Graphite boat dry cleaning device based on remote plasma

Abstract

The utility model discloses a graphite boat dry cleaning device based on remote plasma, which comprises a plasma excitation unit, a cleaning chamber, a vacuum unit, a gas collection chamber and a uniform gas regulation and control chamber, and the plasma excitation unit and the vacuum unit are both arranged on the outer side of the cleaning chamber; the plasma excitation unit is connected with the cleaning chamber through a plasma feed-in pipeline, a graphite boat to be cleaned is placed in the cleaning chamber, and plasma airflow excited by the plasma excitation unit flows into the cleaning chamber through the plasma feed-in pipeline; the bottom of the cleaning chamber is provided with a uniform gas regulation and control chamber, the end part of the uniform gas regulation and control chamber is provided with a gas collection chamber, the gas collection chamber is connected with a vacuum unit through a vacuum pipeline, and gas in the cleaning chamber flows through the uniform gas regulation and control chamber, the gas collection chamber and the vacuum unit and then is discharged. The graphite boat cleaning device has the advantages of being compact in structure, convenient to operate, high in plasma distribution uniformity, high in stability and the like, and the graphite boat cleaning quality is remarkably improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to graphite boat cleaning technical field, concretely relates to a graphite boat dry cleaning device based on remote plasma. BACKGROUND

[0002] Graphite boat is the carrier when solar cell piece is plated antireflection film, in the production process, with graphite boat repeatedly being used, its surface is plated with silicon nitride film constantly, after film layer grows to certain thickness, will influence cell piece plating film craft effect, therefore graphite boat needs to be taken off line to do cleaning maintenance.

[0003] In the main dry cleaning graphite boat technology, usually adopt the mode that radio frequency power connects electrode plate in cleaning cavity and carries out discharge. The energy directly fed into electrode plate is too high, the insulation performance between electrode plate and grounded cavity is difficult to guarantee, plus the excited plasma temperature is very high, and the existing insulation material cannot bear such high temperature except ceramic. In addition, the length size of graphite boat in the current photovoltaic field is getting longer and longer, also makes the processing difficulty of insulating ceramic big, the processing cost is high, causes the bottleneck of technical application.

[0004] Chinese patent application 202310595262.6 discloses a graphite boat dry cleaning device, in the cleaning space formed between the first electrode plate and the second electrode plate of the cleaning cavity, the radio frequency power fed on the electrode plate is used to ionize the cleaning gas, excite the plasma, the plasma and the film layer on the graphite boat to be cleaned react chemically to generate volatile gas, the cleaning cavity is connected with the vacuum unit, and the volatile gas is extracted to achieve the cleaning purpose.

[0005] In the above-mentioned scheme, the radio frequency power is directly connected to the electrode plate in the cleaning cavity to excite the plasma. Due to the close distance between the electrode plate and the graphite boat, the impedance environment in the cleaning cavity, the atmosphere state, the placement position of the graphite boat and other objective factors, the plasma excitation is not uniform, causing the cleaning rate of different areas of the graphite boat to be different. In addition, the physical bombardment of charged particles can cause physical damage to the surface of the graphite boat, making it difficult to ensure uniform cleaning, resulting in low cleaning success rate and poor cleaning effect. In severe cases, the phenomenon of internal sparking in the cavity may occur, damaging the cleaning cavity and the graphite boat, making the surface of the graphite boat rough and porous, and the texture brittle, greatly shortening the service life of the graphite boat. UTILITY MODEL CONTENTS

[0006] The technical problem to be solved by the utility model is to solve the problem of uneven distribution of plasma in the cleaning cavity of the existing graphite boat dry cleaning, and to provide a graphite boat dry cleaning device based on remote plasma, which has compact structure, high plasma distribution uniformity and high stability.

[0007] In order to solve the above technical problems, the utility model adopts the following technical scheme:

[0008] A graphite boat dry cleaning device based on remote plasma, comprising: a plasma excitation unit, a cleaning chamber, a vacuum unit, a gas collection chamber and a uniform gas control chamber, the plasma excitation unit and the vacuum unit are arranged outside the cleaning chamber; the plasma excitation unit is connected with the cleaning chamber through a plasma feeding pipeline, the graphite boat to be cleaned is placed in the cleaning chamber, and the plasma flow excited by the plasma excitation unit flows into the cleaning chamber through the plasma feeding pipeline; the bottom of the cleaning chamber is provided with the uniform gas control chamber, the end of the uniform gas control chamber is provided with the gas collection chamber, the gas collection chamber is connected with the vacuum unit through a vacuum pipeline, and the gas in the cleaning chamber flows through the uniform gas control chamber, the gas collection chamber and the vacuum unit and is discharged.

[0009] As a further improvement of the utility model, the uniform flow plate is provided on the top of the uniform gas control chamber, and a plurality of air holes are uniformly distributed on the uniform flow plate.

[0010] As a further improvement of the utility model, the uniform flow plate is provided with a detachable sealing plate.

[0011] As a further improvement of the utility model, the uniform gas control chamber is symmetrically provided with a flow guide groove on both sides, and the flow guide groove is communicated with the gas collection chamber.

[0012] As a further improvement of the utility model, the length of the flow guide groove and the length of the uniform gas control chamber are both greater than the overall length of the graphite boat.

[0013] As a further improvement of the utility model, the plasma excitation unit and the vacuum unit are located on the same side of the cleaning chamber.

[0014] As a further improvement of the utility model, the connection between the plasma feeding pipeline and the cleaning chamber is located at the upper part of the cleaning chamber, and the connection between the vacuum pipeline and the cleaning chamber is located at the lower part of the cleaning chamber.

[0015] As a further improvement of the utility model, the cleaning chamber is provided with a support for supporting the graphite boat.

[0016] As a further improvement of the utility model, the uniform flow plate is located at the bottom of the support.

[0017] As a further improvement of the utility model, the support is prepared from ceramic material.

[0018] Compared with the prior art, the utility model has the advantages that:

[0019] The graphite boat dry cleaning device based on remote plasma of the utility model, through setting the plasma excitation unit outside the cleaning chamber, and connecting the plasma excitation unit and the cleaning chamber through the plasma feed-in pipeline, the charged particles in the plasma generated by the plasma excitation unit are adsorbed by the plasma feed-in pipeline, avoiding the physical bombardment of the charged particles to the graphite boat to cause the surface damage of the graphite boat, avoiding the risk of shortening the service life of the graphite boat; at the same time, by setting the air uniformity control chamber at the bottom of the cleaning chamber, the airflow uniformity control in the height direction of the graphite boat cleaning can be realized, solving the problem of slow cleaning rate of the rear tail cleaning area of the graphite boat in the traditional graphite boat dry cleaning technology; through appropriate process debugging, the cleaning rate of the graphite boat can be significantly improved, the cleaning effect can be greatly improved, and the surface damage of the graphite boat can be significantly reduced. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 It is a cross-sectional front view schematic diagram of the graphite boat dry cleaning device based on remote plasma in the embodiment of the utility model;

[0021] Figure 2 It is a cross-sectional front view schematic diagram of the graphite boat dry cleaning device based on remote plasma in the embodiment of the utility model;

[0022] Legend: 1, plasma excitation unit; 2, plasma feed-in pipeline; 3, cleaning chamber; 4, vacuum unit; 5, gas collection chamber; 6, air uniformity control chamber; 7, graphite boat; 8, support; 9, converging guide groove; 10, sealing plate; 11, uniform flow plate. DETAILED DESCRIPTION

[0023] The utility model will be further described below in combination with the drawings and specific preferred embodiments, but it is not limited to the protection scope of the utility model.

[0024] In the description of the utility model, it should be understood that the orientation or positional relationship indicated by the terms "side", "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the utility model and simplifying the description, and cannot be understood as indicating or implying that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the utility model.

[0025] In addition, the terms "first", "second" are only used for description purpose, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features, so the features with "first", "second" can be explicitly or implicitly included one or more features, in the description of the utility model, the meaning of "multiple" is two or more than two, unless otherwise expressly specifically limited.

[0026] Embodiments

[0027] As shown in Figure 1 and Figure 2 The utility model discloses a graphite boat dry cleaning device based on remote plasma, including: plasma excitation unit 1, cleaning chamber 3, vacuum unit 4, gas collection chamber 5 and uniform gas control chamber 6, plasma excitation unit 1 and vacuum unit 4 are all arranged in the same outside cleaning chamber 3. Plasma excitation unit 1 is connected with the upper portion of cleaning chamber 3 through plasma feed-in pipeline 2, and the graphite boat 7 to be cleaned is placed in cleaning chamber 3. The plasma gas flow excited by plasma excitation unit 1 surges into cleaning chamber 3 through plasma feed-in pipeline 2 and sprays and diffuses above the top of graphite boat 7. The bottom of cleaning chamber 3 is provided with uniform gas control chamber 6, and the end of uniform gas control chamber 6 is provided with gas collection chamber 5. The gas collection chamber 5 is connected with vacuum unit 4 through vacuum pipeline. The gas collection chamber 5 converges the volatile gas after reaction. The gas in cleaning chamber 3 flows through uniform gas control chamber 6, gas collection chamber 5 and vacuum unit 4 and then is discharged. The inside of cleaning chamber 3 is vacuumized through vacuum unit 4. Therefore, the plasma gas flow can spread and diffuse rapidly in cleaning chamber 3 and react with the deposits on the surface of graphite boat 7.

[0028] In the embodiment, plasma excitation unit 1 is arranged outside cleaning chamber 3, and plasma excitation unit 1 and cleaning chamber 3 are connected through plasma feed-in pipeline 2. The charged particles in the plasma generated by plasma excitation unit 1 are adsorbed by plasma feed-in pipeline 2, avoiding the physical bombardment of the charged particles on graphite boat 7 and causing damage to the surface of graphite boat 7, and avoiding the risk of shortening the service life of graphite boat 7. At the same time, by arranging uniform gas control chamber 6 at the bottom of cleaning chamber 3, the uniformity of the gas flow in the height direction of graphite boat 7 can be controlled, solving the problem of slow cleaning rate in the rear tail cleaning area of graphite boat in the traditional graphite boat dry cleaning technology. Through appropriate process debugging, the cleaning rate of graphite boat 7 can be significantly improved, the cleaning effect can be greatly improved, and the surface damage of graphite boat can be significantly reduced.

[0029] As shown in Figure 2 The top of uniform gas control chamber 6 is provided with uniform flow plate 11, and a plurality of air holes are uniformly distributed on the uniform flow plate 11. The uniformity of the air extraction is improved through the uniform flow plate 11, ensuring that the plasma gas flow fully contacts the surface of graphite boat 7 and improving the cleaning quality.

[0030] Furthermore, the flow equalizer 11 is provided with a removable sealing plate 10. The number of sealing plates 10 placed on the flow equalizer 11 can be adjusted according to the actual cleaning needs to regulate the air extraction speed of different areas on the lower surface of the graphite boat 7.

[0031] like Figure 2 As shown, the uniform gas control chamber 6 is symmetrically equipped with converging guide grooves 9 on both sides. The side of the converging guide grooves 9 facing the graphite boat 7 is open, and the converging guide grooves 9 are connected to the gas collection chamber 5. Through the cooperation of the uniform gas control chamber 6 and the converging guide grooves 9, the plasma is fed in and distributed evenly in the cleaning chamber 3, thus improving the dry cleaning quality of the graphite boat 7.

[0032] like Figure 1 and Figure 2 As shown, the lengths of the confluence channel 9 and the uniform gas control chamber 6 are both greater than the overall length of the graphite boat 7, to ensure that the entire graphite boat 7 is uniformly covered by the plasma flow.

[0033] In this embodiment, plasma is drawn vertically downwards from the upper surface of the graphite boat 7 by a vacuum negative pressure. It passes over the graphite boat 7 in the height direction and reacts chemically with the material to be cleaned on its surface. The plasma then converges into the gas collection chamber 5 via the gas equalization control chamber 6, and finally, the vacuum unit 4 removes the reacted gas or any incompletely reacted gas, thus completing the entire cleaning process. Compared to existing dry cleaning techniques, the cleaning method designed in this embodiment effectively eliminates the physical bombardment of the graphite boat by charged particles. The gas flow field atmosphere is controllable, achieving uniform cleaning that fully covers the surface of the graphite boat 7. This results in high effective cleaning time utilization, faster cleaning speed, and better cleaning effect.

[0034] like Figure 1 As shown, the cleaning chamber 3 is provided with a support member 8 for supporting the graphite boat 7, and the flow equalization plate 11 is located at the bottom of the support member 8.

[0035] Furthermore, the support member 8 is made of ceramic material, which has good insulation properties and can withstand high temperatures.

[0036] The working principle of the graphite boat dry cleaning device based on remote plasma in this embodiment is as follows:

[0037] Under vacuum conditions, cleaning gas is introduced into plasma excitation unit 1 through the inlet. After the pressure in cleaning chamber 3 stabilizes, plasma excitation unit 1, located on the same side as vacuum unit 4, begins operation, generating active plasma. The plasma enters cleaning chamber 3 via plasma feed pipe 2. Charged particles in the plasma are adsorbed by the pipe, leaving neutral active groups. These neutral active groups pass over the upper surface of graphite boat 7 until the end of graphite boat 7. The active groups are drawn by the negative pressure in the gas equalization control chamber 6, uniformly covering each area to be cleaned in the height direction of graphite boat 7, and react with the substances to be cleaned on the surface of graphite boat 7 to generate volatile gases. The volatile gases generated by the reaction, along with the unreacted active groups, enter the gas equalization control chamber 6 through several through holes on the gas equalization plate 11. The volatile gases generated by the reaction and the unreacted active groups are again drawn by the negative pressure in the confluence guide groove 9 connected to vacuum unit 4, converging from both sides of cleaning chamber 3 to gas collection chamber 5. Finally, the volatile gases generated from the reaction in the gas collecting chamber 5, along with the unreacted active groups, enter the vacuum unit 4 and are subsequently discharged from the cleaning chamber 3 to achieve the purpose of cleaning the graphite boat 7. In this embodiment, the cleaning gas includes, but is not limited to, NF3, CF4, SF6, etc.

[0038] The above description is merely a preferred embodiment of this utility model. The protection scope of this utility model is not limited to the above embodiments. All technical solutions falling within the scope of this utility model's concept are protected. It should be noted that for those skilled in the art, any improvements and modifications made without departing from the principle of this utility model should also be considered within the protection scope of this utility model.

Claims

1. A graphite boat dry cleaning device based on remote plasma, characterized in that, include: The system comprises a plasma excitation unit (1), a cleaning chamber (3), a vacuum unit (4), a gas collection chamber (5), and a gas equalization and control chamber (6). The plasma excitation unit (1) and the vacuum unit (4) are both located outside the cleaning chamber (3). The plasma excitation unit (1) is connected to the cleaning chamber (3) through a plasma feed pipe (2). The graphite boat (7) to be cleaned is placed inside the cleaning chamber (3). The plasma gas flow excited by the plasma excitation unit (1) flows into the cleaning chamber (3) through the plasma feed pipe (2). The bottom of the cleaning chamber (3) is provided with a gas equalization and control chamber (6). The end of the gas equalization and control chamber (6) is provided with a gas collection chamber (5). The gas collection chamber (5) is connected to the vacuum unit (4) through a vacuum pipe. The gas in the cleaning chamber (3) flows through the gas equalization and control chamber (6), the gas collection chamber (5), and the vacuum unit (4) before being discharged.

2. The graphite boat dry cleaning device based on remote plasma as described in claim 1, characterized in that, The top of the gas equalization and regulation chamber (6) is provided with a flow equalization plate (11), and multiple ventilation holes are evenly distributed on the flow equalization plate (11).

3. The graphite boat dry cleaning device based on remote plasma according to claim 2, characterized in that, The flow equalizer (11) is provided with a removable sealing plate (10).

4. The graphite boat dry cleaning device based on remote plasma according to claim 2, characterized in that, The gas equalization and regulation chamber (6) is provided with symmetrical converging guide grooves (9) on both sides, and the converging guide grooves (9) are connected to the gas collection chamber (5).

5. The graphite boat dry cleaning device based on remote plasma according to claim 4, characterized in that, The lengths of the confluence channel (9) and the gas equalization control chamber (6) are both greater than the overall length of the graphite boat (7).

6. The graphite boat dry cleaning apparatus based on remote plasma according to any one of claims 1 to 5, characterized in that, The plasma excitation unit (1) and the vacuum unit (4) are both located on the same side of the cleaning chamber (3).

7. The graphite boat dry cleaning apparatus based on remote plasma according to claim 6, characterized in that, The connection between the plasma feed pipe (2) and the cleaning chamber (3) is located at the upper part of the cleaning chamber (3), and the connection between the vacuum pipe and the cleaning chamber (3) is located at the lower part of the cleaning chamber (3).

8. The graphite boat dry cleaning apparatus based on remote plasma according to any one of claims 2 to 5, characterized in that, The cleaning chamber (3) is provided with a support member (8) for supporting the graphite boat (7).

9. The graphite boat dry cleaning apparatus based on remote plasma as described in claim 8, characterized in that, The flow equalization plate (11) is located at the bottom of the support (8).

10. The graphite boat dry cleaning apparatus based on remote plasma according to claim 8, characterized in that, The support member (8) is made of ceramic material.

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