Control device of high-voltage power supply

Abstract

The utility model provides a control device of a high-voltage power supply, which is used for controlling the high-voltage power supply. The control device of the high-voltage power supply comprises a shell, a control panel arranged on the shell, a power supply and an internal circuit, wherein the power supply and the internal circuit are arranged in the shell. The power supply is configured to supply power to the control panel and the internal circuit, and the control panel is electrically connected with the internal circuit. The internal circuit is provided with a connector, the connector is connected with a control port of the high-voltage power supply through a connecting line, and the interface definition of the connector is consistent with the interface definition of the control port of the high-voltage power supply. The connector is a DB25 connector P1, and the DB25 connector P1 comprises 25 pins from P1-1 to P1-25. Wherein the stitches P1-7, P1-8, P1-23 and P1-25 represent empty stitches; pins P1-2, P1-4, P1-6, P1-9, P1-11, P1-13 and P1-21 are grounded, and pins P1-11, P1-13 and P1-21 are grounded. The circuit can control the output of the high-voltage power supply.

Description

Technical Field

[0001] This utility model relates to the field of power supply detection technology, and in particular to a control device for a high-voltage power supply. Background Technology

[0002] In the semiconductor manufacturing field, ion implantation is one of the core processes in chip manufacturing to achieve doping and adjust the electrical properties of materials. Ion implantation equipment accelerates the ion beam using a high-voltage electric field, precisely implanting it into the wafer surface. The high-voltage power supply provides thousands or even hundreds of thousands of volts for the ion implantation process, accelerating charged particles (ions) so that they collide with the target material surface at high energy, achieving doping or modification.

[0003] However, some existing high-voltage power supplies present numerous inconveniences in practical use. Some high-voltage power supplies (such as Glassman-HVSupply 100KV) cannot independently control their output after being removed from the machine, resulting in a failure to start. This necessitates reinstallation and testing on the machine during maintenance, which is inefficient and hinders rapid fault location. Furthermore, there is a lack of convenient verification methods after maintenance, requiring return to the factory for testing, which is costly.

[0004] In view of this, it is indeed necessary to propose a control device for high-voltage power supplies to solve the above problems. Utility Model Content

[0005] To achieve the above objectives, this utility model provides a control device for a high-voltage power supply, which can control the high-voltage power supply offline.

[0006] Therefore, the present invention provides a control device for a high-voltage power supply, comprising: a housing, a control panel mounted on the housing, a power supply and an internal circuit disposed within the housing, wherein the power supply is configured to supply power to the control panel and the internal circuit, the control panel and the internal circuit are electrically connected, a connector is provided on the internal circuit, the connector is connected to the control port of the high-voltage power supply via a connecting wire, and the interface definition of the connector is consistent with the interface definition of the control port of the high-voltage power supply; wherein the connector is a DB25 connector P1, the DB25 connector P1 includes 25 pins from P1-1 to P1-25, pins P1-7, P1-8, P1-23, and P1-25 are unused pins; pins P1-2, P1-4, P1-6, P1-9, P1-11, P1-13, and P1-21 are grounded pins.

[0007] Optionally, the internal circuitry includes an output voltage monitoring circuit 1, an output current monitoring circuit 1, an output voltage monitoring circuit 2, an output current monitoring circuit 2, and an output proportional switching circuit. The output proportional switching circuit includes a resistor R5 and a proportional switching switch K2. The P1-18 pins of the connector are connected to the resistor R5 and the proportional switching switch K2 in sequence, and the other end of the proportional switching switch K2 is grounded. When the proportional switching switch K2 is open / closed, the actual output voltage and current of the high-voltage power supply are monitored through the output voltage monitoring circuit 1 and the output current monitoring circuit 1 / output voltage monitoring circuit 2 and the output current monitoring circuit 2.

[0008] Optionally, an output ratio switching indicator circuit is also included. The output ratio switching indicator circuit includes a light-emitting diode LED3 and a resistor R2. The P1-16 pins of the connector are connected to the light-emitting diode LED3 and the resistor R3 in sequence, and the other end of the resistor R3 is grounded. When the ratio switching switch K2 is closed, the light-emitting diode LED3 lights up.

[0009] Optionally, the output voltage monitoring circuit 1 includes a voltmeter V1, with pin P1-1 of the connector connected to the positive terminal of voltmeter V1 and the negative terminal of voltmeter V1 grounded; the output current monitoring circuit 1 includes a voltmeter V2, with pin P1-3 of the connector connected to the positive terminal of voltmeter V2 and the negative terminal of voltmeter V2 grounded.

[0010] Optionally, the output voltage monitoring circuit 2 includes a voltmeter V6, with pins P1-22 of the connector connected to the positive terminal of voltmeter V6 and the negative terminal of voltmeter V6 grounded; the output current monitoring circuit 2 includes a voltmeter V7, with pins P1-24 of the connector connected to the positive terminal of voltmeter V7 and the negative terminal of voltmeter V7 grounded.

[0011] Optionally, the internal circuitry includes a voltage programming display circuit 1 and a current programming display circuit. The voltage programming display circuit 1 includes an adjustable resistor RP1 and a voltmeter V4. One of the P1-10 pins of the connector is grounded through the voltmeter V4, and the other is connected to the sliding end of the adjustable resistor RP1. The input end of the adjustable resistor RP1 is connected to the power supply, and the output end of the adjustable resistor RP1 is grounded. The current programming display circuit includes an adjustable resistor RP2 and a voltmeter V5. One of the P1-12 pins of the connector is grounded through the voltmeter V5, and the other is connected to the sliding end of the adjustable resistor RP2. The input end of the adjustable resistor RP2 is connected to the power supply, and the output end of the adjustable resistor RP2 is grounded.

[0012] Optionally, the internal circuitry includes a voltage programming display 2 circuit for displaying the set value of the high-voltage power supply output voltage; the voltage programming display 2 circuit includes a voltmeter V3, with pins P1-5 of the connector connected to the positive terminal of the voltmeter V3, and the negative terminal of the voltmeter V3 grounded.

[0013] Optionally, the internal circuit includes a power output activation circuit and a high-voltage activation indicator circuit. The power output activation circuit includes a resistor R4 and a power output switch K1. Pins P1-17 of the connector are connected to the resistor R4 and the power output switch K1 in sequence, and the power output switch K1 is grounded. The high-voltage activation indicator circuit includes a light-emitting diode LED1 and a resistor R1. Pins P1-14 of the connector are connected to the light-emitting diode LED1 and the resistor R1 in sequence, and the other end of the resistor R1 is grounded.

[0014] Optionally, the internal circuit includes a fault indication circuit, which includes a light-emitting diode LED2 and a resistor R2. The P1-15 pins of the connector are connected to the light-emitting diode LED2 and the resistor R2 in sequence, and the other end of the resistor R2 is grounded.

[0015] Optionally, the internal circuit also includes a constant voltage / constant current status indicator circuit, which includes a light-emitting diode LED4 and a resistor R6. The P1-19 pins of the connector are connected to the light-emitting diode LED4 and the resistor R6 in sequence, and the other end of the resistor R6 is grounded.

[0016] Compared with the prior art, the technical solution of the embodiments of this utility model has the following beneficial effects:

[0017] The connector P1 of this invention connects to the control port J1 of the high-voltage power supply via a connecting cable, and the interface definition of connector P1 is consistent with that of control port J1. This allows the control device to control the output of the high-voltage power supply. Thus, independent control and testing of the high-voltage power supply after it is removed from the machine tool is achieved, without relying on the original machine tool, significantly reducing maintenance costs and time. Simultaneously, it simplifies the high-voltage power supply maintenance process, allowing functional testing and repair verification to be completed without returning the power supply to the factory, shortening the maintenance cycle. Furthermore, the interface definition of connector P1 is completely consistent with the interface definition of the high-voltage power supply control port J1, ensuring accurate transmission of control signals. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the use of the control device for the high-voltage power supply conforming to the preferred embodiment of this utility model;

[0019] Figure 2 This is a partial circuit diagram of the connector in the control device of the high-voltage power supply conforming to the preferred embodiment of this utility model;

[0020] Figure 3 This is a schematic diagram of the interface definition of the connector in the control device of the high-voltage power supply conforming to the preferred embodiment of this utility model;

[0021] Figure 4 This is a schematic diagram of the control panel of the high-voltage power supply control device conforming to a preferred embodiment of the present utility model. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0023] It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the structures and / or processing steps closely related to the present invention are shown in the accompanying drawings, while other details that are not closely related to the present invention are omitted.

[0024] Additionally, it should be noted that the terms “comprising,” “including,” or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus.

[0025] Please see Figures 1 to 4 As shown, an embodiment of this utility model provides a control device for a high-voltage power supply. Some high-voltage power supplies cannot be independently controlled after being disconnected from the testing platform, resulting in a failure to start. This control device for a high-voltage power supply is used to control the high-voltage power supply under test, enabling voltage and current output and parameter adjustment even after the power supply is disconnected from the testing platform, greatly improving the flexibility of the test.

[0026] In this embodiment, the control device for the high-voltage power supply includes a housing (not shown) and a power supply VCC and internal circuitry disposed within the housing. A connector is provided on the internal circuitry, and the connector's interface is exposed outside the housing. The connector is connected to the control port of the high-voltage power supply via a connecting cable, and the connector's interface definition is consistent with the control port of the high-voltage power supply. A control panel is provided on the housing for adjusting the output of the high-voltage power supply. The power supply VCC is configured to supply power to the control panel and the internal circuitry, and the control panel and the internal circuitry are electrically connected. The high-voltage power supply is connected to the connector of the control device via a connecting cable, enabling the control device to control the output of the high-voltage power supply. Testers do not need to install the high-voltage power supply into the testing equipment; they can directly control and test the high-voltage power supply through the control device, thus significantly improving the convenience of testing.

[0027] The connector is a DB25 connector P1. DB25 connector P1 includes 25 pins: P1-1, P1-2, P1-3, P1-4, ..., P1-25. Pins P1-7, P1-8, P1-23, and P1-25 are unused pins, while pins P1-2, P1-4, P1-6, P1-9, P1-11, P1-13, and P1-21 are grounded. The unused pins (P1-7, P1-8, P1-23, and P1-25) are reserved for future expansion functionality.

[0028] Please see Figure 4 As shown, the control panel has four indicator lights, four sets of voltmeters, two switches (proportional switching switch K2 and power output switch K1), and two knobs (voltage programming knob and current programming knob). This setup allows operators to intuitively understand the operating status of the high-voltage power supply and perform convenient operation.

[0029] In some embodiments, the indicator lights are exposed on the control panel, allowing maintenance personnel to easily observe them and understand the status of the high-voltage power supply by monitoring their illumination. In other embodiments, holes are drilled on the control panel at the positions corresponding to the indicator lights, allowing light emitted from the indicator lights to pass through the holes, ensuring the indicator light status is visible and facilitating maintenance personnel to observe the indicator lights' on / off states to understand the status of the high-voltage power supply.

[0030] In this embodiment, the internal circuit is a circuit board with multiple circuit modules, and the power supply VCC is electrically connected to the circuit board. Specifically, the internal circuit includes an output voltage monitoring circuit 1, an output current monitoring circuit 1, a voltage programming display circuit 2, a voltage programming display circuit 1, a current programming display circuit, a high voltage on-state indicator circuit, a fault indicator circuit, an output ratio switching indicator circuit, a power output on-state circuit, an output ratio switching circuit, and a constant voltage / constant current state indicator circuit.

[0031] Specifically, the power output activation circuit includes a resistor R4 and a power output switch K1. Pins P1-17 of the connector are connected sequentially to resistor R4 and power output switch K1, with the other end of power output switch K1 grounded. Power output switch K1 is as follows... Figure 4 As shown. The power output switch K1 is at least partially exposed on the control panel, allowing operators to easily control the high-voltage power supply manually. Closing the power output switch K1 creates a closed circuit between pins P1-17 of the connector and pins J1-17 of the high-voltage power supply, thus turning on the high-voltage power supply. Resistor R4 limits the current, preventing overcurrent damage to components in the high-voltage power supply J1-17 pin circuit, such as sensitive components like optocouplers, ensuring they operate within a safe current range and extending their lifespan.

[0032] The high-voltage activation indicator circuit includes an LED (LED1) and a resistor R1. Pins P1-14 of the connector are connected sequentially to LED1 and resistor R1, with the other end of resistor R1 grounded. When the high-voltage power supply outputs high voltage, LED1 illuminates. Resistor R1 limits current, preventing damage to LED1 from overcurrent. By appropriately selecting the resistance value of R1, it can be ensured that LED1 operates within a safe current range, extending its lifespan. Figure 2 , Figure 4 As shown, LED1 is the high-voltage on status light on the control panel. You can determine whether the high-voltage power supply is outputting high voltage by observing whether the high-voltage on status light on the control panel is on or off.

[0033] The voltage programming display circuit includes an adjustable resistor RP1 and a voltmeter V4. One pin of the connector, P1-10, is grounded through the voltmeter V4, and the other pin is connected to the sliding contact of the adjustable resistor RP1. The input of the adjustable resistor RP1 is connected to the power supply VCC, and its output is grounded. By adjusting the resistance of the adjustable resistor RP1, the output voltage of the high-voltage power supply can be precisely controlled. When the high-voltage power supply is turned on, adjusting the resistance of the adjustable resistor RP1 will cause the voltage across P1-10 to vary between VCC and 0V (0-10V). Consequently, the high-voltage power supply outputs the corresponding voltage value, and the voltmeter V4 displays the corresponding set value, i.e., the voltage across pins J1-10. Figure 2 , Figure 4 As shown, the voltmeter V4 is mounted on the control panel. The voltage at pins J1-10 of the high-voltage power supply can be obtained by reading the value displayed at voltage programming display 1. The set value of the high-voltage power supply output voltage is adjusted via adjustable resistor RP1 to determine whether the high-voltage power supply is operating normally.

[0034] The voltage programming display 2 circuit is used to display the set value of the high-voltage power supply output voltage. The voltage programming display 2 circuit includes a voltmeter V3. Pins P1-5 of the connector are connected to the positive terminal of voltmeter V3, and the negative terminal of voltmeter V3 is grounded. The voltage value displayed on voltmeter V3 represents the voltage at pins J1-5 of the high-voltage power supply. For example... Figure 2 , Figure 4As shown, the voltmeter V3 is mounted on the control panel. The voltage at pins J1-5 of the high-voltage power supply can be obtained by reading the voltage value displayed at voltage programming display 2. The set output high voltage value of the high-voltage power supply is equal to a coefficient multiplied by the voltage value displayed on voltmeter V3. The coefficient is determined according to the specifications and model of the high-voltage power supply. When the high-voltage power supply is working, after it is turned on, the resistance of the adjustable resistor RP1 can be adjusted via the voltage programming knob, causing the voltage across P1-10 to vary between VCC and 0 (0-10V). Consequently, the high-voltage power supply outputs the corresponding voltage value. After switching the output ratio, the voltage value displayed on voltmeter V3 is the set value of the high-voltage power supply output voltage. Operators can directly read the value of voltmeter V3 on the control panel to easily obtain the voltage at pins J1-5 of the high-voltage power supply without complex calculations or conversions, improving operational convenience and efficiency. By comparing the voltage value displayed on voltmeter V3 with the corresponding voltage value in the power supply maintenance manual, abnormalities in the high-voltage power supply output can be detected promptly, allowing for quick adjustments or repairs to ensure stable operation of the high-voltage power supply.

[0035] The current programming display circuit includes an adjustable resistor RP2 and a voltmeter V5. One pin of the connector (P1-12) is grounded through the voltmeter V5, and the other pin is connected to the sliding contact of the adjustable resistor RP2. The input of the adjustable resistor RP2 is connected to the power supply VCC, and its output is grounded. When the high-voltage power supply is turned on, adjusting the resistance of the adjustable resistor RP2 will cause the voltage across P1-12 to vary between VCC and 0V (0-10V). Consequently, the high-voltage power supply outputs a corresponding current value, and the voltmeter V5 displays the corresponding set value (showing the voltage across P1-10). The set value of the high-voltage power supply output current = a coefficient multiplied by the voltage value displayed on the voltmeter V5. The coefficient is determined according to the specifications and model of the high-voltage power supply. Figure 2 , Figure 4 As shown, the voltmeter V5 is mounted on the control panel. The voltage at pins J1-12 of the high-voltage power supply can be obtained by reading the value displayed on the current programming display. The set current output of the high-voltage power supply is adjusted via the adjustable resistor RP2 to determine whether the high-voltage power supply is operating normally.

[0036] The output voltage monitoring circuit 1 includes a voltmeter V1. Pin P1-1 of the connector is connected to the positive terminal of voltmeter V1, and the negative terminal of voltmeter V1 is grounded. When the high-voltage power supply outputs, a current feedback signal is transmitted to pin J1-1. Pin J1-1 is connected to pin P1-1 via a connecting wire, and voltmeter V1 displays the voltage across pin J1-1. The actual current value = a coefficient multiplied by the voltage value displayed by voltmeter V1. The coefficient is determined according to the specifications and model of the high-voltage power supply. Figure 2 , Figure 4As shown, the meter head of voltmeter V1 is installed on the control panel. By observing the value at voltage monitor 1, the voltage value displayed by voltmeter V1 can be obtained.

[0037] The output current monitoring circuit 1 includes voltmeter V2. Pin P1-3 of the connector is connected to the positive terminal of voltmeter V2, and the negative terminal of voltmeter V2 is grounded. When the high-voltage power supply outputs, the current feedback signal is transmitted to J1-3. Pin J1-3 is connected to pin P1-3 of the connector via a connecting wire, and voltmeter V3 displays the voltage (0~10V) on J1-3. The actual current value = a coefficient multiplied by the voltage value displayed by voltmeter V2. The coefficient is determined according to the specifications and model of the high-voltage power supply. Figure 2 , Figure 4 As shown, the meter head of voltmeter V2 is installed on the control panel. By observing the value at current monitoring point 1, the voltage value displayed by voltmeter V2 can be obtained.

[0038] The output voltage monitoring circuit 2 includes voltmeter V6. Pins P1-22 of the connector are connected to the positive terminal of voltmeter V6, and the negative terminal of voltmeter V6 is grounded. When the high-voltage power supply is output, a voltage feedback signal is transmitted to pin J1-22. Pin J1-22 is connected to pin P1-22 of the connector via a connecting wire, and voltmeter V6 displays the voltage at pin J1-22. The actual high-voltage output value of the power supply = a coefficient multiplied by the voltage value displayed by voltmeter V6. The coefficient is determined according to the specifications and model of the high-voltage power supply. Figure 2 , Figure 4 As shown, the meter head of voltmeter V6 is installed on the control panel. By observing the value at voltage monitor 2, the voltage value displayed by voltmeter V6 can be obtained.

[0039] The output current monitoring circuit 2 includes a voltmeter V7. Pins P1-24 of the connector are connected to the positive terminal of voltmeter V7, and the negative terminal of voltmeter V7 is grounded. When the high-voltage power supply is outputting, the current feedback signal is transmitted to pin J1-24. Pin J1-24 is connected to pin P1-24 of the connector via a connecting wire, and voltmeter V7 displays the voltage (0~10V) across pin J1-24. The actual output current value of the high-voltage power supply = a coefficient multiplied by the voltage value displayed by voltmeter V7. The coefficient is determined according to the specifications and model of the high-voltage power supply. Figure 2 , Figure 4 As shown, the meter head of voltmeter V7 is installed on the control panel. By observing the value at current monitoring point 2, the voltage value displayed by voltmeter V7 can be obtained.

[0040] The output ratio switching circuit includes resistor R5 and ratio switching switch K2. Pins P1-18 of the connector are connected sequentially to resistor R5 and ratio switching switch K2, with the other end of ratio switching switch K2 grounded. Ratio switching switch K2 is as follows... Figure 4As shown. The proportional switching switch K2 is at least partially exposed on the control panel. When the proportional switching switch K2 is closed, it switches the control ratio of the voltage programming and current programming settings of the high-voltage power supply, and the feedback ratio also changes accordingly, i.e., switching the output range of the high-voltage power supply. Specifically, when the proportional switching switch K2 is closed, it indicates a switch in the output ratio. The voltage programming display circuit 1 and the current programming display circuit are used to display the set values ​​of the high-voltage power supply's output voltage and current, respectively. At this time, the output voltage monitoring circuit 1 and the output current monitoring circuit 1 monitor the actual output voltage and current of the high-voltage power supply, respectively. Similarly, in some embodiments, when the proportional switching switch K2 is closed, it indicates a switch in the output ratio. At this time, the output voltage monitoring circuit 2 and the output current monitoring circuit 2 monitor the actual output voltage and current of the high-voltage power supply, respectively. Resistor R5 acts as a current limiter to prevent overcurrent damage to the components (optocouplers) in the high-voltage power supply J1-18 circuit. With this configuration, by opening and closing the proportional switching switch K2, the control device automatically selects the corresponding monitoring circuit to achieve measurements of different ranges.

[0041] The output ratio switching indicator circuit includes an LED (LED3) and a resistor R3. Pins P1-16 of the connector are connected sequentially to LED3 and resistor R3, with the other end of resistor R3 grounded. When the ratio switching switch K2 is closed, LED3 illuminates, indicating that the output ratio is being switched. Figure 2 , Figure 4 As shown, LED3 is the proportional status light on the control panel. You can determine whether to switch the output ratio by observing whether the proportional status light on the control panel is on or off.

[0042] In some embodiments, when the proportional switching switch K2 is closed, the light-emitting diode LED3 illuminates, indicating a change in output ratio. At this time, the set value of the high-voltage power supply is displayed through voltage programming display circuit 1 and current programming display circuit 2, and the actual output voltage and current of the high-voltage power supply are monitored through output voltage monitoring circuit 1 and output current monitoring circuit 1, respectively. When the proportional switching switch K2 is open, the light-emitting diode LED3 does not illuminate. At this time, the set voltage value of the high-voltage power supply is displayed through voltage programming display circuit 2, and the actual output voltage and current of the high-voltage power supply are monitored through output voltage monitoring circuit 2 and output current monitoring circuit 2, respectively.

[0043] In other embodiments, when the proportional switching switch K2 is closed, the light-emitting diode LED3 illuminates, indicating a switch in the output ratio. At this time, the actual output voltage and current of the high-voltage power supply are monitored by the output voltage monitoring circuit 2 and the output current monitoring circuit 2, respectively. When the proportional switching switch K2 is open, the light-emitting diode LED3 does not illuminate. At this time, the actual output voltage and current of the high-voltage power supply are monitored by the output voltage monitoring circuit 1 and the output current monitoring circuit 1, respectively.

[0044] The fault indication circuit includes an LED2 and a resistor R2. Pins P1-15 of the connector are connected sequentially to LED2 and resistor R2, with the other end of resistor R2 grounded. When the high-voltage power supply fails, LED2 illuminates. Faults include overvoltage, overcurrent, undervoltage, and overtemperature. LED2 serves as the high-voltage fault status light on the control panel; observing the illumination of this light allows you to determine if the high-voltage power supply is faulty.

[0045] The constant voltage / constant current status indicator circuit includes an LED (LED4) and a resistor R6. Pins P1-19 of the connector are connected sequentially to LED4 and resistor R6, with the other end of resistor R6 grounded. When the high-voltage power supply is in a constant voltage state, the high-level signal from the high-voltage power supply is transmitted to pins P1-19 through the connector wire, and then to LED4, causing LED4 to light up. When the high-voltage power supply is in a constant current state, LED4 does not light up. Resistor R6 limits the current, preventing LED4 from being damaged by overcurrent. Figure 2 , Figure 4 As shown, LED4 is the constant voltage / constant current status light on the control panel. By observing whether the constant voltage / constant current status light on the control panel is on or off, you can determine whether the high voltage power supply is in a constant voltage / constant current state.

[0046] Pin P1-20 is connected to the power supply VCC via a 3-terminal voltage regulator chip, one end of which is grounded. The 3-terminal voltage regulator chip stably reduces the power supply VCC to 5V, providing a stable power supply to pin J1-20 of the high-voltage power supply. This stable power supply ensures that the high-voltage power supply receives a constant voltage during operation, reducing the risk of equipment failure or performance degradation due to power fluctuations.

[0047] Preferably, since the 3-terminal voltage regulator chip can reduce the voltage, the resistance values ​​of resistors R1, R2, R3, and R6 can be significantly reduced, or even eliminated entirely for current limiting. By reducing the use of resistors, not only is circuit design simplified, but the risk of circuit failure due to resistor overheating or damage is also reduced.

[0048] Working principle of the control device for high-voltage power supply:

[0049] The control device of the high-voltage power supply is connected to the control port J1 of the high-voltage power supply under test via a connecting cable, and the interface definition of connector P1 is consistent with the interface definition of control port J1. Swinging the power output switch on the control panel up / down closes the power output switch K1 in the power on / off switch circuit, thus activating the high-voltage power supply output. During use, the high-voltage power supply's input terminal is connected to a 208V AC power supply, and its output terminal is connected to a high-voltage load. When the high-voltage power supply outputs high voltage, LED1 illuminates, and the high-voltage on status light on the control panel lights up, indicating that the high-voltage power supply is outputting high voltage.

[0050] The control device can test the functionality of the high-voltage power supply by setting its output voltage and current values. By rotating the voltage programming knob to change the resistance of the adjustable resistor RP1, the voltmeter V4 displays the set voltage value, and the high-voltage power supply outputs the corresponding high voltage based on the voltage signal from pins P1-10. The output voltage monitoring circuit 1 / 2 monitors the accuracy of the voltage feedback from the high-voltage power supply. Observing the values ​​displayed on the control panel (voltage monitoring 1 / 2) reveals the voltage feedback from the high-voltage power supply. The opening and closing of the proportional switch K2 determines whether the voltage feedback is monitored through output voltage monitoring circuit 1 or output voltage monitoring circuit 2. Similarly, the opening and closing of the proportional switch K2 determines whether the set value of the high-voltage power supply is displayed through voltage programming display circuit 1 or voltage programming display circuit 2. By comparing the set value and the feedback value, the output accuracy of the high-voltage power supply is verified.

[0051] The resistance of adjustable resistor RP2 is changed by rotating the current programming knob, which alters the voltage across pins P1-12. Voltmeter V5 displays the set voltage value, and the high-voltage power supply outputs the corresponding current based on the voltage signal from pins P1-12. The current feedback from the high-voltage power supply is then monitored by output current monitoring circuit 1 / 2 to ensure its accuracy. The current feedback from the high-voltage power supply can be obtained by observing the values ​​displayed at current monitoring circuit 1 / 2 on the control panel. The opening and closing of the proportional switching switch K2 determines whether the current feedback from the high-voltage power supply is monitored through output current monitoring circuit 1 or output current monitoring circuit 2. The on / off status of the proportional indicator light on the control panel can be used to determine whether to switch the output ratio, avoiding operational errors.

[0052] The constant voltage / constant current status of the high-voltage power supply can be detected by observing the on / off state of the constant voltage / constant current status indicator on the control panel. When the indicator is lit, the high-voltage power supply is in a constant voltage state. When the indicator is off, the high-voltage power supply is in a constant current state.

[0053] By observing the high-voltage fault status light on the control panel, it can be determined whether there are faults such as overvoltage, overcurrent, undervoltage, or overtemperature in the high-voltage power supply. When the high-voltage fault status light on the control panel is lit, it means that there are faults such as overvoltage, overcurrent, undervoltage, or overtemperature in the high-voltage power supply, and maintenance personnel can then investigate the type of fault.

[0054] In summary, the connector P1 of this invention connects to the control port J1 of the high-voltage power supply via a connecting cable, and the interface definition of connector P1 is consistent with that of control port J1. This allows the control device to control the output of the high-voltage power supply. Consequently, independent control and testing of the high-voltage power supply after it is removed from the machine tool is achieved, without relying on the original machine tool, significantly reducing maintenance costs and time. Simultaneously, it simplifies the maintenance process for the high-voltage power supply, allowing functional testing and repair verification to be completed without returning it to the factory, shortening the maintenance cycle. Furthermore, the interface definition of connector P1 is completely consistent with the interface definition of the high-voltage power supply control port J1, ensuring accurate transmission of control signals.

[0055] The above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model.

Claims

1. A control device of a high voltage power supply for controlling a high voltage power supply, characterized by, The application relates to a high-voltage power supply device, which comprises a shell, a control panel arranged on the shell, a power supply arranged in the shell and an internal circuit, the power supply is configured to supply power to the control panel and the internal circuit, the control panel and the internal circuit are electrically connected, a connector is arranged on the internal circuit, the connector is connected with a control port of the high-voltage power supply through a connecting line, and the interface definition of the connector is consistent with that of the control port of the high-voltage power supply; wherein the connector is a DB25 connector P1, the DB25 connector P1 comprises 25 pins of P1-1 to P1-25, the pins of P1-7, P1-8, P1-23 and P1-25 are empty pins, and the pins of P1-2, P1-4, P1-6, P1-9, P1-11, P1-13 and P1-21 are ground pins. The internal circuit comprises output voltage monitoring 1 circuit, output current monitoring 1 circuit, output voltage monitoring 2 circuit, output current monitoring 2 circuit and output proportion switching circuit, the output proportion switching circuit comprises a resistor R5 and a proportion switching switch K2, the pin P1-18 of the connector is connected with the resistor R5 and the proportion switching switch K2 in sequence, and the other end of the proportion switching switch K2 is grounded; when the proportion switching switch K2 is opened / closed, the actual output voltage and current of the high-voltage power supply are monitored through the output voltage monitoring 1 circuit and the output current monitoring 1 circuit / the output voltage monitoring 2 circuit and the output current monitoring 2 circuit.

2. The control device of a high voltage power supply according to claim 1, characterized by The output proportion switching indication circuit comprises a light-emitting diode LED3 and a resistor R2, the pin P1-16 of the connector is connected with the light-emitting diode LED3 and the resistor R3 in sequence, and the other end of the resistor R3 is grounded; when the proportion switching switch K2 is closed, the light-emitting diode LED3 emits light.

3. The control device of a high voltage power supply according to claim 2, characterized by The output voltage monitoring 1 circuit comprises a voltmeter V1, the pin P1-1 of the connector is connected with the positive pole of the voltmeter V1, and the negative pole of the voltmeter V1 is grounded; the output current monitoring 1 circuit comprises a voltmeter V2, the pin P1-3 of the connector is connected with the positive pole of the voltmeter V2, and the negative pole of the voltmeter V2 is grounded.

4. The control device of a high voltage power supply according to claim 2, characterized by The output voltage monitoring 2 circuit comprises a voltmeter V6, the pin P1-22 of the connector is connected with the positive pole of the voltmeter V6, and the negative pole of the voltmeter V6 is grounded; the output current monitoring 2 circuit comprises a voltmeter V7, the pin P1-24 of the connector is connected with the positive pole of the voltmeter V7, and the negative pole of the voltmeter V7 is grounded.

5. The control device of a high voltage power supply according to claim 2, wherein ​ 6. The control device of a high voltage power supply according to claim 1, wherein The internal circuit includes voltage programming display 1 circuit and current programming display circuit, the voltage programming display 1 circuit includes adjustable resistance RP1 and voltmeter V4, the P1-10 pin of the connector is grounded through the voltmeter V4 in one way, and is connected to the sliding end of the adjustable resistance RP1 in another way, the input end of the adjustable resistance RP1 is connected with the power supply, and the output end of the adjustable resistance RP1 is grounded;The current programming display circuit includes adjustable resistance RP2 and voltmeter V5, the P1-12 pin of the connector is grounded through the voltmeter V5 in one way, and is connected to the sliding end of the adjustable resistance RP2 in another way, the input end of the adjustable resistance RP2 is connected with the power supply, and the output end of the adjustable resistance RP2 is grounded.

7. The control device of a high voltage power supply according to claim 1, wherein The internal circuit includes voltage programming display 2 circuit for displaying the set value of the high-voltage power supply output voltage;The voltage programming display 2 circuit includes voltmeter V3, and the P1-5 pin of the connector is connected to the positive electrode of the voltmeter V3, and the negative electrode of the voltmeter V3 is grounded.

8. The control device of a high voltage power supply according to claim 1, wherein The internal circuit includes power output opening circuit and high-voltage opening indication circuit, the power output opening circuit includes resistance R4 and power output switch K1, the P1-17 pin of the connector is connected to the resistance R4 and the power output switch K1 in turn, and the power output switch K1 is grounded;The high-voltage opening indication circuit includes light emitting diode LED1 and resistance R1, the P1-14 pin of the connector is connected to the light emitting diode LED1 and the resistance R1 in turn, and the other end of the resistance R1 is grounded.

9. The control device of a high voltage power supply according to claim 1, wherein The internal circuit includes fault indication circuit, the fault indication circuit includes light emitting diode LED2 and resistance R2, the P1-15 pin of the connector is connected to the light emitting diode LED2 and the resistance R2 in turn, and the other end of the resistance R2 is grounded.

10. The control device of a high voltage power supply according to claim 1, wherein The internal circuit further includes constant voltage / constant current state indication circuit, the constant voltage / constant current state indication circuit includes light emitting diode LED4 and resistance R6, the P1-19 pin of the connector is connected to the light emitting diode LED4 and the resistance R6 in turn, and the other end of the resistance R6 is grounded.

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