheet and the soft magnetic iron.
[0014] As preferred, the heat dissipation sheet is a copper heat dissipation sheet.
[0015] As preferred, the circumferential side wall of the first magnetic core assembly and the circumferential side wall of the second magnetic core assembly are both wound with a high-temperature adhesive tape.
[0016] The utility model at least has following beneficial effects:
[0017] 1. Since the soft magnetic iron fills the gap between the first magnetic core assembly and the second magnetic core assembly through deformation, the contact area after stacking of the first magnetic core assembly and the second magnetic core assembly can be preferably improved, and the heat dissipation effect is better.
[0018] 2. Since the soft magnetic iron has better flexibility, the soft magnetic iron can buffer the first magnetic core assembly and the second magnetic core assembly, so that the first magnetic core assembly and the second magnetic core assembly can extrude the soft magnetic iron during transportation. The soft magnetic iron buffers the vibration of the first magnetic core assembly and the second magnetic core assembly through deformation, that is, the extrusion force, thereby protecting the first magnetic core assembly and the second magnetic core assembly, and avoiding the phenomenon of cracks and breakage of the first magnetic core assembly and the second magnetic core assembly.
[0019] 3. The combination structure of the aluminum film and the heat dissipation sheet in the application can shield high frequency and harmonics during equipment operation, reduce the loss of the equipment, and improve the working efficiency. The soft magnetic iron can provide a closed magnetic path for the leakage magnetic field at the gap of the magnetic circuit, reduce the leakage magnetic field, reduce the magnetic resistance, improve the efficiency of the magnetic circuit, effectively guide and concentrate the magnetic field to reduce energy loss. BRIEF DESCRIPTION OF DRAWINGS
[0020] Figure 1 Partially cutaway schematic view of the stack set in the cavity is shown in some embodiments of the application.
[0021] Figure 2 Partially cutaway schematic view of the stack set in the cavity is shown in some embodiments of the application. Figure 1 Partially cutaway schematic view of the stack set in the cavity is shown in some embodiments of the application.
[0022] The names of the parts referred to by the numbers in the drawings are as follows:
[0023] 10, magnetic core monomer; 20, cavity; 30, first fixed plate; 40, second fixed plate; 50, connecting plate; 60, gas inlet plate; 70, gas outlet plate; 100, first magnetic core assembly; 200, second magnetic core assembly; 300, soft magnet; 400, heat sink; 500, aluminum film; 600, high-temperature adhesive tape. DETAILED DESCRIPTION
[0024] In order to further understand the content of the present application, the present application will be described in detail in conjunction with the drawings and examples. It should be understood that the examples are only used to explain the present application and not to limit it.
[0025] As shown in Figure 1 and Figure 2 , the present embodiment provides a transformer structure of a remote plasma source device, which comprises a first magnetic core assembly 100 and a second magnetic core assembly 200 stacked up and down, wherein the first magnetic core assembly 100 is a ring structure composed of two U-shaped magnetic core monomers 10, and the second magnetic core assembly 200 is also a ring structure composed of two U-shaped magnetic core monomers 10. Generally, the number of the first magnetic core assembly 100 and / or the second magnetic core assembly 200 can be multiple, and the multiple first magnetic core assemblies 100 and the multiple second magnetic core assemblies 200 are cross-stacked with each other, so that a stack is formed by stacking. Since the first magnetic core assembly 100 and the second magnetic core assembly 200 are both ring structures, when they are used in cooperation with the remote plasma source device, the stack can be used by being sleeved outside the cavity 20 of the remote plasma source device. Further, after the multiple first magnetic core assemblies 100 and the multiple second magnetic core assemblies 200 are stacked to form a stack, a first fixed plate 30 and a second fixed plate 40 are respectively placed at the top and the bottom of the stack, and the first fixed plate 30 and the second fixed plate 40 can be fixed by means of bolts or the like, so that the first fixed plate 30 and the second fixed plate 40 can clamp and fix the stack, thereby ensuring the stability between the first magnetic core assembly 100 and the second magnetic core assembly 200. At the same time, the first fixed plate 30 and the second fixed plate 40 can be fixedly installed on the connecting plate 50 by means of bolts or the like, and the gas inlet plate 60 and the gas outlet plate 70 are also fixedly installed on the connecting plate 50, so that in the installed state, the gas inlet plate 60 can be at the top of the stack, and the gas outlet plate 70 can be at the bottom of the stack, so that the gas can enter the cavity 20 in the stack through the gas inlet plate 60 and flow out from the gas outlet plate 70.
[0026] Further, when the first magnetic core assembly 100 and the second magnetic core assembly 200 are stacked up and down, a soft magnet 300 is placed between the first magnetic core assembly 100 and the second magnetic core assembly 200, so that in the installed state, the first magnetic core assembly 100 and the second magnetic core assembly 200 can clamp the soft magnet 300. Further, the thickness of the soft magnet 300 is 0.2 mm.
[0027] It should be noted that the soft magnetic iron 300 has better flexibility so that it can produce a certain degree of elastic deformation. When the first magnetic core assembly 100 and the second magnetic core assembly 200 are assembled, the first magnetic core assembly 100 and the second magnetic core assembly 200 can extrude the soft magnetic iron 300, so that the soft magnetic iron 300 can deform to a certain extent, and then the soft magnetic iron 300 can better fill the gap between the first magnetic core assembly 100 and the second magnetic core assembly 200, and better improve the contact area after the first magnetic core assembly 100 and the second magnetic core assembly 200 are stacked, so that the heat dissipation effect is better.
[0028] Further, since the soft magnetic iron 300 fills the gap between the first magnetic core assembly 100 and the second magnetic core assembly 200 by deformation, it can better avoid the situation that the stack generates magnetic leakage and magnetic radiation during use. Of course, since the soft magnetic iron 300 has better flexibility, the soft magnetic iron 300 can buffer the first magnetic core assembly 100 and the second magnetic core assembly 200, so that during transportation, the first magnetic core assembly 100 and the second magnetic core assembly 200 will extrude the soft magnetic iron 300, and the soft magnetic iron 300 buffers the vibration of the first magnetic core assembly 100 and the second magnetic core assembly 200, that is, the extrusion force applied, thereby protecting the first magnetic core assembly 100 and the second magnetic core assembly 200, avoiding the phenomenon of cracks and breakage of the first magnetic core assembly 100 and the second magnetic core assembly 200. Since the first magnetic core assembly 100 and the second magnetic core assembly 200 generally work in a high-temperature environment, the first magnetic core assembly 100 and the second magnetic core assembly 200 can transfer their heat to the soft magnetic iron 300, so that the soft magnetic iron 300 can have a certain heat dissipation effect on the first magnetic core assembly 100 and the second magnetic core assembly 200.
[0029] In some embodiments, when the first magnetic core assembly 100 and the second magnetic core assembly 200 are stacked up and down, a heat sink 400 is also arranged between the first magnetic core assembly 100 and the second magnetic core assembly 200.
[0030] It should be noted that the heat sink 400 can be directly in contact with the first magnetic core assembly 100 and the second magnetic core assembly 200, or indirectly in contact with the first magnetic core assembly 100 and the second magnetic core assembly 200 through the soft magnetic iron 300. Through the arrangement of the heat sink 400, the heat on the first magnetic core assembly 100 and the second magnetic core assembly 200 can be transferred to the heat sink 400, so that the heat sink 400 can have a cooling effect on the first magnetic core assembly 100 and the second magnetic core assembly 200, and the performance of the stack is more stable.
[0031] It can be understood that when the soft magnetic iron 300 is clamped between the heat dissipation sheet 400 and the first magnetic core assembly 100 and / or the second magnetic core assembly 200, the soft magnetic iron 300 can fill the gap between the heat dissipation sheet 400 and the first magnetic core assembly 100 or the second magnetic core assembly 200, thereby preferably avoiding the occurrence of magnetic leakage.
[0032] In some embodiments, the number of soft magnetic irons 300 can be set to be multiple. After the first magnetic core assembly 100 and the second magnetic core assembly 200 are stacked up and down, the heat dissipation sheet 400 is clamped between the first magnetic core assembly 100 and the second magnetic core assembly 200. Further, the soft magnetic iron 300 is clamped between the heat dissipation sheet 400 and the first magnetic core assembly 100, and the soft magnetic iron 300 is clamped between the heat dissipation sheet 400 and the second magnetic core assembly 200. That is, the heat dissipation sheet 400 does not directly contact the first magnetic core assembly 100 and the second magnetic core assembly 200, but indirectly connects the first magnetic core assembly 100 and the second magnetic core assembly 200 through the soft magnetic iron 300.
[0033] It can be understood that since the soft magnetic iron 300 is clamped between the heat dissipation sheet 400 and the first magnetic core assembly 100, the heat on the first magnetic core assembly 100 is first transmitted to the soft magnetic iron 300 and then transmitted to the heat dissipation sheet 400 through the soft magnetic iron 300. Similarly, since the soft magnetic iron 300 is clamped between the heat dissipation sheet 400 and the second magnetic core assembly 200, the heat on the second magnetic core assembly 200 is first transmitted to the soft magnetic iron 300 and then transmitted to the heat dissipation sheet 400 through the soft magnetic iron 300. By indirectly transmitting the heat on the first magnetic core assembly 100 and the second magnetic core assembly 200 to the heat dissipation sheet 400 through the soft magnetic iron 300, the soft magnetic iron 300 can maintain a certain temperature, thereby enabling the soft magnetic iron 300 to have better flexibility and elastic deformation capability. The soft magnetic iron 300 can more fully fill the gap between the first magnetic core assembly 100 or the second magnetic core assembly 200 and the heat dissipation sheet 400, on the one hand, the contact area is larger, and on the other hand, the occurrence of magnetic leakage can be avoided. Of course, when the soft magnetic iron 300 has a certain temperature, its elastic performance can also be improved to a certain extent, so that its buffering effect is better, and it can preferably protect the first magnetic core assembly 100 and the second magnetic core assembly 200.
[0034] In some embodiments, in the assembled state, the aluminum film 500 is further clamped between the heat dissipation sheet 400 and the soft magnetic iron 300.
[0035] Further, since the aluminum film 500 has a certain flexibility, the aluminum film 500 can be more fully attached to the soft magnetic iron 300 and the heat sink 400 under the extrusion of the elastic deformation of the soft magnetic iron 300, thereby ensuring a better heat transfer effect. At the same time, since the aluminum film 500 can be more fully attached to the soft magnetic iron 300 and the heat sink 400, the gap between the soft magnetic iron 300 and the heat sink 400 can be better avoided, thereby the magnetic leakage can be better avoided.
[0036] It is worth mentioning that the aluminum film 500 can better shield high frequency and harmonics during use, which can better reduce loss and make the working efficiency higher. Since the aluminum film 500 has better heat conduction performance, the heat on the soft magnetic iron 300 can be better transferred to the heat sink 400 through the setting of the aluminum film 500, so that the heat dissipation effect is better.
[0037] In some embodiments, the heat sink 400 is made of copper material, which has better heat conduction performance, so that the heat sink 400 can have better heat conduction and heat dissipation effect. Further, the copper material heat sink 400 used in cooperation with the aluminum film 500 can better reduce loss and make the working efficiency higher.
[0038] In some embodiments, since the first magnetic core assembly 100 is a ring structure composed of two U-shaped magnetic core monomers 10, in order to ensure the stability between the two magnetic core monomers 10, a high-temperature adhesive tape 600 is wound on the circumferential side wall of the first magnetic core assembly 100 to ensure the structural stability of the ring-shaped first magnetic core assembly 100. Similarly, since the second magnetic core assembly 200 is a ring structure composed of two U-shaped magnetic core monomers 10, in order to ensure the stability between the two magnetic core monomers 10, a high-temperature adhesive tape 600 is wound on the circumferential side wall of the second magnetic core assembly 200 to ensure the structural stability of the ring-shaped second magnetic core assembly 200.
[0039] In some embodiments, the soft magnetic iron 300 is directly attached to the first magnetic core assembly 100, and the aluminum film 500 is directly attached to the soft magnetic iron 300. Similarly, the soft magnetic iron 300 is directly attached to the second magnetic core assembly 200, and the aluminum film 500 is directly attached to the soft magnetic iron 300. When stacking the first magnetic core assembly 100 and the second magnetic core assembly 200, the first magnetic core assembly 100 can be placed at the bottom, and the heat sink 400 is placed on the first magnetic core assembly 100, so that the first magnetic core assembly 100 is in contact with the heat sink 400 through the aluminum film 500 thereon. Then the second magnetic core assembly 200 is placed on the heat sink 400, so that the second magnetic core assembly 200 is in contact with the heat sink 400 through the aluminum film 500 thereon.
[0040] In summary, the above only for the preferred embodiments of the present application, any changes and modifications made in accordance with the present application patent scope, should be the scope of the present application patent cover.
Claims
1. A transformer structure for a remote plasma source apparatus, characterized by: The first magnetic core assembly and the second magnetic core assembly are stacked, and each of the first magnetic core assembly and the first magnetic core assembly is a ring structure composed of two U-shaped magnetic core monomers; When the first magnetic core assembly and the second magnetic core assembly are stacked, a soft magnetic iron is arranged between the first magnetic core assembly and the second magnetic core assembly.
2. The transformer structure of claim 1, wherein: When the first magnetic core assembly and the second magnetic core assembly are stacked, a heat sink is arranged between the first magnetic core assembly and the second magnetic core assembly.
3. The transformer structure of claim 2, wherein: The number of the soft magnetic iron is multiple, and the soft magnetic iron is arranged between the heat sink and the first magnetic core assembly and the second magnetic core assembly.
4. The transformer structure of claim 3, wherein: An aluminum film is arranged between the heat sink and the soft magnetic iron.
5. A transformer structure according to any of claims 2-4, characterized in that: The heat sink is a copper heat sink.
6. The transformer structure of claim 1, wherein: High-temperature adhesive tape is arranged around the circumferential side wall of the first magnetic core assembly and the second magnetic core assembly.