Single crystal furnace provided with guide cylinder and used for monocrystalline silicon production

Abstract

The utility model provides a single crystal furnace with a guide cylinder for producing monocrystalline silicon, which comprises an inner guide cylinder, an outer guide cylinder upper shell and an outer guide cylinder lower shell are respectively sleeved outside the inner guide cylinder, and a mounting component is arranged between the outer guide cylinder upper shell and the outer guide cylinder lower shell. A single crystal furnace is arranged at the bottom of the inner guide cylinder, the mounting assembly comprises a first mounting ring and a second mounting ring which are respectively arranged on the outer sides of the outer guide cylinder upper shell and the outer guide cylinder lower shell, mounting grooves are formed in the first mounting ring and the second mounting ring, mounting blocks are arranged in the mounting grooves, and fixing bolts are arranged in the mounting blocks. The single crystal furnace provided with the guide cylinder and used for monocrystalline silicon production solves the problems that the guide cylinder of the existing single crystal furnace is inconvenient to disassemble and replace in the use process, the graphite soft felt or the graphite blank in the guide cylinder is inconvenient to clean and replace, the heat preservation and heat insulation effects of the guide cylinder are influenced, and the use is relatively inconvenient.

Description

TECHNICAL FIELD

[0001] The utility model relates to single crystal furnace flow guide tube technical field especially, it relates to a single crystal furnace with flow guide tube for monocrystalline silicon production. BACKGROUND

[0002] Single crystal furnace flow guide tube is a kind of key equipment for crystal growth, plays the role of flow guide, cooling and protecting crystal in single crystal growth process.Its basic structure is cylindrical or conical, usually made of metal material, internal surface is coated with high-temperature-resistant, corrosion-resistant special coating.

[0003] The utility model discloses a single crystal furnace flow guide tube discloses a kind of single crystal furnace flow guide tubes, for the current flow guide tube is usually graphite and other materials, its temperature gradient is relatively smaller, therefore, monocrystalline silicon growth speed is slower, the effective single crystal in unit time is less, and production efficiency is lower;The space between the inner cone cylinder and the outer cone cylinder is formed in the inner cylinder body, that is, the space between the inner cone cylinder and the outer cone cylinder;The gas flow of inert gas entering the upper port can be output from the lower port through the airflow channel, and heat is taken away, in this process, since the heat transfer coefficients of the inner cone cylinder and the outer cone cylinder are greater than the heat transfer coefficients of the inner cylinder body and the outer cylinder body, the heat dissipation speed can be improved, compared with prior art, the longitudinal temperature gradient in the internal of single crystal furnace flow guide tube can be improved, thereby facilitating to improve monocrystalline silicon growth speed and improve production efficiency;

[0004] In the manufacturing process of single crystal furnace flow guide tube, graphite soft felt or graphite embryo is generally filled in the flow guide tube to ensure the heat preservation and heat insulation performance of single crystal furnace flow guide tube, but graphite soft felt or graphite embryo has service life and needs to be replaced after being used for a period of time, the single crystal furnace flow guide tube is inconvenient to disassemble and replace during use, and the graphite soft felt or graphite embryo in the interior is inconvenient to clean and replace, thereby affecting the heat preservation and heat insulation effect of flow guide tube and being inconvenient to use.

[0005] It should be noted that the information disclosed in this BACKGROUND section is only intended to provide an overall understanding of the background of the present utility model and should not be regarded as acknowledging or implying in any form that the information constitutes prior art known to those of ordinary skill in the art, therefore the above content belongs to the technical cognition of the inventor and does not necessarily constitute prior art. CONTENT OF THE UTILITY MODEL

[0006] The purpose of this section is to outline some aspects of the embodiments of the present utility model and briefly introduce some preferred embodiments, and some simplifications or omissions may be made in this section, as well as the abstract of the specification and the utility model name, to avoid obscuring the purpose of this section, the abstract of the specification and the utility model name, and such simplifications or omissions cannot be used to limit the scope of the present utility model.

[0007] In view of the above and / or problems existing in the prior art, the utility model provides.

[0008] To solve the above technical problems, the utility model provides the following technical scheme: A single crystal furnace with a flow guide cylinder for single crystal silicon production, including inner flow guide cylinder, the outer side of outer flow guide cylinder upper shell and outer flow guide cylinder lower shell is respectively equipped with the installation of outer flow guide cylinder upper shell and outer flow guide cylinder lower shell, installation assembly is arranged between outer flow guide cylinder upper shell and outer flow guide cylinder lower shell, the bottom of inner flow guide cylinder is provided with single crystal furnace.

[0009] Preferably, the installation assembly includes first installation ring and second installation ring arranged on the outer side of the outer flow guide cylinder upper shell and the outer flow guide cylinder lower shell respectively, installation grooves are formed in the inner part of the first installation ring and the second installation ring, installation blocks are arranged in the installation grooves, and fixed bolts are arranged in the installation blocks.

[0010] Preferably, nuts are screwed on the outer side of the fixed bolts, and knobs are fixedly connected to the top of the fixed bolts.

[0011] Preferably, fixed rods are fixedly connected to the top of the outer flow guide cylinder upper shell, and the number of the fixed rods is four.

[0012] Preferably, fixed blocks are fixedly connected to the top of the fixed rods, and screw rods are screwed on the inner wall of the fixed blocks.

[0013] Preferably, rotating blocks are fixedly connected to the top of the screw rods, and insertion rods are fixedly connected to the bottom of the screw rods, and the insertion rods are inserted into the insertion grooves in the top of the inner flow guide cylinder.

[0014] Compared with the prior art, the utility model has the advantages that:

[0015] The single crystal furnace with a flow guide cylinder for single crystal silicon production is characterized in that the outer flow guide cylinder upper shell and the outer flow guide cylinder lower shell are installed on the outside of the inner flow guide cylinder through the installation assembly, and when the graphite soft felt or the graphite embryo in the inner part is cleaned or replaced, the outer flow guide cylinder upper shell and the outer flow guide cylinder lower shell on the outer side can be disassembled.

[0016] Other features and advantages of the present application will be set forth in the following description, and in part will become apparent to those skilled in the art from the description, or can be learned by practice of the present application. The objects and other advantages of the present application can be realized and attained by the structure particularly pointed out in the written description and the accompanying drawings.

[0017] The technical scheme of the present application will be further described in detail below with the help of the accompanying drawings and examples. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application or the prior art, the following will briefly introduce the drawings needed to be used in the description of the embodiments or the prior art. Obviously, the drawings in the following description only represent some of the embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.

[0019] Figure 1 A preferred embodiment structure diagram of the single crystal furnace provided with a flow guide cylinder for single crystal silicon production of the present application is shown in the figure.

[0020] Figure 2 A structure diagram of the mounting assembly shown in the present application is shown in the figure.

[0021] Figure 3 A structure diagram of the fixing bolt shown in the present application is shown in the figure.

[0022] Figure 4 A structure diagram of the insertion rod shown in the present application is shown in the figure.

[0023] In the figure, 1 is an inner flow guide cylinder, 2 is an outer flow guide cylinder upper shell, 3 is an outer flow guide cylinder lower shell, 4 is a mounting assembly, 41 is a first mounting ring, 42 is a second mounting ring, 43 is a mounting groove, 44 is a mounting block, 45 is a fixing bolt, 5 is a single crystal furnace, 6 is a nut, 7 is a knob, 8 is a fixing rod, 9 is a fixing block, 10 is a screw rod, 11 is a rotating block, and 12 is an insertion rod. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0025] In the following description, many specific details are set forth in order to provide a thorough understanding of the present application, but the present application can also be implemented in other ways different from those described herein, and those skilled in the art can make similar generalizations without departing from the connotation of the present application, therefore the present application is not limited by the specific embodiments disclosed below.

[0026] Secondly, the present application is described in detail in combination with the schematic diagram, and in order to facilitate the description, the cross-sectional view of the device structure will be partially enlarged without the general proportion, and the schematic diagram is only an example, which should not limit the scope of protection of the present application. In addition, the three-dimensional spatial dimensions of length, width and depth should be included in actual production.

[0027] Thirdly, the "one embodiment" or "embodiment" referred to herein is intended to mean a specific feature, structure, or characteristic under at least one implementation of the realizable new type. The "in one embodiment" appearing in different places in the specification is not intended to mean the same embodiment, nor is it intended to mean an embodiment that is independent of or mutually exclusive with other embodiments.

[0028] Referring to Figures 1-4 A single crystal furnace for producing single crystal silicon is provided with a draft tube, comprising an inner draft tube 1, an outer draft tube upper shell 2 and an outer draft tube lower shell 3 are respectively sleeved and installed outside the inner draft tube 1, an installation assembly 4 is arranged between the outer draft tube upper shell 2 and the outer draft tube lower shell 3, and a single crystal furnace 5 is arranged at the bottom of the inner draft tube 1.

[0029] The outer draft tube upper shell 2 and the outer draft tube lower shell 3 are installed outside the inner draft tube 1 through the installation assembly 4, and when the graphite soft felt or graphite embryo inside is cleaned and replaced, the outer draft tube upper shell 2 and the outer draft tube lower shell 3 on the outside can be disassembled.

[0030] In the specific implementation process, as shown in Figure 2 The installation assembly 4 comprises a first installation ring 41 and a second installation ring 42 arranged outside the outer draft tube upper shell 2 and the outer draft tube lower shell 3 respectively, installation grooves 43 are formed in the interiors of the first installation ring 41 and the second installation ring 42, installation blocks 44 are arranged in the interiors of the installation grooves 43, and fixed bolts 45 are arranged in the interiors of the installation blocks 44.

[0031] The outer draft tube upper shell 2 and the outer draft tube lower shell 3 are connected through the first installation ring 41 and the second installation ring 42, the installation blocks 44 are sleeved in the installation grooves 43, and the installation blocks 44 are fixed through the fixed bolts 45, so that the outer draft tube upper shell 2 and the outer draft tube lower shell 3 are fixed, and installation and disassembly are facilitated.

[0032] The fixed bolts 45 are screwed with nuts 6 outside, knobs 7 are fixedly connected to the top of the fixed bolts 45, the fixed bolts 45 are rotated through the knobs 7, and the fixed bolts 45 are positioned and fixed through the nuts 6.

[0033] The outer draft tube upper shell 2 is fixedly connected with fixed rods 8, and the number of the fixed rods 8 is four.

[0034] The fixed rods 8 are fixedly connected with fixed blocks 9 at the top, and the fixed blocks 9 are screwed with screw rods 10 on the inner wall.

[0035] The screw rods 10 are fixedly connected with rotating blocks 11 at the top, and the screw rods 10 are fixedly connected with insertion rods 12 at the bottom, and the insertion rods 12 are inserted into the insertion slots at the top of the inner draft tube 1.

[0036] The fixed block 9 is supported and fixed by the fixed rod 8, the rotating block 11 at the top of the fixed block 9 is rotated, the screw rod 10 is rotated in the fixed block 9, and the plug rod 12 is lowered and inserted into the plug slot at the top of the inner guide cylinder 1, so that the inner guide cylinder 1 and the outer guide cylinder upper shell 2 are positioned, and the installation and disassembly are facilitated.

[0037] In use, the outer guide cylinder upper shell 2 and the outer guide cylinder lower shell 3 are connected by the first mounting ring 41 and the second mounting ring 42, the mounting block 44 is sleeved in the mounting groove 43, and the mounting block 44 is fixed by the fixed bolt 45, so that the outer guide cylinder upper shell 2 and the outer guide cylinder lower shell 3 are fixed, the installation and disassembly are facilitated, and the graphite soft felt or graphite embryo inside is convenient to clean and replace.

[0038] Importantly, it should be noted that the constructions and arrangements of the present application shown in the various exemplary embodiments are merely illustrative. Although only a few embodiments have been described in detail in this disclosure, those skilled in the art who review this disclosure will readily appreciate that many modifications are possible (e.g., variations in sizes, dimensions, structures, shapes and proportions of the various elements, values of parameters (e.g., temperatures, pressures, etc.), mounting arrangements, use of materials, colors, orientations, etc.) using the teachings of the present application as a guide without materially departing from the novel teachings and advantages of the subject matter described in this application. For example, elements shown as integrally formed can be constructed of multiple parts or elements, the position of elements can be reversed or otherwise varied, and the nature or number of elements or positions can be altered or varied. Accordingly, all such modifications are intended to be included within the scope of the present application. The order or sequence of any process or method steps can be changed or re-sequenced without departing from the teachings of the general inventive concept. In the claims, any means-plus-function clause is intended to cover the structures described herein as performing the recited function and not only structural equivalents but also equivalent structures. Other substitutions, modifications, changes, and omissions can be made in the design, operating conditions, and arrangement of the exemplary embodiments without departing from the scope of the present application. Accordingly, the present application is not limited to the particular embodiments described but extends to the scope of the appended claims.

[0039] Furthermore, in the interest of providing a concise description of exemplary embodiments, not all features of an actual implementation can be described (i.e., those unrelated to the best mode of practicing the present application currently under consideration).

[0040] It is to be understood that the development of the particular implementations described herein was not determined merely by the availability of certain items or materials. Rather and more generally, specific implementations can be determined, for example, based on the particular requirements of the instrument or system to which that implementation relates. For example, a specific implementation of a reagent or kit can be determined based on the number of assays or assays types that are to be performed by the instrument or system that implementation relates to.

[0041] It should be noted that the above examples are only used to illustrate the technical solutions of the present application, not to limit it. Although the present application has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present application can be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present application, and they should be covered in the scope of the claims of the present application.

Claims

1. A single-crystal furnace for producing single-crystal silicon, characterized in that, The utility model relates to a single crystal furnace, including inner guide cone (1), the outer portion of inner guide cone (1) is equipped with respectively and installs outer guide cone upper shell (2) with outer guide cone lower shell (3), be provided with installation component (4) between outer guide cone upper shell (2) with outer guide cone lower shell (3), the bottom of inner guide cone (1) is provided with single crystal furnace (5), installation component (4) includes respectively and sets up in the first installation ring (41) with second installation ring (42) of outer guide cone upper shell (2) with outer guide cone lower shell (3) outside, the inside of first installation ring (41) with second installation ring (42) all is seted up with installation groove (43), the inside of installation groove (43) is provided with mounting block (44), the inside of mounting block (44) is provided with fixed bolt (45).

2. The single crystal silicon production furnace with a shroud according to claim 1, characterized by The outside of fixed bolt (45) is screwed with nut (6), the top of fixed bolt (45) is fixedly connected with knob (7).

3. The single crystal silicon production furnace with a shroud according to claim 1, characterized by The top of outer guide cone upper shell (2) is fixedly connected with fixed rod (8), the number of fixed rod (8) is set to four.

4. The single crystal silicon production furnace with a shroud according to claim 3, characterized by The top of fixed rod (8) is fixedly connected with fixed block (9), the inner wall of fixed block (9) is screwed with screw rod (10).

5. The single crystal silicon production furnace with a shroud according to claim 4, characterized by The top of screw rod (10) is fixedly connected with rotating block (11), the bottom of screw rod (10) is fixedly connected with plug rod (12), plug rod (12) inserts into the insertion slot in the top of inner guide cone (1).

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