Electrode stem assembly, electrode reaction device and PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment

Abstract

The utility model discloses an electrode stem assembly, an electrode reaction device and PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment. The electrode stem assembly comprises a sliding rail, a base, a pushing piece, an elastic piece, an electrode stem body and a driving piece, the base is installed on the sliding rail in a sliding mode. The pushing piece is arranged on one side wall of the sliding rail; the two ends of the elastic piece are connected with the end of the pushing piece and the base correspondingly, and when the pushing piece moves relative to the sliding rail and is self-locked, the base is synchronously driven to move under the connecting action of the elastic piece; the electrode stem body is fixedly connected with the base through a connecting piece; the driving piece is connected with the sliding rail and used for pushing the sliding rail to move in the length direction of the sliding rail. Through the arrangement, the condition that the electrode stem assembly is in rigid contact with the graphite boat is effectively avoided, the stability during film coating is improved, and the electrode stem assembly is convenient to replace, so that silicon wafers with different sizes can be quickly adjusted.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of electrode rod assembly, electrode reaction device and PECVD equipment. BACKGROUND

[0002] In the manufacturing process of solar panels, PECVD (Plasma Enhanced Chemical Vapor Deposition) technology is widely used to deposit silicon nitride anti-reflective film on the surface of silicon wafers, which is crucial to improving the photoelectric conversion efficiency of solar panels.

[0003] Currently, the electrode rod assembly of PECVD equipment is mostly fixedly installed on the inner wall of the furnace tube. Although this method can ensure the stability of the plasma and the uniformity of film deposition to a certain extent, it still has certain defects.

[0004] However, there are still certain defects:

[0005] When using the above-mentioned setting for coating, the graphite boat needs to be pushed into the furnace tube by a boat pushing mechanism. When the boat pushing mechanism is in place, the graphite boat contacts the electrode at the rear end of the reaction tube to perform coating. However, during this process, improper operation or design defects of the equipment may cause hard contact between the graphite boat and the electrode rod assembly. This accidental collision is extremely harmful. The electrode rod and the graphite boat are both high-precision and expensive components. Once damaged, not only is the repair or replacement cost high, but it also causes production to stop, seriously affecting production efficiency. More importantly, debris, particulate pollutants, and other contaminants generated during the hard contact process can float in the reaction chamber and easily adhere to the surface of the highly sensitive silicon wafer. As the core component of solar panels, any imperfections on the surface of the silicon wafer can interfere with the quality of subsequent film formation, causing defects in the silicon nitride anti-reflective film, ultimately leading to a decrease in the photoelectric conversion efficiency of solar panels and a significant increase in product failure rate.

[0006] In addition, the existing fixed electrode rod design is tailored according to specific size and shape of silicon wafers. However, with the rapid innovation of the solar industry, the market demand for solar panel specifications is increasingly diverse, with small-size high-efficiency cell wafers and irregular-shaped silicon wafers emerging. Once the silicon wafers that do not match the original design need to be processed, due to the limitations of the compatibility between the fixed electrode rod and the reaction chamber structure, it is often necessary to replace the entire electrode rod or even make large-scale adjustments to the complex structure inside the reaction chamber. This process involves the disassembly, installation, and re-commissioning of precision components, which not only requires a large amount of manpower, material resources, and time cost, but also greatly increases the complexity and uncertainty of the production process.

[0007] Therefore, there is a need for an electrode rod assembly, electrode reaction device, and PECVD equipment to solve the above problems. SUMMARY

[0008] The utility model discloses a purpose at, provide a kind of electrode stem assembly, electrode reaction device and PECVD equipment, to effectively avoid the situation that electrode stem assembly and graphite boat hard contact occurs, improve the stability when coating, and it is convenient to replace electrode stem assembly, to be able to be adjusted quickly to different size silicon wafer, and more stronger adaptability.

[0009] To solve the above technical problems, the utility model provides a kind of electrode stem assembly, including slide rail, base, pusher, elastic element, electrode stem body and driving part;

[0010] The base is slidably installed on the slide rail;

[0011] The pusher is arranged on the side wall of the slide rail;

[0012] The two ends of the elastic element are connected with the end of the pusher and the side wall of the base respectively, when the pusher moves relative to the slide rail and is self-locked, under the connecting action of the elastic element, the base is synchronously driven to move;

[0013] The electrode stem body is fixedly connected with the base by the connecting piece;

[0014] The driving part is connected with the slide rail, for pushing the slide rail to move along its length direction.

[0015] Further, the pusher includes a threaded sleeve and a threaded rod;

[0016] The threaded sleeve is rotatably installed on the side wall of the slide rail;

[0017] The threaded rod is threadedly connected with the inner wall of the threaded sleeve, and slidably penetrates the side wall of the slide rail and is connected with the elastic element;

[0018] When the threaded sleeve rotates, the threaded rod feeds along the length direction of the slide rail, to drive the base to move under the connecting action of the elastic element.

[0019] Further, the connecting piece is made of a sealing, heat-insulating and insulating material.

[0020] Further, the connecting piece has a skirt along the direction of the electrode stem body, the skirt has a wave-shaped structure and is spirally wound outside the electrode stem body.

[0021] Further, the elastic element is a compression spring.

[0022] Further, the driving part is a horizontal displacement table.

[0023] In another aspect, the utility model also proposes an electrode reaction device, including furnace pipe and electrode stem subassembly described in above-mentioned embodiment,

[0024] The end of the furnace pipe is provided with an opening for the electrode stem subassembly to pass in or out;

[0025] When the electrode stem body extends into the furnace pipe, the connecting piece can be in close contact with the opening to seal the opening.

[0026] Further, the electrode stem subassembly is provided with two groups, and the two groups of electrode stem subassemblies are independently arranged.

[0027] In another aspect, the utility model also proposes a PECVD equipment, including electrode reaction device described in above-mentioned embodiment and push boat mechanism,

[0028] The push boat mechanism is used to send the graphite boat into the furnace pipe from the end of the furnace pipe away from the electrode reaction device.

[0029] Compared with the prior art, the utility model has at least the following beneficial effects:

[0030] By setting the electrode stem subassembly including slide rail, base, pusher, elastic piece, electrode stem body and driving piece, and the electrode stem body is arranged on the base, and the two ends of the elastic piece are connected with the pusher arranged on one side of the base and the slide rail respectively, so that the electrode stem body can move along the length direction of the slide rail when subjected to external force, to realize the soft connection between the electrode stem body and the graphite boat, and effectively ensure that the two will not be damaged due to hard contact, improve the service life and avoid the problems of high maintenance difficulty and poor film forming quality caused by damage.

[0031] Among them, by setting the pusher and the driving piece, the coarse adjustment and the fine adjustment of the position of the electrode stem body are realized respectively, the purpose of rapid adjustment for application is achieved, and the production rate is improved.

[0032] Further, by setting the electrode reaction device including the electrode stem subassembly and the furnace pipe, and setting the opening for the electrode stem subassembly to pass in or out at the end of the furnace pipe, the electrode stem subassembly can be independently arranged outside the furnace pipe, and when different sizes of silicon wafers need to be coated, only the electrode stem subassembly needs to be replaced, the purpose of convenient replacement and stronger adaptability is achieved. BRIEF DESCRIPTION OF DRAWINGS

[0033] Figure 1 It is the structural schematic diagram of electrode stem subassembly in the utility model embodiment one;

[0034] Figure 2This is a schematic diagram of the electrode reaction device in Embodiment 2 of this utility model;

[0035] Figure 3 This is a side view of the PECVD equipment in Embodiment 3 of this utility model.

[0036] Reference numerals: 1. Furnace tube; 11. Opening; 21. Slide rail; 22. Base; 23. Pushing component; 231. Threaded sleeve; 232. Threaded rod; 24. Elastic component; 25. Electrode rod body; 3. Driving component; 4. Connecting component; 41. Skirt; 5. Pushing mechanism. Detailed Implementation

[0037] The electrode rod assembly, electrode reaction device, and PECVD equipment of this utility model will be described in more detail below with reference to the schematic diagrams, which illustrate preferred embodiments of this utility model. It should be understood that those skilled in the art can modify the utility model described herein while still achieving the advantageous effects of this utility model. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit this utility model.

[0038] The present invention will be described in more detail below by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0039] Example 1

[0040] like Figure 1 As shown, this embodiment proposes an electrode rod assembly, including a slide rail 21, a base 22, a pusher 23, an elastic member 24, an electrode rod body 25, and a drive member 3.

[0041] The base 22 is slidably mounted on the slide rail 21 to drive the electrode rod body 25 to move, thereby completing the precise docking between the electrode rod body 25 and the graphite boat, ensuring that there will be no false contact that would affect the coating effect.

[0042] The pusher 23 is disposed on one side wall of the slide rail 21 and is used to make coarse adjustments to the electrode rod body 25.

[0043] The two ends of the elastic member 24 are connected with the end of the pushing member 23 and the side wall of the base 22 respectively, when the pushing member 23 moves relative to the slide rail 21 and is locked, under the connection of the elastic member 24, the base 22 is synchronously driven to move. By arranging the elastic member 24, the base 22 can have a moving gap when subjected to an external force, so that when the electrode rod body 25 is connected with the graphite boat, damage caused by hard contact between the electrode rod body 25 and the graphite boat can be avoided, thereby effectively improving the service life and avoiding the problems of high maintenance difficulty and poor film forming quality caused by damage of the electrode rod body 25 and the graphite boat.

[0044] In the embodiment, the electrode rod body 25 is fixedly connected with the base 22 through the connecting piece 4.

[0045] The driving member 3 is connected with the slide rail 21 and is used for driving the slide rail 21 to move along the length direction of the slide rail 21, and correspondingly, the electrode rod body 25 can be synchronously driven to move, so as to complete fine adjustment of the position of the electrode rod body 25.

[0046] In a further embodiment, a specific pushing member 23 is further provided to improve the effect of coarse adjustment of the position of the electrode rod body 25.

[0047] Specifically, the pushing member 23 comprises a threaded sleeve 231 and a threaded rod 232.

[0048] The threaded sleeve 231 is rotatably arranged on the side wall of the slide rail 21. It should be noted that the threaded sleeve 231 only rotates relative to the side wall of the slide rail 21, and the position of the threaded sleeve 231 relative to the slide rail 21 in the horizontal direction remains relatively static.

[0049] The threaded rod 232 is threadedly connected with the inner wall of the threaded sleeve 231, and slidably penetrates through the side wall of the slide rail 21 and is connected with the elastic member 24.

[0050] The side wall of the slide rail 21 is provided with a clamping groove for limiting the threaded rod 232, so that when the threaded sleeve 231 rotates, the threaded rod 232 can be fed in the horizontal direction under the threaded connection, so as to drive the base 22 to move, and the coarse adjustment of the electrode rod body 25 is completed correspondingly.

[0051] In the embodiment, the elastic member 24 is arranged as a compression spring.

[0052] Specifically, when the threaded sleeve 231 rotates, the threaded rod 232 is fed along the length direction of the slide rail 21, so as to drive the base 22 to move under the connection of the elastic member 24, and since the electrode rod body 25 is fixedly connected with the base 22, the movement control of the electrode rod body 25 can be correspondingly completed, so as to achieve the purpose of coarse adjustment of the electrode rod body 25.

[0053] In other embodiments, the material of the connecting piece 4 is further limited to improve the coating effect when applied.

[0054] Specifically, the connecting piece 4 is made of a sealing, heat-insulating and insulating material, which is used to block the port of the furnace tube 1 to prevent foreign matter from entering the inside of the furnace tube 1 during coating, thereby affecting the forming effect.

[0055] In addition, the connecting piece 4 has a skirt 41 along the direction of the electrode rod body 25, which is in a wave shape and spirally wound outside the electrode rod body 25, and is used to assist in supporting the electrode rod body 25 to prevent the electrode rod body 25 from being pressed down under the action of gravity, thereby causing misalignment or virtual contact with the graphite boat during subsequent butt joint.

[0056] In further embodiments, the driving piece 3 is further limited to improve the driving effect on the slide rail 21 and realize the function of fine adjustment of the position of the electrode rod body 25. Specifically, the driving piece 3 is a horizontal displacement table controlled and driven by a servo motor. Since the servo motor has high precision, it can realize the function of fine adjustment of the position of the electrode rod body 25.

[0057] Embodiment Two

[0058] This embodiment two proposes an electrode reaction device, which includes a furnace tube 1 and the electrode rod assembly described in embodiment one.

[0059] Among them, the end of the furnace tube 1 is provided with an opening 11 for the electrode rod assembly to enter or exit.

[0060] It should be particularly noted that when the electrode rod body 25 extends into the inside of the furnace tube 1, the connecting piece 4 can be tightly attached to the opening 11 to seal the opening 11 and ensure the coating quality.

[0061] The electrode reaction device proposed in this embodiment includes an electrode rod assembly and a furnace tube 1, and the end of the furnace tube 1 is provided with an opening 11 for the electrode rod assembly to enter or exit, so that the electrode rod assembly can be independent outside the furnace tube 1. Therefore, when different sizes of silicon wafers need to be coated, only the electrode rod assembly needs to be replaced, which achieves the purpose of convenient replacement and stronger adaptability.

[0062] Among them, the electrode rod assembly is provided with two groups, and the two groups of electrode rod assemblies are independently arranged.

[0063] Embodiment Three

[0064] This embodiment three proposes a PECVD device, which includes the electrode reaction device described in embodiment two and a boat pushing mechanism 5.

[0065] The pushing boat mechanism 5 is used to send the graphite boat into the furnace tube 1 from the end of the electrode reaction device, which is the prior art and will not be described here.

[0066] In further embodiments, a method for using the PECVD device is also proposed to avoid the damage of the graphite boat and the electrode rod assembly caused by the hard contact.

[0067] A method for using the PECVD device, specifically comprising the following steps:

[0068] The graphite boat is transported into the furnace tube 1 by the pushing boat mechanism 5;

[0069] The driving member 3 and the pushing member 23 are controlled to operate, so that the electrode rod body 25 is extended into the graphite boat from the opening 11 of the furnace tube 1, and the connecting member 4 seals the opening 11 at the same time;

[0070] Film deposition is performed.

[0071] Through the above steps, the graphite boat is installed in advance, and then the electrode rod body 25 is controlled to move and dock, and the electrode rod body 25 and the graphite boat are in soft contact, so that the damage between the two caused by the hard contact can be effectively avoided, the service life is improved, and the problems of high maintenance difficulty and poor film quality caused by the damage of the two are avoided.

[0072] Obviously, those skilled in the art can make various modifications and variations to the present application without departing from the spirit and scope of the present application. Thus, if these modifications and variations of the present application belong to the scope of the claims of the present application and its equivalent technologies, the present application also intends to include these modifications and variations.

Claims

1. An electrode stem assembly, characterized by, The electrode rod assembly comprises a slide rail, a base, a pushing member, an elastic member, an electrode rod body and a driving member. The base is slidingly installed on the slide rail. The pushing member is arranged on a side wall of the slide rail. Two ends of the elastic member are connected with an end of the pushing member and a side wall of the base respectively. The electrode rod body is fixedly connected with the base through a connecting member. The driving member is connected with the slide rail and used to push the slide rail to move along a length direction of the slide rail.

2. The electrode pole assembly of claim 1, wherein, The pushing member comprises a threaded sleeve and a threaded rod. The threaded sleeve is rotatably installed on the side wall of the slide rail. The threaded rod is threadedly connected with an inner wall of the threaded sleeve and slidingly penetrates through the side wall of the slide rail and is connected with the elastic member. When the threaded sleeve rotates, the threaded rod feeds along the length direction of the slide rail to drive the base to move under the connection of the elastic member.

3. The electrode pole assembly of claim 1, wherein, The connecting member is made of a sealing, heat-insulating and insulating material.

4. The electrode pole assembly of claim 1, wherein, The connecting member has a skirt along a direction of the electrode rod body, and the skirt has a wave-shaped structure and is spirally wound outside the electrode rod body.

5. The electrode stem assembly of claim 1, wherein, The elastic member is a compression spring.

6. The electrode pole assembly of claim 1, wherein, The driving member is a horizontal displacement table.

7. An electrode reaction device characterized by comprising: The electrode rod assembly comprises a furnace tube and the electrode rod assembly as claimed in any one of claims 1-6. An end of the furnace tube is provided with an opening for the electrode rod assembly to enter or exit. When the electrode rod body extends into the furnace tube, the connecting member can be closely attached to the opening to seal the opening.

8. The electrode reaction device according to claim 7, wherein The electrode rod assembly is provided with two groups, and the two groups of electrode rod assemblies are independently arranged.

9. A PECVD apparatus, characterized by, The electrode reaction device comprises the electrode rod assembly as claimed in any one of claims 7 or 8 and a pushing boat mechanism. The pushing boat mechanism is used to send a graphite boat from an end of the furnace tube away from the electrode reaction device into the furnace tube.

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