Calibrating device for liquid opening of single crystal furnace

Abstract

The utility model discloses a single crystal furnace liquid port calibration device which comprises an outer guide cylinder, a quartz inner guide cylinder and a graphite connecting ring, the graphite connecting ring is arranged between the outer guide cylinder and the quartz inner guide cylinder and is used for supporting the quartz inner guide cylinder, and the single crystal furnace liquid port calibration device is characterized by further comprising a calibration object, the calibration object is detachably mounted on the mounting groove, and the bottom surface of the calibration object is parallel to the bottom surface of the outer guide cylinder. According to the utility model, the calibration object is used for calibrating the liquid opening distance, and the CCD system is matched, so that the liquid opening distance data is more accurate, and the stable growth of crystals is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to a long crystal equipment technical field especially relates to a single crystal furnace liquid mouth calibration device. BACKGROUND

[0002] In the long crystal process of single crystal furnace, the diameter of silicon crystal needs to be controlled within the target range, in order to stabilize the diameter and quality of the crystal, the distance between the silicon solution and the bottom of the flow guide cylinder needs to be maintained at a constant height, in the crystal growth process, the melt is consumed, the height of the liquid level relative to the crucible will be reduced, in order to keep the distance between the liquid level and the bottom of the flow guide cylinder constant, the height of the crucible needs to be increased accordingly, so as to maintain the constant height. How much the crucible rises is captured by the CCD system on the furnace cover, and the parameters of how much the crucible needs to rise are obtained through algorithm adjustment, and the camera will collect images in the whole growth process, and the system will analyze and feedback, so as to provide the rising data of the crucible.

[0003] However, whether the data collected by the CCD is accurate, and whether the liquid port distance obtained by the CCD collection system is accurate, will affect the diameter and quality of the crystal. If the liquid port distance collected and analyzed by the CCD is not accurate, it may affect the crystal pulling speed in the diameter control process, thereby affecting the efficiency, and the instability of the liquid port distance will affect the temperature gradient of the crystal, which will cause the deformation of the crystal, the instability of the crystal diameter, and even the breakage of the crystal, resulting in the scrap of the crystal. Therefore, a device for calibrating the liquid port distance is urgently needed. UTILITY MODEL CONTENT

[0004] The utility model provides a single crystal furnace liquid mouth calibration device aiming at the above-mentioned defects.

[0005] Technical scheme: in order to solve the above-mentioned problems, the utility model adopts a single crystal furnace liquid mouth calibration device, which comprises an outer flow guide cylinder, a quartz inner flow guide cylinder and a graphite connecting ring, the graphite connecting ring is installed between the outer flow guide cylinder and the quartz inner flow guide cylinder and is used for supporting the quartz inner flow guide cylinder, characterized by further comprising a calibration object, the graphite connecting ring is provided with a mounting groove on the inner side, the calibration object is detachably installed on the mounting groove, and the bottom surface of the calibration object is parallel to the bottom surface of the outer flow guide cylinder.

[0006] Further, one side of the calibration object is provided with a hanging ear, and the hanging ear is suspended and installed in the mounting groove.

[0007] Further, a convex bayonet is arranged on the hanging ear, a clamping groove is arranged in the mounting groove, and the convex bayonet is clamped into the clamping groove to fix the position of the calibration object.

[0008] Further, the calibration object is made of quartz.

[0009] Further, the utility model further comprises a furnace cover installed at the top of the outer flow guide cylinder, and an observation window is arranged on the furnace cover to observe the position of the calibration object.

[0010] Further, the quartz inner guide tube is internally provided with a water cooling screen.

[0011] Further, the control system is used for recording the distance between the calibration object and the melt in the quartz crucible and adjusting the meniscus distance.

[0012] Beneficial effects: compared with the prior art, the meniscus distance is calibrated by the calibration object, the meniscus distance data is more accurate by cooperating with the CCD system, and the stable growth of the crystal is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0013] Figure 1 It is a sectional view of the meniscus calibration device of the single crystal furnace.

[0014] Figure 2 It is a sectional view of the meniscus calibration device of the single crystal furnace. Figure 1 It is a partial enlarged schematic view of the structure I.

[0015] Figure 3 It is a schematic view of the external structure of the meniscus calibration device of the single crystal furnace.

[0016] Figure 4 It is a schematic view of the observation angle of the observation window. DETAILED DESCRIPTION

[0017] As shown in the drawings, the meniscus calibration device of the single crystal furnace in the embodiment comprises an outer guide tube 3, a quartz inner guide tube 4, a water cooling screen 5, a calibration object 6, a graphite connecting ring 7 and a control system. The water cooling screen 5 is arranged on the inner side of the quartz inner guide tube 4, the graphite connecting ring 7 is installed between the outer guide tube 3 and the quartz inner guide tube 4, and is used for supporting the quartz inner guide tube 4 and the water cooling screen 5. The top of the outer guide tube 3 is provided with a furnace cover 8, the furnace cover 8 is provided with an observation window 81 for observing the position of the calibration object 6, and the furnace cover 8 is also provided with a CCD window 82 for installing a CCD camera. Figures 1 to 4 The inner side of the graphite connecting ring 7 is provided with a mounting groove 71, the calibration object 6 is detachably mounted on the mounting groove 71, and the bottom surface of the calibration object 6 is parallel to the bottom surface of the outer guide tube 3. Specifically, the calibration object 6 is provided with a hanging ear, the hanging ear is provided with a protruding bayonet, the mounting groove 71 is provided with a clamping groove, and the protruding bayonet is clamped into the clamping groove to fix the position of the calibration object 6, so that the calibration object 6 is suspended and mounted in the mounting groove 71. Because the calibration object is relatively close to the melt, it needs to work in a high-temperature environment and cannot pollute the melt, and the cost and other factors are also considered, the calibration object 6 is made of quartz material.

[0018]

[0019] ​When calibrating the meniscus, the calibration object 6 is installed in the installation slot 71. First, the distance from the bottom surface of the calibration object 6 to the bottom surface of the outer draft tube 3 is measured by a measuring tool, and the value a is recorded. Then, after the silicon material is melted, the crucible 1 is raised during the process temperature adjustment stage, so that the silicon melt 2 liquid surface is in contact with the bottom surface of the calibration object 6. The contact is observed by the operator from the observation window 81. Since the liquid surface changes when the solid is in contact with the liquid surface, the contact moment is easily recognized by the human eye, and the distance error is small. When the calibration object is just in contact with the melt liquid surface, the meniscus can be calibrated as a, and the meniscus at this position in the control system is recorded as a. During the equal-diameter process, the meniscus to be controlled is b, so only the lifting actuator of the crucible needs to be controlled. The value of the meniscus to be maintained in the equal-diameter control is (b-a) based on a. Under this condition, the corresponding crucible height is adjusted in time to control the constant meniscus by the measurement and analysis function of the CCD system.

Claims

1. A single crystal furnace nozzle alignment device, comprising an outer shroud (3), a quartz inner shroud (4), a graphite connecting ring (7), the graphite connecting ring (7) being installed between the outer shroud (3) and the quartz inner shroud (4) for supporting the quartz inner shroud (4), characterized in that, The graphite connecting ring (7) is provided with a mounting groove (71) on the inner side, and the calibration object (6) is detachably mounted on the mounting groove (71), and the bottom surface of the calibration object (6) is parallel to the bottom surface of the outer flow guide cylinder (3).

2. The single crystal furnace port alignment apparatus of claim 1, wherein, One side of the calibration object (6) is provided with a hanging ear which is suspended and mounted in the mounting groove (71).

3. The single crystal furnace port alignment apparatus of claim 2, wherein, The hanging ear is provided with a protruding bayonet, and the mounting groove (71) is provided with a clamping groove, and the protruding bayonet is clamped into the clamping groove to fix the position of the calibration object (6).

4. The single crystal furnace port alignment apparatus of claim 1, wherein, The calibration object (6) is made of quartz.

5. The single crystal furnace port alignment apparatus of claim 1, wherein, A furnace cover (8) is further mounted on the top of the outer flow guide cylinder (3), and the furnace cover (8) is provided with an observation window (81) for observing the position of the calibration object (6).

6. The single crystal furnace port alignment apparatus of claim 1, wherein, The quartz inner flow guide cylinder (4) is provided with a water cooling screen (5) on the inner side.

7. The single crystal furnace port alignment apparatus of claim 1, wherein, A control system is further included, which is used for recording the distance between the calibration object (6) and the molten liquid (2) in the quartz crucible (1) and adjusting the distance between the liquid port and the quartz crucible (1).

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